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    Fabricating method of carbon nanotube-based field effect transistor and carbon nanotube-based field effect transistor fabricated thereby
    2.
    发明授权
    Fabricating method of carbon nanotube-based field effect transistor and carbon nanotube-based field effect transistor fabricated thereby 有权
    由此制造基于碳纳米管的场效应晶体管和基于碳纳米管的场效应晶体管的制造方法

    公开(公告)号：US08999820B2

    公开(公告)日：2015-04-07

    申请号：US14048197

    申请日：2013-10-08

    Applicant: Korea Institute of Science and Technology

    Inventor： Young Tae Byun ,  Sun Ho Kim ,  Young Min Jhon ,  Eun Gyeong Kim ,  Jae Seong Kim ,  Deok Ha Woo

    IPC: H01L21/20 ,  H01L51/00 ,  H01L51/05

    CPC classification number: H01L51/0003 ,  H01L51/0026 ,  H01L51/0048 ,  H01L51/0508 ,  H01L51/0545 ,  Y10S977/742

    Abstract: There are provided a fabricating method of a carbon nanotube-based field effect transistor having an improved binding force with a substrate and a carbon nanotube-based field effect transistor fabricated by the fabricating method. The method includes forming an oxide film on a substrate, forming a photoresist pattern on the oxide film, forming a metal film on the entire surface of the oxide film having the photoresist pattern, removing the photoresist by lifting off, adsorbing carbon nanotubes on the substrate from which the photoresist is removed, performing an annealing process to the substrate to which the carbon nanotubes are adsorbed, and removing the metal film. Since an adhesive strength between a substrate and carbon nanotubes increases, stability and reliability of a field effect transistor can be improved. If the field effect transistor is applied to a liquid sensor or the like, a lifespan of the sensor can be extended and reliability of a measurement result obtained by the sensor can be improved.

    Abstract translation: 提供了一种通过制造方法制造的具有与衬底和基于碳纳米管的场效应晶体管的结合力提高的基于碳纳米管的场效应晶体管的制造方法。 该方法包括在基板上形成氧化膜，在氧化膜上形成光致抗蚀剂图案，在具有光致抗蚀剂图案的氧化膜的整个表面上形成金属膜，通过剥离除去光致抗蚀剂，在基板上吸附碳纳米管 从中除去光致抗蚀剂，对吸附有碳纳米管的基板进行退火处理，并除去金属膜。 由于衬底和碳纳米管之间的粘合强度增加，所以可以提高场效应晶体管的稳定性和可靠性。 如果将场效应晶体管施加到液体传感器等，则可以延长传感器的寿命，并且可以提高由传感器获得的测量结果的可靠性。

    Apparatus and method for measuring ganglion cells
    3.
    发明授权
    Apparatus and method for measuring ganglion cells 有权
    用于测量神经节细胞的装置和方法

    公开(公告)号：US08818492B2

    公开(公告)日：2014-08-26

    申请号：US13686291

    申请日：2012-11-27

    Applicant: Korea Institute of Science and Technology

    Inventor： Jae Hun Kim ,  Seok Lee ,  Hyuk Jae Lee ,  Taikjin Lee ,  Sun Ho Kim ,  Seok Hwan Kim ,  Jin Wook Jeoung ,  Ki Ho Park ,  Ju Yeong Oh ,  Deok Ha Woo ,  Chulki Kim

    IPC: A61B5/05 ,  A61B3/14

    CPC classification number: A61B3/145

    Abstract: An apparatus for measuring ganglion cells may include: a light generation unit configured to irradiate a first light signal polarized in a first direction and a second light signal polarized in a second direction perpendicular to the first direction to a subject; a reflected light processing unit configured to generate an amplification signal corresponding to an image of the subject using a first reflection signal, which is the first light signal reflected from the subject, and a second reflection signal, which is the second light signal reflected from the subject; and an image processing unit configured to measure ganglion cells in the subject using the amplification signal. The apparatus may be used to count the number of normal ganglion cells in the retina by measuring a phase difference of two lights polarized in different directions. The apparatus may also be used to monitor the progress of glaucoma.

