公开(公告)号：US06531697B1

公开(公告)日：2003-03-11

申请号：US09259334

申请日：1999-03-01

申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

IPC分类号： H01J3700

CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

公开(公告)号：US06822233B2

公开(公告)日：2004-11-23

申请号：US10346138

申请日：2003-01-17

申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

IPC分类号： H01J3704

CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

公开(公告)号：US6051834A

公开(公告)日：2000-04-18

申请号：US126432

申请日：1998-07-30

申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Todokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Ruriko Tsuneta ,  Kuniyasu Nakamura ,  Kensuke Sekihara ,  Jun Motoike

发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Todokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Ruriko Tsuneta ,  Kuniyasu Nakamura ,  Kensuke Sekihara ,  Jun Motoike

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J2237/226 ,  H01J2237/2802 ,  H01J2237/2807

摘要： 3-dimensional observation on the atomic arrangement and atomic species in a thin-film specimen are carried out at high speed and accuracy by an electron microscope which measures electrons emitted at high angle from the specimen. A scanning transmission electron microscope has an electron detection device comprising a scintillator converting electrons detected thereby to photons, a photoconductive-film converting photons from the scintillator detected thereby to c.a. 1000 times as many electron-hole pairs as these photons.

摘要翻译： 通过电子显微镜高速准确地进行薄膜样品中的原子排列和原子物质的三维观察，该电子显微镜测量从试样以高角度发射的电子。 扫描透射电子显微镜具有电子检测装置，该电子检测装置包括将由此检测的电子转化为光子的闪烁体，从其检测的闪烁体的光电导膜转换光子至c.a. 这些光子是电子 - 空穴对的1000倍。

公开(公告)号：US5866905A

公开(公告)日：1999-02-02

申请号：US686740

申请日：1996-07-26

申请人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Todokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Ruriko Tsuneta ,  Kuniyasu Nakamura ,  Kensuke Sekihara ,  Jun Motoike

发明人： Hiroshi Kakibayashi ,  Yasuhiro Mitsui ,  Hideo Todokoro ,  Katsuhiro Kuroda ,  Masanari Koguchi ,  Kazutaka Tsuji ,  Tatsuo Makishima ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Ruriko Tsuneta ,  Kuniyasu Nakamura ,  Kensuke Sekihara ,  Jun Motoike

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/28 ,  G01N23/046 ,  G01R31/305 ,  G01N2223/419 ,  H01J2237/226 ,  H01J2237/2802 ,  H01J2237/2807

摘要： A scanning transmission electron microscope including an electron detection system having a scattering angle limiting aperture (for the inner angle) and a scattering angle limiting aperture (for the outer angle) between a specimen and an electron detector (comprising a scintillator and a light guide) and only one electron detector is installed.

摘要翻译： 一种扫描透射电子显微镜，包括具有散射角限制孔径（内角）的电子检测系统和检体与电子检测器（包括闪烁体和光导体）之间的散射角限制孔径（外角） 并且仅安装一个电子检测器。

公开(公告)号：US06548811B1

公开(公告)日：2003-04-15

申请号：US09504044

申请日：2000-02-14

申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi

发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi

IPC分类号： H01J3704

CPC分类号： H01J37/26 ,  H01J37/295 ,  H01J2237/1506

摘要： In order to detect automatically at a high speed and a high probability rate the crystal defects and shape abnormalities in a specimen over a wide area of said specimen, a transmission electron microscope apparatus is employed which has an electron source, a first electrostatic lens, a second electrostatic lens, a third electrostatic lens, a first condenser lens, a second condenser lens, a pre-field objective lens, a deflection coil, a first projection lens, a second projection lens, a third projection lens, a first image shift coil, a second image shift coil, and an image acquisition apparatus, etc. The detection of crystal defects is made definite by observing the specimen image at the same location by multiple variations of the electron beam incidence direction using the deflection coil. In addition, the crystal defects are detected at a high speed by linking the deflection ratios of the deflection coil and of the first image shift coil and the second image shift coil, and carrying out compensation so that image shifts on the image acquisition apparatus due to the multiple electron beam incidence directions are mutually cancelled.

