公开(公告)号：US20080190558A1

公开(公告)日：2008-08-14

申请号：US11825659

申请日：2007-07-06

申请人： Joel Brad Bailey ,  Jean-Michel Claude Huret ,  Paul F. Forderhase ,  Satish Sadam ,  Scott Allen Stratton ,  Michael D. Robbins

发明人： Joel Brad Bailey ,  Jean-Michel Claude Huret ,  Paul F. Forderhase ,  Satish Sadam ,  Scott Allen Stratton ,  Michael D. Robbins

IPC分类号： H01L21/306

CPC分类号： H01L21/6708 ,  H01L21/31116 ,  H01L21/31612 ,  H01L21/6719 ,  H01L21/68785

摘要： An edge area of the substrate processing device is disclosed. The edge area being processed is isolated from the remainder of the substrate by directing a flow of an inert gas through a plenum near the area to be processed thus forming a barrier while directing a flow of reactive species at an angle relative to the top surface of the substrate towards the substrate edge area thus processing the substrate edge area. A flow of oxygen containing gas into the processing chamber together with a negative exhaust pressure may contribute to the biasing of reactive species and other gases away from the non-processing areas of the substrate.

摘要翻译： 公开了一种基板处理装置的边缘区域。 正在处理的边缘区域与基板的其余部分分离，通过使惰性气体流通过待处理区域附近的增压室，从而形成屏障，同时将反应物流的流动相对于顶部表面成一定角度 基板朝向基板边缘区域，从而处理基板边缘区域。 含氧气体流入处理室和负排气压力可能有助于使反应物质和其他气体偏离基板的非处理区域。

公开(公告)号：US20090122304A1

公开(公告)日：2009-05-14

申请号：US12188887

申请日：2008-08-08

申请人： Ju Jin ,  Satish Sadam ,  Vishal Verma ,  Zhiyan Huang ,  Siming Lin ,  Michael D. Robbins ,  Paul F. Forderhase

发明人： Ju Jin ,  Satish Sadam ,  Vishal Verma ,  Zhiyan Huang ,  Siming Lin ,  Michael D. Robbins ,  Paul F. Forderhase

IPC分类号： G01N21/88 ,  H05B37/02

CPC分类号： G01N21/4738 ,  G01N21/9503

摘要： A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. An automatic defect characterization processor is provided.

摘要翻译： 衬底照明和检查系统提供用于照明和检查衬底，特别是衬底边缘。 该系统使用具有设置在其外部或内部的多个光的光漫射器，用于提供衬底的均匀漫射照明。 光扩散器的光学和成像系统外部用于检查包括镜面的基板的多个表面。 提供自动缺陷表征处理器。

公开(公告)号：US20090116727A1

公开(公告)日：2009-05-07

申请号：US12188849

申请日：2008-08-08

申请人： Ju Jin ,  Satish Sadam ,  Vishal Verma ,  Zhiyan Huang ,  Siming Lin ,  Michael D. Robbins ,  Paul F. Forderhase

发明人： Ju Jin ,  Satish Sadam ,  Vishal Verma ,  Zhiyan Huang ,  Siming Lin ,  Michael D. Robbins ,  Paul F. Forderhase

IPC分类号： G06K9/00

CPC分类号： G01N21/4738 ,  G01N21/9503

摘要： A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system a image processor to automatically detect and characterize defects on the wafer's edge.

摘要翻译： 衬底照明和检查系统提供用于照明和检查衬底，特别是衬底边缘。 该系统用于自动检测和表征晶圆边缘缺陷的图像处理器。

公开(公告)号：US07508504B2

公开(公告)日：2009-03-24

申请号：US11891657

申请日：2007-08-09

申请人： Ju Jin ,  Satish Sadam ,  Vishal Verma ,  Zhiyan Huang ,  Siming Lin ,  Michael D Robbins ,  Paul F. Forderhase

发明人： Ju Jin ,  Satish Sadam ,  Vishal Verma ,  Zhiyan Huang ,  Siming Lin ,  Michael D Robbins ,  Paul F. Forderhase

IPC分类号： G01N21/00

CPC分类号： G01N21/4738 ,  G01N21/9503

摘要： A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.

