公开(公告)号：US07737413B2

公开(公告)日：2010-06-15

申请号：US12183622

申请日：2008-07-31

申请人： Hiroyuki Ito ,  Yuko Sasaki ,  Yoshiya Higuchi ,  Takeshi Kawasaki

发明人： Hiroyuki Ito ,  Yuko Sasaki ,  Yoshiya Higuchi ,  Takeshi Kawasaki

IPC分类号： G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

摘要： In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

公开(公告)号：US07872240B2

公开(公告)日：2011-01-18

申请号：US12183622

申请日：2008-07-31

申请人： Hiroyuki Ito ,  Yuko Sasaki ,  Yoshiya Higuchi ,  Takeshi Kawasaki

发明人： Hiroyuki Ito ,  Yuko Sasaki ,  Yoshiya Higuchi ,  Takeshi Kawasaki

IPC分类号： G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J49/42

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1501 ,  H01J2237/1534 ,  H01J2237/24564

摘要： In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

摘要翻译： 在具有用于带电粒子束的高精度和高分辨率聚焦光学系统的带电粒子束装置中，一组线圈沿着射束发射轴排列，以延伸穿过每个从射束发射辐射的径向平面轮廓 轴表示旋转轴，并且每个具有圆弧，其对应由圆周平面除以大于2的自然数产生的分割角，使得可以在带电粒子束的入射轴上产生叠加磁场，并且 带电粒子束的轨迹可以通过叠加的磁场来控制。

公开(公告)号：US20090032722A1

公开(公告)日：2009-02-05

申请号：US12183622

申请日：2008-07-31

申请人： Hiroyuki Ito ,  Yuko Sasaki ,  Yoshiya Higuchi ,  Takeshi Kawasaki

发明人： Hiroyuki Ito ,  Yuko Sasaki ,  Yoshiya Higuchi ,  Takeshi Kawasaki

IPC分类号： H01J3/14

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1501 ,  H01J2237/1534 ,  H01J2237/24564

摘要： In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

摘要翻译： 在具有用于带电粒子束的高精度和高分辨率聚焦光学系统的带电粒子束装置中，一组线圈沿着射束发射轴排列，以延伸穿过每个从射束发射辐射的径向平面轮廓 轴表示旋转轴，并且每个具有圆弧，其对应由圆周平面除以大于2的自然数产生的分割角，使得可以在带电粒子束的入射轴上产生叠加磁场，并且 带电粒子束的轨迹可以通过叠加的磁场来控制。

公开(公告)号：US08581190B2

公开(公告)日：2013-11-12

申请号：US13058540

申请日：2009-08-05

申请人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Hiroyuki Ito

发明人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Hiroyuki Ito

IPC分类号： G01N23/225

CPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/26 ,  H01J2237/282

摘要： Disclosed is a scanning charged particle microscope provided with an aberration measuring means that measures high-order geometrical aberration at high precision and high speed. An image obtained by a single-hole aperture and an image obtained by a multiple-hole aperture arranged in a region larger than that for the single-hole aperture are deconvoluted, an aberration quantity is determined based on the profiles of beams tilted in a plurality of directions and the obtained quantity is fed back to an aberration corrector.

摘要翻译： 公开了一种带有像差测量装置的扫描带电粒子显微镜，其以高精度和高速测量高阶几何像差。 通过单孔孔径获得的图像和通过布置在大于单孔孔径的区域中的多孔孔径获得的图像被去卷积，基于多个倾斜的光束的轮廓来确定像差量 的方向和所获得的量被反馈到像差校正器。

公开(公告)号：US20130068949A1

公开(公告)日：2013-03-21

申请号：US13700142

申请日：2011-05-27

申请人： Kotoko Urano ,  Takeshi Kawasaki ,  Tomonori Nakano ,  Hiroyuki Ito

发明人： Kotoko Urano ,  Takeshi Kawasaki ,  Tomonori Nakano ,  Hiroyuki Ito

IPC分类号： H01J37/26

CPC分类号： H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/221 ,  H01J2237/31749

摘要： Disclosed is an aberration measurement method of a charged particle beam device provided with an aberration corrector (4). The method is characterized by: when measuring aberration, (A) the number of pixels or the resolution is changed of a first image and a second image that are benchmarks when measuring field of view offset, and after determining the destination of movement resulting from a rough field of view offset, the number of pixels or the resolution of the first image and the second image are set to the same conditions, and the amount of field of view offset is measured precisely, or (B) a sample having lines in the horizontal direction and in the vertical direction is one-dimensionally scanned, and the amount of movement is measured from the signal position offset. As a result, in a charged particle beam device provided mounted with an aberration corrector, it becomes possible to provide a highly precise aberration measurement method that is not to the detriment of measurement time.

