Automatic thin-film measuring apparatus
    1.
    发明授权
    Automatic thin-film measuring apparatus 失效
    自动薄膜测量仪

    公开(公告)号:US5321634A

    公开(公告)日:1994-06-14

    申请号:US850026

    申请日:1992-03-12

    CPC分类号: G01G9/00 Y10S414/135

    摘要: In an automatic thin-film measuring apparatus, the zero point of a precision balance is corrected according to directions from a data processing unit before and after the weight of a semiconductor substrate is measured, the surface temperature of the semiconductor substrate laid on a pan of the precision balance is measured, and the weight of the semiconductor substrate is measured when the surface temperature reaches a predetermined value. Furthermore, the cycle of variations in the zero point is found when the zero point is corrected, and the weight measurement of the semiconductor substrate is conducted during an integer multiple of the change cycle. Therefore, it is possible to enhance the precision of the weight measurement and its reproducibility and to shorten the measurement time without being influenced by low-frequency vibrations.

    摘要翻译: 在自动薄膜测量装置中,根据来自数据处理单元的方向,在测量半导体衬底的重量之前和之后校正精度平衡的零点,将半导体衬底的表面温度放置在盘 测量精度平衡,并且当表面温度达到预定值时测量半导体衬底的重量。 此外,当零点被校正时,发现零点变化的周期,并且半导体衬底的重量测量在变化周期的整数倍期间进行。 因此,可以提高重量测量的精度及其重现性,并且缩短测量时间而不受低频振动的影响。

    Drawing apparatus and method of manufacturing article
    3.
    发明授权
    Drawing apparatus and method of manufacturing article 失效
    绘图装置及制作方法

    公开(公告)号:US08658985B2

    公开(公告)日:2014-02-25

    申请号:US13534033

    申请日:2012-06-27

    申请人: Yoshihiro Hirata

    发明人: Yoshihiro Hirata

    IPC分类号: H01J37/302

    摘要: The present invention provides a drawing apparatus including a blanker including a plurality of deflectors configured to respectively deflect the plurality of charged particle beams, and a controller configured to transmit a control signal to the blanker, wherein the blanker includes a storage configured to store pattern data, a generator configured to generate, based on pattern information which is included in the control signal and designates the pattern data, and position information which is included in the control signal and designates a drawing position corresponding to the pattern information, a blanking signal for drawing a pattern corresponding to the pattern data stored in the storage at a position on a substrate corresponding to the position information, and a driving device configured to drive the plurality of deflectors in accordance with the generated blanking signal generated.

    摘要翻译: 本发明提供了一种绘图装置,包括一个包括多个偏转器的消隐器,该多个偏转器被配置为分别偏转多个带电粒子束;以及控制器,被配置为将一个控制信号发送到该消隐器,其中该消隐器包括被配置为存储图案数据的存储器 ,被配置为基于包括在控制信号中并指定图案数据的图案信息以及包括在控制信号中并指定与图案信息相对应的绘图位置的位置信息来生成用于绘制的消隐信号的发生器 与存储在与位置信息对应的基板上的存储部中的图案数据相对应的图案,以及驱动装置,被配置为根据生成的生成的消隐信号来驱动多个偏转器。

    Probe
    4.
    发明授权
    Probe 失效
    探测

    公开(公告)号:US07432726B2

    公开(公告)日:2008-10-07

    申请号:US10553064

    申请日:2004-04-13

    IPC分类号: G01R31/02

    CPC分类号: G01R1/06733

    摘要: According to an embodiment, a probe coming into contact with an electrode pad of a measurement object comprises a connection terminal part integrally formed and connected to a substrate, a contact part having a tapered configuration, and a supporting part which supports the contact part. The contact part extending from an end of the supporting part has a sectional configuration which shares at least one side face with the supporting part.

    摘要翻译: 根据实施例,与测量对象的电极焊盘接触的探针包括一体形成并连接到基板的连接端子部分,具有锥形构造的接触部分和支撑接触部分的支撑部件。 从支撑部的端部延伸的接触部具有与支撑部分共享至少一个侧面的截面构造。

    Method for manufacturing metal microstructure
    5.
    发明授权
    Method for manufacturing metal microstructure 失效
    制造金属微观结构的方法

    公开(公告)号:US07338753B2

    公开(公告)日:2008-03-04

    申请号:US11503303

    申请日:2006-08-14

    IPC分类号: G03F7/039

    摘要: A method of manufacturing a metal microstructure (1) by using a resin mold (13). In order to provide a method in which a mild manufacturing condition which causes less damage to the resin mold (13) can be set and the high-precision metal microstructure (1) can be mass-produced by uniform electroforming, the method of manufacturing the metal microstructure (1) according to the present invention includes the steps of: fixing on a conductive substrate (11) the resin mold (13) having a vacant portion penetrating in the direction of thickness, by interposing a photosensitive polymer (12) having a chemical composition changed by an electron beam, ultraviolet radiation or visible radiation so as to form a layered structure (2) having the resin mold (13); exposing the layered structure (2) having the resin mold (13) to an electron beam, ultraviolet radiation or visible radiation; removing an exposed photosensitive polymer (12c) existing at the vacant portion of the resin mold (13); and filling with a metal (14) the vacant portion of the layered structure (2) having the resin mold (13) by electroforming.

