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    Method and apparatus for sputtering
    1.
    发明授权
    Method and apparatus for sputtering 失效
    溅射的方法和装置

    公开(公告)号：US4610770A

    公开(公告)日：1986-09-09

    申请号：US686005

    申请日：1984-12-24

    申请人： Hiroshi Saito ,  Hideki Tateishi ,  Shigeru Kobayashi ,  Susumu Aiuchi ,  Yasumichi Suzuki ,  Masao Sakata ,  Hideaki Shimamura ,  Tsuneaki Kamei

    发明人： Hiroshi Saito ,  Hideki Tateishi ,  Shigeru Kobayashi ,  Susumu Aiuchi ,  Yasumichi Suzuki ,  Masao Sakata ,  Hideaki Shimamura ,  Tsuneaki Kamei

    IPC分类号： C23C14/36 ,  C23C14/34 ,  C23C14/35 ,  C23C14/46 ,  H01J37/34 ,  H01L21/203 ,  H01L21/31

    CPC分类号： H01J37/32192 ,  C23C14/34 ,  C23C14/46 ,  H01J37/3266 ,  H01J37/34

    摘要： A pair of magnets for producing a mirror magnetic field are disposed outside of an electrode structure carrying a target. Microwaves from a microwave source are introduced toward and into a space defined by the mirror magnetic field for generating high-density plasma. While maintaining this high-density plasma over a wide area of the surface of the target, an electric field substantially perpendicular to the surface of the target is applied for sputtering of the target material. The optimized conditions for plasma generation can be selected when the high-density plasma formed outside of a processing chamber is guided to migrate toward an area above the target in the processing chamber. Capability of sputtering of the material from the entire surface of the target increases the rate of film deposition on a substrate and improves the target utilization rate (the quantity of the material deposited on the substrate/the usable area of the target).

    摘要翻译： 用于产生镜面磁场的一对磁体设置在承载目标的电极结构的外侧。 来自微波源的微波被引入并由用于产生高密度等离子体的反射镜磁场限定的空间中。 当在靶的表面的较宽区域上保持这种高密度等离子体时，施加基本上垂直于靶的表面的电场，以溅射目标材料。 当在处理室外部形成的高密度等离子体被引导以朝向处理室内的目标区域迁移时，可以选择等离子体产生的优化条件。 从靶的整个表面溅射材料的能力增加了基板上的膜沉积速率，并提高了目标利用率（沉积在基板上的材料的量/目标的可用面积）。

    Sputtering process and an apparatus for carrying out the same
    3.
    发明授权
    Sputtering process and an apparatus for carrying out the same 失效
    溅射过程和用于进行溅射的设备

    公开(公告)号：US4963239A

    公开(公告)日：1990-10-16

    申请号：US301468

    申请日：1989-01-26

    申请人： Hideaki Shimamura ,  Masao Sakata ,  Shigeru Kobayashi ,  Yuji Yoneoka ,  Tsuneaki Kamei ,  Tsuneyoshi Kawahito ,  Shoyo Fujita ,  Hiroshi Nakamura

    发明人： Hideaki Shimamura ,  Masao Sakata ,  Shigeru Kobayashi ,  Yuji Yoneoka ,  Tsuneaki Kamei ,  Tsuneyoshi Kawahito ,  Shoyo Fujita ,  Hiroshi Nakamura

    IPC分类号： C23C14/34 ,  H01J37/34

    CPC分类号： C23C14/345 ,  C23C14/34 ,  H01J37/32706 ,  H01J37/34

    摘要： A sputtering process of a substrate biasing system and an apparatus for carrying out the same, capable of forming a film in satisfactory surface coverage over stepped underlying layer. The present invention solves problems in the quality of films formed by the conventional sputtering process of a substrate biasing system by regulating the bias potential of a substrate on which a film is to be formed so that the kinetic energy of ions of a sputtering gas falling on the substrate is varied periodically. The bias potential is regulated by periodically varying the amplitude of the output of a radio frequency (or dc) bias power supply or by changing the duty factor of a voltage pulse stream of the output of the radio frequency (or dc) bias power supply.

    摘要翻译： 衬底偏压系统的溅射工艺和用于执行衬底偏压系统的设备，能够在阶梯式底层上形成令人满意的表面覆盖的膜。 本发明解决了通过调整衬底偏压系统的常规溅射工艺形成的膜的质量的问题，通过调节其上将形成膜的衬底的偏置电位，使得溅射气体的离子的动能落在 基板周期性变化。 通过周期性地改变射频（或直流）偏置电源的输出的幅度或通过改变射频（或直流）偏压电源的输出的电压脉冲流的占空因数来调节偏置电位。

    Sputtering apparatus with film forming directivity
    4.
    发明授权
    Sputtering apparatus with film forming directivity 失效
    具有成膜方向性的溅射装置

    公开(公告)号：US4724060A

    公开(公告)日：1988-02-09

    申请号：US797966

    申请日：1985-11-14

    申请人： Masao Sakata ,  Hideaki Shimamura ,  Shigeru Kobayashi ,  Tsuneyoshi Kawahito ,  Tsuneaki Kamei ,  Katsuo Abe