摘要翻译： 衬底照明和检查系统提供用于照明和检查衬底，特别是衬底边缘。 该系统使用具有设置在其外部或内部的多个光的光漫射器，用于提供衬底的均匀漫射照明。 光扩散器的光学和成像系统外部用于检查包括镜面的基板的多个表面。 光学元件可以相对于基板边缘的中心点径向旋转，以允许对基板边缘的所有表面进行聚焦检查。

公开(公告)号：US5252264A

公开(公告)日：1993-10-12

申请号：US789358

申请日：1991-11-08

申请人： Paul F. Forderhase ,  Carl R. Deckard ,  Jack M. Klein

发明人： Paul F. Forderhase ,  Carl R. Deckard ,  Jack M. Klein

IPC分类号： B23K26/00 ,  B22F3/00 ,  B22F3/02 ,  B22F3/035 ,  B22F3/10 ,  B22F3/105 ,  B23K26/34 ,  B29C35/08 ,  B29C67/00 ,  C04B35/64

CPC分类号： B29C67/0077 ,  B22F3/004 ,  B22F2003/1056 ,  B22F2998/00 ,  B29K2105/251 ,  G05B2219/49013 ,  Y02P10/295

摘要： An apparatus and method for producing parts by fusing selected portions of a layer of powder at a target area, including the systems for delivering the powder to the target area, is disclosed. Multiple powder pistons are included in the apparatus, each of which lift a volume of powder above a surface in an alternating manner relative to one another. Powder delivery begins by the lifting of a volume of powder at a first location on one side of the target area. A counter-rotating roller moves across the lifted powder, distributes it over the target area, and rests beyond a second powder lifting location on the other side of the target area. Portions of the powder layer are then fused at the target area according to a cross-section of the part to be produced, and is followed by lowering a part cylinder at the target area in order to accept the next layer of powder. A second volume of powder is lifted at the second location, and the counter-rotating roller moves across the second location and the target area to deliver the next layer of powder to the target area. The multiple powder piston system reduces the excess powder in the chamber, speeds the delivery of powder, and facilitates the installation of powder during the process.

摘要翻译： 公开了一种用于通过将目标区域上的粉末层的选定部分熔合而制造零件的装置和方法，包括用于将粉末输送到目标区域的系统。 装置中包括多个粉末活塞，每个粉末活塞相对于彼此以交替的方式提升一个表面上方的体积的粉末。 通过在目标区域一侧的第一位置提升一定体积的粉末开始粉末递送。 反转辊移动穿过提升的粉末，将其分配在目标区域上，并且在目标区域的另一侧上放置在第二粉末提升位置之外。 然后根据要制造的部件的横截面将粉末层的部分熔合在目标区域，然后在目标区域处降低部分圆筒，以接受下一层粉末。 第二体积的粉末在第二位置被提升，并且反向旋转辊移动穿过第二位置和目标区域，以将下一层粉末输送到目标区域。 多粉末活塞系统减少了室中的多余粉末，加速了粉末的输送，并且在该过程中容易安装粉末。

公开(公告)号：US5527877A

公开(公告)日：1996-06-18

申请号：US298076

申请日：1994-08-30

申请人： Elmer D. Dickens, Jr. ,  Biing L. Lee ,  Glenn A. Taylor ,  Angelo J. Magistro ,  Hendra Ng ,  Kevin McAlea ,  Paul F. Forderhase

发明人： Elmer D. Dickens, Jr. ,  Biing L. Lee ,  Glenn A. Taylor ,  Angelo J. Magistro ,  Hendra Ng ,  Kevin McAlea ,  Paul F. Forderhase

IPC分类号： C08L101/00 ,  B29C35/08 ,  B29C41/00 ,  B29C67/00 ,  B29C67/04 ,  B29K23/00 ,  B29K77/00 ,  C08G69/14 ,  C08J3/12 ,  C08J9/24 ,  C08L23/04 ,  C08L23/10 ,  C08L23/26 ,  C08L59/00 ,  C08L77/00

CPC分类号： C08J3/12 ,  B29C41/003 ,  B29C67/0077 ,  B29C67/04 ,  C08J9/24 ,  B29C2035/0838 ,  B29K2023/00 ,  B29K2023/06 ,  B29K2023/12 ,  B29K2059/00 ,  B29K2067/006 ,  B29K2077/00 ,  B29K2079/00 ,  B29K2995/0094 ,  Y10S521/919 ,  Y10S525/902 ,  Y10T428/249958 ,  Y10T428/249986 ,  Y10T428/252

摘要： A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 .mu.m, provided further that the number average ratio of particles smaller than 53 .mu.m is greater than 80%, the remaining larger particles being in the size range from 53 .mu.m to 180 .mu.m. A powder with slow recrystallization rates, as evidenced by non-overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10.degree. C. to 20.degree. C. per minute, will also result in sintered parts that are near-fully dense, with minimal dimensional distortion.

