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    Method of manufacturing an electronic component
    7.
    发明授权
    Method of manufacturing an electronic component 有权
    电子部件的制造方法

    公开(公告)号：US07320164B2

    公开(公告)日：2008-01-22

    申请号：US11097888

    申请日：2005-03-31

    申请人： Hajime Yamada ,  Masaki Takeuchi ,  Hideki Kawamura ,  Yukio Yoshino

    发明人： Hajime Yamada ,  Masaki Takeuchi ,  Hideki Kawamura ,  Yukio Yoshino

    IPC分类号： H01L41/047

    CPC分类号： H01L41/316 ,  H03H3/04 ,  H03H9/132 ,  H03H9/173 ,  H03H9/174 ,  Y10T29/42 ,  Y10T29/49156

    摘要： A manufacturing method for an electronic component includes a process of forming a lower electrode and a dummy electrode, which are electrically connected to each other, on a substrate, and a process of forming a piezoelectric thin film on the dummy electrode and the lower electrode while a predetermined bias potential is applied to the lower electrode via the dummy electrode. In this method, the piezoelectric thin film is formed on the lower electrode by stabilizing the potential of the lower electrode, thereby decreasing the surface roughness of the piezoelectric thin film. It is thus possible to manufacture an electronic component that exhibits excellent piezoelectric characteristics, in which the electromechanical coupling coefficient and the quality factor of a resonator are increased.

    摘要翻译： 电子部件的制造方法包括在基板上形成彼此电连接的下电极和虚拟电极的处理以及在虚拟电极和下电极上形成压电薄膜的工艺，同时 经由虚拟电极向下部电极施加规定的偏置电位。 在该方法中，通过稳定下部电极的电位，在下部电极上形成压电薄膜，从而降低压电薄膜的表面粗糙度。 因此，可以制造显示优异的压电特性的电子部件，其中机电耦合系数和谐振器的品质因数增加。

    Piezoelectric filter and electronic component including the same
    9.
    发明授权
    Piezoelectric filter and electronic component including the same 有权
    压电滤波器和包括其的电子元件

    公开(公告)号：US06903496B2

    公开(公告)日：2005-06-07

    申请号：US10446963

    申请日：2003-05-29

    申请人： Masaki Takeuchi ,  Hajime Yamada ,  Hideki Kawamura ,  Daisuke Nakamura

    发明人： Masaki Takeuchi ,  Hajime Yamada ,  Hideki Kawamura ,  Daisuke Nakamura

    IPC分类号： H03H9/54 ,  H03H9/17 ,  H03H9/56 ,  H03H9/58 ,  H04R17/00

    CPC分类号： H03H9/02133 ,  H03H9/564 ,  H03H9/568

    摘要： A piezoelectric filter includes a piezoelectric thin film disposed on a silicon substrate, and a plurality of piezoelectric resonators each having electrodes facing each other with the piezoelectric thin film sandwiched therebetween, and each of the plurality of piezoelectric resonators has a filtering function. The electrode material of one of the piezoelectric resonators is different from the electrode material of the other piezoelectric resonators. For example, the former electrode material has a higher stiffness than the latter electrode material. The piezoelectric filter achieves high-Q resonance and improves the attenuation characteristic.

    摘要翻译： 压电滤波器包括设置在硅基板上的压电薄膜和多个压电谐振器，每个压电谐振器具有夹在其间的压电薄膜彼此相对的电极，并且多个压电谐振器中的每一个具有滤波功能。 压电谐振器之一的电极材料与其它压电谐振器的电极材料不同。 例如，前一电极材料具有比后一电极材料更高的刚度。 压电滤波器实现了高Q谐振，改善了衰减特性。