公开(公告)号：US07350406B2

公开(公告)日：2008-04-01

申请号：US11279606

申请日：2006-04-13

申请人： Hideki Yabe ,  Yuichi Sakai ,  Yoshitatsu Kawama ,  Munehito Kumagai ,  Yasuyuki Nakaoka

发明人： Hideki Yabe ,  Yuichi Sakai ,  Yoshitatsu Kawama ,  Munehito Kumagai ,  Yasuyuki Nakaoka

IPC分类号： G01M19/00

CPC分类号： G01N3/08 ,  G01N2203/0042 ,  G01N2203/0044 ,  G01N2203/0282 ,  G01N2203/0647

摘要： A sensor chip breaking strength inspection apparatus that performs sensor chip breaking strength inspection on a semiconductor wafer on which a plurality of sensor chips having a diaphragm portion are disposed includes: a stage on which the semiconductor wafer is mounted; and a nozzle that emits a medium onto the sensor chips at a pressure equivalent to a standard breaking strength of the sensor chips.

摘要翻译： 在其上设置有多个具有膜片部分的传感器芯片的半导体晶片上执行传感器芯片断裂强度检查的传感器芯片断裂强度检查装置包括：安装半导体晶片的台阶; 以及以与传感器芯片的标准断裂强度相当的压力将介质发射到传感器芯片上的喷嘴。

公开(公告)号：US06379995B1

公开(公告)日：2002-04-30

申请号：US09695242

申请日：2000-10-25

申请人： Yoshitatsu Kawama ,  Hiroaki Morikawa ,  Katsuhiro Imada ,  Kazuyoshi Kojima

发明人： Yoshitatsu Kawama ,  Hiroaki Morikawa ,  Katsuhiro Imada ,  Kazuyoshi Kojima

IPC分类号： H01L2100

CPC分类号： H01L31/022425 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： A water-repellent layer is formed on a light-receiving surface of a solar battery prior to the formation of a coated-film electrode. The coated-film electrode is formed by screen-printing a coating solution on the water-repellent layer. The coating solution is restricted from spreading on the surface of the water-repellent layer and a narrow ridge-shaped coated-film electrode is formed. Thus, the front electrode is smaller in width and larger in height, so received light loss and transmission loss are decreased.

摘要翻译： 在形成涂膜电极之前，在太阳能电池的受光面上形成防水层。 涂布膜电极通过在拒水层上丝网印刷涂布溶液而形成。 涂布液被限制在防水层的表面上，形成窄的脊状涂膜电极。 因此，前电极的宽度较小，高度较大，所以受光损失和传输损耗降低。

公开(公告)号：US06096569A

公开(公告)日：2000-08-01

申请号：US201660

申请日：1998-12-01

申请人： Yoshinori Matsuno ,  Yoshitatsu Kawama ,  Hiroaki Morikawa ,  Satoshi Arimoto ,  Hisao Kumabe ,  Toshio Murotani

发明人： Yoshinori Matsuno ,  Yoshitatsu Kawama ,  Hiroaki Morikawa ,  Satoshi Arimoto ,  Hisao Kumabe ,  Toshio Murotani

IPC分类号： H01L31/04 ,  H01L31/042 ,  H01L31/18

CPC分类号： H01L31/0504 ,  H01L31/022441 ,  H01L31/048 ,  H01L31/0516 ,  H01L31/1892 ,  Y02E10/50

摘要： A process of forming electrodes is simplified during modularizing of a solar battery. According to the manufacturing method and the manufacturing apparatus, a thin solar battery is manufactured at a reduced cost and with a better yield. Using a robot which includes a suction chip which can handle a semiconductor film 2 without any damage which is separated from a particular substrate 1, the semiconductor films 2 are each accurately placed through a transparent resin 3 onto a glass substrate 7 which serves as a window of a solar battery, and p-type and n-type electrodes are printed at a time on the semiconductor films 2 which are arranged. Further, since a monolithic tab electrode is soldered to connect the electrodes, the manufacturing processes of the solar battery are simplified.

摘要翻译： 在太阳能电池的模块化期间简化了形成电极的工艺。 根据制造方法和制造装置，以更低的成本和更好的产量制造薄的太阳能电池。 使用包括能够处理半导体膜2而不会从特定基板1分离的任何损伤的吸引芯片的机器人，将半导体膜2分别通过透明树脂3准确地放置在作为窗口的玻璃基板7上 的太阳能电池，并且在配置的半导体膜2上一次印刷p型和n型电极。 此外，由于整体式接片电极被焊接以连接电极，所以太阳能电池的制造工艺被简化。