    Abstract translation: 用于测量神经节细胞的装置可以包括：光产生单元，被配置为将与第一方向垂直的第二方向上的沿第一方向偏振的第一光信号和第二光信号偏振到对象; 反射光处理单元，被配置为使用作为从被摄体反射的第一光信号的第一反射信号和从第二反射信号反射的第二反射信号，生成与被摄体的图像相对应的放大信号， 学科; 以及图像处理单元，被配置为使用所述放大信号来测量所述对象中的神经节细胞。 该装置可以通过测量在不同方向上偏振的两个光的相位差来计数视网膜中正常神经节细胞的数量。 该装置还可用于监测青光眼的进展。

    Plasmonic all-optical switch and light control method using the same
    5.
    发明授权
    Plasmonic all-optical switch and light control method using the same 有权
    等离子全光开关和光控制方法使用相同

    公开(公告)号：US09261714B2

    公开(公告)日：2016-02-16

    申请号：US14533297

    申请日：2014-11-05

    Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Sun Ho Kim ,  Jae Hun Kim ,  Chulki Kim ,  Kyungsun Moon ,  Min Ah Seo ,  Deok Ha Woo ,  Seok Lee ,  Jong Chang Yi ,  Taikjin Lee ,  Youngchul Chung

    IPC: G02F1/03 ,  G02F1/01 ,  G02B5/00 ,  G02F1/00 ,  B82Y20/00

    CPC classification number: G02F1/0126 ,  B82Y20/00 ,  G02B5/008 ,  G02F2203/10 ,  Y10S977/834

    Abstract: A plasmonic all-optical switch includes a graphene layer, a first dielectric layer located on the graphene layer, a nano-antenna located on the first dielectric layer, and a second dielectric layer located on the nano-antenna. An incident beam is propagated by means of a surface plasmon wave generated at an interface between the graphene layer and the first dielectric layer. Further, localized surface plasmon resonance is selectively generated at an interface between the nano-antenna and the second dielectric layer by means of a pump beam incident to the nano-antenna to decrease an intensity of the incident beam. The plasmonic all-optical switch may operate at an ultrahigh speed just with a small light energy without any electric method, greatly reduce power consumption of an IT device by applying to an all-optical transistor or the like, and increase a processing rate.

    Abstract translation: 等离子体全光开关包括石墨烯层，位于石墨烯层上的第一电介质层，位于第一电介质层上的纳米天线和位于纳米天线上的第二电介质层。 入射光束通过在石墨烯层和第一介电层之间的界面处产生的表面等离子体波传播。 此外，通过入射到纳米天线的泵浦光束在纳米天线和第二介电层之间的界面选择性地产生局部表面等离子体共振，以降低入射光束的强度。 等离子体全光开关可以在没有任何电气方式的情况下以超轻的光能运行，通过施加到全光晶体管等来大大降低IT设备的功耗，并且提高处理速率。

    Method of analyzing binding efficiency of adhesive nanoparticles
    6.
    发明授权
    Method of analyzing binding efficiency of adhesive nanoparticles 有权
    分析粘合剂纳米粒子结合效率的方法

    公开(公告)号：US09442115B2

    公开(公告)日：2016-09-13

    申请号：US13895708

    申请日：2013-05-16

    Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Young Min Jhon ,  Chi Woong Jang ,  Myung Suk Chun ,  Seok Lee ,  Jae Hun Kim ,  Chul Ki Kim ,  Deok Ha Woo ,  Taik Jin Lee ,  Young Tae Byun ,  Sun Ho Kim

    IPC: G01N33/551 ,  G01N33/574 ,  G01N33/58

    CPC classification number: G01N33/574 ,  G01N33/587

    Abstract: Provided is a method of analyzing binding efficiency of adhesive nanoparticles. The method includes (a) injecting a solution containing nanoparticles into a first chamber slide, (b) evaporating only the solution from the first chamber slide into which the solution containing the nanoparticles is injected, and measuring a saturation temperature using a thermal imager while radiating light from a light source, (c) injecting cells into a second chamber slide, (d) injecting a solution containing nanoparticles into the second chamber slide in which the cells are cultured, (e) removing nanoparticles which are not bound to the cells from the second chamber slide into which the cells and the nanoparticles are injected, and (f) evaporating only the solution from the second chamber slide from which the nanoparticles are removed, and measuring a saturation temperature using a thermal image while radiating light from the light source.