摘要翻译： 公开了一种带有像差校正器（4）的带电粒子束装置的像差测量方法。 该方法的特征在于：当测量像差时，（A）测量视场偏移时的第一图像和第二图像的像素数量或分辨率被改变为基准，并且在确定由 粗糙视野偏移，像素数或第一图像和第二图像的分辨率被设置为相同的条件，并且精确地测量视场偏移量，或（B）具有线中的样本 水平方向和垂直方向被一维地扫描，并且从信号位置偏移测量移动量。 结果，在设置有像差校正器的带电粒子束装置中，可以提供不损害测量时间的高精度像差测量方法。

公开(公告)号：US20110139980A1

公开(公告)日：2011-06-16

申请号：US13058540

申请日：2009-08-05

申请人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Hiroyuki Ito

发明人： Tomonori Nakano ,  Takeshi Kawasaki ,  Kotoko Hirose ,  Hiroyuki Ito

IPC分类号： G01N23/225

CPC分类号： H01J37/153 ,  H01J37/21 ,  H01J37/26 ,  H01J2237/282

摘要： Disclosed is a scanning charged particle microscope provided with an aberration measuring means that measures high-order geometrical aberration at high precision and high speed. An image obtained by a single-hole aperture and an image obtained by a multiple-hole aperture arranged in a region larger than that for the single-hole aperture are deconvoluted, an aberration quantity is determined based on the profiles of beams tilted in a plurality of directions and the obtained quantity is fed back to an aberration corrector.

摘要翻译： 公开了一种带有像差测量装置的扫描带电粒子显微镜，其以高精度和高速测量高阶几何像差。 通过单孔孔径获得的图像和通过布置在大于单孔孔径的区域中的多孔孔径获得的图像被去卷积，基于多个倾斜的光束的轮廓来确定像差量 的方向和所获得的量被反馈到像差校正器。

公开(公告)号：US09097170B2

公开(公告)日：2015-08-04

申请号：US13421068

申请日：2012-03-15

申请人： Shinji Kishi ,  Yutaka Noyori ,  Takeshi Kawasaki

发明人： Shinji Kishi ,  Yutaka Noyori ,  Takeshi Kawasaki

IPC分类号： F01P1/06 ,  F01N3/05 ,  F01N13/10 ,  F01P3/12 ,  F01P7/16 ,  F01P3/20 ,  F02B3/06

CPC分类号： F01P1/06 ,  F01N3/055 ,  F01N13/10 ,  F01N2260/20 ,  F01P3/12 ,  F01P3/20 ,  F01P7/165 ,  F02B3/06 ,  Y02T10/20

摘要： An exhaust manifold is covered by a manifold heat shield cover and an exhaust pipe is directed downward from the exhaust manifold. In such an engine, a cooling fan is disposed on a front portion of the engine and the exhaust pipe is positioned on the air flow path of the cooling fan. An auxiliary component heat shielding plate is directed from the manifold heat shield cover along a back side of the exhaust pipe. An auxiliary engine component is disposed beneath the manifold heat shield cover on a back side of the auxiliary component heat shielding plate. Between the exhaust pipe and a cylinder block, an air flow guide plate provides an air flow space between the air flow guide plate and the cylinder block. A cooling air flow passing through the air flow space is thus supplied to the auxiliary engine component.

摘要翻译： 排气歧管被歧管隔热罩覆盖，排气管从排气歧管向下指向。 在这样的发动机中，在发动机的前部配置有冷却风扇，排气管位于冷却风扇的风路上。 辅助部件热屏蔽板沿着排气管的后侧从歧管隔热罩引导。 辅助发动机部件设置在辅助部件隔热板的后侧上的歧管隔热罩下方。 在排气管和气缸体之间，气流引导板在气流引导板和气缸体之间提供空气流动空间。 因此，通过空气流动空间的冷却空气流被提供给辅助发动机部件。

公开(公告)号：US20110272578A1

公开(公告)日：2011-11-10

申请号：US13143965

申请日：2010-01-14

申请人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

发明人： Kotoko Hirose ,  Takeshi Kawasaki ,  Tomonori Nakano

IPC分类号： H01J37/28

CPC分类号： H01J37/153 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/221 ,  H01J2237/2802

摘要： There is provided a charged particle radiation device provided with an aberration corrector capable of correcting aberration with high precision in a short time by automatically setting an aberration coefficient measuring condition to thereby realize measurement with high precision. The charged particle radiation device has a feature that a value of defocus and a value of astigma, occurring owing to aberration at the time of the beam tilting, are estimated on the basis of results of aberration measurement, thereby adjusting an electron optical system on the basis of these values.

