公开(公告)号：US20060160321A1

公开(公告)日：2006-07-20

申请号：US10548222

申请日：2004-03-03

申请人： Masaaki Ichiyama ,  Teruno Nagura ,  Tomonori Ishikawa ,  Takaaki Sakurai ,  Yasuo Shimizu

发明人： Masaaki Ichiyama ,  Teruno Nagura ,  Tomonori Ishikawa ,  Takaaki Sakurai ,  Yasuo Shimizu

IPC分类号： H01L21/76

CPC分类号： H01L21/76224

摘要： There is provided a method for trench isolation structure formation, which produces neither voids nor cracks within a groove. This method comprises the steps of: forming a groove on a surface of a silicon substrate; coating a polysilazane solution; prebaking the coating at a prebaking temperature regulated so that the temperature is raised in a temperature range of 50° C. to 400° C. over time; curing the coating at a temperature above the maximum prebaking temperature; and polishing and etching the film. The prebaking is carried out while raising the temperature either stepwise in two or more stages or in a monotonically increasing manner.

摘要翻译： 提供了一种用于沟槽隔离结构形成的方法，其在凹槽内既不产生空隙也不产生裂纹。 该方法包括以下步骤：在硅衬底的表面上形成沟槽; 涂覆聚硅氮烷溶液; 在预烘烤温度下预烘烤涂层，使温度在50℃至400℃的温度范围内随时间升高; 在高于最高预烘温度的温度下固化涂层; 并抛光和蚀刻该膜。 在两步或更多阶段或以单调增加的方式逐步升高温度的同时进行预烘烤。

公开(公告)号：US20070259106A1

公开(公告)日：2007-11-08

申请号：US11629592

申请日：2005-08-12

申请人： Yasuo Shimizu ,  Masaaki Ichiyama ,  Teruno Nagura

发明人： Yasuo Shimizu ,  Masaaki Ichiyama ,  Teruno Nagura

IPC分类号： B32B9/00 ,  C09D183/16 ,  H01B3/46

CPC分类号： C08G77/62 ,  C08K5/56 ,  C09D183/16 ,  H01L21/02126 ,  H01L21/02145 ,  H01L21/02222 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/3125 ,  H01L21/316 ,  H01L21/3162 ,  C08L2666/52

摘要： There are provided a process for producing a siliceous film having excellent insulating properties, and a coating composition for use in the process. The coating composition comprises a perhydropolysilazane or modified perhydropolysilazane having a number average molecular weight of 100 to 50,000 and an aluminum compound, the composition having an aluminum content of not less than 10 ppb and not more than 100 ppm in terms of the molar ratio of the aluminum atom to the silicon atom. The siliceous film is produced by coating the coating composition onto a substrate and firing the coated substrate in an atmosphere containing steam, oxygen, or a mixed gas composed of steam and oxygen.

摘要翻译： 提供了一种制备具有优异绝缘性能的硅质膜的方法和用于该方法的涂料组合物。 涂料组合物包括数均分子量为100〜50,000的全氢聚硅氮烷或改性的全氢聚硅氮烷，铝化合物的铝含量为10ppb以上且100ppm以下，以 铝原子与硅原子。 通过将涂料组合物涂布在基材上并在包含蒸汽，氧气或由蒸汽和氧气组成的混合气体的气氛中焙烧涂覆的基材来制备硅质膜。

公开(公告)号：US5494978A

公开(公告)日：1996-02-27

申请号：US346845

申请日：1994-11-30

申请人： Yasuo Shimizu ,  Yuuji Tashiro ,  Hiroyuki Aoki ,  Masaaki Ichiyama ,  Hayato Nishii ,  Toshihide Kishi ,  Kouji Okuda ,  Takeshi Isoda

发明人： Yasuo Shimizu ,  Yuuji Tashiro ,  Hiroyuki Aoki ,  Masaaki Ichiyama ,  Hayato Nishii ,  Toshihide Kishi ,  Kouji Okuda ,  Takeshi Isoda

IPC分类号： C04B35/589 ,  C08G77/48 ,  C08G77/62 ,  C08F283/12

CPC分类号： C08G77/62 ,  C04B35/589

摘要： A stabilized polysilazane obtained by reacting an inorganic polysilazane having a number average molecular weight of about 100 to about 100,000 with an alcohol, an organic acid, an ester, a ketone, an aldehyde, a mercaptan, or an alkysilazane preferably at a molar ratio of from 50/50 to 99.99/0.01 is described.

