ZnO-BASED THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
    4.
    发明申请
    ZnO-BASED THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME 有权
    基于ZnO的薄膜晶体管及其制造方法

    公开(公告)号:US20080283831A1

    公开(公告)日:2008-11-20

    申请号:US11960567

    申请日:2007-12-19

    IPC分类号: H01L29/227 H01L21/34

    CPC分类号: H01L29/7869

    摘要: A ZnO-based thin film transistor (TFT) is provided herein, as is a method of manufacturing the TFT. The ZnO-based TFT has a channel layer that comprises ZnO and ZnCl, wherein the ZnCl has a higher bonding energy than ZnO with respect to plasma. The ZnCl is formed through the entire channel layer, and specifically is formed in a region near THE surface of the channel layer. Since the ZnCl is strong enough not to be decomposed when exposed to plasma etching gas, an increase in the carrier concentration can be prevented. The distribution of ZnCl in the channel layer, may result from the inclusion of chlorine (Cl) in the plasma gas during the patterning of the channel layer.

    摘要翻译: 这里提供了一种ZnO基薄膜晶体管(TFT),以及TFT的制造方法。 ZnO基TFT具有包含ZnO和ZnCl的沟道层,其中ZnCl相对于等离子体具有比ZnO高的结合能。 ZnCl是通过整个沟道层形成的,具体地形成在沟道层表面附近的区域。 由于ZnCl强度足够暴露于等离子体蚀刻气体时不会分解,因此可以防止载流子浓度的增加。 ZnCl在沟道层中的分布可能是由于在沟道层图案化期间在等离子体气体中包含氯(Cl)。

    Transistor, Method Of Manufacturing The Same, And Electronic Device Including The Transistor
    5.
    发明申请
    Transistor, Method Of Manufacturing The Same, And Electronic Device Including The Transistor 审中-公开
    晶体管及其制造方法及包括晶体管的电子器件

    公开(公告)号:US20120168756A1

    公开(公告)日:2012-07-05

    申请号:US13157773

    申请日:2011-06-10

    摘要: Transistors, methods of manufacturing the same, and electronic devices including the transistors. The transistor may include a light blocking member which surrounds at least a portion of the channel layer. The light blocking member may be designed to block light laterally incident from a side of the transistor toward the channel layer (that is, laterally incident light). The light blocking member may be disposed in a portion of a gate insulation layer outside the channel layer. The light blocking member may be connected to a source and a drain or may be connected to a gate. The light blocking member may be separated from the source, the drain and the gate. The light blocking member may completely surround the channel layer.

    摘要翻译: 晶体管及其制造方法以及包括晶体管的电子器件。 晶体管可以包括围绕沟道层的至少一部分的遮光构件。 遮光构件可以被设计成阻挡从晶体管的侧面朝向沟道层(即,横向入射的光)侧向入射的光。 遮光构件可以设置在沟道层外部的栅极绝缘层的一部分中。 遮光构件可以连接到源极和漏极,或者可以连接到栅极。 遮光构件可以与源极,漏极和栅极分离。 光阻挡构件可以完全围绕通道层。

    ZnO-BASED THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME
    6.
    发明申请
    ZnO-BASED THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THE SAME 有权
    基于ZnO的薄膜晶体管及其制造方法

    公开(公告)号:US20100051942A1

    公开(公告)日:2010-03-04

    申请号:US12615315

    申请日:2009-11-10

    IPC分类号: H01L29/227

    CPC分类号: H01L29/7869

    摘要: A ZnO-based thin film transistor (TFT) is provided herein, as is a method of manufacturing the TFT. The ZnO-based TFT has a channel layer that comprises ZnO and ZnCl, wherein the ZnCl has a higher bonding energy than ZnO with respect to plasma. The ZnCl is formed through the entire channel layer, and specifically is formed in a region near THE surface of the channel layer. Since the ZnCl is strong enough not to be decomposed when exposed to plasma etching gas, an increase in the carrier concentration can be prevented. The distribution of ZnCl in the channel layer, may result from the inclusion of chlorine (Cl) in the plasma gas during the patterning of the channel layer.

    摘要翻译: 这里提供了一种ZnO基薄膜晶体管(TFT),以及TFT的制造方法。 ZnO基TFT具有包含ZnO和ZnCl的沟道层,其中ZnCl相对于等离子体具有比ZnO高的结合能。 ZnCl是通过整个沟道层形成的,具体地形成在沟道层表面附近的区域。 由于ZnCl强度足够暴露于等离子体蚀刻气体时不会分解,因此可以防止载流子浓度的增加。 ZnCl在沟道层中的分布可能是由于在沟道层图案化期间在等离子体气体中包含氯(Cl)。

    METHOD OF MANUFACTURING ZnO-BASED THIN FILM TRANSISTOR
    7.
    发明申请
    METHOD OF MANUFACTURING ZnO-BASED THIN FILM TRANSISTOR 有权
    制备ZnO基薄膜晶体管的方法

    公开(公告)号:US20080299702A1

    公开(公告)日:2008-12-04

    申请号:US12110744

    申请日:2008-04-28

    IPC分类号: H01L21/00 H01L21/84

    CPC分类号: H01L29/7869

    摘要: A ZnO-based thin film transistor (TFT) is provided herein. Also provided is a method for manufacturing the TFT. The ZnO-based TFT is very sensitive to the oxygen concentration present in a channel layer. In order to prevent damage to a channel layer of a bottom gate TFT, and to avoid a deep negative threshold voltage resulting from damage to the channel layer, the method for manufacturing the ZnO-based TFT comprises formation of an etch stop layer or a passivation layer comprising unstable or incompletely bonded oxygen, and annealing the layers to induce an interfacial reaction between the oxide layer and the channel layer and to reduce the carrier concentration.

    摘要翻译: 本文提供了一种ZnO基薄膜晶体管(TFT)。 还提供了一种用于制造TFT的方法。 ZnO基TFT对通道层中存在的氧浓度非常敏感。 为了防止对底栅TFT的沟道层的损坏,并且为了避免由于对沟道层的损坏而产生的深负阈值电压,制造ZnO基TFT的方法包括形成蚀刻停止层或钝化层 层,其包含不稳定或不完全结合的氧,并且退火层以在氧化物层和沟道层之间引起界面反应并降低载流子浓度。