公开(公告)号：USRE39354E1

公开(公告)日：2006-10-17

申请号：US10282191

申请日：2002-10-24

申请人： Elmer Douglas Dickens, Jr. ,  Biing-Lin Lee ,  Glenn Alfred Taylor ,  Angelo Joseph Magistro ,  Hendra Ng ,  Kevin P. McAlea ,  Paul F. Forderhase

发明人： Elmer Douglas Dickens, Jr. ,  Biing-Lin Lee ,  Glenn Alfred Taylor ,  Angelo Joseph Magistro ,  Hendra Ng ,  Kevin P. McAlea ,  Paul F. Forderhase

IPC分类号： C08G69/14

CPC分类号： C08J9/24 ,  B29C41/003 ,  B29C64/153 ,  B29C67/04 ,  B29C2035/0838 ,  B29K2023/00 ,  B29K2023/06 ,  B29K2023/12 ,  B29K2059/00 ,  B29K2067/006 ,  B29K2077/00 ,  B29K2079/00 ,  B29K2995/0094 ,  B33Y10/00 ,  B33Y70/00 ,  C08J3/12 ,  Y10S521/919 ,  Y10T428/249958

摘要： A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 μm, provided further that the number average ratio of particles smaller than 53 μm is greater than 80%, the remaining larger particles being in the size range from 53 μm to 180 μm. A powder with slow recrystallization rates, as evidenced by non-overlapping or slightly overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10° C. to 20° C. per minute, will also result in sintered parts that are near-fully dense, with minimal dimensional distortion.

摘要翻译： 已经制备了具有独特性质的激光可烧结粉末产品，其允许粉末在选择性激光烧结机中烧结以形成接近完全致密的烧结部分。 对于大多数目的，烧结部分与通过各向同性地成型粉末制成的具有相同尺寸的另一部件是不可区分的。 除了在接近其软化温度的温度下可自由流动外，还公开了一种有用的粉末，其具有两层分布，其中基本上没有一次颗粒的平均直径大于180μm，只要颗粒的数均比例 小于53μm的大于80％，剩余的较大的颗粒的尺寸范围为53μm至180μm。 具有缓慢重结晶速率的粉末，其扫描速率在每分钟10℃至20℃的差示扫描量热法特征中不重叠或轻微重叠的吸热和放热峰所证明的也将导致 几乎完全致密的烧结部件，具有最小的尺寸变形。

公开(公告)号：US6136948A

公开(公告)日：2000-10-24

申请号：US892583

申请日：1997-07-14

申请人： Elmer Douglas Dickens, Jr. ,  Biing Lin Lee ,  Glenn Alfred Taylor ,  Angelo Joseph Magistro ,  Hendra Ng ,  Kevin P. McAlea ,  Paul F. Forderhase

发明人： Elmer Douglas Dickens, Jr. ,  Biing Lin Lee ,  Glenn Alfred Taylor ,  Angelo Joseph Magistro ,  Hendra Ng ,  Kevin P. McAlea ,  Paul F. Forderhase

IPC分类号： B29C35/08 ,  B29C41/00 ,  B29C67/00 ,  B29C67/04 ,  C08G69/14 ,  C08J3/12 ,  C08J9/24

CPC分类号： B29C67/04 ,  B29C41/003 ,  B29C67/0077 ,  C08J3/12 ,  C08J9/24 ,  B29C2035/0838 ,  B29K2023/00 ,  B29K2023/06 ,  B29K2023/12 ,  B29K2059/00 ,  B29K2067/006 ,  B29K2077/00 ,  B29K2079/00 ,  B29K2995/0094 ,  Y10S521/919 ,  Y10S525/902 ,  Y10T428/252

摘要： A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 .mu.m, provided further that the number average ratio of particles smaller than 53 .mu.m is greater than 80%, the remaining larger particles being in the size range from 53 .mu.m to 180 .mu.m. A powder with slow recrystallization rates, as evidenced by non-overlapping or slightly overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10.degree. C. to 20.degree. C. per minute, will also result in sintered parts that are near-fully dense, with minimal dimensional distortion.

摘要翻译： 已经制备了具有独特性质的激光可烧结粉末产品，其允许粉末在选择性激光烧结机中烧结以形成接近完全致密的烧结部分。 对于大多数目的，烧结部分与通过各向同性地成型粉末制成的具有相同尺寸的另一部件是不可区分的。 除了在接近其软化温度的温度下可自由流动外，还公开了一种有用的粉末，其具有两层分布，其中基本上没有一次颗粒的平均直径大于180μm，条件是， 小于53μm的颗粒大于80％，剩余的较大颗粒的尺寸范围为53μm至180μm。 具有缓慢重结晶速率的粉末，其扫描速率在每分钟10℃至20℃的差示扫描量热法特性中的非重叠或稍微重叠的吸热和放热峰所证明的也将导致 几乎完全致密的烧结部件，具有最小的尺寸变形。

公开(公告)号：US5648450A

公开(公告)日：1997-07-15

申请号：US664356

申请日：1996-06-17

申请人： Elmer Douglas Dickens, Jr. ,  Biing Lin Lee ,  Glenn Alfred Taylor ,  Angelo Joseph Magistro ,  Hendra Ng ,  Kevin P. McAlea ,  Paul F. Forderhase

