公开(公告)号：US5399415A

公开(公告)日：1995-03-21

申请号：US71260

申请日：1993-06-04

申请人： Liang-Yu Chen ,  Noel C. MacDonald

发明人： Liang-Yu Chen ,  Noel C. MacDonald

IPC分类号： B81B3/00 ,  B81C99/00 ,  G01P15/08 ,  H02N1/00 ,  B32B9/00

CPC分类号： B81C1/00214 ,  B81B3/0086 ,  G01P15/0802 ,  H02N1/006 ,  H02N1/008 ,  B81B2201/13 ,  B81B2203/0118 ,  B81B2203/0315 ,  G01P2015/0814 ,  Y10T428/24917 ,  Y10T428/24926

摘要： A process for fabricating mechanically interconnected, released, electrically isolated metal microstructures, and circuit components and actuators produced by the process. A dielectric stack on a substrate is patterned and etched to produce trenches in which a metal such as tungsten is deposited. The dielectric is removed from selected regions of the metal to expose metal beams, and to form mechanically interconnecting, electrically insulating hinges supporting the beams. The beams and hinges are then released for relative motion. Electrical potentials may be established between adjacent beams to produce controlled motion.

摘要翻译： 用于制造机械互连，释放，电隔离的金属微结构的工艺，以及由该工艺制造的电路部件和致动器。 图案化并蚀刻衬底上的电介质堆叠以产生其中沉积诸如钨的金属的沟槽。 电介质从金属的选定区域去除以暴露金属梁，并形成支撑梁的机械互连的电绝缘铰链。 然后释放梁和铰链以进行相对运动。 可以在相邻光束之间建立电势以产生受控的运动。

公开(公告)号：US06372633B1

公开(公告)日：2002-04-16

申请号：US09111657

申请日：1998-07-08

申请人： Dan Maydan ,  Ashok K. Sinha ,  Zheng Xu ,  Liang-Yu Chen ,  Roderick Craig Mosely ,  Daniel Carl ,  Diana Xiaobing Ma ,  Yan Ye ,  Wen Chiang Tu

发明人： Dan Maydan ,  Ashok K. Sinha ,  Zheng Xu ,  Liang-Yu Chen ,  Roderick Craig Mosely ,  Daniel Carl ,  Diana Xiaobing Ma ,  Yan Ye ,  Wen Chiang Tu

IPC分类号： H01L214763

CPC分类号： H01L21/76838 ,  H01L21/32136 ,  H01L21/76885

摘要： The present invention provides a method and apparatus for forming reliable interconnects in which the overlap of the line over the plug or via is minimized or eliminated. In one aspect, a barrier plug comprised of a conductive material, such as tungsten, is deposited over the via to provide an etch stop during line etching and to prevent diffusion of the metal, such as copper, into the surrounding dielectric material if the line is misaligned over the via. Additionally, the barrier plug prevents an overall reduction in resistance of the interconnect and enables reactive ion etching to be employed to form the metal line. In another aspect, reactive ion etching techniques are employed to selectively etch the metal line and the barrier layer to provide a controlled etching process which exhibits selectivity for the metal line, then the barrier and then the via or plug.

摘要翻译： 本发明提供了一种用于形成可靠互连的方法和装置，其中使插塞或通孔上的线重叠最小化或消除。 在一个方面，由诸如钨的导电材料构成的阻挡塞沉积在通孔上，以在线蚀刻期间提供蚀刻停止并且防止金属（例如铜）扩散到周围的介电材料中，如果线 在通道上不对齐。 此外，阻挡塞防止互连的电阻的总体降低，并且能够使用反应离子蚀刻来形成金属线。 在另一方面，使用反应离子蚀刻技术来选择性地蚀刻金属线和阻挡层，以提供对金属线，然后是屏障，然后是通孔或插塞的选择性的受控蚀刻工艺。

公开(公告)号：US08378302B2

公开(公告)日：2013-02-19

申请号：US13035287

申请日：2011-02-25

申请人： Min-Chun Pan ,  Hung-Chin Chiang ,  Chun-Yu Chen ,  Liang-Yu Chen ,  Ching-Tang Wu ,  Min-Cheng Pan

发明人： Min-Chun Pan ,  Hung-Chin Chiang ,  Chun-Yu Chen ,  Liang-Yu Chen ,  Ching-Tang Wu ,  Min-Cheng Pan

IPC分类号： G01J5/02

CPC分类号： A61B5/0091 ,  A61B5/0064

摘要： A bidirectional optical scanner assisting in mammography is revealed. The optical scanner that calculates functional images obtained by diffuse optical tomography, used in combination with a mammography machine can reduce the number of mammograms taken and the dose exposure. The bidirectional optical scanner includes a compression module, a first optical detection module, and a second optical detection module. The same test position of the tested breast can be detected twice in different directions by the first and the second optical detection modules. No matter where the tumor is located, the tumor can be detected. Besides structural images provided by the mammography machine, functional tomographic images of the breast are obtained by the bidirectional optical scanner. Thus diagnostic accuracy in the detection of breast cancer is improved.

