MEMS differential actuated nano probe and method for fabrication
    2.
    发明授权
    MEMS differential actuated nano probe and method for fabrication 失效
    MEMS微分致动纳米探针和制造方法

    公开(公告)号:US06995368B2

    公开(公告)日:2006-02-07

    申请号:US10795407

    申请日:2004-03-09

    IPC分类号: G21K7/00

    摘要: A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.

    摘要翻译: MEMS差分致动纳米探针包括平行布置的四个悬架梁,连接到悬架梁的连接底座,纳米探针。 悬挂梁中的两个由于热膨胀而伸长以允许探针的偏转。 通过将悬架梁加热到不同位置,MEMS微分致动纳米探针可以在两个方向上以两个自由度移动。 MEMS差分致动纳米探针的偏转也可以以压电或静电方式实现。

    Optoelectronic device package and packaging method thereof
    6.
    发明申请
    Optoelectronic device package and packaging method thereof 审中-公开
    光电器件封装及其封装方法

    公开(公告)号:US20080169480A1

    公开(公告)日:2008-07-17

    申请号:US11652060

    申请日:2007-01-11

    IPC分类号: H01L33/00

    摘要: An optoelectronic device package. The optoelectronic device package includes a substrate, a reflector formed on a first plane of the substrate, a cover bonded to the reflector to form a closed space, a plurality of microlenses formed on a first plane of the cover, a phosphor film formed on a second plane of the cover within the closed space, a thermal-conductive film formed on a second plane of the substrate, an electrode formed on the sidewall and the second plane of the substrate uncovered by the thermal-conductive film, and an optoelectronic device formed on the first plane of the substrate within the closed space. The invention also provides a method of packaging the optoelectronic device.

    摘要翻译: 光电器件封装。 所述光电器件封装包括衬底,形成在所述衬底的第一平面上的反射器,结合到所述反射器以形成闭合空间的盖,形成在所述盖的第一平面上的多个微透镜,形成在所述衬底上的荧光膜 封闭空间内的盖的第二平面,形成在基板的第二平面上的导热膜,形成在未被导热膜覆盖的侧壁和基板的第二平面上的电极和形成的光电子器件 在封闭空间内的衬底的第一平面上。 本发明还提供一种封装光电器件的方法。

    MEMS differential actuated nano probe and method for fabrication
    7.
    发明申请
    MEMS differential actuated nano probe and method for fabrication 失效
    MEMS微分致动纳米探针和制造方法

    公开(公告)号:US20050082474A1

    公开(公告)日:2005-04-21

    申请号:US10795407

    申请日:2004-03-09

    摘要: A MEMS differential actuated nano probe includes four suspension beams arranged in parallel, a connecting base connecting to the suspension beams, a nano probe. Two of the suspension beams elongate due to thermal expansion to allow the deflection of the probe. By heating the suspension beams at different positions, the MEMS differential actuated nano probe can move in two directions with two degrees of freedom. The deflection of the MEMS differential actuated nano probe can be also achieved in piezoelectric or electrostatic way.

    摘要翻译: MEMS差分致动纳米探针包括平行布置的四个悬架梁,连接到悬架梁的连接底座,纳米探针。 悬挂梁中的两个由于热膨胀而伸长以允许探针的偏转。 通过将悬架梁加热到不同位置,MEMS微分致动纳米探针可以在两个方向上以两个自由度移动。 MEMS差分致动纳米探针的偏转也可以以压电或静电方式实现。

    Electrostatic movable micro mirror chip
    9.
    发明授权
    Electrostatic movable micro mirror chip 失效
    静电可移动微镜芯片

    公开(公告)号:US06950224B1

    公开(公告)日:2005-09-27

    申请号:US10922265

    申请日:2004-08-18

    IPC分类号: B81B3/00 G02B26/00 G02B26/08

    CPC分类号: G02B26/0841

    摘要: An electrostatic movable micro mirror chip includes an upper mirror plate and a lower electrode plate positioned and jointed together via pairs of fitting solder and positioning grooves. It improves the optical quality of the mirror chip by a lower joining temperature. The fitting and jointing achieves easy positioning and interconnection. The fabrication time and cost is less. The mirror in the mirror chip is plated with metallic coating on both sides so as to balance the stress and improve its flatness.

    摘要翻译: 静电可移动微镜芯片包括上镜面板和下电极板,通过一对装配焊料和定位槽定位和接合在一起。 它通过较低的接合温度提高了镜片的光学质量。 装配和接合实现了容易的定位和互连。 制造时间和成本较低。 镜片中的镜子在两面镀金属涂层,以平衡应力并提高其平整度。

    Glass dam structures for imaging devices chip scale package
    10.
    发明申请
    Glass dam structures for imaging devices chip scale package 审中-公开
    用于成像装置的玻璃坝结构芯片级封装

    公开(公告)号:US20080191334A1

    公开(公告)日:2008-08-14

    申请号:US11705133

    申请日:2007-02-12

    IPC分类号: H01L23/02

    摘要: Glass dam structures for imaging device chip scale package. An optoelectronic device chip scale package comprises a substrate configured as a support structure for the chip scale package. A semiconductor die with die circuitry is attached to the substrate. A glass encapsulant is disposed on the substrate encapsulating the semiconductor die, wherein the glass encapsulant has a dam structure around an opening. A seal layer is disposed between the substrate and the dam structure bonding the two together.

    摘要翻译: 用于成像装置芯片级封装的玻璃坝结构。 光电子器件芯片级封装包括被配置为用于芯片级封装的支撑结构的衬底。 具有管芯电路的半导体管芯连接到衬底。 玻璃密封剂设置在封装半导体管芯的衬底上,其中玻璃密封剂在开口周围具有坝结构。 密封层设置在基板和将两者结合在一起的坝结构之间。