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14 条记录 (耗时 0.022 秒)

    Systems and methods for processing workpieces
    1.
    发明授权
    Systems and methods for processing workpieces 失效

    公开(公告)号：US06668844B2

    公开(公告)日：2003-12-30

    申请号：US09907544

    申请日：2001-07-16

    申请人： Eric Lund ,  Joe Lanfrankie ,  Gil Lund ,  Dana Scranton ,  Eric Bergman

    发明人： Eric Lund ,  Joe Lanfrankie ,  Gil Lund ,  Dana Scranton ,  Eric Bergman

    IPC分类号： B08B300

    CPC分类号： H01L21/67057 ,  B08B3/045 ,  Y10S134/902

    摘要： Workpieces requiring low levels of contamination, such as semiconductor wafers, are loaded into a rotor within a process chamber. The process chamber has a horizontal drain opening in its cylindrical wall. The chamber is closed via a door. A process or rinsing liquid is introduced into the chamber. The liquid rises to a level so that the workpieces are immersed in the liquid. The chamber slowly pivots or rotates to move the drain opening down to the level of the liquid. The liquid drains out through the drain opening. The drain opening is kept near the surface of the liquid to drain off liquid at a uniform rate. An organic solvent vapor is introduced above the liquid to help prevent droplets of liquid from remaining on the workpieces as the liquid drains off. The rotor spins the workpieces to help to remove any remaining droplets by centrifugal force.

    Systems and methods for processing workpieces
    2.
    发明授权
    Systems and methods for processing workpieces 有权
    用于加工工件的系统和方法

    公开(公告)号：US06427359B1

    公开(公告)日：2002-08-06

    申请号：US09907487

    申请日：2001-07-16

    申请人： Dana Scranton ,  Eric Bergman ,  Eric Lund ,  Gil Lund

    发明人： Dana Scranton ,  Eric Bergman ,  Eric Lund ,  Gil Lund

    IPC分类号： F26B700

    CPC分类号： H01L21/67057 ,  B08B3/048 ,  B08B3/102 ,  B08B3/12 ,  B08B11/02 ,  H01L21/67051 ,  Y10S134/902

    摘要： Workpieces requiring low levels of contamination, such as semiconductor wafers, are loaded into a workpiece support or holder within a process chamber. The process chamber has a drain opening, slot or edge. The chamber is closed via a door. A process or rinsing liquid is introduced into the chamber. The liquid rises to a level so that the workpieces are immersed in the liquid. The chamber slowly pivots or rotates to move the drain opening down to the level of the liquid. The liquid drains out through the drain opening. The drain opening is kept near the surface of the liquid to drain off liquid at a uniform rate. An organic solvent vapor is introduced above the liquid to reduce or prevent droplets of liquid from remaining on the workpieces as the liquid drains off. An outer chamber may be provided around the process chamber to provide increased control of the process environment.

    摘要翻译： 需要低水平污染的工件（例如半导体晶片）被装载到处理室内的工件支撑件或保持器中。 处理室具有排水口，槽或边缘。 房间通过门关闭。 将过程或冲洗液体引入室中。 液体升高到一定水平，使得工件浸入液体中。 腔室缓慢地枢转或旋转以将排水口向下移动到液体的高度。 液体通过排水口排出。 排水口保持在液体表面附近，以均匀的速度排出液体。 在液体上方引入有机溶剂蒸气，以在液体排出时减少或防止液体液滴残留在工件上。 可以在处理室周围设置外室，以提供对过程环境的增加的控制。

    Multi-process system with pivoting process chamber
    3.
    发明授权
    Multi-process system with pivoting process chamber 失效
    具有旋转过程室的多工艺系统

