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公开(公告)号：US07781317B2
公开(公告)日：2010-08-24
申请号：US11619413
申请日：2007-01-03
申请人： Joshua Goldberger , Melissa Fardy , Oded Rabin , Allon Hochbaum , Minjuan Zhang , Peidong Yang
发明人： Joshua Goldberger , Melissa Fardy , Oded Rabin , Allon Hochbaum , Minjuan Zhang , Peidong Yang
IPC分类号： H01L21/20
CPC分类号： C01B19/007 , B82Y30/00 , C01G21/00 , C01G21/21 , C01P2004/03 , C01P2004/04 , C01P2004/16 , C01P2004/62 , C01P2004/64 , C01P2004/80 , C01P2006/40 , C30B23/007 , C30B25/00 , C30B29/46 , C30B29/60 , Y02P20/129 , Y10S977/84 , Y10S977/842 , Y10S977/843 , Y10S977/844 , Y10S977/89 , Y10S977/895 , Y10S977/896 , Y10S977/897 , Y10S977/898 , Y10S977/899
摘要： A method for the non-catalytic growth of nanowires is provided. The method includes a reaction chamber with the chamber having an inlet end, an exit end and capable of being heated to an elevated temperature. A carrier gas with a flow rate is allowed to enter the reaction chamber through the inlet end and exit the chamber through the exit end. Upon passing through the chamber the carrier gas comes into contact with a precursor which is heated within the reaction chamber. A collection substrate placed downstream from the precursor allows for the formation and growth of nanowires thereon without the use of a catalyst. A second embodiment of the present invention is comprised of a reaction chamber, a carrier gas, a precursor target, a laser beam and a collection substrate. The carrier gas with a flow rate and a gas pressure is allowed to enter the reaction chamber through an inlet end and exit the reaction chamber through the exit end. The laser beam is focused on the precursor target which affords for the evaporation of the precursor material and subsequent formation and growth of nanowires on the collection substrate.
摘要翻译： 提供了一种非催化生长纳米线的方法。 该方法包括反应室，该室具有入口端，出口端并能够被加热到升高的温度。 允许具有流速的载气通过入口端进入反应室，并通过出口端离开室。 当通过室时，载气与在反应室内被加热的前体接触。 放置在前体下游的收集衬底允许在其上形成和生长纳米线，而不使用催化剂。 本发明的第二实施例由反应室，载气，前体靶，激光束和收集基底组成。 允许具有流速和气体压力的载气通过入口端进入反应室，并通过出口端离开反应室。 激光束聚焦在前体靶上，其提供前体材料的蒸发，随后在收集基底上形成和生长纳米线。
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公开(公告)号：US20080157031A1
公开(公告)日：2008-07-03
申请号：US11619413
申请日：2007-01-03
申请人： Joshua Goldberger , Melissa Fardy , Oded Rabin , Allon Hochbaum , Minjuan Zhang , Peidong Yang
发明人： Joshua Goldberger , Melissa Fardy , Oded Rabin , Allon Hochbaum , Minjuan Zhang , Peidong Yang
CPC分类号： C01B19/007 , B82Y30/00 , C01G21/00 , C01G21/21 , C01P2004/03 , C01P2004/04 , C01P2004/16 , C01P2004/62 , C01P2004/64 , C01P2004/80 , C01P2006/40 , C30B23/007 , C30B25/00 , C30B29/46 , C30B29/60 , Y02P20/129 , Y10S977/84 , Y10S977/842 , Y10S977/843 , Y10S977/844 , Y10S977/89 , Y10S977/895 , Y10S977/896 , Y10S977/897 , Y10S977/898 , Y10S977/899
摘要： A method for the non-catalytic growth of nanowires is provided. The method includes a reaction chamber with the chamber having an inlet end, an exit end and capable of being heated to an elevated temperature. A carrier gas with a flow rate is allowed to enter the reaction chamber through the inlet end and exit the chamber through the exit end. Upon passing through the chamber the carrier gas comes into contact with a precursor which is heated within the reaction chamber. A collection substrate placed downstream from the precursor allows for the formation and growth of nanowires thereon without the use of a catalyst. A second embodiment of the present invention is comprised of a reaction chamber, a carrier gas, a precursor target, a laser beam and a collection substrate. The carrier gas with a flow rate and a gas pressure is allowed to enter the reaction chamber through an inlet end and exit the reaction chamber through the exit end. The laser beam is focused on the precursor target which affords for the evaporation of the precursor material and subsequent formation and growth of nanowires on the collection substrate.
