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    Elimination of island formation and contact resistance problems during electroetching of blanket or patterned thin metallic layers on insulating substrate
    1.
    发明授权
    Elimination of island formation and contact resistance problems during electroetching of blanket or patterned thin metallic layers on insulating substrate 失效
    在绝缘衬底上的毯子或图案化的薄金属层的电蚀刻期间消除岛形成和接触电阻问题

    公开(公告)号：US5567304A

    公开(公告)日：1996-10-22

    申请号：US367550

    申请日：1995-01-03

    申请人： Madhav Datta ,  Lubomyr T. Romankiw ,  Ravindra V. Shenoy

    发明人： Madhav Datta ,  Lubomyr T. Romankiw ,  Ravindra V. Shenoy

    IPC分类号： B23H3/00 ,  B23H9/06 ,  C25F3/14 ,  H05K3/07 ,  H05K3/08 ,  B23H3/02 ,  B23H7/18

    CPC分类号： C25F3/14 ,  B23H3/00 ,  B23H9/06 ,  H05K3/07 ,  H05K3/08

    摘要： In through-mask electroetching of a metal film on top of an insulating substrate, the shape of the metal film being etched is a function of the mask opening, the spacing between the openings and the thickness of the mask. An analysis of the electric field around the mask and the metal film is used to determine conditions leading to the formation of islands of unetched metal films within the openings. The analysis is then used to design the mask pattern and eliminate these islands. The increase in the ratio of the mask thickness to the opening width for eliminating the islands also lowers the undercutting of the mask. Premature stoppage of the electroetching process arising from the isolation of the sample film from the contact is also addressed. The electrical contact to the sample is made at one end and a nozzle jet of electrolyte is slowly swept from the far end of the sample towards the electrical contact. The nozzle speed is matched with the metal removal rate and the electrical contact is exposed to the electrolyte at the end of the process.

    摘要翻译： 在绝缘基板顶部的金属膜的通孔掩模电蚀刻中，被蚀刻的金属膜的形状是掩模开口，开口间距和掩模厚度的函数。 使用掩模和金属膜周围的电场的分析来确定导致在开口内形成未蚀刻金属膜岛的条件。 然后分析用于设计掩模图案并消除这些岛。 掩模厚度与用于消除岛的开口宽度的比率的增加也降低了掩模的底切。 也解决了从接触中分离样品膜引起的电蚀过程的过早停止。 与样品的电接触在一端制成，并且电解质的喷嘴射流从样品的远端缓慢地扫过电接点。 喷嘴速度与金属去除速率相匹配，并且在过程结束时电接触暴露于电解质。

    Electrochemical tool for uniform metal removal during electropolishing
    2.
    发明授权
    Electrochemical tool for uniform metal removal during electropolishing 失效
    电解抛光时用于均匀金属去除的电化学工具

    公开(公告)号：US5217586A

    公开(公告)日：1993-06-08

    申请号：US819298

    申请日：1992-01-09

    申请人： Madhav Datta ,  Lubomyr T. Romankiw

    发明人： Madhav Datta ,  Lubomyr T. Romankiw

    IPC分类号： B23H3/04 ,  C25F7/00

    CPC分类号： C25F7/00

    摘要： The present invention relates to an electropolishing tool for the removal of metal from a workpiece, said electropolishing tool comprising a container means for retaining an electrolytic solution, a cathode assembly in the shape of a pyramid the height of which is adjustable, a power supply means including a negative terminal and a positive terminal with said negative terminal being electrically connectable to said cathode assembly, a plate means for holding the workpiece and for forming an electrical connection to the workpiece, said plate means connected to the positive terminal of said power supply means, and an enclosure means placed over the workpiece leaving only the surface of the workpiece which is to be polished exposed to the electrolytic solution such that when the workpiece is secured to said plate means and said cathode assembly is connected to the negative terminal of said power supply means and is placed over the said enclosure means directly facing the workpiece enclosed therein, that portion of the workpiece exposed to the electrolytic solution undergoes electropolishing.