摘要翻译： 提供一种带有像差校正器的带电粒子辐射装置，其能够通过自动设置像差系数测量条件，以高精度实现测量，从而在短时间内以高精度校正像差。 带电粒子辐射装置具有基于像差测量的结果来估计由于波束倾斜时的像差而发生的散焦值和散射值的特征，由此调整电子光学系统 这些价值的基础。

公开(公告)号：US07728353B2

公开(公告)日：2010-06-01

申请号：US11392549

申请日：2006-03-30

申请人： Seiji Yaegashi ,  Takeshi Kawasaki ,  Ken Nakata

发明人： Seiji Yaegashi ,  Takeshi Kawasaki ,  Ken Nakata

IPC分类号： H01L29/20 ,  H01L31/0328 ,  H01L31/0336 ,  H01L31/072 ,  H01L31/109

CPC分类号： H01L29/66462 ,  H01L21/28575 ,  H01L21/28581 ,  H01L29/2003 ,  H01L29/66318

摘要： A semiconductor device includes a mask layer having openings on a substrate, a GaN-based semiconductor layer selectively formed on the substrate with the mask layer that serves as a mask, a gate electrode and either a source electrode or an emitter electrode formed on the GaN-based semiconductor layer, and a drain electrode or a collector electrode connected on a surface of the first semiconductor layer that faces the GaN-based semiconductor layer or an opposite side of the first semiconductor layer.

摘要翻译： 半导体器件包括在衬底上具有开口的掩模层，在衬底上选择性地形成有用作掩模的掩模层的GaN基半导体层，栅电极以及形成在GaN上的源电极或发射极 以及连接在第一半导体层的面对GaN基半导体层或第一半导体层的相对侧的表面上的漏电极或集电极。

公开(公告)号：US07718976B2

公开(公告)日：2010-05-18

申请号：US11762802

申请日：2007-06-14

申请人： Takeshi Kawasaki ,  Mitsugu Sato ,  Makoto Ezumi ,  Tomonori Nakano

发明人： Takeshi Kawasaki ,  Mitsugu Sato ,  Makoto Ezumi ,  Tomonori Nakano

IPC分类号： G21K1/08

CPC分类号： H01J37/153 ,  H01J37/248 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/1534

摘要： The present invention provides a stable charged particle beam apparatus to enable high-resolution observation by reducing the influence of the noise of a large number of power supplies used in an aberration corrector. The charged particle beam apparatus that has: an SEM column for irradiating an electron beam onto a specimen and making the electron beam scan it; a specimen chamber for housing a specimen stage on which the specimen is placed and held; a detector for detecting secondary electrons generated by the scanning of the electron beam; display means for displaying an output signal of the detector as an SEM image; and a control unit for controlling component parts including the SEM column, the specimen chamber, and the display means. The SEM column has a pair of accelerating electrodes and an aberration corrector that is placed between the pair of accelerating electrodes and corrects aberration of the electron beam, and accelerates the electron beam during a period when being transmitted through the aberration corrector by a high voltage being impressed across the pair of accelerating electrodes.

摘要翻译： 本发明提供了一种稳定的带电粒子束装置，通过减少在像差校正器中使用的大量电源的噪声的影响来实现高分辨率观察。 具有：用于将电子束照射到试样上并使电子束扫描的SEM柱的带电粒子束装置; 用于容纳放置和保持所述试样的试样台的试样室; 用于检测由扫描电子束产生的二次电子的检测器; 用于将检测器的输出信号显示为SEM图像的显示装置; 以及用于控制包括SEM柱，样品室和显示装置的部件的控制单元。 SEM列具有一对加速电极和像差校正器，该像素校正器被放置在一对加速电极之间并校正电子束的像差，并且通过高电压透过像差校正器的期间加速电子束 穿过该对加速电极。