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    Optical filters
    2.
    发明授权
    Optical filters 失效
    光滤波器

    公开(公告)号：US06198863B1

    公开(公告)日：2001-03-06

    申请号：US09051207

    申请日：1998-04-28

    申请人： Ian F Lealman ,  Michael J Robertson ,  Makoto Okai

    发明人： Ian F Lealman ,  Michael J Robertson ,  Makoto Okai

    IPC分类号： G02B634

    CPC分类号： H01S5/06258 ,  G02B6/12007 ,  G02B6/124 ,  H01S5/06256 ,  H01S5/1032 ,  H01S5/1035 ,  H01S5/1209 ,  H01S5/1218 ,  H01S5/1225 ,  H01S5/124 ,  H01S5/32391 ,  H01S5/5045

    摘要： An optical filter is formed from at least two grating located in a waveguide region of a semiconductor optical device. Each grating has a multiple peak optical passband. The gratings are spaced apart in the waveguide region and form an optical cavity having a comb-filter characteristic. The gratings may be located in the active region of an optical gain element and in a preferred example are superstructure gratings (SSGs). A number of filters may be joined together in series.

    摘要翻译： 光学滤波器由位于半导体光学器件的波导区域中的至少两个光栅形成。 每个光栅具有多峰光学通带。 光栅在波导区域中间隔开并形成具有梳状滤波器特性的光学腔。 光栅可以位于光学增益元件的有源区域中，并且在优选的示例中是上部结构光栅（SSG）。 多个过滤器可以串联在一起。

    MICROCONTACT PROBER
    3.
    发明申请
    MICROCONTACT PROBER 有权

    公开(公告)号：US20120090056A1

    公开(公告)日：2012-04-12

    申请号：US13378286

    申请日：2010-05-26

    申请人： Motoyuki Hirooka ,  Makoto Okai

    发明人： Motoyuki Hirooka ,  Makoto Okai

    IPC分类号： G01Q30/02

    CPC分类号： G01Q60/40 ,  G01Q70/12 ,  G01R1/06727 ,  G01R1/06744 ,  G01R31/2887

    摘要： The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.

    摘要翻译： 当使用具有导电纳米管，纳米线或纳米柱探针的微探针探针时，探针和测量样品之间的接触引起的应力得到改善，接触界面处的绝缘层被去除，从而降低了接触电阻，并且性能 的半导体器件检查得到改进。 微接触探针包括悬臂探针，其中每个悬臂设置有从设置在前端的保持器突出50至100nm的纳米线，纳米柱或金属涂覆的碳纳米管探针和用于水平振动悬臂的振动机构 关于这个问题。 支架的前端可以从悬臂的自由端突出，并且可以从悬臂上方检查支架的前端。

    GRAPHENE CIRCUIT BOARD HAVING IMPROVED ELECTRICAL CONTACT BETWEEN GRAPHENE AND METAL ELECTRODE, AND DEVICE INCLUDING SAME
    4.
    发明申请
    GRAPHENE CIRCUIT BOARD HAVING IMPROVED ELECTRICAL CONTACT BETWEEN GRAPHENE AND METAL ELECTRODE, AND DEVICE INCLUDING SAME 失效
    具有改善的石墨和金属电极之间的电气接触的石墨电路板和包括其的装置

    公开(公告)号：US20110198558A1

    公开(公告)日：2011-08-18

    申请号：US13013984

    申请日：2011-01-26

    申请人： Makoto Okai ,  Motoyuki Hirooka ,  Yasuo Wada

    发明人： Makoto Okai ,  Motoyuki Hirooka ,  Yasuo Wada

    IPC分类号： H01L29/06

    CPC分类号： H01L29/1606 ,  G02B6/4246 ,  H01L21/2855 ,  H01L29/41 ,  H01L29/45 ,  H01L29/7781 ,  H01L29/78603 ,  H01L29/78684

    摘要： A circuit board having a graphene circuit according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2-xO3+x (where x is 0 or more), the patterned aluminum oxide film having a recessed region whose surface has one or more cone-shaped recesses therein; a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film having a contact region that covers the recessed region, the graphene film growing parallel to a flat surface of the recessed region and parallel to an inner wall surface of each cone-shaped recess of the recessed region; and a patterned metal film, a part of the patterned metal film covering and having electrical contact with the contact region, the patterned metal film filling each recess covered by the graphene film.