公开(公告)号：US5665607A

公开(公告)日：1997-09-09

申请号：US258745

申请日：1994-06-10

申请人： Yoshitatsu Kawama ,  Mikio Deguchi ,  Shigeru Mitsui ,  Hideo Naomoto ,  Satoshi Arimoto ,  Satoshi Hamamoto ,  Hiroaki Morikawa ,  Hisao Kumabe

发明人： Yoshitatsu Kawama ,  Mikio Deguchi ,  Shigeru Mitsui ,  Hideo Naomoto ,  Satoshi Arimoto ,  Satoshi Hamamoto ,  Hiroaki Morikawa ,  Hisao Kumabe

IPC分类号： H01L21/205 ,  H01L31/0224 ,  H01L31/0352 ,  H01L31/04 ,  H01L31/18 ,  H01L31/0368

CPC分类号： H01L31/1892 ,  H01L31/022425 ,  H01L31/03529 ,  H01L31/18 ,  H01L31/1804 ,  H01L31/1896 ,  Y02E10/547 ,  Y02P70/521 ,  Y10S438/977

摘要： In a method for fabricating a thin film solar cell, a thin semiconductor film serving as a power generating layer is formed on a substrate via an intermediate layer, a plurality of holes are formed penetrating through the thin semiconductor film and reaching the intermediate layer, and the intermediate layer is etched away through the through-holes, separating the thin semiconductor film from the substrate with high-efficiency. Since stress is hardly applied to the thin semiconductor film during the separation process, cracking and breaking of the semiconductor film is avoided. Further, since the surface of the substrate is maintained in good condition, the substrate can be reused, resulting in a reduction in the production cost.

摘要翻译： 在制造薄膜太阳能电池的方法中，通过中间层在基板上形成用作发电层的薄半导体膜，穿过薄半导体膜形成多个孔并到达中间层，并且 通过通孔蚀刻中间层，从而高效地将薄的半导体膜与基板分离。 由于在分离工序中难以对薄的半导体膜施加应力，因此避免了半导体膜的破裂和断裂。 此外，由于基板的表面保持良好状态，因此可以重新使用基板，导致生产成本的降低。

公开(公告)号：US6069065A

公开(公告)日：2000-05-30

申请号：US936435

申请日：1997-09-24

申请人： Satoshi Arimoto ,  Yoshitatsu Kawama

发明人： Satoshi Arimoto ,  Yoshitatsu Kawama

IPC分类号： H01L21/288 ,  H01L21/60 ,  H01L23/485 ,  H01L31/04 ,  H01L21/44

CPC分类号： H01L24/11 ,  H01L24/13 ,  H01L31/022425 ,  H01L31/0504 ,  H01L2224/13099 ,  H01L2924/0001 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01074 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/12036 ,  H01L2924/12043 ,  Y02E10/50

摘要： A semiconductor device fabrication method for simple and high-reliability electrode formation capable of increasing a bond strength with solder when performing wiring through soldering. To form an electrode on a semiconductor substrate having a junction, the pattern of an aluminum paste electrode having an opening is formed and thereafter, the pattern of a silver-aluminum paste electrode or silver paste electrode is formed on the opening so as to overlap with the pattern of the electrode. Thereby, it is possible to increase the bond strength with solder of the silver-aluminum paste electrode or silver paste electrode on the opening without being alloyed with the aluminum paste electrode. It is also possible to improve the certainty of the electrical connection between the electrodes because the overlap between the metallic paste patterns is alloyed.

摘要翻译： 一种用于在通过焊接进行布线时能够增加与焊料的结合强度的简单且高可靠性电极形成的半导体器件制造方法。 为了在具有接合点的半导体衬底上形成电极，形成具有开口的铝浆电极的图形，然后在开口上形成银 - 铝糊电极或银膏电极的图案，以与 电极的图案。 由此，可以在不与铝浆电极合金化的情况下增加与开口上的银 - 铝糊电极或银膏电极的焊料的结合强度。 由于金属膏图案之间的重叠是合金化的，所以可以提高电极之间的电连接的确定性。

公开(公告)号：US08720268B2

公开(公告)日：2014-05-13

申请号：US13070131

申请日：2011-03-23

申请人： Taiki Nakanishi ,  Hiromoto Inoue ,  Yoshitatsu Kawama

发明人： Taiki Nakanishi ,  Hiromoto Inoue ,  Yoshitatsu Kawama

IPC分类号： G01F1/68

CPC分类号： G01F1/6842 ,  G01F1/6845 ,  G01F15/14

摘要： The flow rate detection device includes a sensor element and a support. The sensor element includes: a cavity which is formed in a rear surface of a plate-shaped semiconductor silicon substrate by removing part of the plate-shaped semiconductor silicon substrate; and a thin film portion which is disposed over the cavity and includes a detecting element. The support includes a fitting portion into which the sensor element is to be disposed. The sensor element is supported to the fitting portion by an adhesive in a floating manner. A gap formed between the sensor element and the fitting portion is filled with an anti-undercurrent material. The sensor element has a texture including protrusions and depressions formed on a surface opposed to the fitting portion, and the anti-undercurrent material is brought into contact with the texture.

