Method and Apparatus for Producing Chip Devices, and Chip Device Produced by Means of the Method
    7.
    发明申请
    Method and Apparatus for Producing Chip Devices, and Chip Device Produced by Means of the Method 有权
    用于生产芯片器件的方法和装置,以及通过该方法生产的芯片器件

    公开(公告)号:US20120061778A1

    公开(公告)日:2012-03-15

    申请号:US13228971

    申请日:2011-09-09

    IPC分类号: H01L29/84 H01L21/50

    CPC分类号: B81C1/00333

    摘要: A chip device is produced providing at least one wafer having a plurality of chip components. The wafer or wafers are separated into the individual chip components and/or into groups of chip components. The individual chip components and/or the groups of chip components are applied to a carrier element, in such a way that interspaces having a predetermined width are formed between the individual chip components and/or the groups of chip components. A polymer is introduced into the interspaces in order to form a composite element composed of the chip components and a polymer matrix. The composite element is separated in such a way that chip devices composed of in each case one of the chip components and at least one section of the polymer matrix are formed. The invention furthermore relates to a chip device produced by means of the method.

    摘要翻译: 制造提供具有多个芯片部件的至少一个晶片的芯片器件。 将晶片或晶片分离成各个芯片组件和/或分组成芯片组件。 单个芯片组件和/或芯片组件组被施加到载体元件,使得在各个芯片组件和/或芯片组件组之间形成具有预定宽度的间隙。 将聚合物引入到间隙中以形成由芯片部件和聚合物基体组成的复合元件。 复合元件以这样的方式分离,即在每种情况下由芯片部件和聚合物基体的至少一个部分组成的芯片器件形成。 本发明还涉及通过该方法制造的芯片器件。

    MEMS component and method for production
    8.
    发明授权
    MEMS component and method for production 有权
    MEMS组件和生产方法

    公开(公告)号:US08110962B2

    公开(公告)日:2012-02-07

    申请号:US12642357

    申请日:2009-12-18

    IPC分类号: H01L29/84

    CPC分类号: H03H9/02866 H03H9/14538

    摘要: A MEMS component includes a chip that has a rear side having a low roughness of less than one tenth of the wavelength at the center frequency of an acoustic wave propagating in the component. Metallic structures for scattering bulk acoustic waves are provided on the rear side of the chip and a material of the metallic structures is acoustically matched to a material of the chip.

    摘要翻译: MEMS部件包括芯片,该芯片的后侧具有小于在部件中传播的声波的中心频率处波长的十分之一的粗糙度。 用于散射体声波的金属结构设置在芯片的后侧,并且金属结构的材料与芯片的材料声学匹配。