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公开(公告)号：US09036271B2
公开(公告)日：2015-05-19
申请号：US13278224
申请日：2011-10-21
申请人： Kuo-Yung Hung , Fan-Gang Tseng
发明人： Kuo-Yung Hung , Fan-Gang Tseng
CPC分类号： B29D11/00365 , G02B3/14
摘要： A lens device and a method of manufacturing the same are provided, wherein the lens device includes a transparent substrate, a metal layer, a hydrophobic layer and an aspherical lens. The metal layer is formed on the transparent substrate, and the hydrophobic layer is formed on the metal layer. The metal layer has a first opening, such that an area of the transparent substrate corresponding to the first opening is not covered by the metal layer. The hydrophobic layer has a second opening connected to the first opening, and the second opening is larger than the first opening, such that a portion of the metal layer adjacent to a peripheral edge of the first opening is not covered by the hydrophobic layer. The aspherical lens is formed on the area of the transparent substrate and contacts the portion of the metal layer.
摘要翻译： 提供了一种透镜装置及其制造方法，其中透镜装置包括透明基板，金属层，疏水层和非球面透镜。 金属层形成在透明基板上，疏水层形成在金属层上。 金属层具有第一开口，使得与第一开口相对应的透明基板的区域不被金属层覆盖。 疏水层具有与第一开口连接的第二开口，第二开口大于第一开口，使得与第一开口的周边边缘相邻的金属层的一部分未被疏水层覆盖。 非透镜形成在透明基板的区域上并与金属层的一部分接触。
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公开(公告)号：US08755029B2
公开(公告)日：2014-06-17
申请号：US13425753
申请日：2012-03-21
申请人： Kuo-Yung Hung , Fan-Gang Tseng
发明人： Kuo-Yung Hung , Fan-Gang Tseng
CPC分类号： G03F7/70341 , G03F7/7035
摘要： An immersion lithography apparatus including a container, at least a liquid, a platform, a fixture, a roller, a light source, and a filter is provided. The container includes a bottom plate, a plurality of side plates, and a bearing hole penetrated through one of the side plates. The liquid is filled in the container. The platform is immersed in the liquid. The platform includes a pair of axles. The axles are parallel to the bottom plate. One of the axles passes through the bearing hole. The fixture is mounted on the platform for clamping a mask and a wafer. The roller is connected to the axle, passes through the bearing hole, and is operated to rotate the connected axle. The light source generates ultraviolet light to incident on the mask and the wafer. The filter is located between the light source and the fixture.
摘要翻译： 提供一种包括容器，至少液体，平台，夹具，辊，光源和过滤器的浸没式光刻设备。 容器包括底板，多个侧板以及穿过其中一个侧板的轴承孔。 液体被填充在容器中。 将平台浸入液体中。 平台包括一对轴。 轴平行于底板。 其中一个轴通过轴承孔。 夹具安装在平台上用于夹紧掩模和晶片。 滚轮连接到轴上，穿过轴承孔，并操作以使连接的轴旋转。 光源产生紫外光入射到掩模和晶片上。 过滤器位于光源和夹具之间。
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公开(公告)号：US20120176588A1
公开(公告)日：2012-07-12
申请号：US13425753
申请日：2012-03-21
申请人： Kuo-Yung Hung , Fan-Gang Tseng
发明人： Kuo-Yung Hung , Fan-Gang Tseng
IPC分类号： G03B27/52
CPC分类号： G03F7/70341 , G03F7/7035
摘要： A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.