    公开(公告)号：US06691720B2

    公开(公告)日：2004-02-17

    申请号：US09907485

    申请日：2001-07-16

    申请人： Eric Bergman ,  Dana Scranton ,  Eric Lund ,  Gil Lund

    发明人： Eric Bergman ,  Dana Scranton ,  Eric Lund ,  Gil Lund

    IPC分类号： B08B300

    CPC分类号： B08B3/12 ,  Y10S134/902

    摘要： A system for processing a workpiece includes an inner chamber pivotably supported within an outer chamber. The inner chamber has an opening to allow liquid to drain out. A motor pivots the inner chamber to bring the opening at or below the level of liquid in the inner chamber. As the inner chamber turns, liquid drains out. Workpieces within the inner chamber are supported on a holder or a rotor, which may be fixed or rotating. Multi processes may be performed within the inner chamber, reducing the need to move the workpieces between various apparatus and reducing risk of contamination.

    摘要翻译： 用于处理工件的系统包括可枢转地支撑在外室内的内室。 内室具有开口以允许液体排出。 电动机使内腔枢转，使开口处于内腔液面之下或之下。 当内室转动时，液体排出。 内腔内的工件支撑在可固定或旋转的支架或转子上。 多个工艺可以在内腔内执行，减少了在各种装置之间移动工件的需要，并减少污染的风险。

    Multiple sensor system and method for mapping soil in three dimensions
    5.
    发明授权
    Multiple sensor system and method for mapping soil in three dimensions 有权
    多传感器系统和三维地图绘制方法

    公开(公告)号：US09285501B2

    公开(公告)日：2016-03-15

    申请号：US12612375

    申请日：2009-11-04

    申请人： Colin Christy ,  Paul Drummond ,  Giyoung Kweon ,  Chase Maxton ,  Kenton Dreiling ,  Kyle Jensen ,  Eric Lund

    发明人： Colin Christy ,  Paul Drummond ,  Giyoung Kweon ,  Chase Maxton ,  Kenton Dreiling ,  Kyle Jensen ,  Eric Lund

    IPC分类号： G01N31/00 ,  G01N33/24 ,  G01V11/00 ,  G01N21/359 ,  G01N21/85 ,  G01N21/3563

    CPC分类号： G01V11/00 ,  G01N21/3563 ,  G01N21/359 ,  G01N21/8507

    摘要： A multi-sensor system rapidly measures diffuse reflectance of soil, soil conductivity, and other soil properties in situ, in three dimensions. The system includes a tractor-drawn implement containing a sensor shank used for X-Y axis measurements, a hydraulic probe implement containing a sensor probe for −Z axis measurements, and a set of visible and near-infrared spectrometers, controls, and firmware that are shared by each implement. Both implements include optical sensors and soil electrical conductivity sensors. The probe implement incorporates a sensor that measures insertion force, and the shank implement includes a soil temperature sensor. These combinations of sensors are used to calibrate the system and to characterize the soil properties within a field or area. Geo-referenced soil measurements are collected with the shank implement to identify optimal locations for conducting sensor probe insertions. The probe implement is then used for sensor probing and for collecting soil core samples for lab analysis.

    摘要翻译： 多传感器系统在三维方面快速测量土壤，土壤电导率和其他土壤性质的漫反射。 该系统包括一个拖拉机牵引工具，其中包含用于XY轴测量的传感器柄，包含用于-Z轴测量的传感器探头的液压探头工具以及共享的一组可见光和近红外光谱仪，控制和固件 由每个工具。 两种工具都包括光学传感器和土壤电导率传感器。 探头工具包括测量插入力的传感器，并且柄部件包括土壤温度传感器。 传感器的这些组合用于校准系统和表征场或区域内的土壤性质。 采用柄部工具收集地质参考土壤测量，以确定传感器探针插入的最佳位置。 然后将探头工具用于传感器探测和收集土壤样品进行实验室分析。

    Single workpiece processing system
    6.
    发明授权
    Single workpiece processing system 失效
    单工件加工系统

    公开(公告)号：US06930046B2

    公开(公告)日：2005-08-16

    申请号：US10690864

    申请日：2003-10-21

    申请人： Kyle M. Hanson ,  Eric Lund ,  Coby Grove ,  Steven L. Peace ,  Paul Z. Wirth ,  Scott A. Bruner ,  Jonathan Kuntz

