摘要:
A thermoelastically actuated microresonator device comprising: a main body (14) having a cantilevered beam (12); a heating element (20) located adjacent a surface of the cantilevered beam and adjacent the main body, that may be periodically actuated to generate a periodic heat gradient across a height of the beam, thereby facilitating periodic deflection of the beam.
摘要:
A method for modulating roughness of a surface, comprising: providing a first pre-stressed electrically conductive layer (10) coupled to a dielectric elastic foundation (20) provided over a second conductive layer (30); and subjecting the two conductive layers to a voltage difference, thereby modulating the roughness of the first surface.
摘要:
A method for providing a vertical comb drive. The method comprises: fabricating a device comprising rotor comb element, the rotor element comb comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, and at least one of a plurality of stator comb elements, comprising a main body and a plurality of substantially parallel extensions in a comb arrangement, adapted to be interlaced with the rotor, all on a single layer of a substrate.
摘要:
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).
摘要:
A device for inducing motion on fluids or solids. The device comprising: a structure with a deformable sheet compressed to form a structural wave; and a actuator for actuating the deformable sheet and driving the structural wave in a predetermined manner.
摘要:
A method of efficiently extracting the pull-in parameters of an electrostatically activated actuator. The actuator is modeled as an elastic element. For each of a plurality of deformations of the elastic element, a corresponding voltage is calculated. The highest such voltage is the pull-in voltage of the actuator. The corresponding deformation is the pull-in deformation of the actuator. Each deformation is defined by fixing a displacement of one degree of freedom of the elastic body and calculating corresponding equilibrium displacements of all the other degrees of freedom without the application of any external mechanical forces to ensure equilibrium. The actuator is altered to optimize whichever pull-in parameter is relevant to the desired application of the actuator.
摘要:
A device for manipulating an object present in a fluid by electrokinetics is disclosed. The device comprises a substrate forming a flow chamber. The device further comprises a plurality of electrically biasable electrode structures and at least one electrically floating electrode structure.
摘要:
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).