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公开(公告)号：US20070063613A1
公开(公告)日：2007-03-22
申请号：US10556033
申请日：2004-05-09
申请人： David Elata , Rashed Mahameed
发明人： David Elata , Rashed Mahameed
IPC分类号： H02N10/00
CPC分类号： F03G7/06 , G01P15/097 , H01H1/0036 , H01H2061/006 , H01H2061/008 , H02N10/00 , H03H9/02259 , H03H9/2457 , H03H2009/02511
摘要： A thermoelastically actuated microresonator device comprising: a main body (14) having a cantilevered beam (12); a heating element (20) located adjacent a surface of the cantilevered beam and adjacent the main body, that may be periodically actuated to generate a periodic heat gradient across a height of the beam, thereby facilitating periodic deflection of the beam.
摘要翻译： 一种热弹性致动的微谐振器装置，包括：具有悬臂梁（12）的主体（14）; 位于悬臂梁的表面附近并且靠近主体的加热元件（20），其可被周期性地致动以在横梁的高度上产生周期性的热梯度，从而有助于梁的周期性偏转。
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公开(公告)号：US20150091498A1
公开(公告)日：2015-04-02
申请号：US14042820
申请日：2013-10-01
IPC分类号： H02J7/02
摘要： Methods and systems may provide for detecting a location of an adjacent ultrasonic receiver of a battery powered device relative to a charging surface of a contactless charger. The charging surface may include an ultrasonic array of transmitter sub arrays, wherein one or more of the transmitter sub arrays may be selectively activated based on the location to focus an ultrasonic beam on the adjacent ultrasonic receiver. In one example, a movement of the adjacent ultrasonic receiver may be detected and the focus of the ultrasonic beam is adjusted in response to the movement.
摘要翻译： 方法和系统可以提供相对于非接触充电器的充电表面来检测电池供电装置的相邻超声波接收器的位置。 充电表面可以包括发射器子阵列的超声波阵列，其中可以基于将超声波束聚焦在相邻超声波接收器上的位置来选择性地激活发射机子阵列中的一个或多个。 在一个示例中，可以检测相邻的超声波接收器的移动，并且响应于该移动来调整超声波束的焦点。
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3.发明申请PIEZOELECTRIC ALN RF MEM SWITCHES MONOLITHICALLY INTEGRATED WITH ALN CONTOUR-MODE RESONATORS 有权压电ALN RF器件开关与ALN型谐振器集成在一起公开(公告)号：US20110181150A1
公开(公告)日：2011-07-28
申请号：US12994301
申请日：2009-06-01
申请人： Rashed Mahameed , Nipun Sinha , Gianluca Piazza
发明人： Rashed Mahameed , Nipun Sinha , Gianluca Piazza
CPC分类号： H01H57/00 , H01H2057/006 , H01L27/20 , H01L41/094 , Y10T29/42
摘要： Piezoelectric switches and methods of forming piezoelectric switches. The piezoelectric switch includes first and second cantilever beam actuators. The second cantilever beam actuator has a projection that overlaps the first cantilever beam actuator in a contact region. The projection is mechanically separated from the first cantilever beam actuator by a nanogap such that the first and second cantilever beam actuators are electrically isolated from each other. Each of the first and second cantilever beam actuators includes a piezoelectric actuation layer.