    发明人： Kyle M. Hanson ,  Eric Lund ,  Coby Grove ,  Steven L. Peace ,  Paul Z. Wirth ,  Scott A. Bruner ,  Jonathan Kuntz

    IPC分类号： H01L21/00 ,  H01L21/3213 ,  H01L21/311

    CPC分类号： H01L21/6715 ,  H01L21/32134 ,  H01L21/67017 ,  Y10S438/906 ,  Y10S438/907 ,  Y10S438/913

    摘要： A system and method for processing a workpiece, includes workpiece processors. A robot is moveable within an enclosure to load and unload workpieces into and out of the processors. A processor includes an upper rotor having a central air flow opening. The upper rotor is magnetically driven into engagement with a lower rotor to form a workpiece processing chamber. A moveable drain mechanism aligns different drain paths with the processing chamber so that different processing fluids may be removed from the processing chamber via different drain paths. A moveable nozzle positioned in the air flow opening distributes processing fluid to the workpiece. The processing fluid is distributed across the workpiece surface, via centrifugal force generated by spinning the processing chamber, and removed from the processing chamber via the moveable drain mechanism.

    摘要翻译： 用于处理工件的系统和方法包括工件处理器。 机器人可以在机箱内移动，以将工件加载和卸载进出处理器。 处理器包括具有中心气流开口的上转子。 上转子被磁力驱动与下转子接合以形成工件处理室。 可移动排水机构使不同的排放路径与处理室对准，使得不同的处理流体可以经由不同的排出路径从处理室移除。 位于空气流通口中的可移动喷嘴将处理流体分配到工件。 处理液通过旋转处理室产生的离心力分布在工件表面上，并通过可移动的排水机构从处理室中移出。

    System and method for mobile soil sampling
    7.
    发明申请
    System and method for mobile soil sampling 有权
    移动土壤采样系统与方法

    公开(公告)号：US20050172733A1

    公开(公告)日：2005-08-11

    申请号：US11056807

    申请日：2005-02-10

    申请人： Paul Drummond ,  Eric Lund ,  Kevin Collings ,  Colin Christy

    发明人： Paul Drummond ,  Eric Lund ,  Kevin Collings ,  Colin Christy

    IPC分类号： A01B79/00 ,  G01N1/08 ,  G01N33/24 ,  G01N1/04

    CPC分类号： A01B79/005 ,  G01N1/08 ,  G01N2001/021 ,  G01N2033/245

    摘要： A soil sampling implement and method have a sampler assembly supported from an implement frame for movement across a field. The sampler assembly includes a tapered cylindrical cutting shoe and a soil collection trough. The cutting shoe has a leading cutting edge arranged for movement through soil in a horizontal direction to cut a cylindrical core sample. A sensing device is provided for measuring at least one soil property. The sampler assembly is moved between a lowered position in which the cutting shoe is positioned at a selected sampling depth, and a raised position in which the cutting shoe is positioned above the soil surface and a soil sample contained in the soil collection trough is brought into contact with the sensing device. A cutting shoe scraper engages and cleans the leading cutting edge of the cutting shoe when the sampler assembly is moved between the lowered and raised positions.

    摘要翻译： 土壤取样工具和方法具有从实施框架支撑的用于在田间运动的采样器组件。 采样器组件包括锥形圆柱形切割鞋和土壤收集槽。 切割鞋具有前沿切割边缘，其布置成沿水平方向移动通过土壤以切割圆柱形芯样品。 提供用于测量至少一个土壤性质的感测装置。 采样器组件在切割靴定位在选定采样深度的下降位置和切割靴位于土壤表面上方的升高位置之间移动，并且将包含在土壤收集槽中的土壤样品带入 与感测装置接触。 当采样器组件在降低和升高位置之间移动时，切割刮板刮刀接合并清洁切割板的前切割刃。