摘要翻译： 提供了一种非催化生长纳米线的方法。 该方法包括反应室，该室具有入口端，出口端并能够被加热到升高的温度。 允许具有流速的载气通过入口端进入反应室，并通过出口端离开室。 当通过室时，载气与在反应室内被加热的前体接触。 放置在前体下游的收集衬底允许在其上形成和生长纳米线，而不使用催化剂。 本发明的第二实施例由反应室，载气，前体靶，激光束和收集基底组成。 允许具有流速和气体压力的载气通过入口端进入反应室，并通过出口端离开反应室。 激光束聚焦在前体靶上，其提供前体材料的蒸发，随后在收集基底上形成和生长纳米线。
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3.发明申请THICK POROUS ANODIC ALUMINA FILMS AND NANOWIRE ARRAYS GROWN ON A SOLID SUBSTRATE 有权厚多孔阳极氧化铝膜和固体基底上的纳米阵列公开(公告)号：US20080210662A1
公开(公告)日：2008-09-04
申请号：US11832309
申请日：2007-08-01
CPC分类号： C23C14/024 , B82Y30/00 , C23C14/16 , C23C14/5873 , C30B7/00 , C30B7/005 , C30B29/605 , H01L35/32 , H01L35/34 , Y10T156/10 , Y10T428/12486 , Y10T428/1259 , Y10T428/24273 , Y10T428/24322 , Y10T428/24917
摘要： The presently disclosed invention provides for the fabrication of porous anodic alumina (PAA) films on a wide variety of substrates. The substrate comprises a wafer layer and may further include an adhesion layer deposited on the wafer layer. An anodic alumina template is formed on the substrate. When a rigid substrate such as Si is used, the resulting anodic alumina film is more tractable, easily grown on extensive areas in a uniform manner, and manipulated without danger of cracking. The substrate can be manipulated to obtain free-standing alumina templates of high optical quality and substantially flat surfaces. PAA films can also be grown this way on patterned and non-planar surfaces. Furthermore, under certain conditions the resulting PAA is missing the barrier layer (partially or completely) and the bottom of the pores can be readily accessed electrically. The resultant film can be used as a template for forming an array of nanowires wherein the nanowires are deposited electrochemically into the pores of the template. By patterning the electrically conducting adhesion layer, pores in different areas of the template can be addressed independently, and can be filled electrochemically by different materials. Single-stage and multi-stage nanowire-based thermoelectric devices, consisting of both n-type and p-type nanowires, can be assembled on a silicon substrate by this method.
