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公开(公告)号：US06456382B2
公开(公告)日：2002-09-24
申请号：US09870734
申请日：2001-06-01
IPC分类号： G01B902
CPC分类号： G01M11/0271 , G01B9/02039 , G01B9/02057 , G01B9/02072 , G01B11/2441 , G01M11/0214 , G01M11/025 , G01M11/0264 , G03F7/706
摘要： A method of manufacturing a projection optical system (37) for projecting a pattern from a reticle to a photosensitive substrate, comprising a surface-shape-measuring step wherein the shape of an optical test surface (38) of an optical element (36) which is a component in the projection optical system is measured by causing interference between light from the optical surface (38) and light from an aspheric reference surface (70) while the optical test surface (38) and said reference surface (70) are held in integral fashion in close mutual proximity. A wavefront-aberration-measuring step is included, wherein the optical element is assembled in the projection optical system and the wavefront aberration of the projection optical system is measured. A surface correction calculation step is also included wherein the amount by which the shape of the optical test surface should be corrected is calculated based on wavefront aberration data obtained at the wavefront-aberration-measuring step and surface shape data obtained from the surface-shape-measuring step. The method also includes a surface shape correction step wherein the shape of the optical test surface is corrected based on calculation performed at the surface correction calculation step. Surface shape measuring interferometer systems and wavefront-aberration-measuring interferometer systems (22J-22Q) used in performing the manufacturing method are also disclosed.
摘要翻译： 一种制造用于将图案从掩模版投影到感光基板的投影光学系统（37）的方法，包括表面形状测量步骤，其中光学元件（36）的光学测试表面（38）的形状 通过在将光学测试表面（38）和所述参考表面（70）保持在其中的同时来自光学表面（38）的光和来自非球面参考表面（70）的光之间的干涉来测量投影光学系统中的分量。 一体化的时尚紧密相邻。 包括波前像差测量步骤，其中光学元件组装在投影光学系统中，并且测量投影光学系统的波前像差。 还包括表面校正计算步骤，其中根据在波前像差测量步骤获得的波前像差数据和从表面形状测量步骤获得的表面形状数据来计算光学测试表面的形状应被校正的量， 测量步骤。 该方法还包括表面形状校正步骤，其中基于在表面校正计算步骤执行的计算来校正光学测试表面的形状。 还公开了用于执行制造方法的表面形状测量干涉仪系统和波前像差测量干涉仪系统（22J-22Q）。
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2.发明授权Interferometric apparatus and methods for measuring surface topography of a test surface 有权用于测量测试表面的表面形貌的干涉仪和方法公开(公告)号：US06344898B1
公开(公告)日：2002-02-05
申请号：US09396491
申请日：1999-09-14
IPC分类号： G01B902
CPC分类号： G01B9/02039 , G01B9/02007 , G01B9/02072 , G01B11/255 , G01J9/02
摘要： Apparatus and methods are disclosed for measuring the surface topography of a test surface, such as a spherical or aspherical surface of a refractive or reflective optical element. The test surface is measured by detecting the state of interference fringes generated by interference of a reference light beam and a measurement light beam that interacts (e.g., reflects from) the test surface. The reference and measurement beams are produced by a point light source having a reflective surface. The point light source is disposed between a source of input light and the test surface. The measurement beam (after interacting with the test surface) and the reference beam are caused to interfere with each other to produce a first interference-fringe state. The distance between the point light source and the test surface can be changed between production of the first interference-fringe state and production of a second interference-fringe state. The profile of the test surface is determined by analyzing the resulting interference fringes. A null element can be used to convert a spherical wavefront of the measurement beam into an aspherical wavefront corresponding to the aspherical test surface, or to convert an aspherical wavefront generated by reflection of a spherical wavefront from an aspherical test surface into a spherical or planar wavefront.