摘要翻译： 为了在所述样本的广泛区域上以高速度和高概率率自动检测样品中的晶体缺陷和形状异常，使用透射型电子显微镜装置，其具有电子源，第一静电透镜， 第二静电透镜，第三静电透镜，第一聚光透镜，第二聚光透镜，预场物镜，偏转线圈，第一投影透镜，第二投影透镜，第三投影透镜，第一图像移动线圈 ，第二图像移位线圈和图像采集装置等。通过使用偏转线圈通过电子束入射方向的多个变化在相同位置观察样本图像来确定晶体缺陷的检测。 此外，通过连接偏转线圈和第一图像移位线圈与第二图像移位线圈的偏转比，高速检测晶体缺陷，并执行补偿，使得图像在图像采集装置上的偏移由于 多个电子束入射方向相互抵消。

公开(公告)号：US06875984B2

公开(公告)日：2005-04-05

申请号：US10621444

申请日：2003-07-18

申请人： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

发明人： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

IPC分类号： G01N23/04 ,  G01N1/28 ,  G01N23/225 ,  G01N33/483 ,  G01N37/00 ,  H01J37/20 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  H01J49/44

CPC分类号： H01J37/22 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2809 ,  H01J2237/2813

摘要： A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

摘要翻译： 一种生物电子显微镜和观察方法，可以通过低损伤和高对比度观察生物样品，进行高精度图像分析，并进行高通量样品制备。 1）在可能传输在预定条件下获得的样品的临界电子加速电压的1.2至4.2倍的加速电压下观察样品。 2）在样品和电子检测器之间提供小而简化结构的电子能过滤器，用于通过电子束在传输样品的电子束的规定能量区域内的电子束进行成像。 3）通过图像处理对样本中的观察图像（例如病毒或蛋白质）与已知病毒或蛋白质等参考图像之间的相似性进行定量分析。 4）使用MEMS技术将生物样品的制备方案制成芯片，然后将其安装在电子显微镜的样品台部分上，以将样品引入，准备和转移到样品架上。

公开(公告)号：US06750451B2

公开(公告)日：2004-06-15

申请号：US10183157

申请日：2002-06-28

申请人： Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

发明人： Masanari Koguchi ,  Kuniyasu Nakamura ,  Kaoru Umemura ,  Yoshifumi Taniguchi ,  Mikio Ichihashi

IPC分类号： H01J3726

CPC分类号： H01J37/2955 ,  H01J2237/2802

摘要： Disclosed is an observation apparatus and method using an electron beam, capable of measuring stress and strain information on a crystal structure in a specimen using electron beam diffraction images. A method according to the invention includes mounting a specimen on a specimen stage; irradiating a predetermined area in the specimen with an electron beam while scanning the electron beam, and acquiring an enlarged image of a specimen internal structure in the predetermined area; irradiating a specific portion included in the predetermined area and acquiring a diffraction image showing the crystal structure in the specimen; extracting information on the crystal structure in the specimen; displaying the information of the crystal structure in the specimen so as to be superimposed on the acquired enlarged image. The observation method according to the invention can obtain information on the crystal structure in a specimen with a high degree of sensitivity and with a high level of resolution.

摘要翻译： 公开了一种使用电子束的观测装置和方法，其能够使用电子束衍射图像测量样品中的晶体结构的应力和应变信息。 根据本发明的方法包括将样品安装在样品台上; 在扫描电子束的同时用电子束照射样本中的预定区域，并获取预定区域中的样本内部结构的放大图像; 照射包含在预定区域中的特定部分，并获取示出样品中的晶体结构的衍射图像; 提取样品中晶体结构的信息; 在样本中显示晶体结构的信息，以便叠加在所获取的放大图像上。 根据本发明的观察方法可以以高灵敏度和高分辨率获得关于样品中的晶体结构的信息。

公开(公告)号：US07372029B2

公开(公告)日：2008-05-13

申请号：US11806120

申请日：2007-05-30

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G21K7/00 ,  G01N23/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.

摘要翻译： 扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。 扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元 通过扫描一次电子束。

公开(公告)号：US20070228277A1

公开(公告)日：2007-10-04

申请号：US11806120

申请日：2007-05-30

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G01N23/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.

摘要翻译： 扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。 扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元 通过扫描一次电子束。

公开(公告)号：US07227144B2

公开(公告)日：2007-06-05

申请号：US11328173

申请日：2006-01-10

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G21K7/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.

摘要翻译： 扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。 这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。 首先，对扫描线圈的控制被数字化。 此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。 这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。 然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。