摘要翻译： 将数均分子量为约100〜约100,000的无机聚硅氮烷与醇，有机酸，酯，酮，醛，硫醇或烷基硅氮烷反应得到的稳定化聚硅氮烷，优选摩尔比为 从50/50至99.99 / 0.01。

公开(公告)号：US6083860A

公开(公告)日：2000-07-04

申请号：US5925

申请日：1998-01-12

申请人： Hideki Matsuo ,  Masahiro Kokubo ,  Takashi Ohbayashi ,  Yuji Tashiro ,  Tadashi Suzuki ,  Masami Kizaki ,  Haruo Hashimoto ,  Yasuo Shimizu ,  Takaaki Sakurai ,  Hiroyuki Aoki

发明人： Hideki Matsuo ,  Masahiro Kokubo ,  Takashi Ohbayashi ,  Yuji Tashiro ,  Tadashi Suzuki ,  Masami Kizaki ,  Haruo Hashimoto ,  Yasuo Shimizu ,  Takaaki Sakurai ,  Hiroyuki Aoki

IPC分类号： C03C17/00 ,  C03C17/22 ,  C03C17/30 ,  C04B35/589 ,  C04B41/45 ,  C08G77/62 ,  C23C26/00 ,  C04B35/56

CPC分类号： C04B41/009 ,  C03C17/007 ,  C03C17/225 ,  C03C17/30 ,  C04B35/589 ,  C04B41/4554 ,  C08G77/62 ,  C23C26/00 ,  C03C2217/45 ,  C03C2217/475 ,  C03C2217/479

摘要： A method for forming dense ceramics, particularly a ceramic coating by a low temperature treatment is provided. The method for forming ceramics according to the invention is characterized in that a polysilazane having a number-average molecular weight of 100 to 50,000 or a modified polysilazane thereof is subjected to a heat treatment, then exposed to an atmosphere containing water vapor or immersed in distilled water containing a catalyst, or both, or is brought into contact with Pd.sup.2+ ions and water, the polysilazane having a skeleton comprising the unit represented by the following general formula (I): ##STR1## wherein R.sup.1, R.sup.2 and R.sup.3 each independently represents a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group, an aryl group, a group other than the above and having a carbon atom directly attached to the silicon atom, an alkylsilyl group, an alkylamino group and an alkoxy group; with the proviso that at least one of R.sup.1, R.sup.2 and R.sup.3 is a hydrogen atom. A method wherein said modified polysilazane is only fired at a temperature of 400.degree. C. or below is also provided.

摘要翻译： 提供了通过低温处理形成致密陶瓷，特别是陶瓷涂层的方法。 根据本发明的陶瓷形成方法的特征在于将数均分子量为100〜50,000的聚硅氮烷或其改性聚硅氮烷进行热处理，然后暴露于含有水蒸气的气氛或浸渍在蒸馏水中 含有催化剂的水或两者，或者与Pd 2+离子和水接触，所述聚硅氮烷具有包含由以下通式（I）表示的单元的骨架：其中R1，R2和R3各自独立地表示氢原子， 烷基，烯基，环烷基，芳基，除上述以外的基团，并且具有与硅原子直接连接的碳原子，烷基甲硅烷基，烷基氨基和烷氧基; 条件是R 1，R 2和R 3中的至少一个是氢原子。 其中所述改性聚硅氮烷仅在400℃或更低的温度下烧制的方法。

公开(公告)号：US5747623A

公开(公告)日：1998-05-05

申请号：US543157

申请日：1995-10-13

申请人： Hideki Matsuo ,  Masahiro Kokubo ,  Takashi Ohbayashi ,  Yuji Tashiro ,  Tadashi Suzuki ,  Masami Kizaki ,  Haruo Hashimoto ,  Yasuo Shimizu ,  Takaaki Sakurai ,  Hiroyuki Aoki

发明人： Hideki Matsuo ,  Masahiro Kokubo ,  Takashi Ohbayashi ,  Yuji Tashiro ,  Tadashi Suzuki ,  Masami Kizaki ,  Haruo Hashimoto ,  Yasuo Shimizu ,  Takaaki Sakurai ,  Hiroyuki Aoki

IPC分类号： C03C17/00 ,  C03C17/22 ,  C03C17/30 ,  C04B35/589 ,  C04B41/45 ,  C08G77/62 ,  C23C26/00 ,  C04B35/58

CPC分类号： C04B41/009 ,  C03C17/007 ,  C03C17/225 ,  C03C17/30 ,  C04B35/589 ,  C04B41/4554 ,  C08G77/62 ,  C23C26/00 ,  C03C2217/45 ,  C03C2217/475 ,  C03C2217/479