摘要翻译： 目前公开的发明提供了在各种基底上制造多孔阳极氧化铝（PAA）膜。 衬底包括晶片层，并且还可以包括沉积在晶片层上的粘附层。 在基板上形成阳极氧化铝模板。 当使用诸如Si的刚性基材时，所得的阳极氧化铝膜更易于处理，容易在均匀的方式在广泛的区域生长，并且操作而没有开裂的危险。 可以操作基底以获得高光学质量和基本平坦表面的独立氧化铝模板。 PAA膜也可以在图案和非平面表面上生长。 此外，在某些条件下，所得PAA缺少阻挡层（部分或完全），并且孔的底部可以容易地电接触。 所得膜可以用作形成纳米线阵列的模板，其中纳米线电化学沉积到模板的孔中。 通过图案化导电粘合层，可以独立地解决模板的不同区域中的孔，并且可以通过不同的材料电化学填充。 通过这种方法，可以在硅衬底上组装由n型和p型纳米线组成的单级和多级纳米线型热电装置。
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4.发明授权Thick porous anodic alumina films and nanowire arrays grown on a solid substrate 失效在固体基底上生长的厚多孔阳极氧化铝膜和纳米线阵列公开(公告)号：US07267859B1
公开(公告)日：2007-09-11
申请号：US10303653
申请日：2002-11-25
CPC分类号： C23C14/024 , B82Y30/00 , C23C14/16 , C23C14/5873 , C30B7/00 , C30B7/005 , C30B29/605 , H01L35/32 , H01L35/34 , Y10T156/10 , Y10T428/12486 , Y10T428/1259 , Y10T428/24273 , Y10T428/24322 , Y10T428/24917
摘要： The presently disclosed invention provides for the fabrication of porous anodic alumina (PAA) films on a wide variety of substrates. The substrate comprises a wafer layer and may further include an adhesion layer deposited on the wafer layer. An anodic alumina template is formed on the substrate. When a rigid substrate such as Si is used, the resulting anodic alumina film is more tractable, easily grown on extensive areas in a uniform manner, and manipulated without danger of cracking. The substrate can be manipulated to obtain free-standing alumina templates of high optical quality and substantially flat surfaces PAA films can also be grown this way on patterned and non-planar surfaces. Furthermore, under certain conditions the resulting PAA is missing the barrier layer (partially or completely) and the bottom of the pores can be readily accessed electrically. The resultant film can be used as a template for forming an array of nanowires wherein the nanowires are deposited electrochemically into the pores of the template. By patterning the electrically conducting adhesion layer, pores in different areas of the template can be addressed independently, and can be filled electrochemically by different materials. Single-stage and multi-stage nanowire-based thermoelectric devices, consisting of both n-type and p-type nanowires, can be assembled on a silicon substrate by this method.
摘要翻译： 目前公开的发明提供了在各种基底上制造多孔阳极氧化铝（PAA）膜。 衬底包括晶片层，并且还可以包括沉积在晶片层上的粘附层。 在基板上形成阳极氧化铝模板。 当使用诸如Si的刚性基材时，所得的阳极氧化铝膜更易于处理，容易在均匀的方式在广泛的区域生长，并且操作而没有开裂的危险。 可以操作基底以获得高光学质量的自立式氧化铝模板和基本平坦的表面。也可以在图案化和非平面表面上生长PAA膜。 此外，在某些条件下，所得PAA缺少阻挡层（部分或完全），并且孔的底部可以容易地电接触。 所得膜可以用作形成纳米线阵列的模板，其中纳米线电化学沉积到模板的孔中。 通过图案化导电粘合层，可以独立地解决模板的不同区域中的孔，并且可以通过不同的材料电化学填充。 通过这种方法，可以在硅衬底上组装由n型和p型纳米线组成的单级和多级纳米线型热电装置。
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公开(公告)号：US09279759B2
公开(公告)日：2016-03-08
申请号：US13986424
申请日：2013-05-01
申请人： Woonjoo Lee , Seung Yong Lee , Oded Rabin , Robert M. Briber , Xin Zhang
发明人： Woonjoo Lee , Seung Yong Lee , Oded Rabin , Robert M. Briber , Xin Zhang
CPC分类号： G01N21/01 , B05D3/10 , B05D3/101 , G01N21/648 , G01N21/658 , Y10T428/24893
摘要： The present invention is directed to self-assembled nanoparticle arrays, methods of making the nanoparticle arrays, and methods of using the nanoparticle arrays in spectroscopic methods for detecting targets of interest. The present invention is also directed to a fabrication method for surface-enhanced Raman scattering (SERS) substrates that possess a unique combination of three highly desirable attributes: (a) the SERS substrates can be tuned to match the laser wavelength of operation and maximize the enhancement factor for the particular Raman instrument and analyte in use; (b) the SERS substrates have a highly reproducible enhancement factor over macroscopic sampling areas; and (c) the fabrication method is achieved without resorting to expensive, slow nano-lithography tools.
