Low cost hermetic sealed microwave module packaging
    2.
    发明授权
    Low cost hermetic sealed microwave module packaging 失效
    低成本密封微波模块包装封装

    公开(公告)号:US6028007A

    公开(公告)日:2000-02-22

    申请号:US274832

    申请日:1999-03-23

    CPC classification number: H01L23/66 H01P1/08 H01L2924/0002 Y10T29/49016

    Abstract: The invention relates to a method for producing low cost hermetic Integrated Module Assembly (IMA) packaging, where an aluminum coating (24) is deposited on a poly-tetrafluoral-ethaline substrate (20), the aluminum coating (24) is selectively etched to form a waveguide window (26) and the substrate (20) is selectively treated over the waveguide window (26) to produce a non-conductive hermetic seal. The substrate (20) is then joined to a metal carrier (28) containing the waveguide (30). As a result of using selectively treated low cost substrates to produce hermetic seals, more expensive substrates are not required to form hermetic seals over substrate to waveguide interconnections.

    Abstract translation: 本发明涉及一种用于生产低成本密封的集成模块装配(IMA)封装的方法,其中铝涂层(24)沉积在聚四氟乙基底(20)上,铝涂层(24)被选择性地蚀刻到 形成波导窗口(26),并且在波导窗口(26)上选择性地处理衬底(20)以产生非导电气密封。 然后将基板(20)接合到包含波导管(30)的金属载体(28)上。 作为使用选择性处理的低成本基底以产生气密密封的结果,不需要更昂贵的基底以在基底与波导互连之间形成气密密封。

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