摘要： A method for forming dense ceramics, particularly a ceramic coating by a low temperature treatment is provided. The method for forming ceramics according to the invention is characterized in that a polysilazane having a number-average molecular weight of 100 to 50,000 or a modified polysilazane thereof is subjected to a heat treatment, then exposed to an atmosphere containing water vapor or immersed in distilled water containing a catalyst, or both, or is brought into contact with Pd.sup.2+ ions and water, the polysilazane having a skeleton comprising the unit represented by the following general formula (I): ##STR1## wherein R.sup.1, R.sup.2 and R.sup.3 each independently represents a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group, an aryl group, a group other than the above and having a carbon atom directly attached to the silicon atom, an alkylsilyl group, an alkylamino group and an alkoxy group; with the proviso that at least one of R.sub.1, R.sup.2 and R.sup.3 is a hydrogen atom. A method wherein said modified polysilazane is only fired at a temperature of 400.degree. C. or below is also provided.

摘要翻译： 提供了通过低温处理形成致密陶瓷，特别是陶瓷涂层的方法。 根据本发明的陶瓷形成方法的特征在于将数均分子量为100〜50,000的聚硅氮烷或其改性聚硅氮烷进行热处理，然后暴露于含有水蒸气的气氛或浸渍在蒸馏水中 含有催化剂的水或两者，或者与Pd 2+离子和水接触，所述聚硅氮烷具有包含由以下通式（I）表示的单元的骨架：其中R 1，R 2和R 3各自 独立地表示氢原子，烷基，烯基，环烷基，芳基，除上述以外的具有直接与硅原子连接的碳原子的基团，烷基甲硅烷基，烷基氨基和烷氧基 组; 条件是R 1，R 2和R 3中的至少一个是氢原子。 其中所述改性聚硅氮烷仅在400℃或更低的温度下烧制的方法。

公开(公告)号：US08663906B2

公开(公告)日：2014-03-04

申请号：US12733451

申请日：2008-09-12

申请人： Ralph R Dammel ,  Wen-Bing Kang ,  Yasuo Shimizu ,  Tomonori Ishikawa

发明人： Ralph R Dammel ,  Wen-Bing Kang ,  Yasuo Shimizu ,  Tomonori Ishikawa

IPC分类号： G03F7/20 ,  G03F7/30 ,  G03F7/40

CPC分类号： H01L21/0273 ,  G03F7/0757 ,  G03F7/405

摘要： The present invention provides a composition for forming a fine pattern with high dry etching resistance and a method for forming the fine pattern. The composition for fine pattern formation containing: a resin containing a repeating unit having a silazane bond; and a solvent as well as a method for fine pattern formation using the same.

摘要翻译： 本发明提供了一种用于形成具有高耐干蚀刻性的精细图案的组合物和形成精细图案的方法。 精细图案形成用组合物，含有含有具有硅氮烷键的重复单元的树脂; 和溶剂以及使用其形成精细图案的方法。

公开(公告)号：US20100255430A1

公开(公告)日：2010-10-07

申请号：US12733451

申请日：2008-09-12

申请人： Ralph R. Dammel ,  Wen-Bing Kang ,  Yasuo Shimizu ,  Tomonori Ishikawa

发明人： Ralph R. Dammel ,  Wen-Bing Kang ,  Yasuo Shimizu ,  Tomonori Ishikawa

IPC分类号： G03F7/20 ,  C08L83/00

CPC分类号： H01L21/0273 ,  G03F7/0757 ,  G03F7/405

摘要： The present invention provides a composition for forming a fine pattern with high dry etching resistance and a method for forming the fine pattern. The composition for fine pattern formation containing: a resin containing a repeating unit having a silazane bond; and a solvent as well as a method for fine pattern formation using the same.

