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公开(公告)号：US08176782B2
公开(公告)日：2012-05-15
申请号：US12296554
申请日：2007-04-25
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P1/023 , G01P2015/0831
摘要： A capacitive sensor includes a fixed electrode and a movable electrode that is movably supported by an anchor portion through a beam portion. The fixed electrode and the movable electrode are opposed to each other with a gap interposed therebetween, thereby constituting a detecting unit. A capacitance suitable for a size of the gap is detected to detect a predetermined physical value. At least one of an end of the beam portion connected to the anchor portion and an end of the beam portion connected to the movable electrode is provided with a stress moderating unit that moderates a stress.
摘要翻译： 电容式传感器包括固定电极和可动电极，其通过梁部分由锚固部分可移动地支撑。 固定电极和可动电极彼此间隔开间隔开，构成检测部。 检测适合于间隙尺寸的电容以检测预定的物理值。 连接到锚固部分的梁部分的端部和连接到可动电极的梁部分的端部中的至少一个设置有缓和应力的应力调节单元。
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公开(公告)号：US20090266164A1
公开(公告)日：2009-10-29
申请号：US12296554
申请日：2007-04-25
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P1/023 , G01P2015/0831
摘要： A capacitive sensor includes a fixed electrode and a movable electrode that is movably supported by an anchor portion through a beam portion. The fixed electrode and the movable electrode are opposed to each other with a gap interposed therebetween, thereby constituting a detecting unit. A capacitance suitable for a size of the gap is detected to detect a predetermined physical value. At least one of an end of the beam portion connected to the anchor portion and an end of the beam portion connected to the movable electrode is provided with a stress moderating unit that moderates a stress.
摘要翻译： 电容式传感器包括固定电极和可动电极，其通过梁部分由锚固部分可移动地支撑。 固定电极和可动电极彼此间隔开间隔开，构成检测部。 检测适合于间隙尺寸的电容以检测预定的物理值。 连接到锚固部分的梁部分的端部和连接到可动电极的梁部分的端部中的至少一个设置有缓和应力的应力调节单元。
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公开(公告)号：US07554340B2
公开(公告)日：2009-06-30
申请号：US11689663
申请日：2007-03-22
申请人： Eiichi Furukubo , Hisakazu Miyajima
发明人： Eiichi Furukubo , Hisakazu Miyajima
IPC分类号： G01R27/26 , G01P15/125
CPC分类号： G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A capacitive sensor includes an error compensating unit that, in an arrangement that a part of a fixed electrode as an edge portion and a part of a movable electrode as an edge portion are opposed to each other keeping a gap in a direction of shift of a detecting unit, reduces a detection error of capacitance due to the shift of comb-tooth portions from each other in the detecting unit, by a change of capacitance according to variation of the gap caused by the shift.
摘要翻译： 一种电容式传感器包括：误差补偿单元，其以作为边缘部分的固定电极的一部分和作为边缘部分的可动电极的一部分彼此相对的方式保持沿着 检测单元通过根据由偏移引起的间隙的变化的电容的变化，减少由于检测单元中的梳齿部彼此的偏移引起的电容的检测误差。
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公开(公告)号：US20070273393A1
公开(公告)日：2007-11-29
申请号：US11689663
申请日：2007-03-22
申请人： Eiichi Furukubo , Hisakazu Miyajima
发明人： Eiichi Furukubo , Hisakazu Miyajima
IPC分类号： G01R27/26
CPC分类号： G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A capacitive sensor includes an error compensating unit that, in an arrangement that a part of a fixed electrode as an edge portion and a part of a movable electrode as an edge portion are opposed to each other keeping a gap in a direction of shift of a detecting unit, reduces a detection error of capacitance due to the shift of comb-tooth portions from each other in the detecting unit, by a change of capacitance according to variation of the gap caused by the shift.
摘要翻译： 一种电容式传感器包括：误差补偿单元，其以作为边缘部分的固定电极的一部分和作为边缘部分的可动电极的一部分彼此相对的方式保持沿着 检测单元通过根据由偏移引起的间隙的变化的电容的变化，减少由于检测单元中的梳齿部彼此的偏移引起的电容的检测误差。
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公开(公告)号：US20140070101A1
公开(公告)日：2014-03-13
申请号：US14110999
申请日：2012-04-05
IPC分类号： G01N21/17
CPC分类号： G01N21/17 , G01N21/3504
摘要： An optical path of infrared rays (see the broken lines in FIG. 1) is modified to a substantially U-like shape by a first reflecting mirror and a second reflecting mirror. An incidence angle of the infrared rays incident on the wavelength filter (an angle between the infrared rays incident on the surface of the wavelength filter and the line perpendicular to the surface of the wavelength filter) is nearly zero. For this reason, as compared with a conventional example, the influence of the incidence angle dependence of the wavelength filter can be reduced. As a result, the amount of the infrared rays reaching the light receiving unit through the wavelength filter is increased, thereby suppressing a decline in the detection accuracy of the gas component.
