Apparatus for delivering a silica film forming solution
    10.
    发明授权
    Apparatus for delivering a silica film forming solution 失效
    用于输送二氧化硅膜形成溶液的装置

    公开(公告)号:US5599394A

    公开(公告)日:1997-02-04

    申请号:US312733

    申请日:1994-09-27

    摘要: A dispensing apparatus for delivering a silica coating solution in a fixed quantity from a liquid container to a surface of a substrate to form a silica film thereon. The liquid container storing the silica coating solution is connected to a diaphragm pump through a suction pipe. The diaphragm pump is connected to a nozzle through a delivery pipe. The coating solution in the liquid container is supplied to the nozzle by sucking and delivering action of the diaphragm pump. The coating solution is discharged from the nozzle to a surface of a substrate supported by a spin chuck of a spin coating apparatus.

    摘要翻译: 一种用于将固定量的二氧化硅涂层溶液从液体容器输送到基底表面以在其上形成二氧化硅膜的分配装置。 储存二氧化硅涂布液的液体容器通过抽吸管连接到隔膜泵。 隔膜泵通过输送管连接到喷嘴。 液体容器中的涂布液通过隔膜泵的吸引和输送动作被供给到喷嘴。 涂布溶液从喷嘴排出到由旋涂装置的旋转卡盘支撑的基板的表面上。