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6.发明申请THICK POROUS ANODIC ALUMINA FILMS AND NANOWIRE ARRAYS GROWN ON A SOLID SUBSTRATE 失效厚多孔阳极氧化铝膜和固体基底上的纳米阵列公开(公告)号：US20070224399A1
公开(公告)日：2007-09-27
申请号：US10303653
申请日：2002-11-25
申请人： Oded Rabin , Paul Herz , Mildred Dresselhaus , Akintunde Akinwande , Yu-Ming Lin
发明人： Oded Rabin , Paul Herz , Mildred Dresselhaus , Akintunde Akinwande , Yu-Ming Lin
IPC分类号： B32B3/00
CPC分类号： C23C14/024 , B82Y30/00 , C23C14/16 , C23C14/5873 , C30B7/00 , C30B7/005 , C30B29/605 , H01L35/32 , H01L35/34 , Y10T156/10 , Y10T428/12486 , Y10T428/1259 , Y10T428/24273 , Y10T428/24322 , Y10T428/24917
摘要： The presently disclosed invention provides for the fabrication of porous anodic alumina (PAA) films on a wide variety of substrates. The substrate comprises a wafer layer and may further include an adhesion layer deposited on the wafer layer. An anodic alumina template is formed on the substrate. When a rigid substrate such as Si is used, the resulting anodic alumina film is more tractable, easily grown on extensive areas in a uniform manner, and manipulated without danger of cracking. The substrate can be manipulated to obtain free-standing alumina templates of high optical quality and substantially flat surfaces PAA films can also be grown this way on patterned and non-planar surfaces. Furthermore, under certain conditions the resulting PAA is missing the barrier layer (partially or completely) and the bottom of the pores can be readily accessed electrically. The resultant film can be used as a template for forming an array of nanowires wherein the nanowires are deposited electrochemically into the pores of the template. By patterning the electrically conducting adhesion layer, pores in different areas of the template can be addressed independently, and can be filled electrochemically by different materials. Single-stage and multi-stage nanowire-based thermoelectric devices, consisting of both n-type and p-type nanowires, can be assembled on a silicon substrate by this method
摘要翻译： 目前公开的发明提供了在各种基底上制造多孔阳极氧化铝（PAA）膜。 衬底包括晶片层，并且还可以包括沉积在晶片层上的粘附层。 在基板上形成阳极氧化铝模板。 当使用诸如Si的刚性基材时，所得的阳极氧化铝膜更易于处理，容易在均匀的方式在广泛的区域生长，并且操作而没有开裂的危险。 可以操作基底以获得高光学质量的自立式氧化铝模板和基本平坦的表面。也可以在图案化和非平面表面上生长PAA膜。 此外，在某些条件下，所得PAA缺少阻挡层（部分或完全），并且孔的底部可以容易地电接触。 所得膜可以用作形成纳米线阵列的模板，其中纳米线电化学沉积到模板的孔中。 通过图案化导电粘合层，可以独立地解决模板的不同区域中的孔，并且可以通过不同的材料电化学填充。 由n型和p型纳米线组成的单级和多级纳米线型热电装置可以通过这种方法组装在硅衬底上
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公开(公告)号：US20130293884A1
公开(公告)日：2013-11-07
申请号：US13986424
申请日：2013-05-01
申请人： Woonjoo Lee , Seung Yong Lee , Oded Rabin , Robert M. Briber , Xin Zhang
发明人： Woonjoo Lee , Seung Yong Lee , Oded Rabin , Robert M. Briber , Xin Zhang
CPC分类号： G01N21/01 , B05D3/10 , B05D3/101 , G01N21/648 , G01N21/658 , Y10T428/24893
摘要： The present invention is directed to self-assembled nanoparticle arrays, methods of making the nanoparticle arrays, and methods of using the nanoparticle arrays in spectroscopic methods for detecting targets of interest. The present invention is also directed to a fabrication method for surface-enhanced Raman scattering (SERS) substrates that possess a unique combination of three highly desirable attributes: (a) the SERS substrates can be tuned to match the laser wavelength of operation and maximize the enhancement factor for the particular Raman instrument and analyte in use; (b) the SERS substrates have a highly reproducible enhancement factor over macroscopic sampling areas; and (c) the fabrication method is achieved without resorting to expensive, slow nano-lithography tools.
