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公开(公告)号：US5876264A
公开(公告)日：1999-03-02
申请号：US845339
申请日：1997-04-25
CPC分类号： G11B5/3903 , G11B5/3166 , G11B5/1871 , G11B5/3103 , G11B5/3116
摘要： Disclosed is an apparatus and method for calibrating the deposition windage of deposited thin film resistive elements, such as magnetoresistive read elements for magnetic heads which are to be lapped, comprising one set of at least three resistive elements having different nominal height dimensions, a resistance detector for measuring the resistance of each of the resistive elements, and a windage calculator responsive to the nominal height dimensions and to the measured resistances of each of the resistive elements for calculating the windage of the one set of resistive elements.
摘要翻译： 公开了用于校准沉积的薄膜电阻元件的沉积风阻的装置和方法，例如要研磨的磁头的磁阻读取元件，包括一组至少三个具有不同标称高度尺寸的电阻元件，电阻检测器 用于测量每个电阻元件的电阻，以及响应于标称高度尺寸的风阻计算器和用于计算一组电阻元件的风阻的每个电阻元件的测量电阻。
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公开(公告)号：US6027397A
公开(公告)日：2000-02-22
申请号：US845678
申请日：1997-04-25
IPC分类号： B24B37/005 , B24B49/04 , B24B49/10 , G11B5/187 , G11B5/31 , G11B5/39 , B24B49/02 , G11B5/127
CPC分类号： B24B37/005 , B24B49/04 , B24B49/10 , G11B5/3106 , G11B5/3967 , G11B5/1871 , G11B5/3116 , G11B5/3166 , G11B5/398 , Y10T29/49037 , Y10T29/49043
摘要： A dual element electrical lapping guide system is disclosed for a row of multi-layer dual element magnetoresistive and inductive magnetic transducers formed on a substrate, which will be used to form sliders, the sliders being separated by separation kerfs, and the multi-layer transducers aligned along an edge of the substrate for lapping of the edge. The dual element lapping guide system comprises superposed resistive elements and electrical switch elements, each positioned in one of the separation kerfs, and having an edge thereof positioned so as to be aligned with the edge of the row and subject to lapping of the row. Each electrical switch element comprises a bottom and a top layer connected at one end thereof and separated at the other end thereof by an insulation layer, so as to be initially closed at the connected end, which end is aligned with the edge of the multi-layer transducers and subject to lapping of the row at the connected end to open the switch element.
摘要翻译： 公开了一种用于形成在基板上的多层双元件磁阻和电感式磁换能器的行的双元件电研磨引导系统，其将用于形成滑块，滑块由分离切口分开，并且多层换能器 沿着衬底的边缘排列以研磨边缘。 双元件研磨引导系统包括重叠的电阻元件和电气开关元件，每个电极元件和电气开关元件均位于分离切口之一中，并且其边缘被定位成与行的边缘对准并且经受研磨。 每个电气开关元件包括一个底部和一个在其一端连接并在另一端分隔绝缘层的顶层，以便在连接端初始关闭，该端部与多层结构的边缘对准， 并且在连接端进行研磨以打开开关元件。
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3.发明授权Integrated magnetic recording head assembly including an inductive write subassembly and a magnetoresistive read subassembly 失效集成磁记录头组件，其包括感应写入子组件和磁阻读取子组件
公开(公告)号：US4504880A
公开(公告)日：1985-03-12
申请号：US407007
申请日：1982-08-09
申请人： Mark A. Church , Stephen K. Decker
发明人： Mark A. Church , Stephen K. Decker
CPC分类号： G11B5/3903 , G11B5/3967
摘要： An integrated read/write head assembly incorporates a thin film inductive write head subassembly comprising first and second pole pieces that define a write transducing gap, and a magnetoresistive read subassembly disposed in the write gap. The first write pole piece is extended so as to provide a planar conductive path from the terminal connections or studs to the magnetoresistive read subassembly, thereby forming a uniform surface for deposition of the magnetoresistive read subassembly.