    发明人： Masao Sakata ,  Hideaki Shimamura ,  Shigeru Kobayashi ,  Tsuneyoshi Kawahito ,  Tsuneaki Kamei ,  Katsuo Abe

    IPC分类号： C23C14/34 ,  H01J37/34

    CPC分类号： H01J37/3423 ,  H01J37/3408 ,  H01J2237/3327

    摘要： A target for use in a sputtering technique usually has a flat structure. The present invention has succeeded in endowing sputtering film formation with a directivity in such a way that the surface of the target is provided with recesses thereby to limit the flight directions of sputtering particles.Alternatively, the directivity can be bestowed by disposing a frame between a substrate to be formed with a film and the flat sputtering target. This measure requires auxiliary means in which a wall is provided at the outer periphery of the sputtering target so as to effectively utilize a plasma.The present invention actually formed films by the use of the above technique, and has verified the effect thereof. Wide applications are expected in technical fields wherein after forming a microscopic pattern, one or more films need to be further formed.

    摘要翻译： 用于溅射技术的靶通常具有平坦的结构。 本发明成功地赋予溅射成膜的方向性，使得靶的表面设置有凹部，从而限制溅射颗粒的飞行方向。 或者，可以通过在要形成的基板和薄膜之间设置框架来赋予方向性。 该措施需要辅助装置，其中在溅射靶的外周设置壁，以有效地利用等离子体。 本发明通过使用上述技术实际形成膜，并且已经验证了其效果。 预期在技术领域中有广泛的应用，其中在形成微观图案之后，需要进一步形成一个或多个膜。

    Lane Judgement Equipment and Navigation System
    6.
    发明申请
    Lane Judgement Equipment and Navigation System 审中-公开
    车道判断设备和导航系统

    公开(公告)号：US20100332127A1

    公开(公告)日：2010-12-30

    申请号：US12826159

    申请日：2010-06-29

    申请人： Masato Imai ,  Masatoshi Hoshino ,  Masao Sakata

    发明人： Masato Imai ,  Masatoshi Hoshino ,  Masao Sakata

    IPC分类号： G01C21/26

    CPC分类号： B60W30/12 ,  B60W40/072 ,  B60W40/076 ,  B60W2520/10 ,  B60W2550/141 ,  B60W2550/402

    摘要： There is provided lane judgement equipment that is capable of quickly and accurately judging the lane that a vehicle is traveling in on a road with plural lanes in each direction. Lane judgement equipment 100 detects reference positions 402, 502 that are set in advance at an entrance to road B with plural lanes in each direction, and judges which of lanes B1-B3 of road B with plural lanes in each direction a vehicle 400 is traveling in based on entry distance L from those reference positions 402, 502 and on map information.

    摘要翻译： 提供车道判断装置，其能够快速准确地判断车辆在具有多个车道的道路上行进的车道。 车道判断装置100检测在每个方向上具有多个车道的道路B的入口处预先设定的基准位置402,502，并且判断在车辆400行驶的各方向上具有多个车道的道路B的车道B1-B3 基于距离这些参考位置402,502的入口距离L以及地图信息。

    Navigation device and lane guide method
    8.
    发明授权
    Navigation device and lane guide method 有权
    导航装置和导航方法

    公开(公告)号：US08060303B2

    公开(公告)日：2011-11-15

    申请号：US12174834

    申请日：2008-07-17

    申请人： Mikio Bando ,  Masao Sakata

    发明人： Mikio Bando ,  Masao Sakata

    IPC分类号： G08G1/0968 ,  G01C21/36

    CPC分类号： G01C21/36 ,  G08G1/096716 ,  G08G1/096758 ,  G08G1/096775 ,  G08G1/096791 ,  G08G1/096827 ,  G08G1/096844 ,  G08G1/096861 ,  G08G1/167

    摘要： A vehicle is guided to a lane that the vehicle should run, even if map data do not include lane information of a tollgate.A navigation processing part 100 makes a vehicle running path calculation part 112 calculate a running path of the vehicle from a point of a prescribed distance from the tollgate until an ETC receipt signal receiving part 114 receives an ETC receipt signal. Then, the navigation processing part 100 calculates an approximate position of an ETC lane on the basis of the running path, and accumulates the calculated approximate position in a storage unit. Further, when the vehicle approaches to the tollgate within a prescribed distance from the tollgate, the navigation processing part 100 obtains the approximate position of the ETC lane of the tollgate from the storage unit, and displays the approximate position through a display processing part 106, to guide the user to the ETC lane.

