公开(公告)号：US5567241A

公开(公告)日：1996-10-22

申请号：US442146

申请日：1995-05-16

申请人： David V. Tsu ,  Rosa Young ,  Stanford R. Ovshinsky

发明人： David V. Tsu ,  Rosa Young ,  Stanford R. Ovshinsky

IPC分类号： C23C16/511 ,  C23C16/517 ,  H01J37/32 ,  C23C16/00

CPC分类号： H01J37/32211 ,  C23C16/511 ,  C23C16/517 ,  H01J37/321 ,  H01J37/32192 ,  H01J37/32678 ,  H01J2237/3321

摘要： A first aspect of the present invention is an improved microwave vacuum feed-through device for coupling microwave energy from a microwave wave guide in a substantially atmospheric pressure region into an elongated linear microwave applicator in a sub-atmospheric pressure region. The improved feed-through is designed to match the impedance of the microwave wave guide in the atmospheric pressure region and the improved linear microwave applicator. A second aspect of the present invention is an improved linear microwave applicator for uniformly coupling 95% or more of the microwave energy input thereto into an elongated plasma zone. The applicator includes curved microwave reflector panels which are used to tune the uniformity of the radiated microwave energy along the length of the linear applicator. A third aspect of the present invention is a microwave enhanced chemical vapor deposition method for depositing thin film material. The method includes a step of intensifying the kinetic/thermal energy of the electrically neutral species in the plasma by intensifying the kinetic/thermal energy of the ions in the plasma and thereby, through ion-neutral collisions, intensifying the kinetic/thermal energy of the electrically neutral species. The step of intensifying the kinetic/thermal energy of the ions in the plasma includes subjecting the plasma to either a very low frequency alternating current electrical bias or an alternating polarity magnetic field, the frequency of thereof being less than about 100 kHz.

摘要翻译： 本发明的第一方面是一种改进的微波真空馈通装置，用于将微波能量从大气压力区域中的微波波导耦合到亚大气压区域中的细长线性微波施加器。 改进的馈通被设计成匹配大气压区域中的微波波导的阻抗和改进的线性微波施加器。 本发明的第二方面是一种改进的线性微波施加器，用于将输入到其中的95％或更多的微波能量均匀地耦合到细长的等离子体区域中。 施加器包括弯曲的微波反射器面板，其用于调节辐射的微波能量沿着线性施加器的长度的均匀性。 本发明的第三方面是用于沉积薄膜材料的微波增强化学气相沉积方法。 该方法包括通过增强等离子体中的离子的动能/热能来增强等离子体中的电中性物质的动力学/热能，从而通过离子中性碰撞强化其中的动能/热能 电中性物种。 增强等离子体中离子的动能/热能的步骤包括使等离子体经受非常低频的交流电偏压或交替极性磁场，其频率小于约100kHz。

公开(公告)号：US5324553A

公开(公告)日：1994-06-28

申请号：US89207

申请日：1993-07-09

申请人： Stanford R. Ovshinsky ,  David V. Tsu ,  Rosa Young

发明人： Stanford R. Ovshinsky ,  David V. Tsu ,  Rosa Young

IPC分类号： C23C16/511 ,  C23C16/517 ,  H01J37/32 ,  B05D3/06

CPC分类号： H01J37/32211 ,  C23C16/511 ,  C23C16/517 ,  H01J37/321 ,  H01J37/32192 ,  H01J37/32678 ,  H01J2237/3321

摘要： An improved chemical vapor deposition method for the high-rate low-temperature deposition of high-quality thin film material. The method includes the steps of providing an evacuated chamber having a plasma deposition region defined therein; placing a substrate inside the chamber; supplying plasma deposition precursor gases to the deposition region in the evacuated chamber; directing microwave energy from a source thereof to the deposition region, the microwave energy interacting with the deposition precursor gases to form a plasma of electrons, ions and activated electrically neutral species, the plasma including one or more depositing species; increasing the surface mobility of the depositing species in the plasma by coupling additional non-microwave electronic energy and magnetic energy into the plasma, without intentionally adding thermal energy to the substrate or precursor gas; and depositing a thin film of material onto the substrate.

摘要翻译： 一种改进的化学气相沉积方法，用于高速低温沉积的高品质薄膜材料。 该方法包括以下步骤：提供具有限定在其中的等离子体沉积区域的真空室; 将衬底放置在腔室内; 将等离子体沉积前体气体供应到所述抽真空室中的沉积区域; 将微波能量从其源引导到沉积区域，所述微波能量与沉积前体气体相互作用以形成电子，离子和活化的电中性物质的等离子体，所述等离子体包括一种或多种沉积物质; 通过将额外的非微波电子能量和磁能耦合到等离子体中来增加沉积物质在等离子体中的表面迁移率，而无需向基底或前体气体添加热能; 以及在衬底上沉积材料薄膜。

公开(公告)号：US06723421B2

公开(公告)日：2004-04-20

申请号：US09971881

申请日：2001-10-05

申请人： Stanford R. Ovshinsky ,  Boil Pashmakov ,  David V. Tsu

发明人： Stanford R. Ovshinsky ,  Boil Pashmakov ,  David V. Tsu

IPC分类号： B32B326

CPC分类号： C23C16/24 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/02661 ,  H01L29/12 ,  H01L29/1604 ,  H01L31/03682 ,  H01L31/03762 ,  H01L31/1816 ,  H01L31/202 ,  H01L31/208 ,  Y02E10/546 ,  Y02E10/548 ,  Y02P70/521 ,  Y10T428/249956 ,  Y10T428/249957 ,  Y10T428/249961 ,  Y10T428/249967 ,  Y10T428/249979

摘要： A non-single crystalline semiconductor material includes coordinatively irregular structures characterized by distorted chemical bonding, reduced dimensionality and novel electronic properties. A process for forming the material permits variation of the size, concentration and spatial distribution of coordinatively irregular structures. The electronic properties of the material can be changed by controlling the characteristics of the coordinatively irregular structures.