摘要翻译： 揭示了辅助乳房X光照相术的双向光学扫描仪。 计算通过与乳房摄影机组合使用的漫射光学层析成像获得的功能图像的光学扫描器可以减少所采取的乳房X线照片的数量和剂量暴露。 双向光学扫描器包括压缩模块，第一光学检测模块和第二光学检测模块。 通过第一和第二光学检测模块可以在不同的方向上检测被测乳房的相同测试位置两次。 无论肿瘤位于何处，都可以检测到肿瘤。 除了由乳房X线照相机提供的结构图像之外，通过双向光学扫描器获得乳房的功能断层图像。 因此，乳腺癌检测的诊断准确性得到改善。

公开(公告)号：US6017144A

公开(公告)日：2000-01-25

申请号：US736629

申请日：1996-10-24

申请人： Ted Tie Guo ,  Mehul Bhagubhai Naik ,  Liang-Yu Chen ,  Roderick Craig Mosely ,  Israel Beinglass

发明人： Ted Tie Guo ,  Mehul Bhagubhai Naik ,  Liang-Yu Chen ,  Roderick Craig Mosely ,  Israel Beinglass

IPC分类号： C23C14/56 ,  C23C16/02 ,  C23C16/20 ,  C23C16/46 ,  C23C16/52 ,  C23C16/54 ,  H01L21/205 ,  H01L21/28 ,  H01L21/285 ,  H01L21/3205 ,  H01L21/768 ,  G06F17/00 ,  G07F15/02

CPC分类号： C23C14/568 ,  C23C16/0281 ,  C23C16/20 ,  C23C16/54 ,  H01L21/32051 ,  H01L21/76843 ,  H01L21/76876 ,  H01L21/76877 ,  H01L21/76879 ,  H01L2221/1089

摘要： The present invention is to a chemical vapor deposition process for depositing a substantially planar, highly reflective layer on a substrate, and is particularly useful for filling high aspect ratio holes in the substrate with metal-containing material. The substrate is placed in a process zone, and successive seeding and oriented crystal growth stages are performed on the substrate. In the seeding stage, the substrate is heated to temperatures T.sub.s, within a first lower range of temperatures .DELTA. T.sub.s, and a seeding gas is introduced into the process zone. The seeding gas deposits a substantially continuous, non-granular, and planar seeding layer on the substrate. Thereafter, in an oriented crystal growth stage, the substrate is maintained at deposition temperatures T.sub.d, within a second higher range of temperatures .DELTA. T.sub.D, and deposition gas is introduced into the process zone. The deposition gas forms an oriented crystal growth layer on the seeding layer, the oriented crystal growth layer having a highly reflective surface that results from highly oriented, relatively large crystals that grow on the seeding layer.

摘要翻译： 本发明涉及一种用于在基片上沉积基本平面的高反射层的化学气相沉积工艺，特别适用于用含金属的材料填充衬底中的高纵横比孔。 将衬底放置在工艺区中，并在衬底上进行连续接种和取向晶体生长阶段。 在播种阶段，将衬底加热到​​第一较低温度范围DELTA Ts内的温度Ts，并将接种气体引入工艺区。 接种气体在衬底上沉积基本上连续的，非粒状的和平面的接种层。 此后，在取向晶体生长阶段中，将衬底保持在沉积温度Td，在第二较高温度范围DELTA TD内，并将沉积气体引入工艺区。 沉积气体在接种层上形成取向的晶体生长层，取向晶体生长层具有由在取向层上生长的高定向，相对较大的晶体产生的高反射性表面。

公开(公告)号：US08712136B2

公开(公告)日：2014-04-29

申请号：US13397693

申请日：2012-02-16

申请人： Min-Chun Pan ,  Hung-Chih Chiang ,  Liang-Yu Chen ,  Min-Chen Pan

发明人： Min-Chun Pan ,  Hung-Chih Chiang ,  Liang-Yu Chen ,  Min-Chen Pan

IPC分类号： G06K9/00

CPC分类号： G06T11/006

摘要： An image reconstruction method is described as follows. A structural image of an object is obtained. An actual optical detected result of the object is obtained. An inhomogeneous initial state is determined based on the structural image. At least one solution converged with the actual optical detected result is determined by iteratively calculating a physical model from the inhomogeneous initial state. The image of the object is reconstructed based on the solution.

