摘要:
The present invention provides a luminescence sensor (20) comprising at least one chamber (22) and at least one optical filter formed by at least a first conductive grating (11), the at least first conductive grating (11) comprising a plurality of wires (12), wherein at least one of the wires (12) of the at least first conductive grating (11) is linked to a temperature control device for controlling the temperature of at least one chamber (22) in the sensor.
摘要:
A radiation detection system (100) is described comprising a measurement region (104) in a measurement chamber adapted for receiving at least one sample (108) to be examined and adapted for receiving excitation radiation for impingement on the at least one sample (108) and for generating sample radiation. The radiation detection system (100) furthermore comprises at least one detector element (106) for detection of the generated sample radiation. The radiation detection system thereby is a front irradiation system, i.e. the excitation radiation is incident on a first side of the measurement region (104) in a measurement chamber and the at least one detector element (106) is positioned at a second side of the measurement region (104) in a measurement chamber, the second side being opposite to the first side with respect to the measurement region (104) in a measurement chamber, such that detection occurs at the side facing the first side. The detection system (100) also comprises optical means (112) adapted for guiding said excitation radiation aside the at least one detector element (106).
摘要:
An integrated biosensing device detects emissions from a sample when illuminated. A photo detector (20) is adjacent a site for retaining the sample (40) or receiving excitation radiation for impingement on the sample (40). A reflector (10) deflects the illumination onto the sample site and substantially guides the excitation radiation away from the photo detector. By providing a reflector, a ratio of desired detection of emissions to unwanted detection of the illumination light can be improved. This can be achieved by a reduction in an amount of the illumination reaching the photo detector, and/or by an increase in the amount of illumination of the sample and thus in the amount of emissions reaching the detector. This can be achieved more cost effectively than by using a filter. The illumination can be from above or below if the substrate is transparent.
摘要:
The invention provides a bio chip device comprising at least one sample compartment and at least one light sensitive element, the at least one sample compartment being provided on a first side of the at least one light sensitive element, wherein incident light is provided incident from a second side opposite of the first side of the at least one light sensitive element. Further, the invention provides a method for the detection of fluorescent particles within at least one sample compartment of a bio chip device.
摘要:
A detection system (100, 150, 180, 200, 220, 250) for detecting luminescence from at least one sample (108) when excited by incident excitation radiation. Detecting luminescence may allow to detect, for example, biological, chemical or bio-chemical particles. The detection system (100, 150, 180, 200, 220, 250) comprising at least one optical component (102) with at least a first surface (104). The first surface (104) of the at least one optical component (102) is located to internally reflect incident excitation radiation to create an evanescent field outside the at least one optical component (102) for exciting the at least one sample (108). The detection system also comprises at least one detector element (110) that is in direct contact with the at least one optical component (102) to detect the luminescence from at least one excited sample (108) through the at least one optical component (102).
摘要:
An illumination detection system comprises an excitation radiation source and associated radiation processing arrangement, and a focusing arrangement for focusing the excitation radiation from the radiation processing arrangement onto an analysis region of a sample. A radiation collection arrangement collects radiation from the analysis region of the sample resulting from the excitation, and a detector detects the collected radiation. The focused excitation radiation comprises an excitation line which is evanescent in the sample. This combines the advantages of line scanning (reduced analysis time) and evanescent excitation (reduced background signal) and therewith enables increased measurement speed and precision for point of care application.
摘要:
A lithographic apparatus is disclosed. The apparatus includes a source for supplying hydrogen radicals, a guide for use in conjunction with the source, for directing hydrogen radicals to an application surface to be targeted by the hydrogen radicals. The guide is provided with a coating having a hydrogen radical recombination constant of less than 0.2. In this way, the radicals can be transported with reduced losses and are able to better interact with remaining contaminants on application surfaces, such as mirror surfaces.
摘要:
A multi-layer mirror includes a multi-layer stack. The multi-layer stack includes a plurality of alternating layers with a multi-layer stack top layer and a spectral filter top layer arranged on the multi-layer stack. The spectral filter top layer includes a first spectral purity enhancement layer that includes a first material m1 and has a first layer thickness d1, an intermediate layer that includes a second material m2 and has a second layer thickness d2. The intermediate layer is arranged on the multi-layer stack top layer. The first material is selected from SiN, Si3N4, SiO2, ZnS, Te, diamond, CsI, Se, SiC, amorphous carbon, MgF2, CaF2, TiO2, Ge, PbF2, ZrO2, BaTiO3, LiF or NaF. The second material includes a material different from the first material, and d1+d2 has a thickness between 1.5 and 40 nm.
摘要:
An optical sensor apparatus for use in an extreme ultraviolet lithographic system is disclosed. The apparatus includes an optical sensor comprising a sensor surface and a removal mechanism configured to remove debris from the sensor surface. Accordingly, dose and/or contamination measurements may be carried out conveniently for the lithographic system.
摘要:
A method for the removal of a deposition on an optical element of an apparatus including the optical element includes providing an H2 containing gas and one or more additional compounds selected from the group of hydrocarbon compounds and silane compounds in at least part of the apparatus includes producing hydrogen radicals from H2 from the H2 containing gas; and bringing the optical element with deposition into contact with at least part of the hydrogen radicals and removing at least part of the deposition. Further, a method for the protection of an optical element of an apparatus including the optical element includes providing a cap layer to the optical element by a deposition process; and during or after use of the apparatus, removing at least part of the cap layer from the optical element in a removal process as described above. The methods can be applied in a lithographic apparatus.