摘要翻译： 非单晶半导体材料包括以失真化学键合为特征的协调不规则结构，尺寸降低和新颖的电子性能。 形成材料的方法允许协调不规则结构的尺寸，浓度和空间分布的变化。 可以通过控制协调不规则结构的特性来改变材料的电子特性。

公开(公告)号：US20080311392A1

公开(公告)日：2008-12-18

申请号：US12157531

申请日：2008-06-11

申请人： David V. Tsu

发明人： David V. Tsu

IPC分类号： B32B3/00

CPC分类号： A01G9/1438 ,  Y02A40/252 ,  Y10T428/249921 ,  Y10T428/265

摘要： A composite thermal barrier material. The material includes a support layer coated on one or both sides with an infrared active material to improve thermal retention characteristics. The support layer is typically a flexible organic or polymer material. The infrared active material increases reflectance of thermal infrared radiation and reduces the flow of heat from the interior side of the barrier to the external surroundings. The infrared active material operates through vibrational absorption in the infrared and/or free carrier absorption. Representative infrared active materials include oxides, transparent conductors, and nanoscale metals.

摘要翻译： 复合热障材料。 该材料包括用红外线活性材料涂覆在一侧或两侧的支撑层，以改善热保持特性。 支撑层通常是柔性的有机或聚合物材料。 红外活性材料增加了热红外辐射的反射率，并减少了从屏障的内侧到外部环境的热量流动。 红外线活性材料通过红外和/或自由载体吸收中的振动吸收进行操作。 代表性的红外活性材料包括氧化物，透明导体和纳米级金属。

公开(公告)号：US20140042355A1

公开(公告)日：2014-02-13

申请号：US13584602

申请日：2012-08-13

申请人： David V. Tsu ,  Robert J. Kopf ,  David Jablonski ,  Scott F. Jenney

发明人： David V. Tsu ,  Robert J. Kopf ,  David Jablonski ,  Scott F. Jenney

IPC分类号： E04B1/78 ,  C08K7/02 ,  C08K7/08 ,  C08K7/06

CPC分类号： E04B1/76 ,  E04B2001/742 ,  E04B2001/743 ,  E04B2001/745 ,  E04B2001/7691 ,  Y02A30/245 ,  Y02A30/246 ,  Y10T428/2958 ,  Y10T428/298

摘要： A synthetic insulation material that rivals and surpasses down in performance without suffering degradation in insulating power over time. The material is an aggregate of particulate units that have a fractal-like geometric configuration. The geometric configuration includes non-integer dimensionality that promotes physical entanglements of the particulate units. The physical entanglements impart a high frictional resistance to slippage of the particulate units to maintain loft over time by inhibiting the settling of particulate units upon compression. The geometric configuration further includes aspects of self-similarity. The particulate units are formed from a material that efficiently scatters thermal radiation. The combination of high loft and efficient scattering of thermal radiation minimizes heat loss resulting from conduction and radiation, leads to a superior material for thermal insulation, has excellent health characteristics for human and the environment, and exhibits excellent long term life cycle performance.

摘要翻译： 合成绝缘材料在性能上与竞争对手超越性能而不会随着时间的推移绝缘功率的退化。 该材料是具有分形状几何构型的颗粒单元的聚集体。 几何构型包括促进颗粒单元的物理缠结的非整数维度。 通过在压缩时抑制颗粒单元的沉降，物理缠结对颗粒单元的滑动赋予高摩擦阻力以保持随时间的升高。 几何构型还包括自相似性的方面。 颗粒单元由有效散射热辐射的材料形成。 高散射和高辐射热辐射的组合可最大限度地减少由传导和辐射引起的热损失，导致优异的隔热材料，对人类和环境具有优异的健康特性，并且具有优异的长期生命周期性能。

公开(公告)号：US20100064614A1

公开(公告)日：2010-03-18

申请号：US12584969

申请日：2009-09-15

申请人： David V. Tsu ,  Leticia C. Tsu ,  Robert J. Kopf ,  David C. Jablonski ,  Robert O. Miller

发明人： David V. Tsu ,  Leticia C. Tsu ,  Robert J. Kopf ,  David C. Jablonski ,  Robert O. Miller

IPC分类号： E04B1/78

CPC分类号： E04B1/7604 ,  E04B1/7654 ,  E04B2001/746 ,  E04B2001/7691 ,  Y02A30/248

摘要： Commercial metalized plastic film, in the form of discarded containers or container stock, is collected, cleaned, shredded and packaged, to produce an insulating layer having a high thermal resistance, or R-value, no outgassing of volatile compounds at habitable temperatures, and multiple reusability after deployment. Each step in the sequence is designed to minimize unit cost of the process, as well as maximize the thermal resistance of the finished product. The invention largely avoids disintegration of the recycled material, and hence utilizes the embedded energy already present in the construction of the original film.

摘要翻译： 收集，清洁，切碎和包装的商业金属化塑料薄膜，以废弃容器或容器原料的形式，以产生具有高耐热性或R值的绝缘层，在适宜温度下不排放挥发性化合物，以及 部署后的多重可重用性。 序列中的每个步骤旨在最小化工艺的单位成本，并最大限度地提高成品的热阻。 本发明大大地避免了回收材料的分解，因此利用了原始薄膜的结构中已经存在的嵌入能量。