    摘要翻译： 根据本发明的具有石墨烯电路的电路板包括：基底; 形成在基底基板上的图案化氧化铝膜，图案化的氧化铝膜具有平均组成为Al 2-x O 3 + x（其中x为0或更大）的图案化氧化铝膜，图案化的氧化铝膜具有凹陷区域，其表面具有一个或多个 锥形凹槽; 优选仅在图案化的氧化铝膜上生长的石墨烯膜，所述石墨烯膜具有一个或多个石墨烯原子层，所述石墨烯膜具有覆盖所述凹陷区域的接触区域，所述石墨烯膜平行于所述凹陷区域的平坦表面生长 并且平行于凹陷区域的每个锥形凹部的内壁表面; 以及图案化的金属膜，所述图案化的金属膜的一部分覆盖并与所述接触区域电接触，所述图案化金属膜填充由所述石墨烯膜覆盖的每个凹部。

    Field emission electron gun and electron beam applied device using the same
    5.
    发明授权
    Field emission electron gun and electron beam applied device using the same 有权
    场发射电子枪和电子束施加装置使用相同

    公开(公告)号：US07732764B2

    公开(公告)日：2010-06-08

    申请号：US11831989

    申请日：2007-08-01

    申请人： Tadashi Fujieda ,  Makoto Okai ,  Kishio Hidaka ,  Mitsuo Hayashibara ,  Shunichi Watanabe

    发明人： Tadashi Fujieda ,  Makoto Okai ,  Kishio Hidaka ,  Mitsuo Hayashibara ,  Shunichi Watanabe

    IPC分类号： H01J31/073 ,  H01J37/26 ,  H01J37/30

    CPC分类号： H01J37/073 ,  B82Y10/00 ,  B82Y40/00 ,  H01J1/3044 ,  H01J9/025 ,  H01J37/3174 ,  H01J2201/3043 ,  H01J2201/30434 ,  H01J2201/30469 ,  H01J2201/30484 ,  H01J2201/30488 ,  H01J2201/30496 ,  H01J2237/06341 ,  H01J2237/26

    摘要： The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.

    摘要翻译： 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外，还要获得能量扩散比电子枪窄的电子束。 此外，还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于，在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料，用于场发射电子的提取器和用于加速电子的加速器。 此外，还将场致发射电子枪应用于各种电子束施加装置。

    Flat panel display
    8.
    发明申请
    Flat panel display 审中-公开
    平板显示器

    公开(公告)号：US20060049743A1

    公开(公告)日：2006-03-09

    申请号：US11207941

    申请日：2005-08-22

    申请人： Makoto Okai ,  Takahiko Muneyoshi ,  Tomio Yaguchi ,  Nobuaki Hayashi

    发明人： Makoto Okai ,  Takahiko Muneyoshi ,  Tomio Yaguchi ,  Nobuaki Hayashi

    IPC分类号： H01J63/04 ,  H01J1/62

    CPC分类号： G09G3/22 ,  B82Y10/00 ,  H01J1/3048 ,  H01J29/481 ,  H01J31/127 ,  H01J2201/30469 ,  H01J2329/00

    摘要： A flat panel display having electron sources capable is of emitting electrons uniformly within the display surface. The flat panel display includes a rear panel formed by a rear substrate. Cathode electrodes are formed on the inner surface of the rear substrate. Layers forming the electron sources consist of carbon nanotubes and are formed on the cathode electrodes. The surfaces of layers of the electron sources are bristled with the carbon nanotubes. Multi-walled and single-walled carbon nanotubes are dispersed in the layers of the electron sources.

    摘要翻译： 具有电子源的平板显示器能够在显示表面内均匀地发射电子。 平板显示器包括由后基板形成的后面板。 阴极电极形成在后基板的内表面上。 形成电子源的层由碳纳米管构成，并形成在阴极上。 电子源层的表面被碳纳米管刷毛。 多壁和单壁碳纳米管分散在电子源的层中。

    ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM LITHOGRAPHY DEVICE USING IT
    10.
    发明申请
    ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM LITHOGRAPHY DEVICE USING IT 审中-公开
    电子源，电子枪和电子显微镜装置和电子束光刻设备使用它

    公开(公告)号：US20110186735A1

    公开(公告)日：2011-08-04

    申请号：US13020098

    申请日：2011-02-03

    申请人： Tadashi FUJIEDA ,  Makoto Okai ,  Takashi Ohshima ,  Boklae Cho

    发明人： Tadashi FUJIEDA ,  Makoto Okai ,  Takashi Ohshima ,  Boklae Cho

    IPC分类号： G21K7/00 ,  B01J19/08 ,  H01J9/04

    CPC分类号： B01J19/08 ,  G21K7/00 ,  H01J9/04 ,  H01J2237/06316

    摘要： An electron source is implemented which has a lower work function of an electron emission surface, yields emitted electrons of a narrower energy bandwidth and higher current density, and lasts longer than existing Zr/O/W electron sources. Further, an electron microscope which yields an image of higher-resolution in a shorter time and an electron beam lithography device which yields higher throughput are also provided. The electron source comprises a needle-shaped electrode made of metal having its tip in a needle shape, a heating body which heats up the needle-shaped electrode, and a diffusion source capable of being heated up by the heating body and made of a mixture of barium composite containing oxygen and carbon particles.

    摘要翻译： 实现了具有较低的电子发射表面功函数的电子源，产生较窄的能带宽和较高电流密度的发射电子，并且比现有的Zr / O / W电子源持续时间更长。 此外，还提供了在更短时间内产生更高分辨率的图像的电子显微镜以及产生较高产量的电子束光刻装置。 电子源包括由针尖形状的金属构成的针状电极，加热针状电极的加热体和能够被加热体加热并由混合物构成的扩散源 的含有氧和碳颗粒的钡复合物。