Method for fabricating organic thin film transistor
    2.
    发明授权
    Method for fabricating organic thin film transistor 有权
    制造有机薄膜晶体管的方法

    公开(公告)号:US07241652B2

    公开(公告)日:2007-07-10

    申请号:US11123120

    申请日:2005-05-06

    IPC分类号: H01L21/336 H01L21/8234

    摘要: Disclosed herein is a method for fabricating an organic thin film transistor that includes a gate electrode, a gate insulating film, source/drain electrodes and an organic semiconductor layer formed in this order on a substrate wherein the surface of the gate insulating film on which source/drain electrodes are formed is impregnated with an inorganic or organic acid, followed by annealing. According to the method, the surface of a gate insulating film damaged by a photoresist process can be effectively recovered. In addition, organic thin film transistors having high charge carrier mobility and high on/off current ratio can be fabricated.

    摘要翻译: 本文公开了一种制造有机薄膜晶体管的方法,其包括在基板上依次形成的栅电极,栅极绝缘膜,源/漏电极和有机半导体层,其中源绝缘膜的表面 /漏电极浸渍无机或有机酸,然后进行退火。 根据该方法,可以有效地回收由光刻胶工艺损坏的栅极绝缘膜的表面。 此外,可以制造具有高电荷载流子迁移率和高导通/截止电流比的有机薄膜晶体管。

    Organic thin film transistor comprising multi-layered gate insulator
    3.
    发明授权
    Organic thin film transistor comprising multi-layered gate insulator 有权
    包括多层栅极绝缘体的有机薄膜晶体管

    公开(公告)号:US07005674B2

    公开(公告)日:2006-02-28

    申请号:US10769816

    申请日:2004-02-03

    IPC分类号: H01L35/24 H01L29/76

    摘要: An organic thin film transistor (OTFT) comprising a gate electrode, a gate insulating film, an organic active layer and a source/drain electrode, or a gate electrode, a gate insulating film, a source/drain electrode and an organic active layer, sequentially formed on a substrate, wherein the gate insulating film is a multi-layered insulator comprising a first layer of a high dielectric material and a second layer of an insulating organic polymer compatible with the organic active layer, the second layer being positioned directly under the organic active layer. The OTFT of the present invention shows low threshold and driving voltages, high charge mobility, and high Ion/Ioff, and it can be prepared by a wet process.

    摘要翻译: 一种有机薄膜晶体管(OTFT),包括栅极,栅极绝缘膜,有机活性层和源极/漏极,或栅电极,栅极绝缘膜,源/漏电极和有机活性层, 依次形成在基板上,其中栅极绝缘膜是包括高介电材料的第一层和与有机活性层相容的绝缘有机聚合物的第二层的多层绝缘体,第二层位于 有机活性层。 本发明的OTFT显示低阈值和驱动电压,高电荷迁移率和高/低电流,并且可以通过湿法制备。

    Organic thin film transistor including fluorine-based polymer thin film and method of fabricating the same
    4.
    发明授权
    Organic thin film transistor including fluorine-based polymer thin film and method of fabricating the same 有权
    包含氟基聚合物薄膜的有机薄膜晶体管及其制造方法

    公开(公告)号:US07364940B2

    公开(公告)日:2008-04-29

    申请号:US11296704

    申请日:2005-12-08

    IPC分类号: H01L51/40

    摘要: An organic thin film transistor including a fluorine-based polymer thin film and method of fabricating the same. The organic thin film transistor may include a gate electrode, a gate insulating layer, an organic semiconductor layer, source electrode, and a drain electrode formed on a substrate wherein a fluorine-based polymer thin film may be formed (or deposited) at the interface between the gate insulating layer and the organic semiconductor layer. The organic thin film transistor may have higher charge carrier mobility and/or higher on/off current ratio (Ion/Ioff). In addition, a polymer organic semiconductor may be used to form the insulating layer and the organic semiconductor layer by wet processes, so the organic thin film transistor may be fabricated by simplified procedure(s) at reduced costs.

    摘要翻译: 包含氟基聚合物薄膜的有机薄膜晶体管及其制造方法。 有机薄膜晶体管可以包括形成在基板上的栅电极,栅极绝缘层,有机半导体层,源电极和漏电极,其中可以在界面处形成(或沉积)氟基聚合物薄膜 在栅绝缘层和有机半导体层之间。 有机薄膜晶体管可具有较高的电荷载流子迁移率和/或较高的导通/截止电流比(I />)。 此外,可以使用聚合物有机半导体通过湿法形成绝缘层和有机半导体层,因此有机薄膜晶体管可以通过简化的程序以降低的成本制造。

    Composition for forming passivation layer and organic thin film transistor comprising the passivation layer
    7.
    发明申请
    Composition for forming passivation layer and organic thin film transistor comprising the passivation layer 有权
    用于形成钝化层的组合物和包含钝化层的有机薄膜晶体管

    公开(公告)号:US20090045396A1

    公开(公告)日:2009-02-19

    申请号:US12078403

    申请日:2008-03-31

    摘要: Disclosed herein is a composition including a perfluoropolyether derivative, a photosensitive polymer or a copolymer thereof, and a photocuring agent, a passivation layer, organic thin film transistor, and electronic device including the same, a method of forming the passivation layer and methods of fabricating the organic thin film transistor and electronic device. The organic thin film transistor may prevent or reduce oxygen and moisture from infiltrating thereinto, and thus may prevent or reduce the degradation of the performance thereof caused by ambient air, prevent or reduce the deterioration thereof, and may more easily be formed into a pattern, thereby exhibiting characteristics suitable for use in electronics.

