公开(公告)号：US20060151711A1

公开(公告)日：2006-07-13

申请号：US11274608

申请日：2005-11-15

申请人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

发明人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan Brodie ,  Davis Crewe

IPC分类号： H01J1/50

CPC分类号： H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

摘要： The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

摘要翻译： 本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。 由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向 。

公开(公告)号：US07335894B2

公开(公告)日：2008-02-26

申请号：US11274608

申请日：2005-11-15

申请人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan D. Brodie ,  David A. Crewe

发明人： Juergen Frosien ,  Stefan Lanio ,  Gerald Schoenecker ,  Alan D. Brodie ,  David A. Crewe

IPC分类号： H01J37/244

CPC分类号： H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24485

摘要： The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.

摘要翻译： 本发明涉及带电粒子单元，用于对带电粒子束的带电粒子进行偏转和能量选择。 由此，提供用于使带电粒子束偏转和聚焦并形成电位的能量滤波器的双重聚焦扇区单元，由此带电粒子束的带电粒子根据带电物品的能量在电位鞍上被重定向 。

公开(公告)号：US09048068B2

公开(公告)日：2015-06-02

申请号：US12776980

申请日：2010-05-10

申请人： Stefan Lanio ,  Gerald Schoenecker

发明人： Stefan Lanio ,  Gerald Schoenecker

IPC分类号： H01J37/28 ,  H01J37/147 ,  H01J37/153

CPC分类号： H01J37/28 ,  H01J37/1471 ,  H01J37/153 ,  H01J2237/1523 ,  H01J2237/1534 ,  H01J2237/244

摘要： An electron beam device comprises: a beam emitter for emitting a primary electron beam; an objective electron lens for focusing the primary electron beam onto a specimen, the objective lens defining an optical axis; a beam separator having a first dispersion for separating a signal electron beam from the primary electron beam; and a dispersion compensation element. The dispersion compensation element has a second dispersion, the dispersion compensation element being adapted for adjusting the second dispersion independently of an inclination angle of the primary beam downstream of the dispersion compensation element, such that the second dispersion substantially compensates the first dispersion. The dispersion compensation element is arranged upstream, along the primary electron beam, of the beam separator.

摘要翻译： 电子束装置包括：用于发射一次电子束的射束发射器; 用于将一次电子束聚焦到样本上的目标电子透镜，物镜限定光轴; 具有用于从一次电子束分离信号电子束的第一色散的光束分离器; 和色散补偿元件。 色散补偿元件具有第二色散，色散补偿元件适用于独立于色散补偿元件下游的主光束的倾斜角而调节第二色散，使得第二色散基本上补偿第一色散。 色散补偿元件沿着一级电子束布置在分束器的上游。

公开(公告)号：US08373136B2

公开(公告)日：2013-02-12

申请号：US12579869

申请日：2009-10-15

申请人： Gerald Schoenecker ,  Stefan Lanio

发明人： Gerald Schoenecker ,  Stefan Lanio

IPC分类号： H01J3/18 ,  H01J3/20

CPC分类号： H01J37/1472 ,  H01J2237/1508 ,  H01J2237/153

摘要： An achromatic beam separator device for separating a primary charged particle beam from another charged particle beam and providing the primary charged particle beam on an optical axis (142) is provided, including a primary charged particle beam inlet (134), a primary charged particle beam outlet (132) encompassing the optical axis, a magnetic deflection element (163) adapted to generate a magnetic field, and an electrostatic deflection element (165) adapted to generate an electric field overlapping the magnetic field, wherein at least one element chosen from the electrostatic deflection element and the magnetic deflection element is positioned and/or positionable to compensate an octopole influence.

摘要翻译： 提供了一种消色差束分离器装置，用于将初级带电粒子束与另一带电粒子束分离并在光轴（142）上提供初级带电粒子束，包括初级带电粒子束入口（134），初级带电粒子束 包括光轴的出口（132），适于产生磁场的磁偏转元件（163）和适于产生与磁场重叠的电场的静电偏转元件（165），其中，从 静电偏转元件和磁偏转元件被定位和/或定位以补偿八极杆的影响。

公开(公告)号：US4980558A

公开(公告)日：1990-12-25

申请号：US379270

申请日：1989-07-13

申请人： Harald Rose ,  Gerald Schoenecker

发明人： Harald Rose ,  Gerald Schoenecker

IPC分类号： H01J37/063 ,  H01J37/09 ,  H01J37/153 ,  H01J37/30

CPC分类号： H01J37/063 ,  H01J37/3007

摘要： An electron beam generator or electron gun has a line-shaped cathode with a flattened tip as an electron source, a slotted diaphragm disposed in the plane of the cathode tip, and a double anode having two electrodes also fashioned as slotted diaphragms. The voltage potentials of the three slotted diaphragms, and their respective distances to the cathode, are selected such that a stigmatic virtual electron source at infinity is obtained.

摘要翻译： 电子束发生器或电子枪具有线状阴极，其具有作为电子源的扁平末端，设置在阴极尖端的平面中的开槽膜，以及具有两个也被形成为开槽隔膜的电极的双阳极。 选择三个开槽的膜片的电压电位及其到阴极的相应距离，使得获得无限远的ig虚拟电子源。

公开(公告)号：US20140175277A1

公开(公告)日：2014-06-26

申请号：US13734180

申请日：2013-01-04

申请人： Stefan Lanio

发明人： Stefan Lanio ,  Jüergen Frosien ,  Gerald Schoenecker ,  Dieter Winkler

IPC分类号： H01J37/26

CPC分类号： H01J37/244 ,  H01J37/147 ,  H01J37/261 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/1516 ,  H01J2237/24465 ,  H01J2237/2449 ,  H01J2237/24592 ,  H01J2237/2806 ,  H01J2237/2812 ,  H01J2237/2814

摘要： A secondary charged particle detection system for a charged particle beam device is described. The detection system includes a beam splitter for separating a primary beam and a secondary beam formed upon impact on a specimen; a beam bender for deflecting the secondary beam; a focusing lens for focusing the secondary beam; a detection element for detecting the secondary beam particles, and three deflection elements, wherein at least a first deflector is provided between the beam bender and the focusing lens, at least a second deflector is provided between the focusing lens and the detection element, at least a third deflector is provided between the beam splitter and the detection element.

摘要翻译： 描述了带电粒子束装置的二次带电粒子检测系统。 检测系统包括用于分离初级束的分束器和在冲击样品上形成的次级束; 用于偏转次光束的光束弯曲机; 用于聚焦二次束的聚焦透镜; 用于检测次级束粒子的检测元件和三个偏转元件，其中至少第一偏转器设置在光束弯曲器和聚焦透镜之间，至少第二偏转器设置在聚焦透镜和检测元件之间，至少 在分束器和检测元件之间提供第三偏转器。