    摘要翻译： 本发明涉及一种用于从工件去除金属的电抛光工具，所述电抛光工具包括用于保持电解液的容器装置，高度可调的金字塔形状的阴极组件，电源装置 包括负端子和正极端子，所述负极端子可电连接到所述阴极组件;板装置，用于保持所述工件并形成与所述工件的电连接，所述板装置连接到所述电源装置的正极端子 以及放置在工件上的外壳装置，仅留下要被抛光的工件的表面暴露于电解溶液，使得当工件固定到所述板装置并且所述阴极组件连接到所述电源的负极端子时 供给装置并且被放置在直接面向工件的所述外壳装置上 在其中暴露于电解液的工件的那部分进行电解抛光。

    Electrochemical micromachining tool and process for through-mask patterning of thin metallic films supported by non-conducting or poorly conducting surfaces
    4.
    发明授权
    Electrochemical micromachining tool and process for through-mask patterning of thin metallic films supported by non-conducting or poorly conducting surfaces 失效
    电化学微加工工具和由不导电或导电不良的表面支撑的薄金属膜的通孔掩模图案化工艺

    公开(公告)号：US5284554A

    公开(公告)日：1994-02-08

    申请号：US819310

    申请日：1992-01-09

    申请人： Madhav Datta ,  Lubomyr T. Romankiw

    发明人： Madhav Datta ,  Lubomyr T. Romankiw

    IPC分类号： C25F3/06 ,  C23F1/02 ,  C25F3/14 ,  C25F7/00 ,  H01G13/00 ,  H05K3/07 ,  B23H3/10 ,  B23H7/32 ,  B23H9/06

    CPC分类号： C25F3/14 ,  H05K3/07

    摘要： The present invention describes a high speed, high precision electrochemical micromachining tool, chemical solution and method for the one sided through-mask micropatterning of conducting foils and films supported by insulating material. The tool of the present invention can include either a movable plate means allowing for the movement of the workpiece to and fro above the cathode assembly, or a movable cathode assembly means allowing for the movement of said cathode assembly to and fro beneath the workpiece. Said cathode assembly also consists of a nozzle assembly from which the electrolytic solution emerges as electrolytic shower and impinges upon the workpiece. Methods to resolve the problems related to the loss of electrical contact during the electrochemical micromachining process are also described.

    摘要翻译： 本发明描述了一种高速，高精度电化学微加工工具，化学溶液和方法，用于通过绝缘材料支撑的导电箔和薄膜的单面通孔掩模微图案。 本发明的工具可以包括允许工件在阴极组件上方移动的可动板装置，或允许所述阴极组件在工件下方移动的可动阴极组件装置。 所述阴极组件还包括喷嘴组件，电解溶液从该喷嘴组件作为电解淋浴喷出并撞击在工件上。 还描述了解决与电化学微加工过程中的电接触损失有关的问题的方法。

    Etching of Ti-W for C4 rework
    6.
    发明授权
    Etching of Ti-W for C4 rework 失效
    蚀刻Ti-W用于C4返修

    公开(公告)号：US5759437A

    公开(公告)日：1998-06-02

    申请号：US740569

    申请日：1996-10-31

    申请人： Madhav Datta ,  Thomas Safron Kanarsky ,  Gangadhara Swami Mathad ,  Ravindra V. Shenoy

    发明人： Madhav Datta ,  Thomas Safron Kanarsky ,  Gangadhara Swami Mathad ,  Ravindra V. Shenoy

    IPC分类号： C23F1/26 ,  H01L21/3213 ,  C09K13/00

    CPC分类号： H01L21/32134 ,  C23F1/26

    摘要： A chemical etchant for the removal of titanium-tungsten containing structures from the semiconductors and a method for removing the titanium-tungsten. The etchant comprising a solution of hydrogen peroxide, a salt of EDTA, and an acid, the acid capable of preventing the deposition of tin oxide. The method of removal comprises first obtaining a wafer containing titanium-tungsten. Second, immersing the wafer having titanium-tungsten thereon for a predetermined period of time in an etchant bath comprising a solution of hydrogen peroxide, a salt of EDTA and an acid, the acid capable of preventing the deposition of tin oxide. Third, removing the treated wafer and rinsing the treated wafer and lastly, drying the wafer.

    摘要翻译： 用于从半导体去除含钛 - 钨的结构的化学蚀刻剂和用于除去钛 - 钨的方法。 包含过氧化氢，EDTA盐和酸的溶液的蚀刻剂是能够防止氧化锡沉积的酸。 除去的方法包括首先获得含有钛 - 钨的晶片。 其次，将包含钛 - 钨的晶片在包含过氧化氢，EDTA的盐和酸的蚀刻剂浴中浸渍预定时间，所述蚀刻液能够防止氧化锡沉积。 第三，去除经处理的晶片并冲洗经处理的晶片，最后，干燥晶片。

    Electroetching method and apparatus
    8.
    发明授权
    Electroetching method and apparatus 失效
    电蚀方法和装置