摘要翻译： 集成的读/写头组件包括薄膜感应写头子组件，其包括限定写换能间隙的第一和第二极片，以及设置在写间隙中的磁阻读取子组件。 第一写磁极片被延伸以提供从端子连接或螺柱到磁阻读取子组件的平面导电路径，由此形成用于沉积磁阻读取子组件的均匀表面。
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4.发明授权Magnetoresistive device with lapping guide treated to eliminate magnetoresistive effect thereof 失效具有研磨导向器的磁阻装置被处理以消除其磁阻效应公开(公告)号：US07333300B2
公开(公告)日：2008-02-19
申请号：US10964123
申请日：2004-10-12
CPC分类号： B24B37/042 , Y10T29/49034 , Y10T29/49046 , Y10T29/49048
摘要： A method for reducing noise in a lapping guide. Selected portions of a Giant magnetoresistive device wafer are masked, thereby defining masked and unmasked regions of the wafer in which the unmasked regions include lapping guides. The wafer is bombarded with ions such that a Giant magnetoresistive effect of the unmasked regions is reduced. The GMR device is lapped, using the lapping guides to measure an extent of the lapping.
摘要翻译： 一种降低研磨导轨中噪音的方法。 掩蔽了巨型磁阻器件晶片的选定部分，由此限定晶片的掩蔽和未掩模区域，其中未掩蔽区域包括研磨引导件。 用离子轰击晶片，使得未掩蔽区域的巨磁阻效应降低。 研磨GMR装置，使用研磨导轨测量研磨的程度。
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公开(公告)号：US5361547A
公开(公告)日：1994-11-08
申请号：US936823
申请日：1992-08-28
IPC分类号： B24B37/005 , B24B37/04 , G11B5/31 , G11B5/40 , B24B49/10
CPC分类号： B24B37/005 , B24B37/048 , G11B5/3106 , G11B5/3166 , G11B5/3116 , G11B5/40 , Y10T29/49048
摘要： A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers, comprises a row of thin film transducers formed on a substrate, the row comprising a height defining edge and at least four spaced sensing devices, a first two of the sensing devices comprising switch devices each offset a predetermined amount from the height defining edge, and a second two of the sensing devices comprising resistive devices each offset a predetermined amount from the height defining edge, a support of mounting the row of thin film magnetic transducers in a position to lap the height defining edge of each of the thin film magnetic transducers and the sensing devices, a measuring device for measuring the resistance of the resistive devices during lapping of the height defining edge, apparatus responsive to the measured resistance and To a selected sate of at least one of the two switch devices for calibrating resistance versus throat height characteristics for each of the thin film magnetic transducers in the row, and for terminating the lapping process when a predetermined throat height is reached for each of the thin film magnetic transducers.
摘要翻译： 一种用于准确地获得多个批量制造的薄膜磁换能器中每一个的所需喉部高度的研磨控制系统包括形成在基底上的一排薄膜换能器，该行包括高度限定边缘和至少四个间隔开的感测装置 传感装置的前两个包括开关装置，每个开关装置各自从高度限定边缘偏移预定量，并且第二传感装置包括每个偏移距高度限定边缘预定量的电阻装置，安装该行的支撑件 的薄膜磁性换能器，以便搭载每个薄膜磁性换能器和感测装置的高度限定边缘的位置;测量装置，用于在高度限定边缘的研磨期间测量电阻装置的电阻，该装置响应于 测量电阻和至少两个用于校准电阻的开关装置中的一个的选定端子 针对每列薄膜磁性换能器的连续高度特性，以及当每个薄膜磁性换能器达到预定的喉部高度时终止研磨过程。
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公开(公告)号：US4670732A
公开(公告)日：1987-06-02
申请号：US766156
申请日：1985-08-15
申请人： Mark A. Church
发明人： Mark A. Church
IPC分类号： B24B37/013 , G11B5/187 , G11B5/31 , H01L43/12 , H01L43/00
CPC分类号： B24B37/013 , G11B5/1871 , G11B5/3103 , G11B5/3166 , H01L43/12
摘要： An electrical lapping guide resistor for measuring the lapping distance in a process for manufacturing thin film magnetic transducers. Final throat height is measured with an electrical lapping guide resistor which provides a linear change in resistance versus lapping distance. The lapping guide resistor is configured in a shape such that the effective length of the resistors increases as the effective width decreases. In a preferred embodiment of the invention, the resistor includes first and second converging edges which extend from a rearward edge parallel to the final throat height toward the lapping surface. Conductors are disposed along the converging edges. Measurements of the change in lapping distance are effected by measuring the distance between the conductors.