摘要翻译： 一种用于浸没光刻设备的槽。 容器具有底板和连接到其上的侧板的容器，其中侧板围绕并连接底板的所有边缘。 该容器至少填充有折射率为约1.4至约1.8的液体。 平台位于容器中并浸没在液体中。 平台具有固定在其平行于底板的一侧上的轴，其中轴通过穿过其中一个侧板的轴承孔。 设置在容器外部的辊连接到轴以旋转轴，并且还相应地倾斜平台。
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4.发明授权公开(公告)号：US07012762B2
公开(公告)日：2006-03-14
申请号：US10847245
申请日：2004-05-17
申请人： Fan-Gang Tseng , Kuo-Yung Hung , Heng-Tsang Hu
发明人： Fan-Gang Tseng , Kuo-Yung Hung , Heng-Tsang Hu
CPC分类号： G02B19/0057 , G02B19/0028 , G02B19/0085 , G02B27/0938 , G02B27/095 , G02B27/0977 , G11B7/123 , G11B7/1378 , G11B7/1395 , G11B7/22 , G11B2007/13722
摘要： At least two Fresnel lenses are formed on a transparent substrate, and a set of parallel plates are established in an acute included angle (from 19° to 90°) with the transparent substrate by an inclined exposure process employing a thick film photoresist. The parallel plates are separately placed over the Fresnel lenses. Metal layers are separately deposited on the outside surfaces of the parallel plates far from the acute included angle. A transparent polymeric material is overlaid on the surface of the transparent substrate till the parallel plates are immersed. An objective lens, placed over a photo detector, is formed on the surface of the transparent polymeric material. A laser diode is placed at a location on the surface of the substrate opposite to one of the Fresnel lenses, and the photo detector is placed at a location on the surface of that opposite to another of the Fresnel lenses.
摘要翻译： 在透明基板上形成至少两个菲涅尔透镜，并且通过使用厚膜光致抗蚀剂的倾斜曝光工艺，将一组平行板与透明基板以锐角夹角（从19°至90°）建立。 平行板分别放置在菲涅尔透镜上。 金属层分别沉积在远离锐角夹角的平行板的外表面上。 将透明聚合物材料覆盖在透明基板的表面上，直到平行板浸没。 放置在光检测器上的物镜形成在透明聚合物材料的表面上。 激光二极管被放置在与菲涅尔透镜之一相对的基板的表面上的位置处，并且光电检测器被放置在与另一个菲涅尔透镜相反的表面上的位置处。
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公开(公告)号：US20120320466A1
公开(公告)日：2012-12-20
申请号：US13278224
申请日：2011-10-21
申请人： Kuo-Yung Hung , Fan-Gang Tseng
发明人： Kuo-Yung Hung , Fan-Gang Tseng
CPC分类号： B29D11/00365 , G02B3/14
摘要： A lens device and a method of manufacturing the same are provided, wherein the lens device includes a transparent substrate, a metal layer, a hydrophobic layer and an aspherical lens. The metal layer is formed on the transparent substrate, and the hydrophobic layer is formed on the metal layer. The metal layer has a first opening, such that an area of the transparent substrate corresponding to the first opening is not covered by the metal layer. The hydrophobic layer has a second opening connected to the first opening, and the second opening is larger than the first opening, such that a portion of the metal layer adjacent to a peripheral edge of the first opening is not covered by the hydrophobic layer. The aspherical lens is formed on the area of the transparent substrate and contacts the portion of the metal layer.
摘要翻译： 提供了一种透镜装置及其制造方法，其中透镜装置包括透明基板，金属层，疏水层和非球面透镜。 金属层形成在透明基板上，疏水层形成在金属层上。 金属层具有第一开口，使得与第一开口相对应的透明基板的区域不被金属层覆盖。 疏水层具有与第一开口连接的第二开口，第二开口大于第一开口，使得与第一开口的周边边缘相邻的金属层的一部分未被疏水层覆盖。 非透镜形成在透明基板的区域上并与金属层的一部分接触。
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公开(公告)号：US08189175B2
公开(公告)日：2012-05-29
申请号：US12400119
申请日：2009-03-09
申请人： Kuo-Yung Hung , Fan-Gang Tseng
发明人： Kuo-Yung Hung , Fan-Gang Tseng
CPC分类号： G03F7/70341 , G03F7/7035
摘要： A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.
