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1.发明授权
公开(公告)号：US5661744A
公开(公告)日：1997-08-26
申请号：US512710
申请日：1995-08-08
申请人： Kazuyuki Murakami , Hajime Nakatani , Atsushi Sugitatsu , Tadao Minagawa , Toshinori Yagi , Keiko Ito
发明人： Kazuyuki Murakami , Hajime Nakatani , Atsushi Sugitatsu , Tadao Minagawa , Toshinori Yagi , Keiko Ito
CPC分类号： B23K26/083 , B23K26/066
摘要： An excimer laser beam irradiation apparatus capable of processing a workpiece optimally with an excimer irradiation beam even when intensity distribution of the excimer laser beam undergone multiple reflections is non-uniform. A patterning mask has light-transmissive portions for allowing the excimer laser beam to pass through and a reflecting layer for reflecting it. A high reflectivity mirror disposed in opposition to the reflecting layer reflects the excimer laser beam reflected from the reflecting layer toward the patterning mask. An imaging lens images a pattern of the excimer laser beam transmitted through the patterning mask onto a workpiece for irradiation thereof. A workpiece moving mechanism and a mask moving mechanism move the workpiece and the mask moving mechanism, respectively. A control unit controls the workpiece moving mechanism and the mask moving mechanism such that the patterning mask and the workpiece are displaced along a same axis synchronously with each other in a scan moving direction which coincides with a direction in which the excimer laser beam shifts positionally while being reflected between the patterning mask and the reflecting means, for thereby allowing the workpiece to be scanned with the excimer laser beam. The workpiece can be processed uniformly and stably in accordance with a pattern of the patterning mask with high accuracy and reliability.
摘要翻译： 即使准分子激光束的强度分布发生多次反射也能够用准分子照射光束最佳地处理工件的准分子激光束照射装置是不均匀的。 图形掩模具有用于允许准分子激光束通过的透光部分和用于反射它的反射层。 与反射层相对设置的高反射率反射镜将从反射层反射的准分子激光束朝向图案掩模反射。 成像透镜将通过图案化掩模透射的准分子激光束的图案成像到工件上以进行照射。 工件移动机构和掩模移动机构分别移动工件和掩模移动机构。 控制单元控制工件移动机构和掩模移动机构，使得图案掩模和工件沿着与准分子激光束在位置上移动的方向一致的扫描移动方向沿同一轴线同步地移位，同时 在图案掩模和反射装置之间被反射，从而允许用准分子激光束扫描工件。 可以以高精度和可靠性根据图案化掩模的图案均匀且稳定地加工工件。
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公开(公告)号：US5811754A
公开(公告)日：1998-09-22
申请号：US444871
申请日：1995-05-19
申请人： Hajime Nakatani , Atsushi Sugitatsu , Masao Izumo , Tadao Minagawa , Yasushi Minamitani , Yoshifumi Matsushita , Toshinori Yagi , Nobuyuki Zumoto
发明人： Hajime Nakatani , Atsushi Sugitatsu , Masao Izumo , Tadao Minagawa , Yasushi Minamitani , Yoshifumi Matsushita , Toshinori Yagi , Nobuyuki Zumoto
CPC分类号： B23K26/046 , B23K26/04 , B23K26/043 , B23K26/048 , B23K26/066 , H05K3/0026 , H05K2203/056
摘要： An optical processing apparatus for processing optically a workpiece (7) by using a light beam (B). The apparatus is capable of automatically adjusting a imaging magnification to a predetermined value and at the same time maintaining constant a imaging magnification regardless of exchange of masks (3; 100) and workpieces (7) and for ensuring an extended use life of a mask with satisfactory mask function. The apparatus includes a light source system (1) for generating a light beam (B) for illuminating a mask (3; 100) having a predetermined pattern, a imaging lens (5) for copying a pattern image of the mask (3; 100) onto a workpiece (7), a mask moving mechanism (4) for moving the mask in a direction perpendicular to an optical axis (L) of the imaging lens (5), a workpiece moving mechanism for moving the workpiece in a direction perpendicular to the optical axis (L) of the imaging lens (5), a imaging magnification changing mechanism for changing inter-mask/lens/workpiece distance between the