    摘要翻译： 即使地图数据不包括收费站的车道信息，车辆也被引导到车辆应该行驶的车道。 导航处理部100使车辆行驶路径计算部112从收费站的规定距离的点算出车辆的行驶路径，直到ETC接收信号接收部114接收到ETC接收信号。 然后，导航处理部100基于运行路径计算ETC车道的近似位置，并将计算出的近似位置累加在存储部中。 此外，当车辆从收费站接近收费站一定距离时，导航处理部分100从存储单元获取收费站的ETC车道的大致位置，并通过显示处理部分106显示大致位置， 引导用户到ETC车道。

    Vehicle speed control device, method of determining target speed by using the device, and program executing the method
    9.
    发明授权
    Vehicle speed control device, method of determining target speed by using the device, and program executing the method 有权
    车速控制装置，使用该装置确定目标速度的方法以及执行该方法的程序

    公开(公告)号：US08005602B2

    公开(公告)日：2011-08-23

    申请号：US11655196

    申请日：2007-01-19

    申请人： Mikio Bando ,  Takeshi Inoue ,  Koichiro Tanikoshi ,  Masao Sakata ,  Hiroshi Sakamoto ,  Masato Imai

    发明人： Mikio Bando ,  Takeshi Inoue ,  Koichiro Tanikoshi ,  Masao Sakata ,  Hiroshi Sakamoto ,  Masato Imai

    IPC分类号： B60T8/32 ,  G01C21/00

    CPC分类号： B60T7/22 ,  B60T2210/36 ,  B60W10/04 ,  B60W30/16 ,  B60W40/02 ,  B60W40/105 ,  B60W2550/14 ,  B60W2550/402 ,  B60W2720/106

    摘要： The present invention relates to a vehicle speed control device for controlling a speed of a vehicle. The vehicle speed control device includes a current location error estimation section for extracting area attribute information from the map information, for producing a location error probability distribution, a target speed calculation section for receiving the target speed correction instruction, for accessing preset data that shows an acceleration or a gradient of an acceleration which allows a driver not to feel uncomfortable, and for computing target speed values at nodes over the distance in such a way that the target speed values create a continuous curve, and a speed control section for sensing a speed of a vehicle, and for controlling a driving torque of the vehicle so that the sensed speed traces the continuous curve composed of the target speed values.

    摘要翻译： 本发明涉及一种用于控制车辆速度的车速控制装置。 车速控制装置包括：当前位置误差估计部分，用于从地图信息中提取区域属性信息，用于产生位置误差概率分布;目标速度计算部分，用于接收目标速度校正指令，用于访问显示一个 加速度或加速度的梯度，其允许驾驶员不感到不舒服，并且用于以目标速度值产生连续曲线的方式计算距离上的节点处的目标速度值;以及速度控制部分，用于感测速度 并且用于控制车辆的驱动扭矩，使得感测的速度跟踪由目标速度值组成的连续曲线。

    Lane Determining Device and Navigation System
    10.
    发明申请
    Lane Determining Device and Navigation System 有权
    车道确定装置和导航系统

    公开(公告)号：US20110169958A1

    公开(公告)日：2011-07-14

    申请号：US13055603

    申请日：2009-09-25

    申请人： Masato Imai ,  Masatoshi Hoshino ,  Masao Sakata

    发明人： Masato Imai ,  Masatoshi Hoshino ,  Masao Sakata

    IPC分类号： H04N7/18 ,  G06F17/00 ,  G01C21/00

    CPC分类号： B60W30/12 ,  G01C21/3658 ,  G08G1/167

    摘要： Provided is a lane determining device that is capable of quickly and accurately determining the lane traveled by a host vehicle traveling on a road with a plurality of lanes in each direction. A lane determining device that determines the lane traveled by the host vehicle traveling on a road with a plurality of lanes in each direction comprises: road geometry obtaining means that obtains road geometry; imaging means that images the road; division line recognition means that recognizes a division line from an image imaged by the imaging means; first path computation means that computes a path of the host vehicle by repeatedly computing a distance from the division line recognized by the division line recognition means to the imaging means; second path computation means that computes a path of the host vehicle based on the road geometry obtained by the road geometry obtaining means and on autonomous navigation; third path computation means that computes a path of the host vehicle based on a first path computed by the first path computation means and on a second path computed by the second path computation means; and traveled lane determination means that determines the lane traveled by the host vehicle based on a third path computed by the third path computation means.

    摘要翻译： 提供一种车道确定装置，其能够快速且准确地确定在每个方向上具有多个车道的在道路上行驶的主车辆行驶的车道。 确定在每个方向上具有多个车道的道路上行驶的主车辆行驶的车道的车道确定装置包括：获得道路几何形状的道路几何获取装置; 成像意味着道路图像; 分割线识别装置识别由成像装置成像的图像的分割线; 第一路径计算装置，通过重复地计算从分割线识别装置识别的分割线到成像装置的距离来计算主车辆的路径; 第二路径计算装置，基于由道路几何获取装置获得的道路几何和自主导航来计算主车辆的路径; 第三路径计算装置，基于由第一路径计算装置计算的第一路径和由第二路径计算装置计算的第二路径来计算主车辆的路径; 以及行驶车道确定装置，其基于由第三路径计算装置计算出的第三路径来确定主车辆行驶的车道。