公开(公告)号：US6128323A

公开(公告)日：2000-10-03

申请号：US157067

申请日：1998-09-18

申请人： David W. Myers ,  Herve A. Besaucele ,  Palash P. Das ,  Thomas P. Duffey ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Thomas Hofmann ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  Robert G. Ozarski ,  Gamaralalage G. Padmabandu ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Paul S. Thompson ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb ,  Paolo Zambon

发明人： David W. Myers ,  Herve A. Besaucele ,  Palash P. Das ,  Thomas P. Duffey ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Thomas Hofmann ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  Robert G. Ozarski ,  Gamaralalage G. Padmabandu ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Paul S. Thompson ,  Richard C. Ujazdowski ,  Tom A. Watson ,  R. Kyle Webb ,  Paolo Zambon

IPC分类号： G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/041 ,  H01S3/08 ,  H01S3/081 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225 ,  H03K17/80 ,  H03K3/57 ,  H01S3/08009 ,  H01S3/0812 ,  H01S3/1392 ,  H01S3/2251 ,  H01S3/2256

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses at 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Improvements in the laser chamber permitting the higher pulse rates and improved bandwidth performance include a single upstream preionizer tube and a high efficiency chamber. The chamber is designed for operation at lower fluorine concentration. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了一种可靠的模块化生产质量准分子激光器，其能够在2000Hz下产生10mJ激光脉冲，全宽度为一半，最大带宽为约0.6μm或更小。 可更换模块包括激光室; 由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。 允许更高脉冲速率和改进的带宽性能的激光室的改进包括单个上游预分解器管和高效室。 该室设计用于在较低的氟浓度下运行。 在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括增加容量的高压电源，具有用于精确电压调整的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US5991324A

公开(公告)日：1999-11-23

申请号：US41474

申请日：1998-03-11

申请人： David S. Knowles ,  James H. Azzola ,  Herve A. Besaucele ,  Palash P. Das ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Tibor Juhasz ,  Robert G. Ozarski ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Richard C. Ujazdowski ,  Tom A. Watson ,  Richard M. Ness

发明人： David S. Knowles ,  James H. Azzola ,  Herve A. Besaucele ,  Palash P. Das ,  Alexander I. Ershov ,  Igor V. Fomenkov ,  Tibor Juhasz ,  Robert G. Ozarski ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom ,  Richard C. Ujazdowski ,  Tom A. Watson ,  Richard M. Ness

IPC分类号： H01S3/038 ,  G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/139 ,  H01S3/225 ,  H01S3/22

CPC分类号： G01J9/0246 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/225 ,  H01S3/1392

摘要： A reliable, modular, production quality narrow-band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwidth of about 0.6 pm or less. The present invention is especially suited to long-term round-the-clock operation in the lithographic production of integrated circuits. Improvements over prior art lasers include a single upstream preionizer tube and acoustic baffles. A preferred embodiment includes reduced fluorine concentration, an anode support bar shaped to reduce aerodynamic reaction forces on blower bearings, a modified pulse power system providing faster pulse rise time, an output coupler with substantially increased reflectivity, a line narrowing module with CaF prism beam expanders, a more accurate wavemeter, a laser computer controller programmed with new and improved pulse energy control algorithm.

摘要翻译： 一种可靠，模块化，生产质量好的窄带KrF准分子激光器，能够以1000Hz的频率产生10mJ的激光脉冲，带宽约为0.6μm或更小。 本发明特别适用于集成电路的平版印刷生产中的长期全天候操作。 现有技术的激光器的改进包括单个上游预分解器管和声学挡板。 优选的实施例包括减少的氟浓度，阳极支撑杆形状以减小鼓风机轴承上的空气动力反作用力，改进的脉冲电源系统提供更快的脉冲上升时间，输出耦合器具有显着增加的反射率，具有CaF棱镜扩束器的线窄化模块 ，更准确的波长计，激光计算机控制器编程，具有新的改进的脉冲能量控制算法。

公开(公告)号：USRE38054E1

公开(公告)日：2003-04-01

申请号：US09801383

申请日：2001-03-07

申请人： Thomas Hofmann ,  Jean-Marc Hueber ,  Palash P. Das ,  Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

发明人： Thomas Hofmann ,  Jean-Marc Hueber ,  Palash P. Das ,  Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

IPC分类号： H01S310

CPC分类号： C23C14/225 ,  C23C14/0694 ,  C23C14/16 ,  C23C14/24 ,  G01J9/00 ,  G02B1/105 ,  G02B5/1852 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/08009 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H03K3/57 ,  H03K17/80

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved communication module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了可产生1000Hz至2000Hz或更大范围内的10mJ激光脉冲的可靠的模块化生产质量准分子激光器。 可更换模块包括激光室; 由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。 在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括具有用于精确调整电压的电压降低电路的增加容量的高压电源，改进的通信模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US6018537A

