公开(公告)号：USD981969S1

公开(公告)日：2023-03-28

申请号：US29794758

申请日：2021-06-15

Applicant: EBARA CORPORATION

Designer： Kenichi Akazawa ,  Tomoko Owada ,  Osamu Nabeya ,  Makoto Fukushima ,  Yuichi Kato

公开(公告)号：USD1021832S1

公开(公告)日：2024-04-09

申请号：US29874375

申请日：2023-04-19

Applicant: EBARA CORPORATION

Designer： Kenichi Akazawa ,  Osamu Nabeya ,  Shingo Togashi ,  Satoru Yamaki ,  Tomoko Owada ,  Cheng Cheng ,  Yuichi Kato

Abstract: FIG. 1 is a top perspective view of an elastic membrane showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a front view thereof, a rear view being identical thereto;
FIG. 6 is a right-side view thereof, a left-side view being identical thereto;
FIG. 7 is a cross sectional view taken along section line 7-7 in FIG. 3; and,
FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 7.
The broken lines in the drawings depict portions of the elastic membrane that form no part of the claimed design.

公开(公告)号：USD981459S1

公开(公告)日：2023-03-21

申请号：US35513172

申请日：2021-06-16

Applicant: EBARA CORPORATION

Designer： Kenichi Akazawa ,  Osamu Nabeya

公开(公告)号：US12237194B2

公开(公告)日：2025-02-25

申请号：US17258916

申请日：2019-07-09

Applicant: EBARA CORPORATION

Inventor： Akihiro Yazawa ,  Takashi Koba ,  Kenichi Kobayashi ,  Kenichi Akazawa ,  Fong-Jie Du ,  Makoto Kashiwagi ,  Asagi Matsugu ,  Takahiro Nanjo ,  Hideharu Aoyama ,  Takashi Mitsuya ,  Tetsuji Togawa

IPC: B24B37/14 ,  B24B37/26 ,  B24B37/30 ,  B65G13/02 ,  H01L21/304 ,  H01L21/677 ,  B24B41/06 ,  B24B57/02 ,  B65G39/04 ,  H01L21/67

Abstract: To provide an automated apparatus for conveying a rectangular substrate. According to one embodiment, there is provided a substrate conveying apparatus for conveying the rectangular substrate. The substrate conveying apparatus includes a plurality of conveyance rollers, a plurality of roller shafts, a motor, and a pusher. The plurality of conveyance rollers are configured to support a lower surface of the substrate. To the plurality of roller shafts, the plurality of conveyance rollers are mounted. The motor is configured to rotate the plurality of roller shafts. The pusher is for lifting the substrate on the plurality of conveyance rollers such that the substrate is separated away from the plurality of conveyance rollers. The pusher includes a stage configured to pass through a clearance between the plurality of roller shafts.

公开(公告)号：US11511389B2

公开(公告)日：2022-11-29

申请号：US16575844

申请日：2019-09-19

Applicant: EBARA CORPORATION

Inventor： Kenichi Akazawa ,  Makoto Kashiwagi ,  Yu Ishii ,  Atsushi Yoshida ,  Kenichi Kobayashi ,  Tetsuji Togawa ,  Hozumi Yasuda

IPC: B24B37/10 ,  B24B41/06 ,  B24B49/16 ,  B24B7/22 ,  B24B41/00 ,  B24B37/005 ,  B24B37/30

Abstract: Disclosed is a polishing head for a polishing apparatus for polishing a quadrangular substrate using a polishing pad attached to a polishing table, comprising a head body portion, a plurality of elastic bags disposed in a surface of the head body portion, which is to face the polishing table, and a substrate holding plate for holding the substrate, the substrate holding plate being pressed by the elastic bags in a direction away from the head body portion, the head body portion being provided with channels for bags, which are in communication with the respective elastic bags, the polishing head further including at least two support plates disposed between the elastic bags on one hand and the substrate holding plate on the other, the elastic bags being configured to press the substrate holding plate through the support plates.

公开(公告)号：US20200094371A1

公开(公告)日：2020-03-26

申请号：US16575844

申请日：2019-09-19

Applicant: EBARA CORPORATION

Inventor： Kenichi Akazawa ,  Makoto Kashiwagi ,  Yu Ishii ,  Atsushi Yoshida ,  Kenichi Kobayashi ,  Tetsuji Togawa ,  Hozumi Yasuda

IPC: B24B37/10 ,  B24B41/06 ,  B24B49/16

Abstract: Disclosed is a polishing head for a polishing apparatus for polishing a quadrangular substrate using a polishing pad attached to a polishing table, comprising a head body portion, a plurality of elastic bags disposed in a surface of the head body portion, which is to face the polishing table, and a substrate holding plate for holding the substrate, the substrate holding plate being pressed by the elastic bags in a direction away from the head body portion, the head body portion being provided with channels for bags, which are in communication with the respective elastic bags, the polishing head further including at least two support plates disposed between the elastic bags on one hand and the substrate holding plate on the other, the elastic bags being configured to press the substrate holding plate through the support plates.

