摘要:
The present invention relates to a biochip for capacitive stimulation and/or detection of biological tissue. The biochip includes a support structure, at least one stimulation and/or sensor device, which is arranged in or on the support structure, and at least one dielectric layer, one layer surface of which is arranged on the stimulation and/or sensor device and the opposite layer surface forms a stimulation and/or sensor surface for the capacitive stimulation and/or detection of biological tissue. The dielectric layer includes (Tix, Zr1-x)O2, with 0.99≧x≧0.5, or a TiO2 and ZrO2 layer arrangement.
摘要:
Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO2.
摘要:
Biochip for capacitive stimulation and/or detection of biological tissues. The biochip has a carrier structure, at least one stimulation and/or sensor device, which is arranged in or at the carrier structure, and at least one dielectric layer, one layer area of which is arranged at the stimulation and/or sensor device and the opposite layer area of which forms a stimulation and/or sensor area for capacitive simulation and/or detection of biological tissues, wherein the dielectric layer comprises TiO2.
摘要:
An apparatus having a device for moving a liquid comprises a piezoacoustic resonator element (11) having at least one piezoelectric layer (110) and two electrodes (111 and 112) present on the piezoelectric layer (110). The piezoacoustic resonator element (11) is designed such that, owing to a voltage being applied to the piezoelectric layer (110) by means of the electrodes (111 or 112), a volume oscillation of the piezoelectric layer (110) is excited at a resonant frequency. The piezoelectric resonator element (11) can be acoustically coupled in a suitable manner to a liquid for the purpose of transmitting the excited oscillation into the liquid for the purpose of moving the liquid. The apparatus may be in the form of a micromixer or in the form of a micropump and may comprise, in addition, sensor elements (41) for detecting the attachment of substance.
摘要:
The invention relates to a device (31) which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a thickness oscillation of the piezoelectric layer (32) is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element (37) that is configured as a thin layer.
摘要:
The invention relates to a device (31) which comprises at least one piezoacoustic resonator element (2) having a piezoelectric layer (32) and two electrodes that are electrically contacted to the piezoelectric layer (32). The piezoacoustic resonator element (2) is configured in such a manner that, when a voltage is applied to the piezoelectric layer (32), a thickness oscillation of the piezoelectric layer (32) is excited via the electrodes with a resonant frequency. The inventive device is characterized by comprising, integrated into the piezoacoustic resonator element (2), a temperature measurement device (3) having a measuring element (37) that is configured as a thin layer.
摘要:
An apparatus having a device for moving a liquid comprises a piezoacoustic resonator element (11) having at least one piezoelectric layer (110) and two electrodes (111 and 112) present on the piezoelectric layer (110). The piezoacoustic resonator element (11) is designed such that, owing to a voltage being applied to the piezoelectric layer (110) by means of the electrodes (111 or 112), a volume oscillation of the piezoelectric layer (110) is excited at a resonant frequency. The piezoelectric resonator element (11) can be acoustically coupled in a suitable manner to a liquid for the purpose of transmitting the excited oscillation into the liquid for the purpose of moving the liquid. The apparatus may be in the form of a micromixer or in the form of a micropump and may comprise, in addition, sensor elements (41) for detecting the attachment of substance.
摘要:
The invention relates to an actuator (1) having a sensor layer (10) by means of which a temperature can be detected, and to a method for producing same.
摘要:
A stackable piezoelectric actuator component (100) comprises a stack (10) of piezoelectric layers (11) and electrode layers (12) arranged therebetween, a voltage supply device (20) arranged outside the stack (10) and serving for making electrical contact with the electrode layers, a contact connection (30) for applying a voltage to the voltage supply device (20) and a further contact connection (40), which is electrically coupled to the voltage supply device (20). The contact connection (30) and the further contact connection (40) are designed complementarily with respect to one another in such a way that a further stackable piezoelectric actuator component (200), comprising at least a contact connection or a further contact connection (30, 40), can be electrically coupled to the actuator component (100).
摘要:
A piezoactuator of multilayer design includes piezoelectric layers and electrode layers to form a stack. A predetermined breaking layer for the targeted origination and guiding of cracks is introduced between two adjacent electrode layers. The predetermined breaking layer has a barrier region, in which the formation of continuous electrically conductive paths or the formation of cracks leading through the barrier region is impeded.