摘要翻译： 公开了用于测量测试表面（例如折射或反射光学元件的球面或非球面）的表面形貌的装置和方法。 通过检测由参考光束和与测试表面相互作用（例如反射）的测量光束产生的干涉条纹的状态来测量测试表面。 参考和测量光束由具有反射表面的点光源产生。 点光源设置在输入光源和测试表面之间。 使测量光束（与测试表面相互作用）和参考光束相互干涉以产生第一干涉条纹状态。 可以在产生第一干涉条纹状态和产生第二干涉条纹状态之间改变点光源与测试表面之间的距离。 通过分析所得到的干涉条纹来确定测试表面的轮廓。 可以使用空元素将测量光束的球面波前转换成对应于非球面测试表面的非球面波前，或者将通过球面波阵面的反射产生的非球面波阵面从非球面测试表面转换成球面或平面波阵面 。
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公开(公告)号：US5986760A
公开(公告)日：1999-11-16
申请号：US97578
申请日：1998-06-12
申请人： Shigeru Nakayama , Takashi Genma , Tetsuji Onuki , Masami Ebi , Hajime Ichikawa
发明人： Shigeru Nakayama , Takashi Genma , Tetsuji Onuki , Masami Ebi , Hajime Ichikawa
CPC分类号： G01M11/025 , G01B11/2441 , G01B11/255 , G01M11/0271
摘要： A method of measuring a surface shape of a target surface, and a lens manufacturing process for manufacturing a lens having a surface shape figured to high-precision. The method and process includes the steps of first, interferometrically measuring the surface shape of the target surface or the lens surface. Then second, measuring a surface shape of a prototype target surface. Then third, determining a rotationally symmetric error component of the difference between the target surface shape or the lens surface shape and the prototype target surface shape. Then fourth, expressing the rotationally symmetric error as a sum of two components, one being slowly varying and the other being a remainder. The slowly varying component is at least determined by performing the third step, while the remainder component is determined by performing the first step.
摘要翻译： 测量目标表面的表面形状的方法以及制造具有高精度的表面形状的透镜的透镜制造工艺。 该方法和方法包括以下步骤：首先干涉测量目标表面或透镜表面的表面形状。 然后第二，测量原型目标表面的表面形状。 然后，第三，确定目标表面形状或透镜表面形状与原型目标表面形状之间的差异的旋转对称误差分量。 然后第四，将旋转对称误差表示为两个分量的和，一个是缓慢变化的，另一个是余数。 至少通过执行第三步来确定缓慢变化的分量，而通过执行第一步来确定剩余分量。
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4.发明申请TRANSPARENT POLYCRYSTALLINE SPINEL SUBSTRATE AND METHOD OF PRODUCING SAME, AND OPTICAL ARTICLE USING SAID SUBSTRATE 审中-公开透明多晶弹簧基板及其制造方法，以及使用该基板的光学件公开(公告)号：US20100247812A1
公开(公告)日：2010-09-30
申请号：US12744039
申请日：2008-11-21
CPC分类号： G03B21/10 , C04B35/443 , C04B2235/9661 , H04N9/3105 , Y10T428/1095
摘要： There is provided a transparent polycrystalline spinel substrate characterized in having a transmittance of 0.005% or less in a crossed Nicol system at a thickness of 1 mm and a wavelength of 450 nm, which does not generate image blurring or light-dark change when used in optical products. There is also provided a method for producing the transparent polycrystalline spinel substrate comprising a step for preparing a spinel powder, a step for molding the spinel powder and producing a spinel formed body, a step for sintering the spinel formed body and producing a spinel sintered body, and a step for subjecting the spinel sintered body to hot isostatic pressing (HIP) and producing a spinel polycrystalline body. There is further provided a liquid crystal projector and a receiver for rear-projection television having the aforementioned transparent polycrystalline spinel substrate.
摘要翻译： 提供了一种透明多晶尖晶石基材，其特征在于在1mm厚度和450nm波长的正交尼科耳系统中透光率为0.005％以下，当使用时不产生图像模糊或明暗变化 光学产品。 还提供了一种制造透明多晶尖晶石基材的方法，包括制备尖晶石粉末的步骤，尖晶石粉末成型步骤和尖晶石成形体的制造步骤，用于烧结尖晶石成形体并制备尖晶石烧结体 以及对尖晶石烧结体进行热等静压（HIP）并制造尖晶石多晶体的工序。 此外，还提供了具有上述透明多晶尖晶石基板的背投电视的液晶投影仪和接收机。
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5.发明授权公开(公告)号：US07741238B2
公开(公告)日：2010-06-22
申请号：US11910229
申请日：2006-03-28
IPC分类号： C04B35/443
CPC分类号： G02B1/02 , C04B35/443 , C04B35/6455 , C04B41/009 , C04B41/5055 , C04B41/87 , C04B2111/80 , C04B2235/5409 , C04B2235/604 , C04B2235/608 , C04B2235/658 , C04B2235/6581 , C04B2235/661 , C04B2235/786 , C04B2235/79 , C04B2235/9607 , C04B2235/9653
摘要： A low-cost spinel sintered body having small polarization and high heat-conductivity is provided. Also, a useful light-transmitting window and light-transmitting lens for light-emitting device is provided. For such purpose, the spinel sintered body of the present invention has a contrast ratio of 300 or more in the case of white light, where the contrast ratio is defined as the quotient obtained by dividing an amount of transmitting light in the case of being arranged between two polarizing plates, the polarizing directions of the two polarizing plates being parallel to each other, by an amount of transmitting light in the case of being arranged between two polarizing plates, the polarizing directions of the two polarizing plates being orthogonal to each other.