摘要翻译： 一种用于浸没光刻设备的槽。 容器具有底板和连接到其上的侧板的容器，其中侧板围绕并连接底板的所有边缘。 该容器至少填充有折射率为约1.4至约1.8的液体。 平台位于容器中并浸没在液体中。 平台具有固定在其平行于底板的一侧上的轴，其中轴通过穿过其中一个侧板的轴承孔。 设置在容器外部的辊连接到轴以旋转轴，并且还相应地倾斜平台。
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公开(公告)号：US20100083899A1
公开(公告)日：2010-04-08
申请号：US12400119
申请日：2009-03-09
申请人： Kuo-Yung Hung , Fan-Gang Tseng
发明人： Kuo-Yung Hung , Fan-Gang Tseng
CPC分类号： G03F7/70341 , G03F7/7035
摘要： A tank for an immersion lithography apparatus provided. The tank has a container with a bottom plate and side plates connected to each, wherein the side plates surround and connect all edges of the bottom plate. The container is filled in at least a liquid having a refractive index thereof from about 1.4 to about 1.8. A platform is located in the container and immersed in the liquid. The platform has an axle fastened on a side thereof parallel to the bottom plate, wherein the axle passes through a bearing hole penetrated through one of the side plates. A roller disposed outside the container connects to the axle to rotate the axle, and furthermore, to incline the platform accordingly.
摘要翻译： 一种用于浸没光刻设备的槽。 容器具有底板和连接到其上的侧板的容器，其中侧板围绕并连接底板的所有边缘。 该容器至少填充有折射率为约1.4至约1.8的液体。 平台位于容器中并浸没在液体中。 平台具有固定在其平行于底板的一侧上的轴，其中轴通过穿过其中一个侧板的轴承孔。 设置在容器外部的辊连接到轴以旋转轴，并且还相应地倾斜平台。
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公开(公告)号：US09040144B2
公开(公告)日：2015-05-26
申请号：US13603128
申请日：2012-09-04
CPC分类号： B82Y30/00 , B01D61/46 , Y10T428/24339
摘要： A filtering film structure includes a film, a conductive layer and a dielectric layer. The film includes a plurality of holes. The conductive layer is disposed on the inner surface of the holes, and the dielectric layer is disposed on the conductive layer. When applying a voltage to the conductive layer, an electrical charge layer forms on the surface of the dielectric layer.
摘要翻译： 滤膜结构包括膜，导电层和电介质层。 该膜包括多个孔。 导电层设置在孔的内表面上，电介质层设置在导电层上。 当向导电层施加电压时，在电介质层的表面上形成电荷层。
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公开(公告)号：US20120231464A1
公开(公告)日：2012-09-13
申请号：US13044658
申请日：2011-03-10
申请人： Chih-Sheng Yu , Fan-Gang Tseng
发明人： Chih-Sheng Yu , Fan-Gang Tseng
CPC分类号： B01L7/52 , B01L2200/0673 , B01L2200/147 , B01L2300/0645 , B01L2300/1827
摘要： A heatable droplet device is used to embody real-time detection by means of the device's temperature control and surface treated and trimmed. A temperature causing internal stability disturbed is immediately detected with a designed sensor while affecting a specific area.
摘要翻译： 可加热液滴装置用于通过设备的温度控制和表面处理和修整实现实时检测。 在影响特定区域时，用设计的传感器立即检测到内部稳定性受到干扰。
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10.发明申请公开(公告)号：US20050202667A1
公开(公告)日：2005-09-15
申请号：US11028957
申请日：2005-01-03
申请人： Adam Cohen , Gang Zhang , Fan-Gang Tseng
发明人： Adam Cohen , Gang Zhang , Fan-Gang Tseng
IPC分类号： B81B3/00 , G01P15/08 , G01P15/125 , H01P1/202 , H01P3/06 , H01P5/18 , H01P11/00 , H05K3/46 , H01L21/4763 , H01L21/44
CPC分类号： G01P15/0802 , B81B2201/042 , C25D1/003 , C25D1/12 , G01P15/125 , H01P1/202 , H01P3/06 , H01P5/183 , H01P11/00 , H01P11/005 , H01P11/007 , H05K3/4647 , Y10T29/49155
摘要： Various embodiments are directed to the electrochemical fabrication of multilayer mesoscale or microscale structures which are formed using at least one conductive structural material, at least one conductive sacrificial material, and at least one dielectric material. In some embodiments the dielectric material is a UV-curable photopolymer. In other embodiments, electrochemically fabricated structures are formed on dielectric substrates.
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