公开(公告)日：2000-01-25

申请号：US273446

申请日：1999-03-19

申请人： Thomas Hofmann ,  Jean-Marc Hueber ,  Palash P. Das ,  Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

发明人： Thomas Hofmann ,  Jean-Marc Hueber ,  Palash P. Das ,  Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

IPC分类号： G01J9/00 ,  G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/08 ,  H01S3/0971 ,  H01S3/134 ,  H01S3/223 ,  H01S3/225 ,  H01S3/10

CPC分类号： G03F7/70025 ,  G01J9/00 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0971 ,  H01S3/134 ,  H01S3/223 ,  H01S3/225 ,  H01S3/08009 ,  H01S3/09713 ,  H01S3/2251 ,  H01S3/2256

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了可产生1000Hz至2000Hz或更大范围内的10mJ激光脉冲的可靠的模块化生产质量准分子激光器。 可更换模块包括激光室; 由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。 在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括增加容量的高压电源，具有用于精确电压调整的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US06330261B1

公开(公告)日：2001-12-11

申请号：US09271041

申请日：1999-03-17

申请人： Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

发明人： Toshihiko Ishihara ,  Thomas P. Duffey ,  John T. Melchior ,  Herve A. Besaucele ,  Richard G. Morton ,  Richard M. Ness ,  Peter C. Newman ,  William N. Partlo ,  Daniel A. Rothweil ,  Richard L. Sandstrom

IPC分类号： H01S300

CPC分类号： G03F7/70025 ,  C23C14/0694 ,  C23C14/16 ,  C23C14/225 ,  C23C14/24 ,  G01J9/00 ,  G02B1/105 ,  G02B5/1852 ,  G03F7/70041 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/036 ,  H01S3/08009 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/09713 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H03K3/57 ,  H03K17/80

摘要： The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber, a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod. A novel design for the compression head saturable inductor greatly reduces the quantity of transformer oil required and virtually eliminates the possibility of oil leakage which in the past has posed a hazard.

摘要翻译： 本发明提供了一种可靠的模块化生产质量准分子激光器，其能够产生1000Hz至2000Hz范围内的10mJ激光脉冲，全宽度为一半，最大带宽为约0.6μm或更小。 可更换模块包括激光室，由三个模块组成的脉冲电源系统; 光学谐振器，包括线窄模块和输出耦合器模块; 波形计模块，电气控制模块，冷却水模块和气体控制模块。在脉冲功率单元中已经提供了重要的改进，以产生更快的上升时间和改进的脉冲能量控制。 这些改进包括增加容量的高压电源，具有用于精确调整电压的电压降低电路，改进的换向模块，其从由高压电源充电的电容器产生高电压脉冲，并用脉冲电压放大23次 具有由单个四段不锈钢棒组成的次级绕组的非常快速的电压互感器。 用于压缩头可饱和电感器的新颖设计大大减少了所需的变压器油的数量，并且几乎消除了过去漏油的可能性。

公开(公告)号：US6028872A

公开(公告)日：2000-02-22

申请号：US211825

申请日：1998-12-15

申请人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

发明人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

IPC分类号： G03F7/20 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225 ,  H02M9/02 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225 ,  H03K17/80 ,  H03K3/57 ,  H01S3/09702

摘要： A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated resonant power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.

摘要翻译： 用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源。 源包括一个包括充电电容器，固态开关和限流电感器的脉冲发生电路。 在脉冲发生电路中产生的脉冲在至少两个脉冲压缩电路中被压缩，并且升压脉冲变压器将峰值电压增加到至少12000伏特。 提供了一种非常快速的调节谐振电源，用于在小于400微秒内对充电电容器充电，并且包括编程处理器的脉冲控制系统以至少的速率控制充电电容器的充电至小于约百分之一的精度 2000次每秒收费。

公开(公告)号：US06240112B1

公开(公告)日：2001-05-29

申请号：US09470288

申请日：1999-12-22

申请人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

发明人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

IPC分类号： H01S304

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/097 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80

摘要： A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 4000 charges per second. In a preferred embodiment capable of operating at pulse rates of 2000 to 4000 Hz or greater, water cooling of the saturable inductors is provided.

摘要翻译： 用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源。 源包括一个包括充电电容器，固态开关和限流电感器的脉冲发生电路。 在脉冲发生电路中产生的脉冲在至少两个脉冲压缩电路中被压缩，并且升压脉冲变压器将峰值电压增加到至少12000伏特。 提供了一种非常快速的调节电源，用于在小于400微秒内为充电电容器充电，并且包括编程的处理器的脉冲控制系统以至少4000的速率控制充电电容器的充电，精度小于约百分之一 每秒收费 在能够以2000至4000Hz或更大的脉冲速率操作的优选实施例中，提供可饱和电感器的水冷却。

公开(公告)号：US6151346A

公开(公告)日：2000-11-21

申请号：US370739

申请日：1999-08-09

申请人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

发明人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

IPC分类号： G03F7/20 ,  H01S3/097 ,  H01S3/225 ,  H02M3/00 ,  H02M9/04 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/097 ,  H03K17/80 ,  H03K3/57 ,  H01S3/225

摘要： A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.