摘要翻译： 提供了具有小偏振和高导热性的低成本尖晶石烧结体。 另外，提供了一种用于发光装置的有用的透光窗和透光透镜。 为此目的，本发明的尖晶石烧结体在白光的情况下具有300以上的对比度，其中对比度被定义为在布置的情况下将透射光量除以所得到的商 在两个偏振片之间，两个偏振片的偏振方向彼此平行，在两个偏振片之间布置的情况下透射光的量，两个偏振片的偏振方向彼此正交。
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公开(公告)号：US06952819B1
公开(公告)日：2005-10-04
申请号：US09667802
申请日：2000-09-22
CPC分类号： G06Q10/00 , Y10S707/99943
摘要： A computer-readable recording medium in which basic-administrative-tasks software programs are recorded, according to this invention provides a module for data-writing processing into a database in a manner so as to maintain compatibility of data between tables, even when customized data is included in a table. The module for writing data is equipped with both a data-writing processing functions group corresponding to the customization, and a writing means for simultaneously updating both a customizing region and a core region in the database memory on a disk.
摘要翻译： 根据本发明的根据本发明的记录基本管理任务软件程序的计算机可读记录介质提供了一种用于以数据的形式进行数据写入处理的模块，以便保持数据在表之间的兼容性，即使在定制数据 包含在表格中。 用于写入数据的模块配备有与定制相对应的数据写入处理功能组，以及用于同时更新盘上的数据库存储器中的定制区域和核心区域的写入装置。
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公开(公告)号：US5808801A
公开(公告)日：1998-09-15
申请号：US687616
申请日：1996-08-08
申请人： Shigeru Nakayama , Kenji Tozaki
发明人： Shigeru Nakayama , Kenji Tozaki
CPC分类号： H04N9/3141 , G02B27/0172 , G02B2027/011 , G02B2027/0178
摘要： A compact head mount display where an image display means and a magnifying reflecting mirror are substantially symmetrically arranged to a combiner, so that an image displayed on the display means and an outside image can be observed in a magnified and superimposed manner. The magnifying reflecting mirror is arranged as a Fresnel reflecting mirror so that the display becomes more compact. An optical system for use in the head mount display where the magnifying reflecting mirror is arranged as an aspherical surface and the shape of the aspherical surface is so designed that aberrations can be suitably corrected.
摘要翻译： PCT No.PCT / JP95 / 02512 Sec。 371日期：1996年8月8日 102（e）日期1996年8月8日PCT 1995年12月7日PCT PCT。 WO96 / 18126 PCT出版物 日期1996年6月13日一种紧凑的头戴式显示器，其中图像显示装置和放大反射镜基本对称地布置到组合器，使得可以以放大和叠加的方式观察显示在显示装置上的图像和外部图像 。 放大反射镜被布置为菲涅耳反射镜，使得显示器变得更加紧凑。 一种用于头戴式显示器的光学系统，其中放大反射镜被布置为非球面，并且非球面的形状被设计成可以适当地校正像差。
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公开(公告)号：US20120293644A1
公开(公告)日：2012-11-22
申请号：US13359164
申请日：2012-01-26
IPC分类号： H04N7/18
CPC分类号： G02B21/14 , G02B21/365 , G02B21/367
摘要： A phase-contrast microscope system includes: an illumination optical system that illuminates a specimen with an illumination light from a light source; an imaging optical system that forms an image of the specimen from a light from the specimen; a first spatial modulation element that is disposed in a position of a pupil of the imaging optical system and changes an amplitude transmittance distribution of the light from the specimen; an image sensor that detects the image of the specimen by the imaging optical system and outputs a picture signal; a calculation section that calculates the amplitude transmittance distribution of the light from the specimen appropriate for observing the specimen on the basis of the output data detected by the image sensor and the amplitude transmittance distribution of the light from the specimen formed by the first spatial modulation element.
