MEMS-based resonant tunneling devices and arrays of such devices for electric field sensing
    1.
    发明授权
    MEMS-based resonant tunneling devices and arrays of such devices for electric field sensing 有权
    基于MEMS的共振隧道装置和用于电场感测的这种装置的阵列

    公开(公告)号:US08604772B2

    公开(公告)日:2013-12-10

    申请号:US12915571

    申请日:2010-10-29

    IPC分类号: G01R19/00

    CPC分类号: G01R29/12

    摘要: A sensor assembly for electric field sensing is provided. The sensor assembly may include an array of Micro-Electro-Mechanical System (MEMS)-based resonant tunneling devices. A resonant tunneling device may be configured to generate a resonant tunneling signal in response to the electric field. The resonant tunneling device may include at least one electron state definer responsive to changes in at least one respective controllable characteristic of the electron state definer. The changes in the controllable characteristic are configured to affect the tunneling signal. An excitation device may be coupled to the resonant tunneling device to effect at least one of the changes in the controllable characteristic affecting the tunneling signal. A controller may be coupled to the resonant tunneling device and the excitation device to control the changes of the controllable characteristic in accordance with an automated control strategy configured to reduce an effect of noise on a measurement of the electric field.

    摘要翻译: 提供一种用于电场感测的传感器组件。 传感器组件可以包括基于微机电系统(MEMS)的共振隧穿装置的阵列。 谐振隧穿装置可以被配置为响应于电场而产生谐振隧穿信号。 谐振隧穿装置可以包括响应于电子态定义器的至少一个相应的可控特性的变化的至少一个电子态定义器。 可控特性的变化被配置为影响隧道信号。 励磁装置可以耦合到谐振隧道装置以实现影响隧道信号的可控特性中的至少一个变化。 控制器可以耦合到谐振隧穿装置和激励装置,以根据配置成减少噪声对电场测量的影响的自动控制策略来控制可控特性的变化。

    MEMS-Based Resonant Tunneling Devices and Arrays of Such Devices For Electric Field Sensing
    2.
    发明申请
    MEMS-Based Resonant Tunneling Devices and Arrays of Such Devices For Electric Field Sensing 有权
    用于电场感测的这种器件的基于MEMS的谐振隧道装置和阵列

    公开(公告)号:US20110241702A1

    公开(公告)日:2011-10-06

    申请号:US12915571

    申请日:2010-10-29

    IPC分类号: G01R27/04

    CPC分类号: G01R29/12

    摘要: A sensor assembly for electric field sensing is provided. The sensor assembly may include an array of Micro-Electro-Mechanical System (MEMS)-based resonant tunneling devices. A resonant tunneling device may be configured to generate a resonant tunneling signal in response to the electric field. The resonant tunneling device may include at least one electron state definer responsive to changes in at least one respective controllable characteristic of the electron state definer. The changes in the controllable characteristic are configured to affect the tunneling signal. An excitation device may be coupled to the resonant tunneling device to effect at least one of the changes in the controllable characteristic affecting the tunneling signal. A controller may be coupled to the resonant tunneling device and the excitation device to control the changes of the controllable characteristic in accordance with an automated control strategy configured to reduce an effect of noise on a measurement of the electric field.

    摘要翻译: 提供一种用于电场感测的传感器组件。 传感器组件可以包括基于微机电系统(MEMS)的共振隧穿装置的阵列。 谐振隧穿装置可以被配置为响应于电场而产生谐振隧穿信号。 谐振隧穿装置可以包括响应于电子态定义器的至少一个相应的可控特性的变化的至少一个电子态定义器。 可控特性的变化被配置为影响隧道信号。 励磁装置可以耦合到谐振隧道装置以实现影响隧道信号的可控特性中的至少一个变化。 控制器可以耦合到谐振隧穿装置和激励装置,以根据配置成减少噪声对电场测量的影响的自动控制策略来控制可控特性的变化。

    Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication
    6.
    发明申请
    Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication 失效
    小型化多气体和蒸气传感器装置及相关制造方法

    公开(公告)号:US20050109081A1

    公开(公告)日:2005-05-26

    申请号:US10719971

    申请日:2003-11-21

    IPC分类号: G01N25/48 G01N7/00

    CPC分类号: G01N25/4873 G01N25/4813

    摘要: The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.

    摘要翻译: 本发明提供了一种小型化传感器装置,其包括具有第一表面和第二表面的薄膜膜,一个或多个直接或间接地邻近薄膜膜的第一表面设置的电阻薄膜加热器/温度计装置,以及设置的框架 直接或间接地邻近所述薄膜膜的第二表面,其中所述框架的一个或多个内表面限定至少一个具有至少一个开口的单元。 传感器装置还包括直接或间接地邻近框架设置的薄膜层。 传感器装置还包括直接或间接地邻近薄膜膜设置的感测层。

    Ignition device for a gas appliance and method of operation
    7.
    发明申请
    Ignition device for a gas appliance and method of operation 审中-公开
    燃气用具点火装置及其操作方法

    公开(公告)号:US20070128563A1

    公开(公告)日:2007-06-07

    申请号:US11296139

    申请日:2005-12-07

    IPC分类号: F23Q9/00 F23Q9/08

    CPC分类号: H01C7/008 H01C17/08

    摘要: An ignition device for a gas appliance is provided. The ignition device includes a membrane and a plurality of heating elements embedded in the membrane, wherein the heating elements comprise a plurality of patterned resistors and wherein the plurality of heating elements are configured to heat a surface on application of voltage through the heating elements. The ignition device also includes a cavity disposed adjacent to the heating elements and configured to provide thermal isolation of the heating elements.

    摘要翻译: 提供一种用于燃气器具的点火装置。 点火装置包括膜和嵌入在膜中的多个加热元件,其中加热元件包括多个图案化的电阻器,并且其中多个加热元件构造成通过加热元件施加电压来加热表面。 点火装置还包括邻近加热元件设置的空腔,并且构造成提供加热元件的热​​隔离。

    Thermistor having doped and undoped layers of material
    8.
    发明申请
    Thermistor having doped and undoped layers of material 失效
    具有掺杂和未掺杂材料层的热敏电阻

    公开(公告)号:US20070126548A1

    公开(公告)日:2007-06-07

    申请号:US11648919

    申请日:2007-01-03

    IPC分类号: H01C7/13

    摘要: According to some embodiments, a first layer of doped material may be provided to form a resistor. A second layer of undoped material may then be formed on the first layer. The first layer might comprise, for example, a layer of doped silicon carbide while the second layer comprises a layer of undoped silicon carbide. The resistance of the resistor may then be measured to determine a temperature.

    摘要翻译: 根据一些实施例,可以提供第一掺杂材料层以形成电阻器。 然后可以在第一层上形成第二层未掺杂的材料。 第一层可以包括例如掺杂碳化硅层,而第二层包括未掺杂的碳化硅层。 然后可以测量电阻器的电阻以确定温度。