Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication
    1.
    发明申请
    Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication 失效
    小型化多气体和蒸气传感器装置及相关制造方法

    公开(公告)号:US20050109081A1

    公开(公告)日:2005-05-26

    申请号:US10719971

    申请日:2003-11-21

    IPC分类号: G01N25/48 G01N7/00

    CPC分类号: G01N25/4873 G01N25/4813

    摘要: The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.

    摘要翻译: 本发明提供了一种小型化传感器装置,其包括具有第一表面和第二表面的薄膜膜,一个或多个直接或间接地邻近薄膜膜的第一表面设置的电阻薄膜加热器/温度计装置,以及设置的框架 直接或间接地邻近所述薄膜膜的第二表面,其中所述框架的一个或多个内表面限定至少一个具有至少一个开口的单元。 传感器装置还包括直接或间接地邻近框架设置的薄膜层。 传感器装置还包括直接或间接地邻近薄膜膜设置的感测层。

    Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication
    3.
    发明授权
    Miniaturized multi-gas and vapor sensor devices and associated methods of fabrication 失效
    小型化多气体和蒸气传感器装置及相关制造方法

    公开(公告)号:US07104113B2

    公开(公告)日:2006-09-12

    申请号:US10719971

    申请日:2003-11-21

    IPC分类号: G01N25/00 G01N7/00

    CPC分类号: G01N25/4873 G01N25/4813

    摘要: The invention provides a miniaturized sensor device including a thin film membrane having a first surface and a second surface, one or more resistive thin film heater/thermometer devices disposed directly or indirectly adjacent to the first surface of the thin film membrane, and a frame disposed directly or indirectly adjacent to the second surface of the thin film membrane, wherein one or more internal surfaces of the frame define at least one cell having at least one opening. The sensor device also includes a thin film layer disposed directly or indirectly adjacent to the frame. The sensor device further includes a sensing layer disposed directly or indirectly adjacent to the thin film membrane.

    摘要翻译: 本发明提供了一种小型化传感器装置,其包括具有第一表面和第二表面的薄膜膜,一个或多个直接或间接地邻近薄膜膜的第一表面设置的电阻薄膜加热器/温度计装置,以及设置的框架 直接或间接地邻近所述薄膜膜的第二表面,其中所述框架的一个或多个内表面限定至少一个具有至少一个开口的单元。 传感器装置还包括直接或间接地邻近框架设置的薄膜层。 传感器装置还包括直接或间接地邻近薄膜膜设置的感测层。

    OPTOFLUIDIC DEVICES AND METHODS OF USING THE SAME
    4.
    发明申请
    OPTOFLUIDIC DEVICES AND METHODS OF USING THE SAME 失效
    光学器件及其使用方法

    公开(公告)号:US20090201497A1

    公开(公告)日:2009-08-13

    申请号:US11400947

    申请日:2006-04-10

    IPC分类号: G01J3/40 G01N21/01

    摘要: An optofluidic device is provided. The device includes a cladding region having a first refractive index, and a channel defined by the cladding region such that the cladding region forms an inner surface or an interface of the channel. The channel is configured to house one or more of a liquid, a solid, a gas, a colloidal, or a suspension sample, wherein the sample has a second refractive index, where the channel is configured to guide radiation, and where the first refractive index is lower than the second refractive index.

    摘要翻译: 提供了一种光流体装置。 该器件包括具有第一折射率的包层区域和由包层区域限定的沟道,使得包层区域形成沟道的内表面或界面。 通道被配置成容纳液体,固体,气体,胶体或悬浮样品中的一种或多种,​​其中样品具有第二折射率,其中通道被构造成引导辐射,并且其中第一折射 指数低于第二折射率。

    MEMS based current sensor using magnetic-to-mechanical conversion and reference components
    5.
    发明授权
    MEMS based current sensor using magnetic-to-mechanical conversion and reference components 有权
    基于MEMS的电流传感器采用磁 - 机转换和参考元件

    公开(公告)号:US07466121B2

    公开(公告)日:2008-12-16

    申请号:US11506493

    申请日:2006-08-18

    IPC分类号: G01R33/00

    摘要: A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.

    摘要翻译: 微机电系统(MEMS)电流传感器被描述为包括第一导体,用于使由第一导体中的电流产生的磁场成形的磁场成形部件,以及包括磁 - 用于感测成形磁场的MEMS组件,并且响应于此,提供第一导体中的电流的指示。 还描述了一种用于感测使用MEMS的电流的方法,包括使用在第一导体中的电流产生的磁场成形,用具有磁MEMS组件磁场感测电路的基于MEMS的磁场感测组件感测成形的磁场 并且提供第一导体中的电流的指示。

    Optofluidic devices and methods of using the same
    8.
    发明授权
    Optofluidic devices and methods of using the same 失效
    光电装置及其使用方法

    公开(公告)号:US07574089B1

    公开(公告)日:2009-08-11

    申请号:US11400947

    申请日:2006-04-10

    IPC分类号: G02B6/00 G02B6/02 G02B6/10

    摘要: An optofluidic device is provided. The device includes a cladding region having a first refractive index, and a channel defined by the cladding region such that the cladding region forms an inner surface or an interface of the channel. The channel is configured to house one or more of a liquid, a solid, a gas, a colloidal, or a suspension sample, wherein the sample has a second refractive index, where the channel is configured to guide radiation, and where the first refractive index is lower than the second refractive index.

    摘要翻译: 提供了一种光流体装置。 该器件包括具有第一折射率的包层区域和由包层区域限定的沟道,使得包层区域形成沟道的内表面或界面。 通道被配置成容纳液体,固体,气体,胶体或悬浮样品中的一种或多种,​​其中样品具有第二折射率,其中通道被构造成引导辐射,并且其中第一折射 指数低于第二折射率。

    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT & MAGNETIC FIELD SENSOR HAVING CAPACITIVE SENSE COMPONENTS
    9.
    发明申请
    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT & MAGNETIC FIELD SENSOR HAVING CAPACITIVE SENSE COMPONENTS 有权
    基于微电子系统(MEMS)的电流和具有电容感测元件的磁场传感器

    公开(公告)号:US20080070338A1

    公开(公告)日:2008-03-20

    申请号:US11939589

    申请日:2007-11-14

    IPC分类号: H01L21/02

    摘要: A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component having a capacitive magneto-MEMS component, a compensator and an output component for sensing magnetic fields and for providing, in response thereto, an indication of the current present in a respective conductor to be measured. In one embodiment, first and second mechanical sense components are electrically conductive and operate to sense a change in a capacitance between the mechanical sense components in response to a mechanical indicator from a magnetic-to-mechanical converter.

    摘要翻译: 基于微机电系统(MEMS)的电流和磁场传感器包括具有电容式磁MEMS组件的基于MEMS的磁场感测部件,补偿器和用于感测磁场的输出部件,并且响应于此而提供 当前存在于待测量的导体中的指示。 在一个实施例中,第一和第二机械感测部件是导电的并且用于响应于来自磁 - 机械转换器的机械指示器感测机械感测部件之间的电容的变化。