mask, the imaging lens and the workpiece, and a central control unit (9) which is comprised of an actual imaging magnification arithmetic module (91) for determining an actual imaging magnification value (M') in terms of a ratio between the copied pattern image and a predetermined pattern, a magnification decision module (92) for making decision whether or not a difference between the actual imaging magnification value and a desired imaging magnification value is smaller than a permissible value, an optical-axis displacement control module (93) responsive to indication that the difference exceeds a permissible value (.delta.) to thereby arithmetically determine on the basis of the actual and desired imaging magnification values the inter-mask/lens/workpiece distance at which the actual imaging magnification value (M') becomes equal to the desired imaging magnification value (M) for controlling thereby the imaging magnification changing mechanism so that the inter-mask/lens/workpiece distance coincides with the arithmetically determined distance, and a displacement control module for controlling the mask moving mechanism and the workpiece moving mechanism.
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公开(公告)号：US5187716A
公开(公告)日：1993-02-16
申请号：US725098
申请日：1991-07-03
申请人： Kenyu Haruta , Haruhiko Nagai , Hajime Nakatani , Yoshihiko Yamamoto , Taketoshi Takemura , Takashi Eura , Shungo Tsuboi , Yoshifumi Matsushita , Tadao Minagawa
发明人： Kenyu Haruta , Haruhiko Nagai , Hajime Nakatani , Yoshihiko Yamamoto , Taketoshi Takemura , Takashi Eura , Shungo Tsuboi , Yoshifumi Matsushita , Tadao Minagawa
IPC分类号： H01S3/038 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/225 , H01S3/0388 , H01S3/0971
摘要： At least the opposing surface portions of the main electrodes of an excimer laser device are covered with materials which are resistive to chemical etching than nickel. The etching resistive material may be a platinum based alloy containing rhodium, ruthenium, iridium, or osmium; a nickel based alloy containing gold, platinum, rhodium, ruthenium, iridium, or osmium; or rhodium, ruthenium, iridium, or osmium. Thus, an excimer laser device is realized by which the lives of the electrodes and the laser gas are prolonged.
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4.发明授权Element and device for detecting internal faults in an insulating gas charged electrical apparatus 失效用于检测绝缘气体充电电器中的内部故障的元件和装置
公开(公告)号：US4839767A
公开(公告)日：1989-06-13
申请号：US149168
申请日：1988-01-27
CPC分类号： G01N27/041 , G01N17/00
摘要： An element for detecting internal faults in an insulating gas charged electrical apparatus comprises a substrate disposed in the electrical apparatus charged with an insulating gas, a pair of electrodes disposed on the substrate, and a thin metal film covering the pair of electrodes and the exposed surface of the substrate. This film is capable of producing fluorides with low conductivity upon reacting with a decomposed gas produced by internal faults of the electrical apparatus. Since the thin metal film exhibits high response characteristics readily in reaction with even a trace amount of a decomposed gas, it is possible to promptly detect faults occurring in the electrical apparatus, such as a partial discharge or local heating. In addition, a device for detecting internal faults in an insulating gas charge electrical apparatus using the internal fault detection element utilizes an optical signal for transmitting signals. Accordingly, the device is free from electromagnetically induced interference and is capable of remote monitoring because of the low level of loss in signal transmission.
