Apparatus for producing silicon single crystal
    1.
    发明授权
    Apparatus for producing silicon single crystal 失效
    硅单晶制造装置

    公开(公告)号:US5260037A

    公开(公告)日:1993-11-09

    申请号:US903950

    申请日:1992-06-26

    摘要: An apparatus and a method for producing a silicon single crystal by Czochralski method, whereby the silicon single crystal is pulled up from a crucible while the crucible is heated by a side heater in the lateral periphery of the crucible and a bottom heater facing the bottom of the crucible. The outputs of the side heater and bottom heater are controlled independently each other so that an oxygen concentration in the pull-up direction of the pulled-up silicon single crystal is rendered uniform. In addition to the output control of the heaters, a magnetic field is applied to a molten liquid in the crucible, so that, a dopant concentration in a radial direction of the pulled-up silicon single crystal is rendered uniform.

    摘要翻译: 一种通过Czochralski法制造单晶硅的装置和方法,其中,通过在坩埚的外周边的侧面加热器将坩埚加热坩埚时,将硅单晶从坩埚中拉出,并且将底部加热器面向底部加热器 坩埚。 侧加热器和底部加热器的输出彼此独立地控制,使得上拉硅单晶的上拉方向上的氧浓度均匀。 除了加热器的输出控制之外,对坩埚中的熔融液体施加磁场,使得上拉硅单晶的半径方向的掺杂剂浓度变得均匀。

    Apparatus for producing silicon single crystal
    2.
    发明授权
    Apparatus for producing silicon single crystal 失效
    硅单晶制造装置

    公开(公告)号:US5471949A

    公开(公告)日:1995-12-05

    申请号:US330785

    申请日:1994-10-28

    摘要: A method of producing a silicon single crystal, in which a cylindrical partition is immersed in a molten pure silicon liquid or molten silicon liquid containing a Sb dopant within a crucible and the molten liquid inside the partition is pulled up from the crucible to produce the silicon single crystal, wherein an interval between a lower end of the partition and a crucible bottom is changed to control an oxygen concentration in the pulling-up silicon single crystal. The interval is reduced in the case where the oxygen concentration in the pulling-up silicon single crystal is to be increased while the interval is increased in the case where the oxygen concentration is to be reduced.

    摘要翻译: 一种制造硅单晶的方法,其中将圆柱形分隔件浸入熔融的纯硅液体或坩埚内含有Sb掺杂剂的熔融硅液体,并且将分隔壁内的熔融液体从坩埚中拉出以产生硅 单晶,其中改变分隔件的下端和坩埚底部之间的间隔,以控制提拉硅单晶中的氧浓度。 在氧浓度降低的情况下,在提高硅单晶中的氧浓度增加的同时间隔增加的情况下,间隔减小。

    Method of producing silicon single crystal
    3.
    发明授权
    Method of producing silicon single crystal 失效
    硅单晶的生产方法

    公开(公告)号:US5392729A

    公开(公告)日:1995-02-28

    申请号:US588171

    申请日:1990-09-26

    摘要: A method of producing a silicon single crystal, in which a cylindrical partition is immersed in a molten pure silicon liquid or molten silicon liquid containing a Sb dopant within a crucible and the molten liquid inside the partition is pulled up from the crucible to produce the silicon single crystal, wherein an interval between a lower end of the partition and a crucible bottom is changed to control an oxygen concentration in the pulling-up silicon single crystal. The interval is reduced in the case where the oxygen concentration in the pulling-up silicon single crystal is to be increased while the interval is increased in the case where the oxygen concentration is to be reduced.

    摘要翻译: 一种制造硅单晶的方法,其中将圆柱形分隔件浸入熔融的纯硅液体或坩埚内含有Sb掺杂剂的熔融硅液体,并且将分隔壁内的熔融液体从坩埚中拉出以产生硅 单晶,其中改变分隔件的下端和坩埚底部之间的间隔,以控制提拉硅单晶中的氧浓度。 在氧浓度降低的情况下,在提高硅单晶中的氧浓度增加的同时间隔增加的情况下,间隔减小。

    Apparatus and method for producing silicon single crystal
    4.
    发明授权
    Apparatus and method for producing silicon single crystal 失效
    硅单晶制造装置及方法

    公开(公告)号:US5152867A

    公开(公告)日:1992-10-06

    申请号:US554552

    申请日:1990-07-19

    摘要: An apparatus and a method for producing a silicon single crystal by the Czochralski method, whereby the silicon single crystal is pulled up from a crucible while the crucible is heated by a side heater in the lateral periphery of the crucible and a bottom heater facing the bottom of the crucible. The outputs of the side heater and bottom heater are controlled independently of each other so that an oxygen concentration in the pull-up direction of the pulled-up silicon single crystal is rendered uniform. In addition to the output control of the heaters, a magnetic field is applied to a molten liquid in the crucible, so that, a dopant concentration in a radial direction of the pulled-up silicon single crystal is rendered uniform.