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公开(公告)号：US4652954A
公开(公告)日：1987-03-24
申请号：US790927
申请日：1985-10-24
申请人： Mark A. Church
发明人： Mark A. Church
CPC分类号： G11B5/3163 , Y10T29/49046 , Y10T29/49064
摘要： A method for making a thin film magnetic head assembly comprising the steps of depositing a first magnetic pole piece layer, depositing a nonmagnetic material gap forming layer, and depositing a protective layer of etch resistant material. A layer of insulation is deposited upon which is formed a conductive coil. A leveling pad of insulation is deposited over the conductive coil, and the part of the protective layer which is not covered by the insulation is removed. The gap forming layer is therefore protected during the processing steps so that a desired gap length is produced. The second magnetic pole piece layer is then deposited to complete the magnetic circuit.
摘要翻译： 一种用于制造薄膜磁头组件的方法，包括以下步骤：沉积第一磁极片层，沉积非磁性材料间隙形成层，以及沉积抗蚀刻材料的保护层。 沉积一层绝缘层，形成导电线圈。 在导电线圈上沉积有绝缘层的调平垫，并且去除未被绝缘层覆盖的部分保护层。 因此，在处理步骤期间保护间隙形成层，从而产生期望的间隙长度。 然后沉积第二磁极片层以完成磁路。
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8.发明授权Lapping process using micro-advancement for optimizing flatness of a magnetic head air bearing surface 失效研磨工艺采用微型前进，优化磁头空气轴承表面的平整度
公开(公告)号：US5749769A
公开(公告)日：1998-05-12
申请号：US674054
申请日：1996-07-01
IPC分类号： B24B19/26 , B24B37/00 , B24B47/02 , G11B5/10 , G11B5/187 , G11B5/31 , G11B5/39 , G11B5/40 , G11B5/60 , B24B37/04
CPC分类号： B24B19/26 , B24B37/00 , B24B37/048 , B24B47/02 , B82Y10/00 , B82Y25/00 , G11B5/10 , G11B5/1871 , G11B5/3106 , G11B5/3163 , G11B5/3903 , G11B5/6005 , G11B2005/3996 , G11B5/3967 , G11B5/40 , Y10T29/49041 , Y10T29/49048
摘要： A lapping method and device for lapping magnetic heads to provide an air bearing surface with improved surface quality including increased smoothness, reduced rolloff, and reduced recession. The lapping machine includes a lapping plate having a grinding surface, a linear motion mechanism for moving the ABS over the grinding surface in a first, linear direction, and a micro-advance mechanism for controllably advancing the workpiece over the grinding surface in a second direction that is preferably perpendicular. The lapping method comprises affixing the unfinished magnetic head proximate to the lapping plate and depositing an abrasive slurry on the grinding surface. An initial rough lapping stage is performed, including moving the grinding surface so that the workpiece is lapped to a first predetermined target specification. After washing, a conductive lubricant material is applied to the grinding surface, other lapping steps may be performed, and then a micro-advanced lapping stage is performed, including micro-advancing the magnetic head in the second direction while simultaneously linear lapping it in the first direction to provide a highly polished ABS.