摘要翻译： 流量检测装置包括传感器元件和支撑件。 传感器元件包括：通过去除板状半导体硅衬底的一部分而形成在板状半导体硅衬底的后表面中的空腔; 以及设置在空腔上方并包括检测元件的薄膜部分。 该支撑件包括一个装配部分，传感器元件将被放置在其中。 传感器元件通过粘合剂以浮动方式支撑到配合部分。 传感器元件与嵌合部之间形成的间隙填充有防止欠电流材料。 传感器元件具有包括在与配合部相对的表面上形成的突起和凹陷的纹理，并且防止欠电流材料与纹理接触。

公开(公告)号：US6037088A

公开(公告)日：2000-03-14

申请号：US799570

申请日：1997-02-12

申请人： Hiroaki Morikawa ,  Yoshitatsu Kawama ,  Satoshi Arimoto ,  Yukio Shinoda ,  Takashi Ishihara

发明人： Hiroaki Morikawa ,  Yoshitatsu Kawama ,  Satoshi Arimoto ,  Yukio Shinoda ,  Takashi Ishihara

IPC分类号： H01L31/04 ,  H01L31/0203

CPC分类号： H01L31/022458 ,  H01L31/048 ,  H01L31/0682 ,  Y02E10/547

摘要： A method of making the solar cells includes a step of forming a first electroconductive region on a first surface of a semiconductor substrate having through-holes defined therein and also having an emitter layer formed thereon, a step of disposing the semiconductor substrate on a transparent substrate with a second surface of the semiconductor substrate opposite to the first surface thereof confronting the transparent substrate through a resinous material, a step of bonding the semiconductor substrate and the transparent substrate together by means of the resinous material, and a step of forming a second electroconductive region on the first electroconductive region.

摘要翻译： 制造太阳能电池的方法包括在其上形成有通孔的半导体衬底的第一表面上形成第一导电区域并且还具有形成在其上的发射极层的步骤，将半导体衬底设置在透明衬底上 其中半导体衬底的与通过树脂材料面对透明衬底的第一表面相对的第二表面，通过树脂材料将半导体衬底和透明衬底接合在一起的步骤，以及形成第二导电 区域在第一导电区域上。

公开(公告)号：US5725006A

公开(公告)日：1998-03-10

申请号：US563420

申请日：1995-11-28

申请人： Yoshitatsu Kawama ,  Takashi Ishihara ,  Satoshi Arimoto ,  Hiroaki Morikawa ,  Akihiro Takami ,  Yoshinori Matsuno ,  Hideo Naomoto ,  Yoichiro Nishimoto

发明人： Yoshitatsu Kawama ,  Takashi Ishihara ,  Satoshi Arimoto ,  Hiroaki Morikawa ,  Akihiro Takami ,  Yoshinori Matsuno ,  Hideo Naomoto ,  Yoichiro Nishimoto

IPC分类号： E04D13/18 ,  G09F7/00 ,  H01L31/0236 ,  H01L31/0352 ,  H01L31/04 ,  H01L31/042 ,  H01L31/048 ,  H01L31/052

CPC分类号： H01L31/03529 ,  H01L31/0236 ,  H01L31/048 ,  Y02E10/50

摘要： A solar battery cell, solar battery module, and solar battery module group achieving high product value by enabling the display of surface patterns without reducing the power generating efficiency of the solar battery cells are provided. The direction and/or reflectance of reflected light incident to the surface of the solar battery cell are varied by controlling the distribution of the rough surface structure imparted to the solar battery cell surface. The direction or reflectance of reflected light incident to the surface of the solar battery cell is changed in part depending upon the part of the semiconductor solar battery cell surface to which the light is incident. Semiconductor solar battery cells with high product value can therefore be achieved because patterns with strong visual impact can be displayed and easily recognized without reducing the power generation efficiency of the solar battery cell.

摘要翻译： 提供了一种能够在不降低太阳能电池单元的发电效率的情况下实现表面图案的显示而实现高产品价值的太阳能电池单元，太阳能电池模块和太阳能电池模块组。 通过控制赋予太阳能电池单元表面的粗糙表面结构的分布来改变入射到太阳能电池单元的表面的反射光的方向和/或反射率。 入射到太阳能电池单元的表面的反射光的方向或反射率部分地取决于光入射的半导体太阳能电池单元表面的部分。 因此，可以在不降低太阳能电池单元的发电效率的情况下显示并容易地识别具有强烈的视觉冲击的图案，从而实现具有高产品值的半导体太阳能电池单元。