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1.发明授权Apparatus and method for moving a liquid by means of a piezoelectric transducer 有权用于通过压电传感器移动液体的装置和方法公开(公告)号：US08240907B2
公开(公告)日：2012-08-14
申请号：US12066085
申请日：2006-09-07
申请人： Reinhard Gabl , Mathias Link , Matthias Schreiter , Jan Weber
发明人： Reinhard Gabl , Mathias Link , Matthias Schreiter , Jan Weber
IPC分类号： B01F11/02
CPC分类号： B01F13/0059 , B01F11/0266 , B01L3/50273 , B01L2300/0636 , B01L2300/0663 , B01L2300/0877 , B01L2400/0436 , B01L2400/0439 , F04B19/006 , F04B43/046 , G01N29/022 , G01N2291/0224 , G01N2291/0252 , G01N2291/0256 , G01N2291/0421 , G01N2291/0422 , Y10T137/2213
摘要： An apparatus having a device for moving a liquid comprises a piezoacoustic resonator element (11) having at least one piezoelectric layer (110) and two electrodes (111 and 112) present on the piezoelectric layer (110). The piezoacoustic resonator element (11) is designed such that, owing to a voltage being applied to the piezoelectric layer (110) by means of the electrodes (111 or 112), a volume oscillation of the piezoelectric layer (110) is excited at a resonant frequency. The piezoelectric resonator element (11) can be acoustically coupled in a suitable manner to a liquid for the purpose of transmitting the excited oscillation into the liquid for the purpose of moving the liquid. The apparatus may be in the form of a micromixer or in the form of a micropump and may comprise, in addition, sensor elements (41) for detecting the attachment of substance.
摘要翻译： 具有用于移动液体的装置的装置包括具有至少一个压电层（110）的压电谐振元件（11）和存在于压电层（110）上的两个电极（111和112）。 压电谐振元件（11）被设计为使得由于通过电极（111或112）施加到压电层（110）的电压，压电层（110）的体积振荡在 谐振频率。 压电谐振元件（11）可以以合适的方式与液体进行声学耦合，以将激发的振荡传输到用于移动液体的液体。 该装置可以是微混合器的形式或者是微型泵的形式，并且还可以包括用于检测物质附着的传感器元件（41）。
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公开(公告)号：US20140009034A1
公开(公告)日：2014-01-09
申请号：US13996482
申请日：2011-12-15
申请人： Reinhard Gabl
发明人： Reinhard Gabl
IPC分类号： H01L41/04 , H01L41/083
CPC分类号： H01L41/04 , H01L41/0825 , H01L41/083 , H01L41/273
摘要： The invention relates to an actuator (1) having a sensor layer (10) by means of which a temperature can be detected, and to a method for producing same.
摘要翻译： 本发明涉及具有传感器层（10）的致动器（1），通过该传感器层可以检测温度，以及其制造方法。
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公开(公告)号：US20130270968A1
公开(公告)日：2013-10-17
申请号：US13880037
申请日：2011-10-18
申请人： Reinhard Gabl
发明人： Reinhard Gabl
IPC分类号： H01L41/047 , H01L41/083
CPC分类号： H01L41/0475 , H01L41/0472 , H01L41/083
摘要： A stackable piezoelectric actuator component (100) comprises a stack (10) of piezoelectric layers (11) and electrode layers (12) arranged therebetween, a voltage supply device (20) arranged outside the stack (10) and serving for making electrical contact with the electrode layers, a contact connection (30) for applying a voltage to the voltage supply device (20) and a further contact connection (40), which is electrically coupled to the voltage supply device (20). The contact connection (30) and the further contact connection (40) are designed complementarily with respect to one another in such a way that a further stackable piezoelectric actuator component (200), comprising at least a contact connection or a further contact connection (30, 40), can be electrically coupled to the actuator component (100).