摘要翻译： 图像重建方法如下所述。 获得物体的结构图像。 获得物体的实际光学检测结果。 基于结构图像确定不均匀的初始状态。 通过从不均匀的初始状态迭代计算物理模型来确定与实际光学检测结果收敛的至少一个解决方案。 基于解决方案重建对象的图像。

公开(公告)号：US08395120B2

公开(公告)日：2013-03-12

申请号：US13351384

申请日：2012-01-17

申请人： Min-Chun Pan ,  Jhao-Ming Yu ,  Hung-Chih Chiang ,  Min-Cheng Pan ,  Chun-Yu Chen ,  Liang-Yu Chen

发明人： Min-Chun Pan ,  Jhao-Ming Yu ,  Hung-Chih Chiang ,  Min-Cheng Pan ,  Chun-Yu Chen ,  Liang-Yu Chen

IPC分类号： G01J5/02

CPC分类号： A61B5/0091 ,  A61B5/0064

摘要： A bidirectional optical scanner assisting in mammography is revealed. The optical scanner that calculates functional images obtained by diffuse optical tomography, used in combination with a mammography machine can reduce the number of mammograms taken and the dose exposure. The bidirectional optical scanner includes a first compression plate, a first optical detection module, a second optical detection module and a second compression plate. The same test position of the tested breast can be detected twice in different directions by the first and the second optical detection modules. No matter where the tumor is located, the tumor can be detected. Besides structural images provided by the mammography machine, functional tomographic images of the breast are obtained by the bidirectional optical scanner. Thus diagnostic accuracy in the detection of breast cancer is improved.

摘要翻译： 揭示了辅助乳房X光照相术的双向光学扫描仪。 计算通过与乳房摄影机组合使用的漫射光学层析成像获得的功能图像的光学扫描器可以减少所采取的乳房X线照片的数量和剂量暴露。 双向光学扫描器包括第一压缩板，第一光学检测模块，第二光学检测模块和第二压缩板。 通过第一和第二光学检测模块可以在不同的方向上检测被测乳房的相同测试位置两次。 无论肿瘤位于何处，都可以检测到肿瘤。 除了由乳房X线照相机提供的结构图像之外，通过双向光学扫描器获得乳房的功能断层图像。 因此，乳腺癌检测的诊断准确性得到改善。

公开(公告)号：US20120085908A1

公开(公告)日：2012-04-12

申请号：US13035287

申请日：2011-02-25

申请人： Min-Chun PAN ,  Hung-Chin Chiang ,  Chun-Yu Chen ,  Liang-Yu Chen ,  Ching-Tang Wu ,  Min-Cheng Pan

发明人： Min-Chun PAN ,  Hung-Chin Chiang ,  Chun-Yu Chen ,  Liang-Yu Chen ,  Ching-Tang Wu ,  Min-Cheng Pan

IPC分类号： G01J1/04 ,  G01J5/00 ,  G01J1/00

CPC分类号： A61B5/0091 ,  A61B5/0064

摘要： A bidirectional optical scanner assisting in mammography is revealed. The optical scanner that calculates functional images obtained by diffuse optical tomography, used in combination with a mammography machine can reduce the number of mammograms taken and the dose exposure. The bidirectional optical scanner includes a compression module, a first optical detection module, and a second optical detection module. The same test position of the tested breast can be detected twice in different directions by the first and the second optical detection modules. No matter where the tumor is located, the tumor can be detected. Besides structural images provided by the mammography machine, functional tomographic images of the breast are obtained by the bidirectional optical scanner. Thus diagnostic accuracy in the detection of breast cancer is improved.

摘要翻译： 揭示了辅助乳房X光照相术的双向光学扫描仪。 计算通过与乳房摄影机组合使用的漫射光学层析成像获得的功能图像的光学扫描器可以减少所采取的乳房X线照片的数量和剂量暴露。 双向光学扫描器包括压缩模块，第一光学检测模块和第二光学检测模块。 通过第一和第二光学检测模块可以在不同的方向上检测被测乳房的相同测试位置两次。 无论肿瘤位于何处，都可以检测到肿瘤。 除了由乳房X线照相机提供的结构图像之外，通过双向光学扫描器获得乳房的功能断层图像。 因此，乳腺癌检测的诊断准确性得到改善。