Photosensitive composition having uniform concentration distribution of components and pattern formation method using the same
    6.
    发明授权
    Photosensitive composition having uniform concentration distribution of components and pattern formation method using the same 失效
    具有均匀的组分浓度分布的光敏组合物和使用其的图案形成方法

    公开(公告)号:US06703181B1

    公开(公告)日:2004-03-09

    申请号:US08709879

    申请日:1996-09-09

    IPC分类号: G03C176

    摘要: There is provided a photosensitive composition suitable for a resist material. This photosensitive composition has a high sensitivity and a high resolution with respect to a light source having a short wavelength, does not cause a phase separation in a film state, and makes it possible to stably form fine resist patterns. The photosensitive composition contains a polymer obtained by protecting an alkali-soluble group of an alkali-soluble polymer by a group which is unstable with respect to an acid, a compound which generates an acid upon being irradiated with light, at least one compound which is selected from the group consisting of an imidazole compound, an alanine compound, an adenine compound, an adenosine compound, and a quaternary ammonium salt compound, and which increases miscibility in a resist film, and a phenol compound.

    摘要翻译: 提供了适用于抗蚀剂材料的光敏组合物。 这种光敏组合物相对于具有短波长的光源具有高灵敏度和高分辨率,不会在膜状态下引起相分离,并且使得可以稳定地形成精细的抗蚀剂图案。 感光性组合物含有通过相对于酸不稳定的基团,被光照射时产生酸的化合物保护碱溶性聚合物而获得的聚合物,至少一种化合物是 选自咪唑化合物,丙氨酸化合物,腺嘌呤化合物,腺苷化合物和季铵盐化合物,并且增加抗蚀剂膜和酚化合物的混溶性。

    Photosensitive resin composition and method of manufacturing color
filter using the same
    7.
    发明授权
    Photosensitive resin composition and method of manufacturing color filter using the same 失效
    感光树脂组合物及其制造方法

    公开(公告)号:US4820619A

    公开(公告)日:1989-04-11

    申请号:US933215

    申请日:1986-11-21

    CPC分类号: G03F7/012 G03F7/0007

    摘要: A photosensitive resin composition contains a co-polymer of a glycidyl (meth)acrylate or glycidyl (.alpha.-methyl)vinyl ether with a (meth)acrylic amide or ester having a quaternary ammonium salt structure, and an aromatic azide as a photosensitizer. A color filter can be prepared by coating the composition on a substrate, and exposing and developing the coated composition to form a pattern. The resultant pattern is then dyed.

    摘要翻译: 感光性树脂组合物含有(甲基)丙烯酸缩水甘油酯或缩水甘油基(α-甲基)乙烯基醚与具有季铵盐结构的(甲基)丙烯酰胺或酯的共聚物和作为光敏剂的芳族叠氮化物。 可以通过将组合物涂布在基材上,以及曝光和显影涂布的组合物以形成图案来制备滤色器。 然后将所得图案染色。

    Color imaging device having white, cyan and yellow convex lens filter
portions
    10.
    发明授权
    Color imaging device having white, cyan and yellow convex lens filter portions 失效
    具有白色,青色和黄色凸透镜滤色镜部分的彩色成像装置

    公开(公告)号:US4721999A

    公开(公告)日:1988-01-26

    申请号:US602689

    申请日:1984-04-23

    摘要: A color imaging device includes a solid state image sensor formed with a plurality of picture elements in a two dimensional array. A color filter array has filter portions in one-to-one correspondence with the picture elements. The filter portions are formed as lenses to provide a focusing effect. These lenses can include cyan focusing color filter portions, yellow focusing color filter portions, and full-color light-transmitting focusing color filter portions. All of these filter portions focus incident light using a lens effect onto respective elements on the solid state image sensor. In one embodiment, protective layers are located between filter parts. Other embodiments use tannic acid in their formation. In this way, inaccuracies in color signal separation are minimized.

    摘要翻译: 彩色成像装置包括形成有二维阵列中的多个像素的固态图像传感器。 滤色器阵列具有与图像元件一一对应的滤光器部分。 过滤器部分形成为透镜以提供聚焦效果。 这些透镜可以包括青色聚焦滤色镜部分,黄色聚焦滤色镜部分和全色透光聚焦滤色镜部分。 所有这些滤光器部分将入射光利用透镜效应聚焦到固态图像传感器上的各个元件上。 在一个实施例中,保护层位于过滤器部件之间。 其他实施方案在其形成中使用丹宁酸。 以这种方式,颜色信号分离的不精确度被最小化。