摘要翻译： 通过第一反射镜和第二反射镜将红外线的光路（见图1中的虚线）修改为大致U字状。 入射到波长滤波器上的红外线的入射角（入射到波长滤波器的表面上的红外线与垂直于波长滤波器的表面的线之间的角度）的入射角几乎为零。 因此，与传统的例子相比，可以降低波长滤波器的入射角依赖性的影响。 结果，通过波长滤波器到达光接收单元的红外线的量增加，从而抑制气体成分的检测精度的下降。
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公开(公告)号：US20080150659A1
公开(公告)日：2008-06-26
申请号：US11883174
申请日：2006-08-29
申请人： Koji Yokoyama , Riichi Uotome , Eiichi Furukubo , Katsumi Kakimoto , Ryosuke Meshii , Hideki Ueda , Masakazu Kobayashi
发明人： Koji Yokoyama , Riichi Uotome , Eiichi Furukubo , Katsumi Kakimoto , Ryosuke Meshii , Hideki Ueda , Masakazu Kobayashi
IPC分类号： H01H29/00
CPC分类号： H01H29/00 , H01H29/004 , H01H2029/008 , H01H2057/006
摘要： A relay device using a conductive fluid and having excellent switching response is provided. This relay device mainly comprises a laminate having an interior space, and formed by bonding a semiconductor substrate to an insulating substrate, at least two contacts exposed to the interior space, a diaphragm portion facing the interior space, a conductive fluid sealed in the interior space, and an actuator for elastically deforming the diaphragm portion. By forming the diaphragm portion on the semiconductor substrate, it is possible to reduce a driving force of the actuator needed to elastically deform the diaphragm portion, and obtain a volume change of the interior space with good response. This volume change causes a positional displacement of the conductive fluid in the interior space, thereby forming a conductive state or a non-conductive sate between the contacts.
摘要翻译： 提供了使用导电流体并具有优异的开关响应的继电器装置。 该中继装置主要包括具有内部空间并通过将半导体衬底粘合到绝缘衬底，暴露于内部空间的至少两个触点，面向内部空间的隔膜部分，密封在内部空间中的导电流体 以及用于使隔膜部分弹性变形的致动器。 通过在半导体衬底上形成隔膜部分，可以减小弹性变形隔膜部分所需的致动器的驱动力，并且以良好的响应获得内部空间的体积变化。 该体积变化导致导电流体在内部空间中的位置偏移，从而在触点之间形成导电状态或非导电状态。
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公开(公告)号：US06755081B2
公开(公告)日：2004-06-29
申请号：US10333910
申请日：2003-04-30
申请人： Eiichi Furukubo , Masami Hori , Kazuya Nohara
发明人： Eiichi Furukubo , Masami Hori , Kazuya Nohara
IPC分类号： G01P102
CPC分类号： G01P15/123 , G01P1/023 , G01P15/08
摘要： An acceleration sensor including a sensor chip for converting into an electrical signal an acceleration applied in a direction of a sensitive axis parallel to a board face of a printed circuit board, which has a first wire bonding face, a wiring base for supporting the sensor chip, which includes second and third wire bonding faces and a wiring pattern formed on the second and third wire bonding faces and a package for accommodating the wiring base having the sensor chip mounted thereon, which has a mounting face to be mounted on the board face of the printed circuit board and a fourth wire bonding face substantially parallel to the mounting face such that the wiring pattern on the third and second wire bonding faces of the wiring base can be connected to pads of the package and pads of the sensor chip, respectively.
摘要翻译： 一种加速度传感器，包括传感器芯片，用于将具有第一引线接合面的印刷电路板的平行于平行于印刷电路板的基板面的敏感轴方向的加速度转换成电信号，用于支撑传感器芯片的布线基板 ，其包括第二和第三引线接合面和形成在第二和第三引线接合面上的布线图案和用于容纳布置基底的封装，其具有安装在其上的传感器芯片，该封装具有安装在板的表面上的安装面 印刷电路板和基本上平行于安装面的第四引线接合面，使得布线基板的第三和第二引线接合面上的布线图案可以分别连接到封装的焊盘和传感器芯片的焊盘。
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公开(公告)号：US07464591B2
公开(公告)日：2008-12-16
申请号：US11579178
申请日：2006-01-20
申请人： Yoshihisa Fukuda , Kouji Sakai , Atsushi Ishigami , Eiichi Furukubo , Ryosuke Meshii , Takashi Yajima
发明人： Yoshihisa Fukuda , Kouji Sakai , Atsushi Ishigami , Eiichi Furukubo , Ryosuke Meshii , Takashi Yajima
CPC分类号： G01P15/08 , G01P2015/0871
摘要： A semiconductor acceleration sensor having beam parts formed in substantially L-shape to surround a weight part, wherein formed to surround a square part, as seen in plan view and constituting the weight part, are two elongated L-shaped beam parts, at locations close to proximal end portions of which are formed protruding portions protruding from a fixed part toward the weight part, and receiving recessed portions protruding from the weight part toward the fixed part to surround the protruding portions. The protruding portions have an outer shape substantially the same as an inner wall surface of the receiving recessed portions so that movements of the weight part in any directions in a horizontal direction perpendicular to an up and down direction are limited as a result of reception of the protruding portions by the receiving recessed portions. Thus, even when a side impact is applied to the acceleration sensor, the weight part is prevented from moving significantly, thereby preventing an excessive stress from being applied to the beam parts to break the beam parts.