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公开(公告)号：US20120012558A1
公开(公告)日：2012-01-19
申请号：US13004191
申请日：2011-01-11
申请人： Eiichi NAGAO , Makiko Kawada , Tadao Minagawa , Ei Tsuchie , Kyoichi Ohtsuka
发明人： Eiichi NAGAO , Makiko Kawada , Tadao Minagawa , Ei Tsuchie , Kyoichi Ohtsuka
IPC分类号： H01H33/88
摘要： In a gas insulated breaking device which accommodates open/close elements including a puffer cylinder which compresses an insulation gas and extinguishes an arc and a contact finger which has a slide contact portion which is brought into slide contact with a slide contact portion of the puffer cylinder in the inside of a vessel in which the insulation gas is sealed, a relatively soft plating film is formed on the slide contact portion of the puffer cylinder, and a relatively hard plating film is formed on the slide contact portion of the contact finger, and the silver plating film of each slide contact portion has an inner layer thereof formed of a soft film and an outer layer thereof which constitutes a surface portion formed of a hard film.
摘要翻译： 在一种气体绝缘破坏装置中，该装置包括一个压缩绝缘气体并消除电弧的吹气缸的开启/关闭元件，以及具有滑动接触部分的接触指状物，该滑动接触部分与气缸的滑动接触部分滑动接触 在绝缘气体密封的容器的内部，在吹气筒的滑动接触部上形成相对软的镀膜，在接触指的滑动接触部形成相对硬的镀膜， 每个滑动接触部分的镀银膜具有由软膜及其外层形成的内层，其构成由硬膜形成的表面部分。
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公开(公告)号：US20060260678A1
公开(公告)日：2006-11-23
申请号：US11436545
申请日：2006-05-19
申请人： Eiichi Nagao , Makiko Kawada , Tadao Minagawa , Ei Tsuchie , Kyoichi Ohtsuka
发明人： Eiichi Nagao , Makiko Kawada , Tadao Minagawa , Ei Tsuchie , Kyoichi Ohtsuka
IPC分类号： H01L31/00
摘要： In a gas insulated breaking device which accommodates open/close elements including a puffer cylinder which compresses an insulation gas and extinguishes an arc and an electricity supply means which has a slide contact portion which is brought into slide contact with a slide contact portion of the puffer cylinder in the inside of a vessel in which the insulation gas is sealed, a relatively soft plating film is formed on the slide contact portion of the puffer cylinder, and a relatively hard plating film is formed on the slide contact portion of the electricity supply means, and the silver plating film of each slide contact portion has an inner layer thereof formed of a soft film and an outer layer thereof which constitutes a surface portion formed of a hard film.
摘要翻译： 在一种气体绝缘破坏装置中，该装置包括一个压缩绝缘气体并消弧的开放气缸的开/关元件，以及具有滑动接触部分的电力供应装置，该滑动接触部分与吹气管的滑动接触部分滑动接触 在绝缘气体被密封的容器的内部的气缸中，在吹气筒的滑动接触部分上形成相对软的镀膜，并且在供电装置的滑动接触部分上形成相对硬的镀膜 并且每个滑动接触部分的镀银膜具有由软膜形成的内层和构成由硬膜形成的表面部分的外层。
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公开(公告)号：US4908729A
公开(公告)日：1990-03-13
申请号：US284397
申请日：1988-12-14
摘要： A lightning arrester monitor which consists of an oxygen gas sensor provided in a lightning arrester having a zinc-oxide-type element made of zinc oxide, the main component thereof, and other oxides added thereto, the oxygen gas sensor measures the oxygen concentration of the element which increases as degradation thereof goes on. The monitor makes it possible to assess degradation of the zinc-oxide-type element with ease, without requiring any complicated electrical circuit for detecting leakage current.