摘要翻译： 一种研磨方法和装置，用于研磨磁头以提供具有改进的表面质量的空气轴承表面，包括增加的平滑度，降低的滚降和减小的衰退。 研磨机包括具有磨削表面的研磨板，用于沿着第一直线方向将ABS移动到磨削表面上的直线运动机构，以及用于在第二方向上将工件可控地推进到研磨表面上的微前进机构 优选是垂直的。 研磨方法包括将未完成的磁头固定在研磨板附近并将磨料浆料沉积在研磨表面上。 执行初始粗糙研磨阶段，包括移动研磨表面，使得工件被研磨到第一预定目标规格。 洗涤后，将导电润滑剂材料施加到研磨表面，可以进行其它研磨步骤，然后进行微型高级研磨阶段，包括在第二方向上微动进给磁头，同时在 第一个方向提供高度抛光的ABS。
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公开(公告)号：US5597340A
公开(公告)日：1997-01-28
申请号：US300820
申请日：1994-09-02
CPC分类号： B24B37/005 , B24B37/048 , G11B5/3106 , G11B5/3166 , G11B5/3116 , G11B5/40 , Y10T29/49048
摘要： A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers, comprises a row of thin film transducers formed on a substrate, the row comprising a height defining edge and at least four spaced sensing devices, a first two of the sensing devices comprising switch devices each offset a predetermined amount from the height defining edge, and a second two of the sensing devices comprising resistive devices each offset a predetermined amount from the height defining edge, a support of mounting the row of thin film magnetic transducers in a position to lap the height defining edge of each of the thin film magnetic transducers and the sensing devices, a measuring device for measuring the resistance of the resistive devices during lapping of the height defining edge, apparatus responsive to the measured resistance and to a selected state of at least one of the two switch devices for calibrating resistance versus throat height characteristics for each of the thin film magnetic transducers in the row, and for terminating the lapping process when a predetermined throat height is reached for each of the thin film magnetic transducers.
摘要翻译： 一种用于准确地获得多个批量制造的薄膜磁换能器中每一个的所需喉部高度的研磨控制系统包括形成在基底上的一排薄膜换能器，该行包括高度限定边缘和至少四个间隔开的感测装置 传感装置的前两个包括开关装置，每个开关装置各自从高度限定边缘偏移预定量，并且第二传感装置包括每个偏移距高度限定边缘预定量的电阻装置，安装该行的支撑件 的薄膜磁性换能器，以便搭载每个薄膜磁性换能器和感测装置的高度限定边缘的位置;测量装置，用于在高度限定边缘的研磨期间测量电阻装置的电阻，该装置响应于 测量电阻以及用于校准电阻ve的两个开关装置中的至少一个的选定状态 针对行中的每个薄膜磁换能器，并且为每个薄膜磁性换能器达到预定的喉部高度时终止研磨过程。
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公开(公告)号：US5531017A
公开(公告)日：1996-07-02
申请号：US579466
申请日：1995-12-27
CPC分类号： G11B5/3163 , G11B5/3103 , G11B5/3166 , Y10T29/49041 , Y10T29/4905
摘要： A novel thin film magnetic head fabrication process is provided for fabricating a plurality of thin film magnetic head elements. The process begins with the selection of an appropriate wafer substrate of suitable size and quality. At least two primary sub-areas of the wafer substrate are designated as work areas for the deposition of magnetic recording transducer elements. The work areas have first and second end portions and are arranged in mutually adjacent relation along a shared boundary zone that extends in a first direction through the wafer substrate between the first and second end portions. The wafer substrate is populated with plural rows of magnetic recording transducer elements in the designated work areas such that the plural rows extend in a second direction that is substantially perpendicular to the first direction. The work areas are separated from the wafer substrate and magnetic transducer slider elements are fabricated from the plural rows of magnetic recording transducer elements. The process steps are such that they reduce the number of fabrication steps to a minimum while increasing the consistency of throat and stripe heights.
摘要翻译： 提供了用于制造多个薄膜磁头元件的新型薄膜磁头制造工艺。 该过程开始于选择适当尺寸和质量的合适的晶片衬底。 晶片衬底的至少两个主要子区域被指定为用于沉积磁记录换能器元件的工作区域。 工作区具有第一和第二端部，并且沿着沿第一方向延伸穿过第一和第二端部之间的晶片衬底的共享边界区布置成相互相邻的关系。 晶片基板在指定的工作区域中填充有多行磁记录换能器元件，使得多行在基本上垂直于第一方向的第二方向上延伸。 工作区域与晶片基板分离，并且磁性换能器滑块元件由多行磁记录换能器元件制成。 工艺步骤使得它们将制造步骤的数量减少到最小，同时增加了喉部和条纹高度的一致性。
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