摘要翻译： 本发明涉及自组装纳米颗粒阵列，制备纳米颗粒阵列的方法，以及在用于检测目的靶的光谱方法中使用纳米颗粒阵列的方法。 本发明还涉及一种用于表面增强拉曼散射（SERS）衬底的制造方法，其具有三种非常理想属性的独特组合：（a）可以调整SERS衬底以匹配操作的激光波长并使 特定拉曼仪器和分析物在使用中的增强因子; （b）SERS底物在宏观取样区域具有高度可重现的增强因子; 和（c）制造方法是在不使用昂贵，缓慢的纳米光刻工具的情况下实现的。
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8.发明授权Thick porous anodic alumina films and nanowire arrays grown on a solid substrate 有权在固体基底上生长的厚多孔阳极氧化铝膜和纳米线阵列公开(公告)号：US07875195B2
公开(公告)日：2011-01-25
申请号：US11832309
申请日：2007-08-01
IPC分类号： H01B13/00
CPC分类号： C23C14/024 , B82Y30/00 , C23C14/16 , C23C14/5873 , C30B7/00 , C30B7/005 , C30B29/605 , H01L35/32 , H01L35/34 , Y10T156/10 , Y10T428/12486 , Y10T428/1259 , Y10T428/24273 , Y10T428/24322 , Y10T428/24917
摘要： The presently disclosed invention provides for the fabrication of porous anodic alumina (PAA) films on a wide variety of substrates. The substrate comprises a wafer layer and may further include an adhesion layer deposited on the wafer layer. An anodic alumina template is formed on the substrate. When a rigid substrate such as Si is used, the resulting anodic alumina film is more tractable, easily grown on extensive areas in a uniform manner, and manipulated without danger of cracking. The substrate can be manipulated to obtain free-standing alumina templates of high optical quality and substantially flat surfaces. PAA films can also be grown this way on patterned and non-planar surfaces. Furthermore, under certain conditions, the resulting PAA is missing the barrier layer (partially or completely) and the bottom of the pores can be readily accessed electrically. The resultant film can be used as a template for forming an array of nanowires wherein the nanowires are deposited electrochemically into the pores of the template. By patterning the electrically conducting adhesion layer, pores in different areas of the template can be addressed independently, and can be filled electrochemically by different materials. Single-stage and multi-stage nanowire-based thermoelectric devices, consisting of both n-type and p-type nanowires, can be assembled on a silicon substrate by this method.
摘要翻译： 目前公开的发明提供了在各种基底上制造多孔阳极氧化铝（PAA）膜。 衬底包括晶片层，并且还可以包括沉积在晶片层上的粘附层。 在基板上形成阳极氧化铝模板。 当使用诸如Si的刚性基材时，所得的阳极氧化铝膜更易于处理，容易在均匀的方式在广泛的区域生长，并且操作而没有开裂的危险。 可以操作基底以获得高光学质量和基本平坦表面的独立氧化铝模板。 PAA膜也可以在图案和非平面表面上生长。 此外，在某些条件下，所得PAA缺少阻挡层（部分或完全），并且孔的底部可以容易地电接触。 所得膜可以用作形成纳米线阵列的模板，其中纳米线电化学沉积到模板的孔中。 通过图案化导电粘合层，可以独立地解决模板的不同区域中的孔，并且可以通过不同的材料电化学填充。 通过这种方法，可以在硅衬底上组装由n型和p型纳米线组成的单级和多级纳米线型热电装置。
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