公开(公告)号：US06947852B2

公开(公告)日：2005-09-20

申请号：US10163172

申请日：2002-06-04

申请人： Harald F. Hess ,  Patrick Rodney Lee

发明人： Harald F. Hess ,  Patrick Rodney Lee

IPC分类号： G01H13/00 ,  G01H1/04 ,  G01L7/00 ,  G01M7/00 ,  G11B5/596 ,  G11B19/04 ,  G11B19/20 ,  G11B21/21

CPC分类号： G11B19/048 ,  G01M7/00

摘要： A system and method for assessing and potentially correcting for non-translational motion in a resonance measurement apparatus is provided. The design measures the response of an article, such as an HGA assembly including a read/write head, as well as the excitation of a shaking device, such as a head resonance tester, and computes a correction factor using either two or three point measurement. The correction factor may be evaluated by subjecting the arrangement to further vibration at varying frequencies. Measurement of the shaking device may be accomplished using an accelerometer or by optical measurement using a light beam.

摘要翻译： 提供了一种用于在谐振测量装置中评估和潜在校正非平移运动的系统和方法。 该设计测量物品的响应，例如包括读/写头的HGA组件以及诸如头共振测试仪的振动装置的激发，并且使用两点或三点测量来计算校正因子 。 校正因子可以通过使该装置在变化的频率下进一步振动来评估。 振动装置的测量可以使用加速度计或通过使用光束的光学测量来实现。

公开(公告)号：US07816655B1

公开(公告)日：2010-10-19

申请号：US10851041

申请日：2004-05-21

申请人： Harald F. Hess ,  Marian Mankos ,  David L. Adler

发明人： Harald F. Hess ,  Marian Mankos ,  David L. Adler

IPC分类号： H01J37/04

CPC分类号： H01J37/3175 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/2482 ,  H01J2237/31789

摘要： One embodiment disclosed relates to a reflective electron patterning device. The device includes a pattern on a surface. There is an electron reflective portion of the pattern and an electron non-reflective portion of the pattern. Another embodiment disclosed relates to a method of reflecting a pattern of electrons. An electron beam is generated to be incident upon a surface. The pattern is formed on the surface. The incident electrons are reflected from a reflective portion of the pattern are prevented from being reflected from a non-reflective portion of the pattern.

摘要翻译： 公开的一个实施例涉及一种反射型电子图案形成装置。 该装置包括表面上的图案。 图案的电子反射部分和图案的电子非反射部分。 所公开的另一实施例涉及一种反映电子图案的方法。 产生电子束入射到表面上。 图案形成在表面上。 从图案的反射部分反射的入射电子被防止从图案的非反射部分反射。

公开(公告)号：US06759654B1

公开(公告)日：2004-07-06

申请号：US10345696

申请日：2003-01-16

申请人： Marian Mankos ,  David A. Soltz ,  Harald F. Hess

发明人： Marian Mankos ,  David A. Soltz ,  Harald F. Hess

IPC分类号： G01N23225

CPC分类号： G11B5/455 ,  G01N23/2251 ,  G11B5/012 ,  G11B5/09 ,  G11B5/1272 ,  G11B5/3166 ,  G11B5/3193 ,  G11B27/36 ,  G11B2220/20

摘要： One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons using an electron source, biasing the specimen with respect to the electron source such that the incident electrons decelerate as a surface of the specimen is approached, and illuminating a portion of the specimen at a tilt with the beam of incident electrons. The specimen is moved under the incident beam of electrons using a movable stage of the inspection apparatus. Scattered electrons are detected to form image data of the specimen showing distinct contrast between regions of different magnetization. The movement of the specimen under the beam of incident electrons may be continuous, and data for multiple image pixels may be acquired in parallel using a time delay integrating detector.

公开(公告)号：US08462336B2

公开(公告)日：2013-06-11

申请号：US12956946

申请日：2010-11-30

申请人： Robert Eric Betzig ,  Harald F. Hess

发明人： Robert Eric Betzig ,  Harald F. Hess

IPC分类号： G01J3/30

CPC分类号： G01N21/6428 ,  G01N21/64 ,  G01N21/6458 ,  G01N21/648 ,  G01N33/582 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6439 ,  G01N2021/6441 ,  G02B21/16 ,  G02B21/367 ,  G02B27/58

摘要： An apparatus includes a position-sensitive detector to detect intensities of radiation as a function of position on the detector, and an optical system, characterized by a diffraction-limited resolution volume, adapted for imaging light emitted from activated and excited phototransformable optical labels (“PTOLs”) in a sample onto the position sensitive-detector. A first light source provides activation radiation to the sample to activate a subset of the PTOLs that are distributed in the sample with a density greater than an inverse of the diffraction-limited resolution volume of the optical system. A second light source provides excitation radiation to the sample to excite a portion of the PTOLs in the subset of the PTOLs. A controller controls one both of the activation radiation and the excitation radiation provided to the sample such that a density of PTOLs in the portion of the PTOLs is less than the inverse of the diffraction-limited resolution volume.

