Double patterning method
    8.
    发明申请
    Double patterning method 失效
    双重图案化方法

    公开(公告)号:US20090258501A1

    公开(公告)日:2009-10-15

    申请号:US12216107

    申请日:2008-06-30

    申请人: Michael Chan

    发明人: Michael Chan

    IPC分类号: H01L21/311

    摘要: A method of making a device includes forming a first photoresist layer over an underlying layer, patterning the first photoresist layer to form a first photoresist pattern, rendering the first photoresist pattern insoluble to a solvent, forming a second photoresist layer over the first photoresist pattern, patterning the second photoresist layer to form a second photoresist pattern over the underlying layer, and etching the underlying layer using both the first and the second photoresist patterns as a mask.

    摘要翻译: 制造器件的方法包括在下层上形成第一光致抗蚀剂层,图案化第一光致抗蚀剂层以形成第一光致抗蚀剂图案,使第一光致抗蚀剂图案不溶于溶剂,在第一光致抗蚀剂图案上形成第二光致抗蚀剂层, 图案化第二光致抗蚀剂层以在下层上形成第二光致抗蚀剂图案,并且使用第一和第二光致抗蚀剂图案作为掩模蚀刻下面的层。

    System for recognizing events
    9.
    发明申请
    System for recognizing events 有权
    识别事件的系统

    公开(公告)号:US20070041615A1

    公开(公告)日:2007-02-22

    申请号:US11208792

    申请日:2005-08-22

    IPC分类号: G06K9/00

    CPC分类号: G06K9/00771

    摘要: A system recognizes events. The system includes a sequence of continuous vectors and a sequence of binarized vectors. The sequence of continuous vectors represents spatial-dynamic relationships of objects in a predetermined recognition area. The sequence of binarized vectors is derived from the sequence of continuous vectors by utilizing thresholds for determining binary values for each spatial-dynamic relationship. The sequence of binarized vectors indicates whether an event has occurred.

    摘要翻译: 系统识别事件。 该系统包括连续向量序列和二进制向量序列。 连续向量的序列表示预定识别区域中的对象的空间 - 动态关系。 通过利用用于确定每个空间 - 动态关系的二进制值的阈值,从连续向量的序列中导出二进制向量的序列。 二进制向量的序列表示事件是否发生。