    摘要翻译: 一种通过使用树脂模具(13)制造金属微结构(1)的方法。 为了提供可以设定对树脂模具(13)造成较小损害的温和制造条件并且可以通过均匀电铸来大量生产高精度金属微结构(1)的方法,制造 根据本发明的金属微结构(1)包括以下步骤:通过插入具有一个或多个金属微结构(1)的光敏聚合物(12)将具有穿过厚度方向的空白部分的树脂模具(13)固定在导电基板(11)上, 化学成分由电子束,紫外线辐射或可见光辐射而变化,形成具有树脂模具(13)的层状结构(2)。 将具有树脂模具(13)的层状结构(2)暴露于电子束,紫外线或可见光; 去除存在于树脂模具(13)的空缺部分的暴露的光敏聚合物(12c); 并通过电铸将金属(14)填充到具有树脂模具(13)的层状结构(2)的空位部分上。

    Method and device for manufacturing metallic particulates, and manufactured metallic particulates
    6.
    发明授权
    Method and device for manufacturing metallic particulates, and manufactured metallic particulates 有权
    用于制造金属颗粒的方法和装置,以及制造的金属微粒

    公开(公告)号:US07108735B2

    公开(公告)日:2006-09-19

    申请号:US10473181

    申请日:2002-03-26

    IPC分类号: B22F9/08

    摘要: Produce metal particles offering high purity and uniform granular shape and size: by forming a combustion chamber comprising an injector nozzle for mixture gas of oxygen and hydrogen, an ignition device and a material metal feeder in the upper space of a high-pressure water tank filled with inert gas; igniting inside the combustion chamber via the ignition device the injector nozzle for mixture gas of oxygen and hydrogen and melting (vaporize) the material fed by the material metal feeder; and then causing the produced molten metal droplets to contact high-pressure water and let the resulting metallic particles to precipitate in water.

    摘要翻译: 生产提供高纯度和均匀颗粒形状和尺寸的金属颗粒:通过形成燃烧室,其包括用于氧气和氢气的混合气体的喷射器喷嘴,在高压水箱的上部空间中的点火装置和材料金属进料器 用惰性气体 通过点火装置在燃烧室内点燃用于氧气和氢气的混合气体的喷射器喷嘴并熔化(蒸发)由材料金属进料器供给的材料; 然后使产生的熔融金属液滴接触高压水并使得到的金属颗粒在水中沉淀。

    Hair styling method
    8.
    发明申请
    Hair styling method 审中-公开
    发型方法

    公开(公告)号:US20050227206A1

    公开(公告)日:2005-10-13

    申请号:US11148473

    申请日:2005-06-09

    摘要: A hair-styling form includes strips attached thereto, each strip having a length of hair. The form is divided into multiple regions, and the strips are pasted on each region. The strip is made of a plain paper, cardboard, or plastic sheet and indicates information of at least one of hair length, permanent wave, or hair color requested by a customer.

    摘要翻译: 头发造型形式包括连接到其上的条带,每个条带具有一定长度的头发。 形式分为多个区域,每个区域都贴上条带。 该条由普通纸,纸板或塑料片制成,并指示客户要求的头发长度,永久波或头发颜色中的至少一种的信息。

    Content delivery apparatus and content creation method
    9.
    发明申请
    Content delivery apparatus and content creation method 审中-公开
    内容传送装置和内容制作方法

    公开(公告)号:US20050086119A1

    公开(公告)日:2005-04-21

    申请号:US10501526

    申请日:2003-01-14

    IPC分类号: G06Q30/00 H04N7/173 G06F17/60

    摘要: A method for creating a content with higher advertising function, and an appropriate device for distributing such content are disclosed. A user's PC (100) logs on to a PVad service server (200) and makes a request for distribution of a PVad (a promotion video including an advertisement element). The PVad service server (200) distributes the PVad requested. A PVad is stored by correlating with a PV-ID that is to identify an artist etc. incorporated in a promotion video, and an ad-ID that is to identify an advertised subject incorporated in the promotion video. The PVad service server (200) stores distribution logs for the PVad on a PVad view log counter database (400). An advertiser's PC (600) makes a request for a view data. The PVad service server (200) retrieves a view log from the PVad view log counter database (400) based on an ad-ID, and sends the view log retrieved as a “view data for advertiser”.

    摘要翻译: 公开了一种用于创建具有较高广告功能的内容的方法,以及用于分发这样的内容的适当的设备。 用户的PC(100)登录到PVad服务器(200)并且发出PVad分发请求(包括广告元素的促销视频)。 PVad服务器(200)分发所请求的PVad。 通过与包含在促销视频中的艺术家等的PV-ID相关联的PVad和用于识别在促销视频中并入的广告主题的ad-ID来存储PVad。 PVad服务服务器(200)在PVad视图日志计数器数据库(400)上存储PVad的分发日志。 广告客户的PC(600)提出查看数据的请求。 PVad服务服务器(200)基于ad-ID从PVad视图日志计数器数据库(400)检索视图日志,并发送作为“广告商的查看数据”检索的查看日志。

    Optical switch
    10.
    发明申请
    Optical switch 审中-公开
    光开关

    公开(公告)号:US20050025412A1

    公开(公告)日:2005-02-03

    申请号:US10480300

    申请日:2002-05-29

    IPC分类号: G02B6/35 G02B6/26

    摘要: The optical switch comprises a platform, and an optical fiber is held in a V groove for securing optical fiber of this platform. A switch element is placed on the platform. The switch element has a frame, and a plurality of alignment pins which are supplied together with the platform are disposed on the bottom face of the frame. A cantilever is secured to the frame, and a mirror is installed at the tip section of the cantilever. A pair of electrodes are secured on the platform. And by supplying voltage between the electrode and cantilever and generating an electrostatic force between them, the mirror is vertically moved.

    摘要翻译: 光开关包括平台,光纤保持在V槽中,用于固定该平台的光纤。 开关元件放置在平台上。 开关元件具有框架,并且与框架一起供应的多个对准销设置在框架的底面上。 悬臂固定在框架上,反光镜安装在悬臂的末端部分。 一对电极固定在平台上。 并且通过在电极和悬臂之间提供电压并在它们之间产生静电力,反射镜被垂直移动。