    公开(公告)号：US5543032A

    公开(公告)日：1996-08-06

    申请号：US459760

    申请日：1995-06-02

    申请人： Madhav Datta ,  Ravindra V. Shenoy

    发明人： Madhav Datta ,  Ravindra V. Shenoy

    IPC分类号： C25F3/14 ,  H01L21/60 ,  C25F7/00

    CPC分类号： C25F3/14 ,  H01L24/11 ,  H01L2224/13099 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01024 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/01327 ,  H01L2924/014 ,  H01L2924/14

    摘要： A tool and process for electroetching metal films or layers on a substrate employs a linear electrode and a linear jet of electrolyte squirted from the electrode. The electrode is slowly scanned over the film by a drive mechanism. The current is preferably intermittent. In one embodiment a single wafer surface (substrate) is inverted and the jet is scanned underneath. In another embodiment wafers are held vertically on opposite sides of a holder and two linear electrodes, oriented horizontally and on opposite sides of the holder, are scanned vertically upward at a rate such that the metal layers are completely removed in one pass. The process is especially adapted for fabricating C4 solder balls with triple seed layers of Ti--W (titanium-tungsten alloy) on a substrate, phased Cr--Cu consisting of 50% chromium (Cr) and 50% copper (Cu), and substantially pure Cu. Solder alloys are through-mask electrodeposited on the Cu layer. The seed layers conduct the plating current. During etching the seed layers are removed between the solder bumps to isolate them. The phased Cr--Cu and Cu layers are removed by a single electroetching operation in aqueous potassium sulfate and glycerol with cell voltage set to dissolve the phased layer more quickly than the Cu, avoiding excessive solder bump undercutting in the copper layer. The cell voltage may be such that the solder bump is only slightly undercut so as to form a stepped base C4 structure upon reflowing. Ti--W is removed by a chemical process.

    摘要翻译： 用于在基板上电蚀金属膜或层的工具和方法采用线性电极和从电极喷射的电解质的线性射流。 通过驱动机构将电极缓慢扫描在膜上。 电流优选是间歇的。 在一个实施例中，单个晶片表面（基板）被倒置并且在下面扫描射流。 在另一个实施例中，晶片垂直地保持在保持器的相对侧上，并且水平定向并且在保持器的相对侧上的两个线性电极以一定速度被垂直向上扫描，使得金属层在一次通过中完全去除。 该方法特别适用于在基体上制造具有Ti-W（钛 - 钨合金）三重种子层的C4焊球，由50％铬（Cr）和50％铜（Cu）组成的相位Cr-Cu， 纯铜。 焊接合金是电沉积在Cu层上的通孔掩模。 种子层进行电镀电流。 在蚀刻期间，在焊料凸块之间移除种子层以隔离它们。 通过在硫酸钾水溶液和甘油中通过单次电蚀操作除去相位的Cr-Cu和Cu层，其电池电压设置为比Cu更快地溶解相位层，避免了铜层中过多的焊料凹凸。 电池电压可以使得焊料凸块仅略微下切，以便在回流时形成阶梯式基底C4结构。 Ti-W通过化学工艺除去。

    Method for making a thin flexible primary battery for microelectronics applications
    9.
    发明授权
    Method for making a thin flexible primary battery for microelectronics applications 失效
    制造用于微电子应用的薄柔性一次电池的方法

    公开(公告)号：US5558957A

    公开(公告)日：1996-09-24

    申请号：US329347

    申请日：1994-10-26

    申请人： Madhav Datta ,  Ravindra V. Shenoy

    发明人： Madhav Datta ,  Ravindra V. Shenoy

    IPC分类号： H01M2/02 ,  H01M4/13 ,  H01M4/66 ,  H01M6/18 ,  H01M4/70

    CPC分类号： G06K19/0702 ,  H01M2/021 ,  H01M4/13 ,  H01M4/661 ,  H01M6/181 ,  Y10T29/49114 ,  Y10T29/49115

    摘要： A method is provided for making a flexible primary battery suitable for microelectronics applications, and more particularly, for use with self-contained self-powered portable devices (SSPD) such as RF-ID tags. The method generally employs photolithography and etching techniques to minimize the thicknesses of metal foils required in the structure of the battery, as well as packaging methods which yield a flexible and durable battery having a thickness of not more than about 0.5 millimeter, and preferably about 0.3 millimeter or less, and a relatively small size on the order of a few square centimeters in surface area.

    摘要翻译： 提供了一种用于制造适用于微电子应用的柔性一次电池的方法，更具体地，用于与自包含的自供电便携式设备（SSPD）如RF-ID标签一起使用。 该方法通常使用光刻和蚀刻技术来最小化电池结构中所需的金属箔的厚度，以及产生厚度不大于约0.5毫米，优选约0.3的柔性耐用电池的封装方法 毫米或更小，并且表面积的几平方厘米量级的相对较小的尺寸。