摘要翻译： 相差显微镜系统包括：照明光学系统，其利用来自光源的照明光照射样本; 成像光学系统，其从来自所述样本的光形成所述样本的图像; 第一空间调制元件，其设置在成像光学系统的光瞳的位置，并且改变来自所述样本的光的透射率分布; 图像传感器，其通过所述成像光学系统检测所述检体的图像，并输出图像信号; 计算部，其根据由图像传感器检测的输出数据和来自第一空间调制元件形成的试样的光的振幅透射率分布，计算适合于观察样本的样本的光的透射率分布 。
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9.发明申请Input/output screen creating system, input/output screen creating method, and work processing system 审中-公开输入/输出画面创建系统，输入/输出画面创建方法和作业处理系统公开(公告)号：US20060031747A1
公开(公告)日：2006-02-09
申请号：US11022865
申请日：2004-12-28
申请人： Shigefumi Wada , Shigeru Nakayama , Shigekazu Kurozu , Takeshi Haramoto , Takahiro Suzuki , Tatsuhito Ryu , Kazufumi Naito
发明人： Shigefumi Wada , Shigeru Nakayama , Shigekazu Kurozu , Takeshi Haramoto , Takahiro Suzuki , Tatsuhito Ryu , Kazufumi Naito
IPC分类号： G06F17/24
CPC分类号： G06Q10/10 , G06F17/212 , G06F17/243
摘要： An input/output screen creating system, which creates an input/output screen to be used in a work processing system, has an object storage unit, an input/output screen creating unit, a grid display unit, and an input/output screen storage unit. The object storage unit stores a plurality of objects capable of being arranged on the input/output screen therein. The input/output screen creating unit displays a form for creating and editing the input/output screen, and accepts an input of an arrangement of the objects stored in the object on the form. The grid display unit superposes and arranges grids having the size for a two-byte or one-byte character on a canvas to be a job area on the input/output screen provided to the form. The input/output screen storage unit stores the input/output screen having the objects arranged with them being related with the grids therein.
摘要翻译： 一种输入/输出画面生成系统，其创建用于工作处理系统的输入/输出画面，具有对象存储单元，输入/输出画面创建单元，网格显示单元和输入/输出画面存储 单元。 对象存储单元存储能够布置在其中的输入/输出屏幕上的多个对象。 输入/输出画面创建单元显示用于创建和编辑输入/输出画面的表单，并接受在表单上存储在对象中的对象的排列的输入。 网格显示单元将画布上具有两字节或单字节字符大小的网格叠加并排列为提供给表单的输入/输出屏幕上的作业区域。 输入/输出屏幕存储单元存储其中布置有对象的输入/输出屏幕与其中的网格相关。
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公开(公告)号：US5434112A
公开(公告)日：1995-07-18
申请号：US183822
申请日：1994-01-21
申请人： Shigetomo Matsui , Hiroyuki Matsumura , Yoshikazu Ikemoto , Yasuhiro Kumon , Shigeru Nakayama , Keiji Tsujita , Keisuke Fukunaga , Nobuhiro Kuribayashi , Kenichi Wakana
发明人： Shigetomo Matsui , Hiroyuki Matsumura , Yoshikazu Ikemoto , Yasuhiro Kumon , Shigeru Nakayama , Keiji Tsujita , Keisuke Fukunaga , Nobuhiro Kuribayashi , Kenichi Wakana
CPC分类号： B24C5/04 , B05B1/00 , Y10S239/19
摘要： A high pressure injection nozzle member is formed of a super hard alloy or a hard material of carbide series mainly composing of a tungsten carbide as, wherein the tungsten carbon is composed of grains each having a diameter of less than 1 .mu.m. At least one kind of carbide or solid solution of carbide selected from Ti, Ta, V, Cr, Mo, Hf, or Zr by a weight % of less than 10.0% is added. A binding material essentially consisting of at least one of iron group elements by weight % of 0.2 to 2.0% may be further added. The super hard alloy or a hard sintered material has a high abrasion proof property and has a hardness more than about HRA 94.0. Nitride or nitride solid solution may be utilized in place of carbide or carbide solid solution. The nozzle member is particularly suitable for an abrasive water jet.
摘要翻译： 高压喷嘴构件由超硬合金或主要由碳化钨构成的碳化物系硬质材料形成，其中钨碳由直径小于1μm的晶粒构成。 添加至少一种选自Ti，Ta，V，Cr，Mo，Hf或Zr的碳化物或固溶体，重量％小于10.0％。 可以进一步添加基本上由至少一种铁族元素组成的结合材料，其重量％为0.2-2.0％。 超硬合金或硬质烧结材料具有高耐磨性，硬度大于约HRA 94.0。 可以使用氮化物或氮化物固溶体代替碳化物或碳化物固溶体。 喷嘴构件特别适用于磨料水射流。
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