摘要翻译： 用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源。 源包括一个包括充电电容器，固态开关和限流电感器的脉冲发生电路。 在脉冲发生电路中产生的脉冲在至少两个脉冲压缩电路中被压缩，并且升压脉冲变压器将峰值电压增加到至少12000伏特。 提供了一种非常快速的调节电源，用于在小于400微秒内对充电电容器充电，并且包括编程的处理器的脉冲控制系统以至少2000的速率控制充电电容器的充电至小于约百分之一的精度 每秒收费

公开(公告)号：US5936988A

公开(公告)日：1999-08-10

申请号：US118773

申请日：1998-07-18

申请人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

发明人： William N. Partlo ,  Daniel L. Birx ,  Richard M. Ness ,  Daniel A. Rothweil ,  Paul C. Melcher ,  Brett D. Smith

IPC分类号： H01F30/00 ,  G03F7/20 ,  H01S3/097 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

CPC分类号： G03F7/70483 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/097 ,  H03K17/80 ,  H03K3/57 ,  H01S3/225

摘要： A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.

摘要翻译： 用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源。 源包括一个包括充电电容器，固态开关和限流电感器的脉冲发生电路。 在脉冲发生电路中产生的脉冲在至少两个脉冲压缩电路中被压缩，并且升压脉冲变压器将峰值电压增加到至少12000伏特。 提供了一种非常快速的调节电源，用于在小于400微秒内对充电电容器充电，并且包括编程的处理器的脉冲控制系统以至少2000的速率控制充电电容器的充电至小于约百分之一的精度 每秒收费

公开(公告)号：US5982795A

公开(公告)日：1999-11-09

申请号：US995832

申请日：1997-12-22

申请人： Daniel A. Rothweil ,  Igor V. Fomenkov

发明人： Daniel A. Rothweil ,  Igor V. Fomenkov

IPC分类号： G03F7/20 ,  H01S3/03 ,  H01S3/097 ,  H01S3/225 ,  H03K3/57 ,  H03K17/80 ,  H01S3/00

CPC分类号： G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/03 ,  H01S3/097 ,  H01S3/225 ,  H03K17/80 ,  H03K3/57

摘要： An excimer laser system having a laser chamber containing elongated electrodes and an excimer laser gas and a high voltage pulse power supply having fine digital regulation for supplying high voltage electrical pulses to the electrodes. The high voltage pulse power supply includes a power supply and a magnetic switch circuit for compressing and amplifying the output of the power supply. The power supply includes a silicon controlled rectifier which provides a direct current output to an inverter which converts the output of the silicon controlled rectifier to high frequency alternating current which is in turn amplified by a step up transformer. An output stage diode rectifier in combination with an inductor converts this high frequency high voltage current back to direct current. A control board comprising electronic circuits controls the power supply to provide high voltage pulses at a frequency of at least 1000 Hz. A voltage feedback circuit detects the voltage output of the output stage rectifier and provides a voltage output signal to the control board and a current feedback circuit detects charging current flowing in the output stage diode rectifier and provides a charging current signal to the control board. A digital command control for providing command control to said control board. A preferred embodiment of the present invention achieves very precise regulation with the use of differential instrumentation amplifiers in the feedback circuits and by reducing the charging current near the end of the charging cycle of each pulse.

摘要翻译： 准分子激光系统具有包含细长电极和准分子激光气体的激光室和具有用于向电极提供高电压电脉冲的精细数字调节的高压脉冲电源。 高压脉冲电源包括用于压缩和放大电源的输出的电源和磁开关电路。 该电源包括一个可控硅整流器，其向逆变器提供直流输出，该逆变器将可控硅整流器的输出转换成高频交流电，而高频交流又由升压变压器放大。 与电感器结合的输出级二极管整流器将该高频高压电流转换回直流电。 包括电子电路的控制板控制电源以提供至少1000Hz的频率的高电压脉冲。 电压反馈电路检测输出级整流器的电压输出，并向控制板提供电压输出信号，电流反馈电路检测在输出级二极管整流器中流动的充电电流，并向控制板提供充电电流信号。 一种用于向所述控制板提供命令控制的数字命令控制。 本发明的优选实施例通过在反馈电路中使用差分仪表放大器并且通过减少在每个脉冲的充电周期结束附近的充电电流来实现非常精确的调节。