摘要翻译： 压电开关和形成压电开关的方法。 压电开关包括第一和第二悬臂梁致动器。 第二悬臂梁致动器具有在接触区域中与第一悬臂梁致动器重叠的突起。 突起通过纳米间隙与第一悬臂梁致动器机械分离，使得第一和第二悬臂梁致动器彼此电隔离。 第一和第二悬臂梁致动器中的每一个包括压电致动层。
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4.发明申请MEMS DEVICES UTILIZING A THICK METAL LAYER OF AN INTERCONNECT METAL FILM STACK 有权利用互连金属膜堆叠的金属层的MEMS器件公开(公告)号：US20150145075A1
公开(公告)日：2015-05-28
申请号：US14127536
申请日：2013-08-23
CPC分类号： B81B3/0051 , B81B3/0021 , B81B7/008 , B81B2201/0235 , B81B2201/0242 , B81B2203/0145 , B81C1/00166 , B81C1/00246 , B81C1/00531 , B81C2203/0714 , B81C2203/0742 , G01C19/5733 , G01P15/125 , G01P2015/0814
摘要： A MEMS device, such as an accelerometer or gyroscope, fabricated in interconnect metallization compatible with a CMOS microelectronic device. In embodiments, a proof mass has a first body region utilizing a thick metal layer that is separated from a thin metal layer. The thick metal layer has a film thickness that is significantly greater than that of the thin metal layer for increased mass. The proof mass further includes a first sensing structure comprising the thin metal layer, but lacking the thick metal layer for small feature sizes and increased capacitive coupling to a surrounding fame that includes a second sensing structure comprising the thin metal layer, but also lacking the thick metal layer. In further embodiments, the frame is released and includes regions with the thick metal layer to better match film stress-induced static deflection of the proof mass.
摘要翻译： MEMS器件，例如加速度计或陀螺仪，其制造在与CMOS微电子器件兼容的互连金属化中。 在实施例中，检验质量体具有利用与金属薄层分离的厚金属层的第一体区。 厚金属层的膜厚度明显大于金属层的厚度，以增加质量。 检测质量还包括第一感测结构，其包括薄金属层，但是缺少用于小特征尺寸的厚金属层和增加到周围声望的电容耦合，其包括包含薄金属层的第二感测结构，但是也缺少厚的 金属层。 在另外的实施例中，框架被释放并且包括具有较厚金属层的区域以更好地匹配膜应力引起的证明块的静态偏转。
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公开(公告)号：US09620983B2
公开(公告)日：2017-04-11
申请号：US14042820
申请日：2013-10-01
摘要： Methods and systems may provide for detecting a location of an adjacent ultrasonic receiver of a battery powered device relative to a charging surface of a contactless charger. The charging surface may include an ultrasonic array of transmitter sub arrays, wherein one or more of the transmitter sub arrays may be selectively activated based on the location to focus an ultrasonic beam on the adjacent ultrasonic receiver. In one example, a movement of the adjacent ultrasonic receiver may be detected and the focus of the ultrasonic beam is adjusted in response to the movement.
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公开(公告)号：US20140238828A1
公开(公告)日：2014-08-28
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
CPC分类号： H01H59/0009 , B81B3/0097 , B81B7/04 , B81B2201/018 , B81B2203/0109 , B81B2203/0118 , B81B2203/0172 , B81B2203/0307
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
摘要翻译： 本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。 腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。 锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。
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7.发明授权MEMS devices utilizing a thick metal layer of an interconnect metal film stack 有权使用互连金属膜叠层的厚金属层的MEMS器件公开(公告)号：US09150402B2
公开(公告)日：2015-10-06
申请号：US14127536
申请日：2013-08-23
CPC分类号： B81B3/0051 , B81B3/0021 , B81B7/008 , B81B2201/0235 , B81B2201/0242 , B81B2203/0145 , B81C1/00166 , B81C1/00246 , B81C1/00531 , B81C2203/0714 , B81C2203/0742 , G01C19/5733 , G01P15/125 , G01P2015/0814
摘要： A MEMS device, such as an accelerometer or gyroscope, fabricated in interconnect metallization compatible with a CMOS microelectronic device. In embodiments, a proof mass has a first body region utilizing a thick metal layer that is separated from a thin metal layer. The thick metal layer has a film thickness that is significantly greater than that of the thin metal layer for increased mass. The proof mass further includes a first sensing structure comprising the thin metal layer, but lacking the thick metal layer for small feature sizes and increased capacitive coupling to a surrounding fame that includes a second sensing structure comprising the thin metal layer, but also lacking the thick metal layer. In further embodiments, the frame is released and includes regions with the thick metal layer to better match film stress-induced static deflection of the proof mass.