    摘要翻译: 一种通过切克劳斯基法(Czochralski method)制造单晶硅的装置和方法,其中,通过在坩埚的外周边的侧面加热器将坩埚加热,并且底部加热器面向底部,从坩埚中拉出硅单晶 的坩埚。 侧加热器和底部加热器的输出彼此独立地控制,使得上拉硅单晶的上拉方向上的氧浓度均匀。 除了加热器的输出控制之外,对坩埚中的熔融液体施加磁场,使得上拉硅单晶的半径方向的掺杂剂浓度变得均匀。

    Apparatus for producing single crystals
    5.
    发明授权
    Apparatus for producing single crystals 失效
    单晶制造装置

    公开(公告)号:US5611857A

    公开(公告)日:1997-03-18

    申请号:US474662

    申请日:1995-06-07

    摘要: A process and apparatus for producing silicon single crystals with excellent dielectric strength of gate oxide films by adjusting the temperature gradient of the pulled-up silicon single crystal without loss of its rate of pulling. The process of producing silicon single crystals by pulling up the single crystal from a melt of material of the single crystal imposes a certain average temperature gradient on the grown single crystal while it is still at high temperature. The apparatus is provided with a heating element outside a crucible and pulling shaft with which a single crystal is pulled up from the melt of the material in the crucible. The ratio of length h of the heating element to the inside diameter .phi. of the crucible is adjusted so as to be between 0.2 and 0.8 whereby the temperature gradient can be maintained below 2.5.degree. C./mm.

    摘要翻译: 通过调节上拉硅单晶的温度梯度而不损失其拉伸速率,制造具有优异的栅极氧化膜介电强度的硅单晶的方法和装置。 通过从单晶的熔体中提取单晶来生产硅单晶的过程在生长的单晶仍处于高温时施加一定的平均温度梯度。 该设备在坩埚外部设置有加热元件和拉动轴,单晶从坩埚中的材料的熔体被拉出。 将加热元件的长度h与坩埚的内径phi的比率调整为0.2〜0.8,由此将温度梯度保持在2.5℃/ mm以下。

    Process for producing silicon single crystals
    6.
    发明授权
    Process for producing silicon single crystals 失效
    硅单晶的制造方法

    公开(公告)号:US5474019A

    公开(公告)日:1995-12-12

    申请号:US322197

    申请日:1994-10-13

    摘要: A process and apparatus for producing silicon single crystals with excellent dielectric strength of gate oxide films by adjusting the temperature gradient of the pulled-up silicon single crystal without loss of its rate of pulling. The process of producing silicon single crystals by pulling up the single crystal from a melt of material of the single crystal imposes a certain average temperature gradient on the grown single crystal while it is still at high temperature. The apparatus is provided with a heating element outside a crucible and pulling shaft with which a single crystal is pulled up from the melt of the material in the crucible. The ratio of length h of the heating element to the inside diameter .phi. of the crucible is adjusted so as to be between 0.2 and 0.8 whereby the temperature gradient can be maintained below 2.5.degree. C./mm.

    摘要翻译: 通过调节上拉硅单晶的温度梯度而不损失其拉伸速率,制造具有优异的栅极氧化膜介电强度的硅单晶的方法和装置。 通过从单晶的熔体中提取单晶来生产硅单晶的过程在生长的单晶仍处于高温时施加一定的平均温度梯度。 该设备在坩埚外部设置有加热元件和拉动轴,单晶从坩埚中的材料的熔体被拉出。 将加热元件的长度h与坩埚的内径phi的比率调整为0.2〜0.8,由此将温度梯度保持在2.5℃/ mm以下。

    Outboard motor control system
    7.
    发明授权
    Outboard motor control system 有权
    舷外马达控制系统

    公开(公告)号:US09139276B2

    公开(公告)日:2015-09-22

    申请号:US14368810

    申请日:2012-05-09

    申请人: Makoto Ito

    发明人: Makoto Ito

    摘要: A plurality of outboard motors are mounted to a stern of a watercraft and configured to be steered independently. A target steering angle setting section is configured to set a target steering angle for each of the outboard motors. Actuators are configured to steer the outboard motors such that the steering angle of each of the outboard motors is equal or substantially equal to a target steering angle. An actual steering angle detecting section is configured to detect an actual steering angle of each of the outboard motors. A control section is programmed and configured to control the steering operation of the outboard motors such that, when a steering angle difference defining a difference between the actual steering angles of adjacently arranged outboard motors becomes equal to or larger than a prescribed value, an increase of the steering angle difference is prevented.

    摘要翻译: 多个舷外马达安装在船舶船尾,并被配置成独立转向。 目标转向角设定部被配置为对每个舷外马达设定目标转向角。 致动器构造成转向舷外马达,使得每个舷外马达的转向角等于或基本上等于目标转向角。 实际的转向角检测部被配置为检测每个舷外马达的实际转向角。 控制部被编程和配置为控制舷外马达的转向操作,使得当定义相邻排列的外侧马达的实际转向角之间的差异的转向角差异等于或大于规定值时,增加 防止转向角差。

    MOBILE STATION AND TIME ADJUSTMENT METHOD
    10.
    发明申请
    MOBILE STATION AND TIME ADJUSTMENT METHOD 审中-公开
    移动站和时间调整方法

    公开(公告)号:US20130316693A1

    公开(公告)日:2013-11-28

    申请号:US13979264

    申请日:2012-02-06

    IPC分类号: H04W8/24

    CPC分类号: H04W8/245 G04R20/18

    摘要: A mobile station includes a time information reception determining unit configured to determine whether time information is received from a residing network, a table configured to associate networks where the mobile station may reside with time zones for areas where the networks are operated, and a time adjustment unit configured to, in the case where it is not determined by the time information reception determining unit that the time information is received, refer to the table, and perform time adjustment based on the time zone corresponding to the network where the mobile station resides.

    摘要翻译: 移动站包括:时间信息接收确定单元,被配置为确定是否从驻留网络接收时间信息;被配置为将移动站可能驻留的网络与用于网络操作的区域的时区相关联的表,以及时间调整 在未被时间信息接收判定单元判断为接收到时间信息的情况下,参照该表,并且基于与移动站所在的网络对应的时区来进行时间调整。