    Abstract translation: 提供了分析粘合剂纳米粒子的结合效率的方法。 该方法包括：（a）将含有纳米颗粒的溶液注入到第一室载玻片中，（b）仅蒸发来自注入含有纳米颗粒的溶液的第一室载玻片的溶液，并且使用热成像仪测量饱和温度，同时辐射 来自光源的光，（c）将细胞注射到第二室载玻片中，（d）将含有纳米颗粒的溶液注入培养细胞的第二室载玻片中，（e）除去未结合细胞的纳米颗粒 注入细胞和纳米颗粒的第二室滑动，和（f）仅从去除了纳米颗粒的第二室载玻片蒸发溶液，并且使用热图像测量饱和温度，同时辐射来自光源的光 。

    Apparatus and method for extreme ultraviolet spectrometer calibration
    7.
    发明授权
    Apparatus and method for extreme ultraviolet spectrometer calibration 有权
    用于极紫外光谱仪校准的仪器和方法

    公开(公告)号：US09188485B1

    公开(公告)日：2015-11-17

    申请号：US14490948

    申请日：2014-09-19

    Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Sun Ho Kim ,  Yong Soo Kim ,  Jae Hun Kim ,  Min-Chul Park ,  Young Tae Byun ,  Min Ah Seo ,  Joon Mo Ahn ,  Deok Ha Woo ,  Seok Lee ,  Taik Jin Lee ,  Young Min Jhon

    IPC: G01D18/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/28

    CPC classification number: G01J3/0297 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2803 ,  G01J2003/282

    Abstract: Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.

    Abstract translation: 本文公开了用于极紫外（EUV）分光仪校准的装置和方法。 用于EUV分光仪校准的装置包括EUV生成模块，Al滤光片，衍射光栅，CCD照相机，光谱转换模块和控制模块，该模块将与频谱峰值中的最大峰值对应的波长值与 根据高次谐波的顺序，从频谱转换模块转换成具有预定参考波长值的EUV光的顺序，以计算具有最接近参考波长值的差值，并根据EUV的顺序来控制光谱 从光谱转换模块转换为沿波长轴方向移动计算出的差值的光。 因此，可以精确地测量在EUV曝光技术和掩模检查技术中使用的EUV光的光谱的波长。

    Pulse laser apparatus
    10.
    发明授权
    Pulse laser apparatus 有权
    脉冲激光装置

    公开(公告)号：US09124067B2

    公开(公告)日：2015-09-01

    申请号：US14448227

    申请日：2014-07-31

    Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

    Inventor： Young Min Jhon ,  Joon Mo Ahn ,  Jae Hun Kim ,  Seok Lee ,  Min Chul Park ,  Deok Ha Woo ,  Young Tae Byun ,  Taik Jin Lee ,  Sun Ho Kim

    IPC: H01S3/11 ,  H01S3/117 ,  H01S3/106

    CPC classification number: H01S3/117 ,  H01S3/08027 ,  H01S3/1062 ,  H01S3/1068 ,  H01S3/11 ,  H01S3/1103 ,  H01S3/1106 ,  H01S3/1109 ,  H01S3/1112 ,  H01S3/1623

    Abstract: Provided is a pulse laser apparatus for generating laser light. The apparatus includes a first mirror and a second mirror which are disposed at both ends of a resonator and configured to reflect the laser light, a gain medium disposed between the first and second mirrors and configured to amplify and output light incident from an outside, an etalon configured to adjust a pulse width of the laser light, and an acousto-optic modulator disposed between the first and second mirrors and configured to form a mode-locked and Q-switched signal from the laser light, in which some of the laser light is output through either the first or second mirror to outside the resonator.

    Abstract translation: 提供了一种用于产生激光的脉冲激光装置。 该装置包括：第一反射镜和第二反射镜，其设置在谐振器的两端并被配置为反射激光;增益介质，设置在第一和第二反射镜之间并且被配置为放大并输出从外部入射的光， 标准准则被配置为调整激光的脉冲宽度，以及声光调制器，其布置在第一和第二反射镜之间并被配置为从激光形成锁模和Q开关信号，其中一些激光 通过第一或第二反射镜输出到谐振器外部。

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