公开(公告)号：US10525564B2

公开(公告)日：2020-01-07

申请号：US15248028

申请日：2016-08-26

Applicant: Ebara Corporation

Inventor： Kenichi Akazawa ,  Kenichi Kobayashi ,  Akihiro Yazawa ,  Manao Hoshina

IPC: B24B41/00 ,  B24B27/00 ,  B08B3/02 ,  B24B9/00

Abstract: Disclosed is a reversing machine that reverses a substrate upside down. The reversing machine includes: a first arm pair configured to mount a substrate thereon; a second arm pair facing the first arm pair; an opening/closing mechanism configured to open/close the second arm pair so as to grip the substrate mounted on the first arm pair; and a rotating mechanism configured to rotate the first arm pair and the second arm pair around a predetermined axis that is set inside the first arm pair and the second arm pair and extends along an extension direction of the first arm pair and the second arm pair such that the substrate is reversed upside down.

公开(公告)号：US10141211B2

公开(公告)日：2018-11-27

申请号：US15690025

申请日：2017-08-29

Applicant: EBARA CORPORATION

Inventor： Toshio Yokoyama ,  Masahiko Sekimoto ,  Kenichi Kobayashi ,  Kenichi Akazawa ,  Takashi Mitsuya ,  Keiichi Kurashina

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/687

Abstract: A substrate processing apparatus comprises a transferring device including a grasping section configured to grasp a substrate holder, and a transferring section configured to transfer the substrate holder grasped by the grasping section, and a processing bath for storing a substrate held by the substrate holder so that a surface of the substrate is vertically oriented, and processing the substrate. The grasping section is configured to grasp the substrate holder with a surface of the substrate oriented horizontally. The transferring section is configured to transfer the substrate holder above the processing bath, with the surface of the substrate oriented horizontally.

公开(公告)号：USD989012S1

公开(公告)日：2023-06-13

申请号：US29774336

申请日：2021-03-16

Applicant: EBARA CORPORATION

Designer： Kenichi Akazawa ,  Osamu Nabeya ,  Shingo Togashi ,  Satoru Yamaki ,  Tomoko Owada ,  Cheng Cheng ,  Yuichi Kato

Abstract: FIG. 1 is a top perspective view of an elastic membrane showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a front view thereof, a rear view being identical thereto;
FIG. 6 is a right-side view thereof, a left-side view being identical thereto;
FIG. 7 is a cross sectional view taken along section line 7-7 in FIG. 3; and,
FIG. 8 is an enlarged portion view take along line 8-8 of FIG. 7.
The broken lines in the drawings depict portions of the elastic membrane that form no part of the claimed design.

公开(公告)号：US20220005716A1

公开(公告)日：2022-01-06

申请号：US17258916

申请日：2019-07-09

Applicant: EBARA CORPORATION

Inventor： Akihiro Yazawa ,  Takashi Koba ,  Kenichi Kobayashi ,  Kenichi Akazawa ,  Fong-Jie Du ,  Makoto Kashiwagi ,  Asagi Matsugu ,  Takahiro Nanjo ,  Hideharu Aoyama ,  Takashi Mitsuya ,  Tetsuji Togawa

IPC: H01L21/677 ,  B24B37/14 ,  B24B37/26 ,  H01L21/304 ,  B24B37/30 ,  B65G13/02

Abstract: To provide an automated apparatus for conveying a rectangular substrate. According to one embodiment, there is provided a substrate conveying apparatus for conveying the rectangular substrate. The substrate conveying apparatus includes a plurality of conveyance rollers, a plurality of roller shafts, a motor, and a pusher. The plurality of conveyance rollers are configured to support a lower surface of the substrate. To the plurality of roller shafts, the plurality of conveyance rollers are mounted. The motor is configured to rotate the plurality of roller shafts. The pusher is for lifting the substrate on the plurality of conveyance rollers such that the substrate is separated away from the plurality of conveyance rollers. The pusher includes a stage configured to pass through a clearance between the plurality of roller shafts.