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1.发明授权公开(公告)号：US07732764B2
公开(公告)日：2010-06-08
申请号：US11831989
申请日：2007-08-01
IPC分类号： H01J31/073 , H01J37/26 , H01J37/30
CPC分类号： H01J37/073 , B82Y10/00 , B82Y40/00 , H01J1/3044 , H01J9/025 , H01J37/3174 , H01J2201/3043 , H01J2201/30434 , H01J2201/30469 , H01J2201/30484 , H01J2201/30488 , H01J2201/30496 , H01J2237/06341 , H01J2237/26
摘要： The object of the present invention is to enable the optical axis of an electron beam of a field emission electron gun mounting thereon an electron gun composed of a fibrous carbon material to be adjusted easily. Moreover, it is also to obtain an electron beam whose energy spread is narrower than that of the electron gun. Further, it is also to provide a high resolution electron beam applied device mounting thereon the field emission electron gun. The means for achieving the objects of the present invention is in that the fibrous carbon material is coated with a material having a band gap, in the field emission electron gun including an electron source composed of a fibrous carbon material and an electrically conductive base material for supporting the fibrous carbon material, an extractor for field-emitting electrons, and an accelerator for accelerating the electrons. Moreover, it is also to apply the field emission electron gun to various kinds of electron beam applied devices.
摘要翻译： 本发明的目的是使得能够容易地调整由其上安装有由纤维状碳材料构成的电子枪的场发射电子枪的电子束的光轴。 此外，还要获得能量扩散比电子枪窄的电子束。 此外，还提供安装在其上的高分辨率电子束施加装置的场致发射电子枪。 用于实现本发明的目的的手段在于，在场发射电子枪中包括具有带隙的材料的纤维状碳材料包括由纤维状碳材料构成的电子源和用于 支撑纤维状碳材料，用于场发射电子的提取器和用于加速电子的加速器。 此外，还将场致发射电子枪应用于各种电子束施加装置。
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2.发明申请Electron emitting element, electron gun, and electron beam applied equipment using the same 审中-公开电子发射元件，电子枪和使用其的电子束施加设备公开(公告)号：US20080315747A1
公开(公告)日：2008-12-25
申请号：US12076888
申请日：2008-03-25
IPC分类号： H01J29/46
CPC分类号： H01J37/073 , H01J37/28
摘要： An electron emitting element having a cap portion 103 with a closed structure and a columnar axis portion 101a comprising a tubular material composed mostly of carbon and a conductive base material for immobilizing the tubular material, characterized in that; the cap portion 103 includes a plurality of five-membered ring structures 104 made by atoms which constitute the tubular material and the distance between the five-membered ring structures 104 is 30 nm or more.
摘要翻译： 电子发射元件具有封闭结构的盖部分103和包括主要由碳组成的管状材料的柱状轴线部分101a和用于固定管状材料的导电基底材料，其特征在于： 盖部分103包括由构成管状材料的原子制成的多个五元环结构104，并且五元环结构104之间的距离为30nm以上。
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公开(公告)号：US07239261B2
公开(公告)日：2007-07-03
申请号：US10913494
申请日：2004-08-09
CPC分类号： H05K9/0083 , B82Y10/00 , B82Y30/00 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/01012 , H01L2924/01025 , H01L2924/01046 , H01L2924/01078 , H01L2924/01079 , H01L2924/12041 , H01L2924/1423 , H01L2924/16152 , H01L2924/3011 , H01L2924/3025 , H01Q17/004 , H05K3/284 , H05K9/0024 , Y10S977/932 , H01L2924/00014 , H01L2924/00
摘要： The purpose of the present invention is to provide an easy-to-manufacture electromagnetic wave absorption material usable from submillimeter wave region to millimeter wave region with an excellent radio wave absorbing performance and a variety of usage thereof.The present invention is characterized by an electromagnetic wave absorption material comprised of a dispersions of at least one of the materials: a multi-layer hollow globule of carbon, a schungite carbon, and the schungite ore; mixed into a matter having a high electrical resistivity. The invention is further characterized by an electronic device, an optical transmission module, an optical reception module, a high frequency telecommunication equipment, and a stop-free automated tollgate system, wherein at least a part of their board, electronic element, and circuit wiring are covered with said electromagnetic wave absorption material.