公开(公告)号：US07782457B2

公开(公告)日：2010-08-24

申请号：US11944274

申请日：2007-11-21

申请人： Robert Eric Betzig ,  Harald F. Hess

发明人： Robert Eric Betzig ,  Harald F. Hess

IPC分类号： G01J3/30

CPC分类号： G01N21/6428 ,  G01N21/64 ,  G01N21/6458 ,  G01N21/648 ,  G01N33/582 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6439 ,  G01N2021/6441 ,  G02B21/16 ,  G02B21/367 ,  G02B27/58

摘要： First activation radiation is provided to a sample that includes phototransformable optical labels (“PTOLs”) to activate a first subset of the PTOLs in the sample. First excitation radiation is provided to the first subset of PTOLs in the sample to excite at least some of the activated PTOLs, and radiation emitted from activated and excited PTOLs within the first subset of PTOLs is detecting with imaging optics. The first activation radiation is controlled such that the mean volume per activated PTOL in the first subset is greater than or approximately equal to a diffraction-limited resolution volume (“DLRV”) of the imaging optics.

摘要翻译： 将第一激活辐射提供给包括光变形光学标签（“PTOL”）的样品，以激活样品中PTOL的第一子集。 将第一激发辐射提供给样品中的PTOL的第一子集，以激发至少一些激活的PTOL，并且由PTOL的第一子集内的激活和激发的PTOL发射的辐射正在用成像光学元件进行检测。 控制第一激活辐射，使得第一子集中每个激活的PTOL的平均体积大于或近似等于成像光学器件的衍射限制分辨率体积（“DLRV”）。

公开(公告)号：US07626694B2

公开(公告)日：2009-12-01

申请号：US11944280

申请日：2007-11-21

申请人： Robert Eric Betzig ,  Harald F. Hess

发明人： Robert Eric Betzig ,  Harald F. Hess

IPC分类号： G01J3/30

CPC分类号： G01N21/6428 ,  G01N21/64 ,  G01N21/6458 ,  G01N21/648 ,  G01N33/582 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6439 ,  G01N2021/6441 ,  G02B21/16 ,  G02B21/367 ,  G02B27/58

摘要： First activation radiation is provided to a sample that includes fluorescent proteins (“FPs”) to activate a first subset of the FPs in the sample. First excitation radiation is provided to the first subset of FPs in the sample to excite at least some of the activated FPs, and radiation emitted from activated and excited FPs within the first subset of FPs is detecting with imaging optics. The first activation radiation is controlled such that the mean volume per activated FPs in the first subset is greater than or approximately equal to a diffraction-limited resolution volume (“DLRV”) of the imaging optics.

摘要翻译： 第一激活辐射被提供给包括荧光蛋白（“FP”）的样品，以激活样品中FP的第一子集。 第一激发辐射被提供给样本中的FP的第一子集，以激励至少一些激活的FP，并且从FP的第一子集内的激活和激发的FP发射的辐射是用成像光学器件进行检测的。 控制第一激活辐射，使得第一子集中每个激活的FP的平均体积大于或近似等于成像光学器件的衍射限制分辨率体积（“DLRV”）。

公开(公告)号：US07505143B2

公开(公告)日：2009-03-17

申请号：US11130830

申请日：2005-05-17

申请人： Harald F. Hess ,  Thomas Daniel Carr ,  Romain Sappey

发明人： Harald F. Hess ,  Thomas Daniel Carr ,  Romain Sappey

IPC分类号： G01B11/02

CPC分类号： G01B9/0207 ,  G11B5/6052

摘要： In one embodiment, a method of dynamic reference plane compensation, comprises impinging radiation from a first radiation source onto a surface of an object; generating an uncompensated measurement signal from radiation reflected from a first location on the surface and a second location; generating a compensation signal from radiation reflected from a third location and a fourth location on the surface; and generating a compensated measurement signal using the uncompensated measurement signal and the compensation signal.

摘要翻译： 在一个实施例中，动态参考平面补偿的方法包括将来自第一辐射源的辐射照射到物体的表面上; 从表面上的第一位置反射的辐射和第二位置产生未补偿的测量信号; 从表面上的第三位置和第四位置反射的辐射产生补偿信号; 以及使用所述未补偿的测量信号和所述补偿信号产生补偿的测量信号。

公开(公告)号：US06424745B1

公开(公告)日：2002-07-23

申请号：US09081469

申请日：1998-05-19

申请人： Mark Henry Hansen ,  Harald F. Hess ,  Partha Pratim Mitra ,  Gordon Albert Thomas

发明人： Mark Henry Hansen ,  Harald F. Hess ,  Partha Pratim Mitra ,  Gordon Albert Thomas