摘要翻译： MEMS器件，例如加速度计或陀螺仪，其制造在与CMOS微电子器件兼容的互连金属化中。 在实施例中，检验质量体具有利用与金属薄层分离的厚金属层的第一体区。 厚金属层的膜厚度明显大于金属层的厚度，以增加质量。 检测质量还包括第一感测结构，其包括薄金属层，但是缺少用于小特征尺寸的厚金属层和增加到周围声望的电容耦合，其包括包含薄金属层的第二感测结构，但是也缺少厚的 金属层。 在另外的实施例中，框架被释放并且包括具有较厚金属层的区域以更好地匹配膜应力引起的证明块的静态偏转。
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公开(公告)号：US20150022431A1
公开(公告)日：2015-01-22
申请号：US13794441
申请日：2013-03-11
IPC分类号： G01P15/097 , G01P15/125 , G06F3/01 , H02N1/00
CPC分类号： G06F3/017 , G01P15/125 , G06F1/1626 , G06F1/1694 , G06F3/0346 , H02N1/008
摘要： A Micro-Electro-Mechanical System (MEMS) accelerometer employing a rotor and stator that are both released from a substrate. In embodiments, the rotor and stator are each of continuous a metal thin film. A stress gradient in the film is manifested in capacitive members of the rotor and stator as a substantially equal deflection such that a relative displacement between the rotor and stator associated with an acceleration in the z-axis is substantially independent of the stress gradient. In embodiments, the stator comprises comb fingers cantilevered from a first anchor point while the rotor comprises comb fingers coupled to a proof mass by torsion springs affixed to the substrate at second anchor points proximate to the first anchor point.
摘要翻译： 使用从基板释放的转子和定子的微机电系统（MEMS）加速度计。 在实施例中，转子和定子各自是连续的金属薄膜。 膜中的应力梯度表现为转子和定子的电容构件中的大致相等的偏转，使得与z轴加速度相关联的转子和定子之间的相对位移基本上与应力梯度无关。 在实施例中，定子包括从第一锚定点悬臂的梳齿，而转子包括通过在靠近第一锚点的第二锚定点处固定到基底的扭转弹簧联接到检验质量块的梳齿。
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9.发明授权Piezoelectric ALN RF MEM switches monolithically integrated with ALN contour-mode resonators 有权压电ALN RF MEM开关与ALN轮廓模式谐振器单片集成公开(公告)号：US08604670B2
公开(公告)日：2013-12-10
申请号：US12994301
申请日：2009-06-01
申请人： Rashed Mahameed , Nipun Sinha , Gianluca Piazza
发明人： Rashed Mahameed , Nipun Sinha , Gianluca Piazza
IPC分类号： H01L41/09
CPC分类号： H01H57/00 , H01H2057/006 , H01L27/20 , H01L41/094 , Y10T29/42
摘要： Piezoelectric switches and methods of forming piezoelectric switches. The piezoelectric switch includes first and second cantilever beam actuators. The second cantilever beam actuator has a projection that overlaps the first cantilever beam actuator in a contact region. The projection is mechanically separated from the first cantilever beam actuator by a nanogap such that the first and second cantilever beam actuators are electrically isolated from each other. Each of the first and second cantilever beam actuators includes a piezoelectric actuation layer.
摘要翻译： 压电开关和形成压电开关的方法。 压电开关包括第一和第二悬臂梁致动器。 第二悬臂梁致动器具有在接触区域中与第一悬臂梁致动器重叠的突起。 突起通过纳米间隙与第一悬臂梁致动器机械分离，使得第一和第二悬臂梁致动器彼此电隔离。 第一和第二悬臂梁致动器中的每一个包括压电致动层。
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公开(公告)号：US10224164B2
公开(公告)日：2019-03-05
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
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