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    Method for fabricating micromechanical components
    1.
    发明授权
    Method for fabricating micromechanical components 有权
    微机械部件的制造方法

    公开(公告)号：US06251699B1

    公开(公告)日：2001-06-26

    申请号：US09617175

    申请日：2000-07-17

    Applicant: Matthias Fuertsch ,  Michael Offenberg

    Inventor： Matthias Fuertsch ,  Michael Offenberg

    IPC: H01L2100

    CPC classification number: B81C1/00666 ,  B81B2203/0118 ,  B81C2201/0109 ,  B81C2201/0164 ,  B81C2201/0169

    Abstract: A method for fabricating micromechanical components, which provides for depositing one or a plurality of sacrificial layers on a silicon substrate and, thereon, a silicon layer. In subsequent method steps, a structure is patterned out of the silicon layer, and the sacrificial layer is removed, at least under one section of the structure. The silicon layer is doped by an implantation process.

    Abstract translation: 一种用于制造微机械部件的方法，其提供在硅衬底上以及其上的硅层上沉积一个或多个牺牲层。 在随后的方法步骤中，从硅层图案化结构，并且至少在该结构的一个部分处去除牺牲层。 通过注入工艺掺杂硅层。

    Device for detecting a deformation of a component
    2.
    发明授权
    Device for detecting a deformation of a component 失效
    用于检测部件变形的装置

    公开(公告)号：US07025163B2

    公开(公告)日：2006-04-11

    申请号：US10311919

    申请日：2002-04-05

    Applicant: Matthias Fuertsch ,  Gerd Lorenz

    Inventor： Matthias Fuertsch ,  Gerd Lorenz

    IPC: B60K28/10

    CPC classification number: B60R21/0136 ,  G01R31/318508

    Abstract: A device for detecting a deformation of a component, for example, in the automotive industry, having a deformable hollow body arrangement assigned as a deformation indicator to the component and having at least one orifice area, and at least one sensor device situated in the particular orifice area for measuring an air flow corresponding to the deformation of the hollow body arrangement. In addition, a method of detecting such a deformation of a component and activating an appropriate safety application is described. The measured data is analyzed by an analyzer unit after measurement of the deformation, and a suitable safety application optionally being activated if the measured data of the at least one sensor device indicates a deformation of hollow body arrangement and thus of the component.

    Abstract translation: 一种用于检测例如在汽车工业中的部件的变形的装置，其具有被分配为部件并具有至少一个孔口区域的变形指示器的可变形的中空主体装置，以及位于该特定部件中的至少一个传感器装置 用于测量与中空体装置的变形相对应的气流的孔面积。 此外，描述了检测部件的这种变形并激活适当的安全应用的方法。 如果所述至少一个传感器装置的测量数据指示中空主体装置和部件的变形，则在测量变形之后，通过分析器单元分析测量数据，并且可选地激活合适的安全应用。

    Micropump having a pump diaphragm and a polysilicon layer
    5.
    发明授权
    Micropump having a pump diaphragm and a polysilicon layer 失效
    微泵具有泵膜和多晶硅层

    公开(公告)号：US07740459B2

    公开(公告)日：2010-06-22

    申请号：US10564370

    申请日：2004-07-07

    Applicant: Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    Inventor： Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    IPC: F04B17/03

    CPC classification number: F04B43/043

    Abstract: A method for producing a micromechanical component, preferably for fluidic applications having cavities. The component is constructed from two functional layers, the two functional layers being patterned differently using micromechanical methods. A first etch stop layer having a first pattern is applied to a base plate. A first functional layer is applied to the first etch stop layer and to the first contact surfaces of the base plate. A second etch stop layer, having a second pattern, is applied to first functional layer. A second functional layer is applied to the second etch stop layer and to the second contact surfaces of the first functional layer. An etching mask is applied to the second functional layer. The second and the first functional layer are patterned as sacrificial layers by the use of the first and the second etch stop layer by etching methods and/or by using the first and the second etch stop layer. By supplementing patterning of the base plate, additional movable fluidic elements may be implemented, using the method. The method is preferably used for producing a micropump having an epitactic polysilicon layer as the pump diaphragm.

    Abstract translation: 用于制造微机械部件的方法，优选用于具有空腔的流体应用。 该组件由两个功能层构成，两个功能层使用微机械方法被不同地图案化。 将具有第一图案的第一蚀刻停止层施加到基板。 第一功能层被施加到第一蚀刻停止层和基板的第一接触表面。 具有第二图案的第二蚀刻停止层被施加到第一功能层。 第二功能层被施加到第二蚀刻停止层和第一功能层的第二接触表面。 将蚀刻掩模施加到第二功能层。 通过使用第一和第二蚀刻停止层通过蚀刻方法和/或通过使用第一和第二蚀刻停止层将第二功能层和第一功能层图案化为牺牲层。 通过补充基板的图案化，可以使用该方法来实现附加的可移动流体元件。 该方法优选用于制造具有外延多晶硅层作为泵膜的微型泵。

    Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer
    7.
    发明申请
    Method for the production of a micromechanical part preferably used for fluidic applications, and micropump comprising a pump membrane made of a polysilicon layer 失效
    用于生产优选用于流体应用的微机械部件的方法以及包括由多晶硅层制成的泵膜的微型泵

    公开(公告)号：US20060186085A1

    公开(公告)日：2006-08-24

    申请号：US10564370

    申请日：2004-07-07

    Applicant: Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    Inventor： Matthias Fuertsch ,  Hubert Benzel ,  Stefan Finkbeiner ,  Stefan Pinter ,  Frank Fischer ,  Heiko Stahl ,  Tjalf Pirk