摘要翻译： 本发明的目的是提供一种易于制造的电磁波吸收材料，其可从亚毫米波区域到毫米波区域使用，具有优异的无线电波吸收性能和各种用途。 本发明的特征在于电磁波吸收材料由至少一种材料的分散体构成：碳酸多层中空球，schiteite碳和schiteite矿石; 混合成具有高电阻率的物质。 本发明的特征还在于电子设备，光传输模块，光接收模块，高频电信设备和无停止自动收费系统，其中至少一部分电路板，电子元件和电路布线 被所述电磁波吸收材料覆盖。
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公开(公告)号：US07151268B2
公开(公告)日：2006-12-19
申请号：US11059511
申请日：2005-02-17
IPC分类号： H01J37/073
CPC分类号： H01J37/073 , H01J37/304 , H01J2237/0653 , H01J2237/30455 , H01J2237/30472
摘要： A field-emission electron gun includes a field-emission cathode including a single fiber-like carbon substance and an electrically-conductive substrate for supporting the substance, an extractor for field-emitting electrons, an accelerating electrode for accelerating the electrons, an extracting power-supply for applying extracting voltage to the extractor, an accelerating power-supply for applying accelerating voltage to the accelerating electrode, and a unit for detecting and monitoring a part of emission current. In this field-emission electron gun, if emission-variation amount has become larger than a predetermined value, the extracting voltage is automatically boosted for a constant length of time, thereby increasing the emission current up to a predetermined value. Further, extracting voltage at the time of boosting the extracting voltage, voltage-boosting time, and the emission current are recorded, then being feed-backed to voltage-boosting conditions for the next-time extracting voltage. Moreover, the accelerating voltage is varied in correspondence with the voltage-boosting of the extracting voltage.
摘要翻译： 场致发射电子枪包括：包含单纤维状碳物质的场致发射阴极和用于支撑物质的导电基板，用于场发射电子的提取器，用于加速电子的加速电极，提取电力 - 用于向提取器施加提取电压，用于向加速电极施加加速电压的加速电源，以及用于检测和监测部分发射电流的单元。 在该场发射电子枪中，如果发射变化量大于预定值，则提取电压自动升高恒定的时间长度，从而将发射电流提高到预定值。 此外，记录提升电压提升时的提取电压，升压时间和发射电流，然后将其反馈到下一次提取电压的升压条件。 此外，加速电压根据提取电压的升压而变化。
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公开(公告)号：US20050072360A1
公开(公告)日：2005-04-07
申请号：US10910359
申请日：2004-08-04
IPC分类号： C23C16/48 , C23C16/00 , C23C16/04 , C23C16/18 , C23C16/46 , C23C16/52 , H01L21/00 , H01L21/285 , H01L21/428
CPC分类号： C23C16/487 , C23C16/047 , C23C16/18 , C23C16/46 , C23C16/48 , H01L21/28562
摘要： The method by which a small amount of gaseous organic metal is loaded in a vacuum atmosphere, the gaseous organic metal is decomposed by irradiation with an electron beam, and metal components are deposited on a beam-irradiated portion has the problem that the deposited portion is rendered amorphous by hydrocarbon contamination, so that the conductivity and strength of the deposit considerably deteriorate. The invention solves the problem by a method by which the gaseous organic metal is decomposed by irradiation with the electron beam and the metal components are deposited on the beam-irradiated portion, wherein the deposited portion is irradiated with a laser, heated by a heater, or irradiated with infrared rays during deposition, thereby allowing the molding of a crystalline metal deposit with excellent conductivity and strength.