摘要翻译： 一种半导体加速度传感器，其具有形成为大致L形以包围重量部分的梁部分，其中形成为包围正方形部分，如在平面图中看到并构成重量部分的两个细长L形梁部分，在靠近的位置 其基端部形成有从固定部朝向配重部突出的突出部，并且容纳从重物部朝向固定部突出以包围突出部的凹部。 突出部具有与容纳凹部的内壁面大致相同的外形，使得重量部在与上下方向垂直的水平方向上的任何方向上的移动受到限制 突出部分由接收凹部。 因此，即使当对加速度传感器施加侧面冲击时，防止重量部分显着移动，从而防止过大的应力施加到梁部分以破坏梁部分。
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公开(公告)号：US20080022770A1
公开(公告)日：2008-01-31
申请号：US11579178
申请日：2006-01-20
申请人： Yoshihisa Fukuda , Kouji Sakai , Atsushi Ishigami , Eiichi Furukubo , Ryosuke Meshii , Takashi Yajima
发明人： Yoshihisa Fukuda , Kouji Sakai , Atsushi Ishigami , Eiichi Furukubo , Ryosuke Meshii , Takashi Yajima
IPC分类号： G01P15/02
CPC分类号： G01P15/08 , G01P2015/0871
摘要： A semiconductor acceleration sensor having beam parts formed in substantially L-shape to surround a weight part, wherein formed to surround a square part, as seen in plan view and constituting the weight part, are two elongated L-shaped beam parts, at locations close to proximal end portions of which are formed protruding portions protruding from a fixed part toward the weight part, and receiving recessed portions protruding from the weight part toward the fixed part to surround the protruding portions. The protruding portions have an outer shape substantially the same as an inner wall surface of the receiving recessed portions so that movements of the weight part in any directions in a horizontal direction perpendicular to an up and down direction are limited as a result of reception of the protruding portions by the receiving recessed portions. Thus, even when a side impact is applied to the acceleration sensor, the weight part is prevented from moving significantly, thereby preventing an excessive stress from being applied to the beam parts to break the beam parts.
摘要翻译： 一种半导体加速度传感器，其具有形成为大致L形以包围重量部分的梁部分，其中形成为包围正方形部分，如在平面图中看到并构成重量部分的两个细长L形梁部分，在靠近的位置 其基端部形成有从固定部朝向配重部突出的突出部，并且容纳从重物部朝向固定部突出以包围突出部的凹部。 突出部具有与容纳凹部的内壁面大致相同的外形，使得重量部在与上下方向垂直的水平方向上的任何方向上的移动受到限制 突出部分由接收凹部。 因此，即使当对加速度传感器施加侧面冲击时，防止重量部分显着移动，从而防止过大的应力施加到梁部分以破坏梁部分。
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公开(公告)号：US06906412B2
公开(公告)日：2005-06-14
申请号：US10485403
申请日：2003-05-29
申请人： Eiichi Furukubo , Masami Hori , Kazuya Nohara
发明人： Eiichi Furukubo , Masami Hori , Kazuya Nohara
CPC分类号： B81B7/0048 , B81B2201/0235 , B81C2203/032 , G01P1/023 , G01P15/0802 , G01P15/125 , H01L24/32 , H01L2224/05554 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2224/73265 , H01L2224/83385 , H01L2924/16195 , H01L2924/3511 , H05K3/3442 , H01L2924/00014
摘要： A sensor package P is a surface-mounted sensor package which is adapted to be mounted on a printed board 200. The sensor package P includes a case 1 for accommodating a semiconductor acceleration sensor chip 100 having output pads 101. The case has a bottom wall 10, which is divided into a center area 10a for supporting the sensor chip 100 and a peripheral area 10b. Output electrodes 15 to be connected to the output pads 101 are formed on external surfaces of the peripheral area. These output electrodes 15 are soldered to the printed board 200 for electrical connection between the sensor chip and an electric circuit of the printed board as well as for holding the sensor package physically on the printed board. The feature of the present invention resides in that grooves 12 are formed in an interior surface of the bottom wall 10 between the center area 10a and the peripheral area 10b.
摘要翻译： 传感器封装P是适于安装在印刷电路板200上的表面安装的传感器封装。 传感器封装P包括用于容纳具有输出焊盘101的半导体加速度传感器芯片100的壳体1。 壳体具有底壁10，其被分成用于支撑传感器芯片100的中心区域10a和周边区域10b。 要连接到输出焊盘101的输出电极15形成在周边区域的外表面上。 这些输出电极15被焊接到印刷电路板200上，用于传感器芯片和印刷电路板的电路之间的电连接，以及将传感器封装物理地保持在印刷电路板上。 本发明的特征在于，凹槽12形成在中心区域10a和周边区域10b之间的底壁10的内表面中。
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