发明人： Elmer Douglas Dickens, Jr. ,  Biing Lin Lee ,  Glenn Alfred Taylor ,  Angelo Joseph Magistro ,  Hendra Ng ,  Kevin P. McAlea ,  Paul F. Forderhase

IPC分类号： B29C35/08 ,  B29C41/00 ,  B29C67/00 ,  B29C67/04 ,  C08G69/14 ,  C08J3/12 ,  C08J9/24

CPC分类号： B29C67/04 ,  B29C41/003 ,  B29C67/0077 ,  C08J3/12 ,  C08J9/24 ,  B29C2035/0838 ,  B29K2023/00 ,  B29K2023/06 ,  B29K2023/12 ,  B29K2059/00 ,  B29K2067/006 ,  B29K2077/00 ,  B29K2079/00 ,  B29K2995/0094 ,  Y10S521/919 ,  Y10S525/902 ,  Y10T428/249958 ,  Y10T428/249986 ,  Y10T428/252

摘要： A laser-sinterable powder product has been prepared having unique properties which allow the powder to be sintered in a selective laser sintering machine to form a sintered part which is near-fully dense. For most purposes, the sintered part is indistinguishable from another part having the same dimensions made by isotropically molding the powder. In addition to being freely flowable at a temperature near its softening temperature, a useful powder is disclosed that has a two-tier distribution in which substantially no primary particles have an average diameter greater than 180 .mu.m, provided further that the number average ratio of particles smaller than 53 .mu.m is greater than 80%, the remaining larger particles being in the size range from 53 .mu.m to 180 .mu.m. A powder with slow recrystallization rates, as evidenced by non-overlapping or slightly overlapping endothermic and exothermic peaks in their differential scanning calorimetry characteristics for scan rates of on the order of 10.degree. C. to 20.degree. C. per minute, will also result in sintered parts that are near-fully dense, with minimal dimensional distortion.

摘要翻译： 已经制备了具有独特性质的激光可烧结粉末产品，其允许粉末在选择性激光烧结机中烧结以形成接近完全致密的烧结部分。 对于大多数目的，烧结部分与通过各向同性地成型粉末制成的具有相同尺寸的另一部件是不可区分的。 除了在接近其软化温度的温度下可自由流动外，还公开了一种有用的粉末，其具有两层分布，其中基本上没有一次颗粒的平均直径大于180μm，条件是， 小于53μm的颗粒大于80％，剩余的较大颗粒的尺寸范围为53μm至180μm。 具有缓慢重结晶速率的粉末，其扫描速率在每分钟10℃至20℃的差示扫描量热法特性中的非重叠或稍微重叠的吸热和放热峰所证明的也将导致 几乎完全致密的烧结部件，具有最小的尺寸变形。

公开(公告)号：US07207584B2

公开(公告)日：2007-04-24

申请号：US10847526

申请日：2004-05-17

申请人： Paul F. Forderhase

发明人： Paul F. Forderhase

IPC分类号： A63G25/00

CPC分类号： B62M6/55 ,  B62M1/36

摘要： An auxiliary power system for a bicycle having a motor (10) attached to the bicycle flame (22) by thin clamps (30), which can be arranged in a variety of positions to avoid disturbing the control cables. Power is delivered on demand via a sprocket driving a single freewheel (180) attached to a modified left crank (200). The gearbox (20) may be attached to the frame by means of a quick-release system. A bushing (600), (700), (820) may be used instead of a modified as a means of mounting the freewheel to the crank axle. (720), (610), (850b). To prevent accidental simultaneous braking and triggering, triggering the system is accomplished by placing the trigger switch (430) so that the rider's fingers must disengage the brake in order to engage the motor. Accidental triggering may be prevented by placing a trigger switch on each handle and wiring them in series so that both switches must be engaged to obtain power.

摘要翻译： 一种用于自行车的辅助动力系统，其具有通过薄夹具（30）附接到自行车火焰（22）的电动机（10），其可以布置在各种位置以避免干扰控制电缆。 根据需要通过链轮驱动功率，该链轮驱动附接到改进的左曲柄（200）的单个自由轮（180）。 齿轮箱（20）可以通过快速释放系统附接到框架。 可以使用衬套（600），（700），（820）代替修改为将自由轮安装到曲轴上的装置。 （720），（610），（850b）。 为了防止意外的同时制动和触发，通过放置触发开关（430）来实现触发系统，使得骑车人的手指必须脱离制动器以接合电动机。 可以通过在每个手柄上放置触发开关并串联连接来防止意外触发，从而两个开关必须接合才能获得电力。