摘要翻译： 在真空气氛中加载少量气体有机金属的方法，通过用电子束照射来分解气态有机金属，并且在束照射部分上沉积金属成分具有沉积部分为 通过碳氢化合物污染使其呈现无定形，使得沉积物的导电性和强度显着劣化。 本发明通过用电子束照射分解气态有机金属并将金属成分沉积在束照射部分上的方法解决了该问题，其中沉积部分被激光照射，加热器加热， 或在沉积期间用红外线照射，从而允许成型具有优异的导电性和强度的结晶金属沉积物。
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公开(公告)号：US07388199B2
公开(公告)日：2008-06-17
申请号：US10570198
申请日：2004-09-03
申请人： Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
发明人： Takafumi Morimoto , Tooru Shinaki , Yoshiyuki Nag'No , Yukio Kenbou , Yuuichi Kunitomo , Takenori Hiroki , Tooru Kurenuma , Hiroaki Yanagimoto , Hiroshi Kuroda , Shigeru Miwa , Ken Murayama , Mitsuo Hayashibara , Kishio Hidaka , Tadashi Fujieda
IPC分类号： G21K7/00
CPC分类号： G01Q70/12
摘要： A probe is made by attaching a carbon nanotube 12 to a mounting base end 13, which eliminates the effects of a carbon contamination film, to increase the bonding strength, increase the conductivity of the probe, and strengthen the bonding performance thereof by coating the entire circumference of the nanotube and the base with a coating film, rather than coating just one side. The work of mounting the carbon nanotube and mounting base end are performed under observation by a microscope. Further, the carbon contamination film 14 formed by an electron microscope is stripped off at a stage before bonding by the coating film.
摘要翻译： 通过将碳纳米管12附着到安装基端13上，从而消除碳污染膜的影响，提高接合强度，提高探针的导电性，并通过涂覆全部 纳米管的周长和基底与涂膜，而不是仅涂覆一面。 在显微镜观察下进行安装碳纳米管和安装基端的工作。 此外，通过电子显微镜形成的碳污染膜14在通过涂膜粘合之前的阶段被剥离。
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7.发明授权Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device 失效具有碳纳米管的发光源，使用该发光源的电子显微镜，以及电子束绘制装置公开(公告)号：US06930313B2
公开(公告)日：2005-08-16
申请号：US10636701
申请日：2003-08-08
申请人： Tadashi Fujieda , Kishio Hidaka , Mitsuo Hayashibara , Shuichi Suzuki , Yoshimichi Numata , Toshiaki Horiuchi
发明人： Tadashi Fujieda , Kishio Hidaka , Mitsuo Hayashibara , Shuichi Suzuki , Yoshimichi Numata , Toshiaki Horiuchi
IPC分类号： G03F7/20 , B82B3/00 , G01Q70/12 , H01J1/304 , H01J9/02 , H01J37/06 , H01J37/073 , H01J37/26 , H01L21/027
CPC分类号： H01J1/304 , B82Y10/00 , B82Y30/00 , H01J37/073 , H01J2201/30469 , H01J2237/0635 , Y10S977/876 , Y10S977/939
摘要： A high reliability emission source is constructed to secure the ohmic contact between a carbon nanotube and an electrically conductive base material, so as to ensure sufficient joining strength, and to provide for easy beam shaft adjustment. An electron microscope for realizing high resolution, high brightness, a reduction in sample damage due to a reduction in acceleration voltage, a reduction in cost and compactness, and an electron beam drawing device for realizing high definition, high efficiency, a reduction in cost and compactness in comparison with the conventional device, is achieved by using this high reliability emission source. In the emission source, the carbon nanotube is attached to the tip central portion of the electrically conductive base material through an electrically conductive joining material or an organic material by carbonization-processing the organic material by heat treatment, or by diffusive joining.
