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公开(公告)号：US07507957B2
公开(公告)日：2009-03-24
申请号：US11216389
申请日：2005-08-31
IPC分类号： G01N23/00
CPC分类号： G01Q30/14 , G01Q10/06 , Y10S977/853 , Y10S977/86 , Y10S977/862 , Y10S977/869 , Y10S977/871
摘要： A problem to be resolved by the invention resides in providing a multifunction analyzing apparatus for detecting a shape with high resolution and physical property information capable of not only successively reading a base arrangement from end to end but also specifying a position hybridized by known RNA with regard to a single piece of DNA elongated in one direction on a board. A microscope system of the invention is provided with a fluorescence microscope, a scanning near field microscope and a scanning probe microscope as a detecting system, the microscopes are fixed to a switching mechanism and can be moved to a position at which the various microscopes can observe the same portion of a sample by switching operation of the mechanism. The microscope system of the invention is provided with a function capable of directly detecting a shape and physical property information of one piece of DNA by the scanning probe microscope by multifunction scanning.
摘要翻译： 本发明要解决的问题在于提供一种用于检测具有高分辨率和物理属性信息的形状的多功能分析装置，其不仅能够从一端到另一端连续读取基本排列，而且还指定与已知RNA杂交的位置 到在板上沿一个方向伸长的单个DNA。 本发明的显微镜系统设置有荧光显微镜，扫描型近场显微镜和扫描探针显微镜作为检测系统，将显微镜固定在切换机构上，并可移动到各种显微镜可以观察到的位置 通过切换机构的操作来获取样品的相同部分。 本发明的显微镜系统具有能够通过扫描探针显微镜通过多功能扫描直接检测一片DNA的形状和物理性质信息的功能。
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公开(公告)号：US20060060778A1
公开(公告)日：2006-03-23
申请号：US11216389
申请日：2005-08-31
IPC分类号： G21K7/00
CPC分类号： G01Q30/14 , G01Q10/06 , Y10S977/853 , Y10S977/86 , Y10S977/862 , Y10S977/869 , Y10S977/871
摘要： A problem to be resolved by the invention resides in providing a multifunction analyzing apparatus for detecting a shape with high resolution and physical property information capable of not only successively reading a base arrangement from end to end but also specifying a position hybridized by known RNA with regard to a single piece of DNA elongated in one direction on a board. A microscope system of the invention is provided with a fluorescence microscope, a scanning near field microscope and a scanning probe microscope as a detecting system, the microscopes are fixed to a switching mechanism and can be moved to a position at which the various microscopes can observe the same portion of a sample by switching operation of the mechanism. The microscope system of the invention is provided with a function capable of directly detecting a shape and physical property information of one piece of DNA by the scanning probe microscope by multifunction scanning.
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公开(公告)号：US06215121B1
公开(公告)日：2001-04-10
申请号：US09124128
申请日：1998-07-29
申请人： Masamichi Fujihira , Masatoshi Yasutake , Tatsuya Miyatani , Toshihiko Sakuhara , Kazutoshi Watanabe
发明人： Masamichi Fujihira , Masatoshi Yasutake , Tatsuya Miyatani , Toshihiko Sakuhara , Kazutoshi Watanabe
IPC分类号： G01N1316
CPC分类号： G01Q60/32 , Y10S977/851
摘要： A signal having a resonant frequency of a cantilever is output by a first oscillator, and supplied to a vibrating element and a control unit to oscillate a probe. A low frequency signal having a large amplitude is output by a second oscillator and supplied to a piezoelectric scanning apparatus. The probe is periodically and relatively moved with respect to the sample between a position where the sample surface is penetrated by the probe and another position where the probe does not penetrate the sample surface and is outside the range of atomic forces caused by the sample. During this movement, the probe movement may be analyzed to obtain a plurality of physical characteristics about the sample, e.g., hardness information of the sample, surface shape information, information related to an adsorption layer of the sample, and information related to physical qualities (for example, electromagnetic field, adsorption force, surface reaction force, electric double layer force in fluid) irradiated from the sample surface along a depth direction.