IPC分类号： G06K946

CPC分类号： G06K9/522 ,  G06K2209/17

摘要： A method and system for optically recognizing an object from a reference library of known products based on a spectrum of local radius of curvature of the object. A surface portion of an object is illuminated with a pattern of light that permits the extraction of three dimensional coordinates for a set of points on the surface portion of the object. An image data set of the surface portion of the object is then captured with a capture device that is positioned at an angular offset with respect to a source of the light. That is, the combination of the light pattern and the imaging device together generate a two dimensional captured image, from which it is possible to extract the three dimensional coordinates for the set of points on the surface portion of the object. A set of local radii of curvatures are then determined for selected data points in the image data set. A spectrum representing a distribution of the curvatures is then computed for the set of local radii of curvatures. If the data set is for the generation of a library of spectra, it is processed with a dimension reduction analysis to determine a single set of basis functions representing all of the objects and a corresponding set of basis coefficients for each different type of object. If the data set is for an unknown object, then the dimension reduction analysis and the basis functions are applied to the data set to generate an unidentified set of basis coefficients. This latter set is then statistically compared with the reference library of spectra to identify the product or at least designate the closest known products.

摘要翻译： 一种用于基于对象的局部曲率半径的光谱从已知产品的参考库光学地识别对象的方法和系统。 物体的表面部分用允许提取物体的表面部分上的一组点的三维坐标的图案来照亮。 然后利用相对于光源以角度偏移定位的捕获装置捕获对象的表面部分的图像数据集。 也就是说，光图案和成像装置的组合一起产生二维拍摄图像，从该图像可以提取对象的表面部分上的该组点的三维坐标。 然后对图像数据集中的选定数据点确定一组局部曲率半径。 然后，对于局部曲率半径的集合计算表示曲率分布的光谱。 如果数据集用于生成光谱库，则通过维数减小分析来处理数据集，以确定表示所有对象的单个基函数集合，以及每个不同类型对象的对应的一组基准系数。 如果数据集用于未知对象，则将维度减小分析和基函数应用于数据集以生成未识别的基系数集合。 然后将后一组与谱的参考文献库进行统计学比较以鉴定产物或至少指定最接近的已知产物。

公开(公告)号：US08780442B2

公开(公告)日：2014-07-15

申请号：US13051670

申请日：2011-03-18

申请人： Harald F. Hess

发明人： Harald F. Hess

IPC分类号： G02B21/00

CPC分类号： G01B9/02041 ,  G01B9/02007 ,  G01B9/02081 ,  G01B9/02097 ,  G01B9/04 ,  G01B2290/45 ,  G01B2290/55 ,  G01N21/6456 ,  G01N21/6458 ,  G02B21/0056 ,  G02B21/0076 ,  G02B21/008 ,  G02B21/14 ,  G02B21/367 ,  H04N13/214

摘要： In one embodiment, an apparatus comprises an optical system with multiple detectors and a processor. The optical system is configured to produce images of an optical source in a first dimension and a second dimension substantially orthogonal to the first dimension at each detector at a given time. Each image from the images is based on an interference of an emission from the optical source in a first direction and an emission from the optical source in a second direction different from the first direction. The processor is configured to calculate a position in a third dimension based on the images. The third dimension is substantially orthogonal to the first dimension and the second dimension.

摘要翻译： 在一个实施例中，一种装置包括具有多个检测器和处理器的光学系统。 光学系统被配置为在给定时间在每个检测器处产生第一尺寸和基本上垂直于第一尺寸的第二尺寸的光源的图像。 来自图像的每个图像基于来自第一方向上的来自光源的发射的干扰和来自与第一方向不同的第二方向的来自光源的发射。 处理器被配置为基于图像计算第三维度中的位置。 第三尺寸基本上与第一尺寸和第二尺寸正交。

公开(公告)号：US07916304B2

公开(公告)日：2011-03-29

申请号：US11961601

申请日：2007-12-20

申请人： Harald F. Hess

发明人： Harald F. Hess

IPC分类号： G01B11/02 ,  G02B21/00

CPC分类号： G01B9/02041 ,  G01B9/02007 ,  G01B9/02081 ,  G01B9/02097 ,  G01B9/04 ,  G01B2290/45 ,  G01B2290/55 ,  G01N21/6456 ,  G01N21/6458 ,  G02B21/0056 ,  G02B21/0076 ,  G02B21/008 ,  G02B21/14 ,  G02B21/367 ,  H04N13/214

摘要： In one embodiment, an apparatus comprises an optical system with multiple detectors and a processor. The optical system is configured to produce images of an optical source in a first dimension and a second dimension substantially orthogonal to the first dimension at each detector at a given time. Each image from the images is based on an interference of an emission from the optical source in a first direction and an emission from the optical source in a second direction different from the first direction. The processor is configured to calculate a position in a third dimension based on the images. The third dimension is substantially orthogonal to the first dimension and the second dimension.

摘要翻译： 在一个实施例中，一种装置包括具有多个检测器和处理器的光学系统。 光学系统被配置为在给定时间在每个检测器处产生第一尺寸和基本上垂直于第一尺寸的第二尺寸的光源的图像。 来自图像的每个图像基于来自第一方向上的来自光源的发射的干扰和来自与第一方向不同的第二方向的来自光源的发射。 处理器被配置为基于图像计算第三维度中的位置。 第三尺寸基本上与第一尺寸和第二尺寸正交。