摘要翻译： 构建高可靠性发射源以确保碳纳米管和导电基材之间的欧姆接触，以确保足够的接合强度，并提供容易的梁轴调节。 用于实现高分辨率，高亮度，由于加速电压降低而导致的样品损伤降低，成本降低和紧凑性的电子显微镜，以及用于实现高清晰度，高效率，降低成本的电子束引出装置 通过使用这种高可靠性的发射源来实现与常规装置相比的紧凑性。 在发光源中，碳纳米管通过导电性接合材料或有机材料通过热处理对该有机材料进行碳化处理或通过扩散接合而附着到导电性基材的顶端中心部。
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公开(公告)号：US20050035896A1
公开(公告)日：2005-02-17
申请号：US10913494
申请日：2004-08-09
CPC分类号： H05K9/0083 , B82Y10/00 , B82Y30/00 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/01012 , H01L2924/01025 , H01L2924/01046 , H01L2924/01078 , H01L2924/01079 , H01L2924/12041 , H01L2924/1423 , H01L2924/16152 , H01L2924/3011 , H01L2924/3025 , H01Q17/004 , H05K3/284 , H05K9/0024 , Y10S977/932 , H01L2924/00014 , H01L2924/00
摘要： The purpose of the present invention is to provide an easy-to-manufacture electromagnetic wave absorption material usable from submillimeter wave region to millimeter wave region with an excellent radio wave absorbing performance and a variety of usage thereof. The present invention is characterized by an electromagnetic wave absorption material comprised of a dispersions of at least one of the materials: a multi-layer hollow globule of carbon, a schungite carbon, and the schungite ore; mixed into a matter having a high electrical resistivity. The invention is further characterized by an electronic device, an optical transmission module, an optical reception module, a high frequency telecommunication equipment, and a stop-free automated tollgate system, wherein at least a part of their board, electronic element, and circuit wiring are covered with said electromagnetic wave absorption material.
摘要翻译： 本发明的目的是提供一种易于制造的电磁波吸收材料，其可从亚毫米波区域到毫米波区域使用，具有优异的无线电波吸收性能和各种用途。 本发明的特征在于电磁波吸收材料由至少一种材料的分散体构成：碳酸多层中空球，schiteite碳和schiteite矿石; 混合成具有高电阻率的物质。 本发明的特征还在于电子设备，光传输模块，光接收模块，高频电信设备和无停止自动收费系统，其中至少一部分电路板，电子元件和电路布线 被所述电磁波吸收材料覆盖。
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公开(公告)号：US07710012B2
公开(公告)日：2010-05-04
申请号：US11734303
申请日：2007-04-12
CPC分类号： H01J1/304 , B82Y15/00 , H01J37/065 , H01J37/073 , H01J37/28 , H01J2201/30469 , H01J2237/06341 , H01J2237/2816 , H01J2237/2852
摘要： An amorphous carbon layer sticking on a carbon nanotube surface is remarkably reduced when a carbon nanotube is joined to a conductive substrate by bringing a single fibrous carbonaceous material in contact with the tip of the conductive substrate and covering at least a part of the contact portion with a conductive material while at lest either of the fibrous carbonaceous material or the conductive substrate is heated in a vacuum.
摘要翻译： 当碳纳米管通过使单个纤维状碳质材料与导电性基材的前端接触而覆盖至少一部分接触部分而将碳纳米管接合到导电性基材上时，粘附在碳纳米管表面上的无定形碳层显着降低， 导电材料同时在真空中加热纤维状含碳材料或导电性基材。
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公开(公告)号：US20070051887A1
公开(公告)日：2007-03-08
申请号：US11513411
申请日：2006-08-31
申请人： Kishio Hidaka , Motoyuki Hirooka , Mitsuo Hayashibara , Tadashi Fujieda , Hiroki Tanaka , Noriaki Takeshi , Takafumi Morimoto , Satoshi Sekino , Masato Takashina , Yuki Uozumi
发明人： Kishio Hidaka , Motoyuki Hirooka , Mitsuo Hayashibara , Tadashi Fujieda , Hiroki Tanaka , Noriaki Takeshi , Takafumi Morimoto , Satoshi Sekino , Masato Takashina , Yuki Uozumi
IPC分类号： G21K7/00
摘要： The present invention provides a cantilever having a base fixed to an inspecting apparatus, a beam protruding from the base, and a probe fixed to an end of the beam, wherein: the probe is formed by use of a carbon nanotube; and the probe is fixed by metal layers from at least two directions when the cantilever is operated, the probe protrudes in a direction in which a sample is fixed. It is possible to prevent the probe from warping and suppress image failures during observation of a sample.
摘要翻译： 本发明提供了一种悬臂，其具有固定在检查装置上的基座，从基座突出的梁和固定在梁的端部的探针，其中：通过使用碳纳米管形成探针; 并且当悬臂被操作时，探针从至少两个方向由金属层固定，探针沿固定样品的方向突出。 可以在观察样品期间防止探头翘曲并抑制图像故障。
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