    IPC: C23F1/00 ,  F04B17/00

    CPC classification number: F04B43/043

    Abstract: A method for producing a micromechanical component, preferably for fluidic applications having cavities. The component is constructed from two functional layers, the two functional layers being patterned differently using micromechanical methods. A first etch stop layer having a first pattern is applied to a base plate. A first functional layer is applied to the first etch stop layer and to the first contact surfaces of the base plate. A second etch stop layer, having a second pattern, is applied to first functional layer. A second functional layer is applied to the second etch stop layer and to the second contact surfaces of the first functional layer. An etching mask is applied to the second functional layer. The second and the first functional layer are patterned as sacrificial layers by the use of the first and the second etch stop layer by etching methods and/or by using the first and the second etch stop layer. By supplementing patterning of the base plate, additional movable fluidic elements may be implemented, using the method. The method is preferably used for producing a micropump having an epitactic polysilicon layer as the pump diaphragm.

    Abstract translation: 用于制造微机械部件的方法，优选用于具有空腔的流体应用。 该组件由两个功能层构成，两个功能层使用微机械方法被不同地图案化。 将具有第一图案的第一蚀刻停止层施加到基板。 第一功能层被施加到第一蚀刻停止层和基板的第一接触表面。 具有第二图案的第二蚀刻停止层被施加到第一功能层。 第二功能层被施加到第二蚀刻停止层和第一功能层的第二接触表面。 将蚀刻掩模施加到第二功能层。 通过使用第一和第二蚀刻停止层通过蚀刻方法和/或通过使用第一和第二蚀刻停止层将第二功能层和第一功能层图案化为牺牲层。 通过补充基板的图案化，可以使用该方法来实现附加的可移动流体元件。 该方法优选用于制造具有外延多晶硅层作为泵膜的微型泵。

    Micromechanical structural element having a diaphragm and method for producing such a structural element
    9.
    发明授权
    Micromechanical structural element having a diaphragm and method for producing such a structural element 有权
    具有隔膜的微机械结构元件及其制造方法

    公开(公告)号：US07148077B2

    公开(公告)日：2006-12-12

    申请号：US10970069

    申请日：2004-10-19

    Applicant: Matthias Fuertsch ,  Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Lars Metzger ,  Christoph Schelling ,  Frieder Sundermeier

    Inventor： Matthias Fuertsch ,  Stefan Pinter ,  Heribert Weber ,  Frank Fischer ,  Lars Metzger ,  Christoph Schelling ,  Frieder Sundermeier

    IPC: H01L21/00

    CPC classification number: B81B3/007 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C2201/0167

    Abstract: A micromechanical structural element, having a very stable diaphragm, implemented in a pure front process and in a layer construction on a substrate. The layer construction includes at least one sacrificial layer and one diaphragm layer above the sacrificial layer, which is structured for laying bare the diaphragm and generating stabilizing elements on the diaphragm, at least one recess being generated for a stabilizing element of the diaphragm. The structure generated in the sacrificial layer is then at least superficially closed with at least one material layer being deposited above the structured sacrificial layer, this material layer forming at least a part of the diaphragm layer and being structured to generate at least one etch hole for etching the sacrificial layer, which is removed from the region under the etch hole, the diaphragm and the at least one stabilizing element being laid bare, a cavity being created under the diaphragm.

    Abstract translation: 具有非常稳定的隔膜的微机械结构元件以纯正的前工艺和基底上的层结构实现。 该层结构包括至少一个牺牲层和牺牲层上方的一个隔膜层，其被构造用于铺设隔膜并在隔膜上产生稳定元件，为隔膜的稳定元件产生至少一个凹槽。 然后在牺牲层中产生的结构至少被表面封闭，其中至少一个材料层沉积在结构化牺牲层的上方，该材料层形成隔膜层的至少一部分并被构造成产生至少一个蚀刻孔 蚀刻从蚀刻孔下方的区域去除的牺牲层，隔膜和至少一个稳定元件被裸露，在隔膜下面形成空腔。

    Sensor element
    10.
    发明申请
    Sensor element 审中-公开
    传感器元件

    公开(公告)号：US20050006235A1

    公开(公告)日：2005-01-13

    申请号：US10885196

    申请日：2004-07-06

    Applicant: Matthias Fuertsch ,  Heribert Weber ,  Christoph Schelling

    Inventor： Matthias Fuertsch ,  Heribert Weber ,  Christoph Schelling

    IPC: G01P5/12 ,  G01F1/684 ,  G01F1/692 ,  G01F1/696 ,  G01N27/26 ,  G01P15/00 ,  H05B1/02

    CPC classification number: G01P15/008 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/696

    Abstract: A sensor element has at least one heater structure, at least one first circuit trace being provided via which current is injected into the heater structure; at least one second circuit trace being provided via which the current is coupled out of the heater structure, and an arrangement for detecting the resistances of individual sections of the heater structure. According to the present invention, the arrangement for detecting the resistances includes additional, high-resistance measuring lines by which the voltage is tapped directly at the individual segments of the heater structure.

    Abstract translation: 传感器元件具有至少一个加热器结构，提供至少一个第一电路迹线，电流被注入到加热器结构中; 提供至少一个第二电路迹线，电流被耦合到加热器结构之外，以及用于检测加热器结构的各个部分的电阻的装置。 根据本发明，用于检测电阻的装置包括附加的高电阻测量线，通过该测量线直接在加热器结构的各个部分上被窃听。

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