摘要翻译： 本发明提供了一种用于形成具有高耐干蚀刻性的精细图案的组合物和形成精细图案的方法。 精细图案形成用组合物，含有含有具有硅氮烷键的重复单元的树脂; 和溶剂以及使用其形成精细图案的方法。

公开(公告)号：US08924080B2

公开(公告)日：2014-12-30

申请号：US14236239

申请日：2012-05-22

申请人： Yoshihiro Oniwa ,  Yasuo Shimizu ,  Atsuhiko Yoneda

发明人： Yoshihiro Oniwa ,  Yasuo Shimizu ,  Atsuhiko Yoneda

IPC分类号： B62D5/04 ,  G05D17/02

CPC分类号： B62D5/0463 ,  G05D17/02

摘要： Provided is an electric power steering device in which the operation feeling is improved without a decrease in commercial value. A phase compensation unit performs a frequency shift on a compensation frequency band compensated by the phase compensation unit. The phase compensation unit performs phase-shift in the compensation frequency band through a frequency shift process, instead of an increase in compensation gain. Therefore, it is possible to minimize occurrences of minute vibrations and abnormal noise in the steering system including the motor that accompany an increase in gain, and to improve the operation feeling and commercial value.

摘要翻译： 本发明提供一种在不降低商业价值的情况下提高操作感觉的电动助力转向装置。 相位补偿单元对由相位补偿单元补偿的补偿频带进行频移。 相位补偿单元通过频移处理来执行补偿频带中的相移，而不是补偿增益的增加。 因此，可以使伴随增益增加的包括电动机的转向系统中的微小振动和异常噪声的发生最小化，并且提高操作感和商业价值。

公开(公告)号：US20140195122A1

公开(公告)日：2014-07-10

申请号：US14236239

申请日：2012-05-22

申请人： Yoshihiro Oniwa ,  Yasuo Shimizu ,  Atsuhiko Yoneda

发明人： Yoshihiro Oniwa ,  Yasuo Shimizu ,  Atsuhiko Yoneda

IPC分类号： B62D5/04

CPC分类号： B62D5/0463 ,  G05D17/02

摘要： Provided is an electric power steering device in which the operation feeling is improved without a decrease in commercial value. A phase compensation unit performs a frequency shift on a compensation frequency band compensated by the phase compensation unit. The phase compensation unit performs phase-shift in the compensation frequency band through a frequency shift process, instead of an increase in compensation gain. Therefore, it is possible to minimize occurrences of minute vibrations and abnormal noise in the steering system including the motor that accompany an increase in gain, and to improve the operation feeling and commercial value.

摘要翻译： 本发明提供一种在不降低商业价值的情况下提高操作感觉的电动助力转向装置。 相位补偿单元对由相位补偿单元补偿的补偿频带进行频移。 相位补偿单元通过频移处理来执行补偿频带中的相移，而不是补偿增益的增加。 因此，可以使伴随增益增加的包括电动机的转向系统中的微小振动和异常噪声的发生最小化，并且提高操作感和商业价值。

公开(公告)号：US08670904B2

公开(公告)日：2014-03-11

申请号：US12937485

申请日：2009-05-28

申请人： Atsuhiko Yoneda ,  Yasuo Shimizu

发明人： Atsuhiko Yoneda ,  Yasuo Shimizu

IPC分类号： G06F17/00 ,  G06F19/00 ,  B62D6/00 ,  G08B1/06

CPC分类号： B62D5/0484 ,  B62D5/046 ,  B62D5/049 ,  H02P6/185 ,  H02P29/032

摘要： A motor control device includes: a rotation angle detection portion that detects a rotation angle of a motor and outputs a rotation angle signal; an abnormal condition detection portion that detects the presence or absence of an abnormal condition of the rotation angle detection portion; a rotation angle estimation portion that estimates the rotation angle of the motor and outputs an estimate rotation angle signal; and a driving control portion that controls driving of the motor on the basis of the rotation angle signal, which is output from the rotation angle detection portion, when the abnormal condition detection portion does not detect an abnormal condition of the rotation angle detection portion, and controls driving of the motor on the basis of the estimate rotation angle signal, which is output from the rotation angle estimation portion, when the abnormal condition detection portion detects an abnormal condition of the rotation angle detection portion.

摘要翻译： 电动机控制装置包括：旋转角度检测部，其检测电动机的旋转角度并输出旋转角度信号; 异常状态检测部，其检测所述旋转角度检测部的异常状况的有无; 旋转角度估计部，其估计所述电动机的旋转角度并输出估计旋转角度信号; 以及驱动控制部，当所述异常状态检测部未检测到所述旋转角度检测部的异常状态时，基于从所述旋转角度检测部输出的旋转角度信号来控制所述电动机的驱动，以及 当异常状态检测部检测到旋转角度检测部的异常状况时，基于从旋转角度估计部输出的估计旋转角度信号来控制电动机的驱动。