摘要翻译： 具有悬臂的共振频率的信号由第一振荡器输出，并被提供给振动元件和控制单元以使探头振荡。 具有大振幅的低频信号由第二振荡器输出并提供给压电扫描装置。 探针在样品表面被探针穿透的位置与探针不穿透样品表面的另一个位置之间相对于样品周期性地相对移动并且处于由样品引起的原子力范围之外。 在该移动期间，可以分析探针运动以获得关于样品的多个物理特性，例如样品的硬度信息，表面形状信息，与样品的吸附层相关的信息，以及与物理性质相关的信息（ 例如从样品表面沿着深度方向照射的电磁场，吸附力，表面反作用力，流体中的双电层力）。
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4.发明申请公开(公告)号：US20070278177A1
公开(公告)日：2007-12-06
申请号：US11809518
申请日：2007-06-01
申请人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
发明人： Kazushige Kondo , Masatoshi Yasutake , Takuya Nakaue , Osamu Takaoka , Atsushi Uemoto , Kazutoshi Watanabe , Yoshiteru Shikakura
摘要： Under the condition that the height is fixed at a target height by turning off a feedback control system of a Z piezoelectric actuator of a cantilever of an atomic force microscope having a probe, which is harder than a processed material, flexure and twisting of the cantilever when carrying out mechanical processing while selectively repeating scanning only on the processed area (in the case of detecting flexure, parallel with the cantilever and in the case of detecting twisting, vertical with the cantilever) is monitored by a quadrant photodiode position sensing detector and the processing is repeated till a flexure amount or a twisting amount, namely, till an elastic deformation amount of the cantilever becomes not more than a determined threshold. It is not necessary to carry out scanning of the observation in obtaining the height information for detection of an end point, so that it is possible to improve a throughput of processing.
摘要翻译： 通过关闭具有探针的原子力显微镜的悬臂的Z型压电致动器的反馈控制系统，该高度被固定在目标高度的条件下，其比加工材料更硬，悬臂的弯曲和扭曲 当在被处理区域（在检测弯曲的情况下，与悬臂平行的情况下，并且在检测到扭转的情况下，与悬臂垂直的情况下）进行机械处理时，通过象限光电二极管位置感测检测器监视 重复加工直到挠曲量或扭转量，即直到悬臂的弹性变形量变得不大于确定的阈值。 在获得用于检测终点的高度信息时，不需要进行观察的扫描，从而可以提高处理的吞吐量。
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公开(公告)号：US20050263700A1
公开(公告)日：2005-12-01
申请号：US11135076
申请日：2005-05-23
IPC分类号： B81C99/00 , B82B3/00 , B82Y15/00 , B82Y40/00 , G01N23/00 , G01Q60/10 , G01Q80/00 , G01Q90/00 , G03F1/08 , G03F1/68 , G03F1/72
摘要： Fine markers are formed by thrusting a probe, which is harder than material to be processed, the formed fine markers are observed in the course of processing, the drift amount is obtained from the change of the position of the center of gravity of the hole, and the processing is restarted in the processing area corrected by the obtained drift amount.
摘要翻译： 通过推出比待处理材料更难的探针来形成精细标记，在加工过程中观察形成的精细标记，漂移量由孔的重心位置的变化获得， 并且在通过所获得的漂移量校正的处理区域中重新开始处理。
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公开(公告)号：US20050089463A1
公开(公告)日：2005-04-28
申请号：US10951000
申请日：2004-09-27
IPC分类号： B82B3/00 , B82B1/00 , C01B31/00 , C01B31/02 , C23C16/48 , D01C5/00 , D01F9/12 , D01F9/127 , G01Q60/00 , G01Q70/12
CPC分类号： G01Q70/12 , C01B32/162 , D01F9/12 , D01F9/1276
摘要： In a method for fabricating a nanometer-scale structure by arranging nanotubes in a predetermined direction at a predetermined position, the method for fabricating a nanometer-scale structure comprises a first step of planarizing a substrate by etching a predetermined part by irradiating a focused energy beam to the sample, a second step of decomposing and depositing an organic gas into a columnar structure with an objective of determining the position and direction, and a third step of attaching and fixing the nanotube by using the thus deposited columnar structure as a standard of position and direction.
