CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME
    2.
    发明申请
    CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME 失效
    具有挠性铰链膜片的冷凝器麦克风及其制造方法

    公开(公告)号:US20080137884A1

    公开(公告)日:2008-06-12

    申请号:US11875996

    申请日:2007-10-22

    IPC分类号: H04R25/00 H01L21/64

    摘要: A micromini condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and a method of manufacturing the same are provided.The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer to be used as a back plate on the first insulating layer; forming a plurality of sound holes by patterning the upper silicon layer; forming a second insulating layer on the upper silicon layer; forming a conductive layer on the upper silicon layer having the sound holes, and forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming a plurality of air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the sacrificial layer, the passivation layer, the conductive layer, the upper silicon layer, the first insulating layer and the lower silicon layer to form an air gap between the diaphragm and the upper silicon layer.Consequently, due to the flexible diaphragm, a manufacturing process using semiconductor MEMS technology may improve the sensitivity of the condenser microphone and reduce the size of the condenser microphone, thereby enabling integration into a portable terminal.

    摘要翻译: 提供具有弯曲铰链形上隔膜和背板的微型电容麦克风及其制造方法。 该方法包括以下步骤:形成下硅层和第一绝缘层; 在所述第一绝缘层上形成用作背板的上硅层; 通过图案化上硅层形成多个声孔; 在所述上硅层上形成第二绝缘层; 在具有所述声孔的所述上硅层上形成导电层,并在所述导电层上形成钝化层; 在钝化层上形成牺牲层; 在所述牺牲层上沉积隔膜,以及形成通过所述隔膜的多个空气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 蚀刻牺牲层,钝化层,导电层,上硅层,第一绝缘层和下硅层,以在隔膜和上硅层之间形成气隙。 因此,由于柔性隔膜,使用半导体MEMS技术的制造工艺可以提高电容式麦克风的灵敏度并减小电容式麦克风的尺寸,从而可以集成到便携式终端中。

    FORCED ACOUSTIC DIPOLE AND FORCED ACOUSTIC MULTIPOLE ARRAY USING THE SAME
    4.
    发明申请
    FORCED ACOUSTIC DIPOLE AND FORCED ACOUSTIC MULTIPOLE ARRAY USING THE SAME 审中-公开
    使用它的强制声音多重和强迫声音多点阵列

    公开(公告)号:US20100124342A1

    公开(公告)日:2010-05-20

    申请号:US12558015

    申请日:2009-09-11

    IPC分类号: H04R1/40

    CPC分类号: H04R1/403 H04R3/12

    摘要: Provide is a forced acoustic dipole in which a direction of an acoustic lobe can be freely steered by controlling phase and sound pressure of input signals input into first and second sound sources, respectively. Accordingly, when a forced acoustic multipole array is configured by arranging a plurality of forced acoustic dipoles and a direction of an acoustic lobe is steered in a particular direction by controlling phase and sound pressure of input signals input into the first and second sound sources, respectively, it is possible for a sound to be heard in a desired location without auditory disturbance to others.

    摘要翻译: 提供是强制声偶极子,其中通过控制输入到第一和第二声源的输入信号的相位和声压分别可以自由地控制声波瓣的方向。 因此,当通过布置多个强制声学偶极子来配置强制声学多极阵列时,分别通过控制输入到第一和第二声源的输入信号的相位和声压来沿着特定方向转向声波瓣的方向 ,可以在期望的位置听到声音,而没有对他人的听觉干扰。

    METHOD FOR MEASURING ENVIRONMENTAL PARAMETERS FOR MULTI-MODAL FUSION
    8.
    发明申请
    METHOD FOR MEASURING ENVIRONMENTAL PARAMETERS FOR MULTI-MODAL FUSION 审中-公开
    用于测量多模式融合的环境参数的方法

    公开(公告)号:US20110282665A1

    公开(公告)日:2011-11-17

    申请号:US13017582

    申请日:2011-01-31

    IPC分类号: G10L17/00 G06K9/00 G06K9/68

    摘要: Provided is a method for measuring environmental parameters for multi-modal fusion. The method for measuring environmental parameters for multi-modal fusion, includes: preparing at least one enrolled modality; receiving at least one input modality; calculating image related environmental parameters of input images in at least one input modality based on illumination of enrolled image in at least one enrolled modality; and comparing the image related environmental parameters with a predetermined reference value and discarding the input image or outputting it as a recognition data according to the comparison result.

    摘要翻译: 提供了一种用于测量多模态融合的环境参数的方法。 多模态融合的环境参数测量方法包括:准备至少一种注册模式; 接收至少一个输入模态; 基于至少一个登记模式的基于注册图像的照明,在至少一个输入模式中计算输入图像的图像相关环境参数; 并且将图像相关环境参数与预定参考值进行比较,并根据比较结果丢弃输入图像或将其作为识别数据输出。