摘要:
Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
摘要:
Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
摘要:
Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
摘要:
Devices having a thin film or laminate structure comprising hafnium and/or zirconium oxy hydroxy compounds, and methods for making such devices, are disclosed. The hafnium and zirconium compounds can be doped, typically with other metals, such as lanthanum. Examples of electronic devices or components that can be made include, without limitation, insulators, transistors and capacitors. A method for patterning a device using the materials as positive or negative resists or as functional device components also is described. For example, a master plate for imprint lithography can be made. An embodiment of a method for making a device having a corrosion barrier also is described. Embodiments of an optical device comprising an optical substrate and coating also are described. Embodiments of a physical ruler also are disclosed, such as for accurately measuring dimensions using an electron microscope.
摘要:
Embodiments of a method for synthesizing aqueous precursors comprising Hf4+ or Zr4+ cations, peroxide, and a monoprotic acid are disclosed. The aqueous precursors are suitable for making HfO2 and ZrO2 thin films, which subsequently can be patterned. The disclosed thin films are dense and continuous, with a surface roughness of ≦0.5 nm and a refractive index of 1.85-2.0 at λ=550 nm. Some embodiments of the disclosed thin films have a leakage-current density ≦20 nA/cm2 at 1 MV/cm, with a dielectric breakdown ≧3 MV/cm. The thin films can be patterned with radiation to form dense lines and space patterns.
摘要翻译:公开了用于合成含Hf4 +或Zr4 +阳离子,过氧化物和单质酸的含水前体的方法的实施方案。 水性前体适于制备HfO 2和ZrO 2薄膜,其随后可以被图案化。 所公开的薄膜是致密且连续的,在λ= 550nm处的表面粗糙度为0.5nm,折射率为1.85-2.0。 所公开的薄膜的一些实施例具有1MV / cm 2的20nA / cm 2的漏电流密度,介电击穿> 3MV / cm。 薄膜可以用辐射图案化以形成密集的线和空间图案。
摘要:
A semiconductor film composition includes an oxide semiconductor material. At least one polyatomic ion is incorporated into the oxide semiconductor material.
摘要:
Systems and methods for move operation elimination with bypass Multiple Instantiation Table (MIT) logic. An example processing system may comprise a first data structure configured to store a plurality of physical register values; a second data structure configured to store a plurality of pointers, each pointer referencing an element of the first data structure; a third data structure including a plurality of move elimination sets, each move elimination set comprising a plurality of bits representing a plurality of logical registers; and a logic configured to perform a data manipulation operation by causing an element of the second data structure to reference an element of the first data structure, the logic further configured to reflect results of two or more data manipulation operations by performing a single update of the third data structure.