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公开(公告)号：US08314355B2
公开(公告)日：2012-11-20
申请号：US11436545
申请日：2006-05-19
申请人： Eiichi Nagao , Makiko Kawada , Tadao Minagawa , Ei Tsuchie , Kyoichi Ohtsuka
发明人： Eiichi Nagao , Makiko Kawada , Tadao Minagawa , Ei Tsuchie , Kyoichi Ohtsuka
IPC分类号： H01H33/02
摘要： In a gas insulated breaking device which accommodates open/close elements including a puffer cylinder which compresses an insulation gas and extinguishes an arc and a contact finger which has a slide contact portion which is brought into slide contact with a slide contact portion of the puffer cylinder in the inside of a vessel in which the insulation gas is sealed, a relatively soft plating film is formed on the slide contact portion of the puffer cylinder, and a relatively hard plating film is formed on the slide contact portion of the contact finger, and the silver plating film of each slide contact portion has an inner layer thereof formed of a soft film and an outer layer thereof which constitutes a surface portion formed of a hard film.
摘要翻译： 在一种气体绝缘破坏装置中，该装置包括一个压缩绝缘气体并消除电弧的吹气缸的开启/关闭元件，以及具有滑动接触部分的接触指状物，该滑动接触部分与气缸的滑动接触部分滑动接触 在绝缘气体密封的容器的内部，在吹气筒的滑动接触部上形成相对软的镀膜，在接触指的滑动接触部形成相对硬的镀膜， 每个滑动接触部分的镀银膜具有由软膜及其外层形成的内层，其构成由硬膜形成的表面部分。
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公开(公告)号：US5876578A
公开(公告)日：1999-03-02
申请号：US889595
申请日：1997-07-08
申请人： Shiro Yamauchi , Tadao Minagawa , Satoshi Higashinakagawa , Hiroshi Maekawa , Mitsuhito Kamei , Chieko Nishida , Shigemitsu Okabe , Takahiro Ohno
发明人： Shiro Yamauchi , Tadao Minagawa , Satoshi Higashinakagawa , Hiroshi Maekawa , Mitsuhito Kamei , Chieko Nishida , Shigemitsu Okabe , Takahiro Ohno
IPC分类号： G01N27/406 , G01N27/407 , G01N27/416
CPC分类号： G01N27/4074
摘要： A gas sensor which can be used for measuring a low concentration repeatedly, which has a quick response and which can be used for a long time with high stability is provided. The gas sensor comprises a solid electrolyte, a detecting electrode provided in contact with one of the surfaces of the solid electrolyte and exposed to a gas to be detected, a counter electrode, provided in contact with the other surface of the solid electrolyte, and lead wires to place an electric voltage across both electrodes or to take out electric signals, wherein an inactive substance which is hard to form a reaction product with the gas to be detected is used as a material to constitute both electrodes.
摘要翻译： 提供可以重复地测量低浓度的气体传感器，其具有快速响应并且可以长时间使用，具有高稳定性。 气体传感器包括固体电解质，与固体电解质中的一个表面接触并暴露于待检测气体的检测电极，设置成与固体电解质的另一个表面接触的对电极和引线 电线在两电极上放置电压或取出电信号，其中使用难以与待检测气体形成反应产物的惰性物质用作构成两电极的材料。
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公开(公告)号：US5005181A
公开(公告)日：1991-04-02
申请号：US409916
申请日：1989-09-20
申请人： Takeo Yoshioka , Tadao Minagawa
发明人： Takeo Yoshioka , Tadao Minagawa
摘要： A gas control device in a halogen gas laser device which comprises: a filter for receiving a small quantity of deteriorated gas from the upstream portion of the laser gas circulating path to convert it into a low-boiling-point gas; and a gas detector for measuring the density of the low-boiling-point gas thus formed, to estimate the halogen gas density, and outputting, when the density is lower than a predetermined value, an instruction signal to supply halogen gas.
摘要翻译： 一种卤素气体激光装置中的气体控制装置，包括：过滤器，用于从激光气体循环路径的上游部分接收少量恶化气体，将其转化为低沸点气体; 以及气体检测器，用于测量如此形成的低沸点气体的密度，以估计卤素气体密度，并且当浓度低于预定值时输出提供卤素气体的指令信号。
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