    摘要翻译: 本文公开了包含全氟聚醚衍生物,光敏聚合物或其共聚物,光固化剂,钝化层,有机薄膜晶体管和包括其的电子器件的组合物,形成钝化层的方法和制造方法 有机薄膜晶体管和电子器件。 有机薄膜晶体管可以防止或减少氧气和水分渗入其中,从而可以防止或减少由环境空气引起的性能的劣化,防止或减少其劣化,并且可以更容易地形成为图案, 从而表现出适用于电子设备的特性。

    Methods of fabricating organic thin film transistors and organic thin film transistors fabricated using the same
    8.
    发明申请
    Methods of fabricating organic thin film transistors and organic thin film transistors fabricated using the same 有权
    制造有机薄膜晶体管的方法和使用其制造的有机薄膜晶体管

    公开(公告)号:US20070194386A1

    公开(公告)日:2007-08-23

    申请号:US11604826

    申请日:2006-11-28

    IPC分类号: H01L29/94

    摘要: Disclosed are methods of fabricating organic thin film transistors composed of a substrate, a gate electrode, a gate insulating film, metal oxide source/drain electrodes, and an organic semiconductor layer. The methods include applying a sufficient quantity of a self-assembled monolayer compound containing a live ion to the surfaces of the metal oxide electrodes to form a self-assembled monolayer. The presence of the live ion at the interface between the metal oxide electrodes and the organic semiconductor layer modifies the relative work function of these materials. Further, the presence of the self-assembled monolayer on the gate insulating film tends to reduce hysteresis. Accordingly, organic thin film transistors fabricated in accord with the example embodiments tend to exhibit improved charge mobility, improved gate insulating film properties and decreased hysteresis associated with the organic insulator.

    摘要翻译: 公开了制造由基板,栅极,栅极绝缘膜,金属氧化物源极/漏极和有机半导体层组成的有机薄膜晶体管的方法。 所述方法包括将足够量的含有活性离子的自组装单层化合物施加到金属氧化物电极的表面以形成自组装单层。 在金属氧化物电极和有机半导体层之间的界面处存在活性离子来改变这些材料的相对功函数。 此外,在栅极绝缘膜上存在自组装单层趋于减小滞后。 因此,根据示例性实施例制造的有机薄膜晶体管倾向于表现出改善的电荷迁移率,改善的栅极绝缘膜性质和与有机绝缘体相关联的减小的滞后。

    Methods of fabricating organic thin film transistors
    9.
    发明授权
    Methods of fabricating organic thin film transistors 有权
    制造有机薄膜晶体管的方法

    公开(公告)号:US08476103B2

    公开(公告)日:2013-07-02

    申请号:US13355940

    申请日:2012-01-23

    IPC分类号: H01L21/00

    摘要: Disclosed is a method for forming banks during the fabrication of electronic devices incorporating an organic semiconductor material that includes preparing an aqueous coating composition having at least a water-soluble polymer, a UV curing agent and a water-soluble fluorine compound. This coating composition is applied to a substrate, exposed using UV radiation and then developed using an aqueous developing composition to form the bank pattern. Because the coating composition can be developed using an aqueous composition rather than an organic solvent or solvent system, the method tends to preserve the integrity of other organic structures present on the substrate. Further, the incorporation of the fluorine compound in the aqueous solution provides a degree of control over the contact angles exhibited on the surface of the bank pattern and thereby can avoid or reduce subsequent surface treatments.

    摘要翻译: 公开了一种在制造包含有机半导体材料的电子器件的过程中形成堤的方法,包括制备至少具有水溶性聚合物,UV固化剂和水溶性氟化合物的水性涂料组合物。 将该涂料组合物施加到基材上,使用UV辐射曝光,然后使用水性显影组合物显影以形成图案。 因为涂料组合物可以使用水性组合物而不是有机溶剂或溶剂体系显影,所以该方法倾向于保持存在于基材上的其它有机结构的完整性。 此外,氟化合物在水溶液中的引入提供了对在堤形图案的表面上显示的接触角的控制程度,从而可以避免或减少随后的表面处理。

    Method of fabricating thin film transistor
    10.
    发明授权
    Method of fabricating thin film transistor 有权
    制造薄膜晶体管的方法

    公开(公告)号:US07834352B2

    公开(公告)日:2010-11-16

    申请号:US11972847

    申请日:2008-01-11

    IPC分类号: H01L31/00

    摘要: A method of fabricating a thin film transistor, in which source and drain electrodes are formed through a solution process, even all stages which include formation of electrodes on a substrate, formation of an insulator layer, and formation of an organic semiconductor layer are conducted through the solution process. In the method, the fabrication is simplified and a fabrication cost is reduced. It is possible to apply the organic thin film transistor to integrated circuits requiring high speed switching because of high charge mobility.

    摘要翻译: 制造薄膜晶体管的方法,其中源极和漏极通过溶液处理形成,甚至包括在衬底上形成电极的所有阶段,形成绝缘体层以及形成有机半导体层通过 解决过程。 在该方法中,简化了制造并降低了制造成本。 由于高电荷迁移率,有机薄膜晶体管可能需要高速切换的集成电路。