摘要翻译： 在通过在预定位置处以预定方向布置纳米管制造纳米级结构的方法中，纳米级结构的制造方法包括：通过照射聚焦能量束来蚀刻预定部分来平坦化基板的第一步骤 以样品的方式分解和沉积有机气体到目标为确定位置和方向的柱状结构中的第二步骤，以及通过使用这样沉积的柱状结构作为位置标准来附着和固定纳米管的第三步骤 和方向。
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7.发明授权Conductive probe for scanning microscope and machining method using the same 失效用于扫描显微镜的导电探针及使用其的加工方法公开(公告)号：US06787769B2
公开(公告)日：2004-09-07
申请号：US10182331
申请日：2002-07-26
申请人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
发明人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
IPC分类号： G01N2300
摘要： A conductive probe for a scanning type microscope that captures the substance information of the surface of a specimen by the tip end of a conductive nanotube probe needle fastened to a cantilever, in which the conductive probe is constructed from a conductive film formed on the surface of the cantilever, a conductive nonatube with its base end portion being fixed in contact which the surface of a predetermined of the cantilever, and a conductive deposit which fastens the conductive nanotube by covering from the base end portion of the nonatube to a part of the conductive film. The conductive nonatube and the conductive film are electrically connected to each other by the conductive deposit.
摘要翻译： 一种用于扫描型显微镜的导电探针，其通过固定到悬臂的导电纳米管探针的尖端捕获试样表面的物质信息，其中导电探针由形成在表面上的导电膜构成 悬臂，其基端部固定为导电的非导管，其中预定的悬臂的表面是接触的，以及导电沉积物，其通过从非管形管的基端部分覆盖到导电的一部分来紧固导电纳米管 电影。 导电非导体和导电膜通过导电沉积物彼此电连接。
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公开(公告)号：US06759653B2
公开(公告)日：2004-07-06
申请号：US10182330
申请日：2002-07-26
申请人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
发明人： Yoshikazu Nakayama , Seiji Akita , Akio Harada , Takashi Okawa , Yuichi Takano , Masatoshi Yasutake , Yoshiharu Shirakawabe
IPC分类号： G21K700
摘要： A scanning type microscope that captures substance information of the surface of a specimen by the tip end of a nanotube probe needle fastened to a cantilever, in which an organic gas is decomposed by a focused ion beam in a focused ion beam apparatus, and the nanotube is bonded to the cantilever with a deposit of the decomposed component thus produced. With this probe, the quality of the nanotube probe needle can be improved by removing an unnecessary deposit adhering to the nanotube tip end portion using a ion beam, by cutting an unnecessary part of the nanotube in order to control length of the probe needle and by injecting ions into the tip end portion of the nanotube.
摘要翻译： 一种扫描型显微镜，其通过紧固在悬臂上的纳米管探针的前端捕获试样表面的物质信息，其中有机气体在聚焦离子束装置中被聚焦离子束分解，并且纳米管 与由此产生的分解成分的沉积物粘合到悬臂上。 利用该探针，可以通过使用离子束除去附着在纳米管末端部分的不必要的沉积物，通过切割不需要的纳米管部分来控制探针的长度，并且通过 将离子注入纳米管的前端部。
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公开(公告)号：US6078044A
公开(公告)日：2000-06-20
申请号：US855543
申请日：1997-05-13
申请人： Masatoshi Yasutake , Yukihiro Sato
发明人： Masatoshi Yasutake , Yukihiro Sato
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/02 , Y10S977/872
摘要： A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample comprises a probe and voice coil motors for generating a moving force for moving the probe in each of three directions x, y and z upon activation of the voice coil motors. A probe supporting mechanism is mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y.
摘要翻译： 用于测量表面形状或样品的物理特性的装置中的探针扫描装置包括用于产生用于在三个方向x，y和z中的每一个方向上移动探针的移动力的探针和音圈电机 激活音圈电机。 安装探头支撑机构，用于在音圈电动机激活时由音圈电动机产生的移动力在三个方向x，y和z上移动，以使探针在方向z上粗略/精细地移动，并扫描探针 方向x和y。
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公开(公告)号：US5440121A
公开(公告)日：1995-08-08
申请号：US174292
申请日：1993-12-28
CPC分类号： G01Q60/30 , B82Y35/00 , G01Q60/32 , G01Q60/40 , Y10S977/852 , Y10S977/86
摘要： A scanning probe microscope uses a conductive material as a probe of AFM. The probe scans a sample while the probe is forcibly oscillated by applying alternating current voltage from an oscillator between the probe and the sample. Signals .omega. and 2.omega. from the probe are extracted with an analog processor using a discrete Fourier transformation, so that distribution of surface potential of the sample is obtained using the signals .omega. and 2.omega..
摘要翻译： 扫描探针显微镜使用导电材料作为AFM的探针。 探头通过从探头和样品之间的振荡器施加交流电压强制振荡探针，扫描样品。 使用离散傅里叶变换，用模拟处理器提取来自探针的信号ω和2ω，从而使用信号ω和2ω获得样品的表面电位分布。
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