摘要翻译： 可堆叠的压电致动器部件（100）包括压电层（11）的堆叠（10）和布置在其间的电极层（12），设置在堆叠（10）外部并用于与 所述电极层，用于向所述电压供应装置（20）施加电压的接触连接（30）和电耦合到所述电压供应装置（20）的另一接触连接（40）。 接触连接（30）和另一个接触连接（40）被设计成彼此互补地设置成使得另外可堆叠的压电致动器部件（200）至少包括接触连接或另外的接触连接（30 ，40）可以电耦合到致动器部件（100）。
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公开(公告)号：US08304963B2
公开(公告)日：2012-11-06
申请号：US13017741
申请日：2011-01-31
IPC分类号： H01L41/083
CPC分类号： H01L41/0838
摘要： A piezoactuator of multilayer design includes piezoelectric layers and electrode layers to form a stack. A predetermined breaking layer for the targeted origination and guiding of cracks is introduced between two adjacent electrode layers. The predetermined breaking layer has a barrier region, in which the formation of continuous electrically conductive paths or the formation of cracks leading through the barrier region is impeded.
摘要翻译： 多层设计的压电致动器包括压电层和电极层以形成叠层。 在两个相邻的电极层之间引入用于靶的起始和引导的预定的断裂层。 预定的断裂层具有阻挡区域，其中形成连续的导电路径或形成通过阻挡区域的裂缝的形成被阻碍。
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公开(公告)号：US20120202382A1
公开(公告)日：2012-08-09
申请号：US13351348
申请日：2012-01-17
IPC分类号： H01R13/66
CPC分类号： H01L41/0475 , F02M51/005 , H01L41/0472 , H01L41/0533
摘要： A piezoactuator has multilayer construction. Piezoelectric layers and electrode layers are alternatingly disposed one over the other in a stack. A number of the electrode layers are electrically conductively connected to a contact pin. A continuation is electrically conductively disposed on the contact pin. The continuation has a contact point with the contact pin and a free end for producing an electrical connection of the piezoactuator. A straight line extending through the contact point and the free end of the continuation encloses an angle with the longitudinal axis of the contact pin that is greater than 0° and less than 180°.
摘要翻译： 压电致动器具有多层结构。 压电层和电极层在堆叠中交替地彼此叠置。 多个电极层与导电针导电连接。 继电器导电地设置在接触销上。 连续件具有与接触销和自由端的接触点，用于产生压电致动器的电连接。 延伸穿过接触点的直线和连续的自由端与接触销的纵向轴线成大约0°且小于180°的角度。
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6.发明申请公开(公告)号：US20090079442A1
公开(公告)日：2009-03-26
申请号：US11663831
申请日：2005-08-02
申请人： Reinhard Gabl , Mathias Link
发明人： Reinhard Gabl , Mathias Link
CPC分类号： G01N29/022 , G01N29/2437 , G01N2291/0256 , G01N2291/0426
摘要： A capacitor structure includes a lower electrode layer disposed on a substrate, an upper electrode layer and a crystalline zinc oxide-containing dielectric layer interposed between the electrode layers. The amorphous dielectric intermediate layer is interposed between the lower electrode layer and the crystalline zinc oxide-containing dielectric layer. A method for producing the aforementioned capacitor structure is also disclosed. The amorphous dielectric layer is adapted to produce during deposition of the zinc oxide an electrical field which is tipped in relation to the normal to the surface of the substrate surface or the lower electrode layer. The zinc oxide monocrystals grow at an angle, thereby providing a crystalline dielectric layer that can be induced to shear vibrations.
摘要翻译： 电容器结构包括设置在基板上的下电极层，介于电极层之间的上电极层和含结晶的含氧化锌的介电层。 非晶电介质中间层介于下电极层和含结晶的含氧化锌的电介质层之间。 还公开了一种制造上述电容器结构的方法。 非晶介质层适于在氧化锌沉积期间产生相对于衬底表面或下电极层的表面的法线倾斜的电场。 氧化锌单晶以一定角度生长，从而提供可诱导剪切振动的结晶介电层。
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公开(公告)号：US20060125489A1
公开(公告)日：2006-06-15
申请号：US10521736
申请日：2003-07-03
CPC分类号： G01N33/54373 , G01N29/022 , G01N29/036 , G01N2291/0255 , G01N2291/0256 , G01N2291/02809 , G01N2291/0422 , G01N2291/0426 , G01N2291/045
摘要： A device for detecting at least one substance of a fluid includes at least one piezo-acoustic resonator with at least one piezo layer, an electrode arranged on the piezo-electric layer, at least one other electrode arranged on the piezo-electric layer and a surface section used for sorption of the substance of the fluid. The piezo-electric layer, the electrodes and the surface section are disposed in such a way that electric control of the electrodes leads to an oscillation of the resonator at a resonance frequency which depends upon the amount of the substance which is sorbed on the surface section. The thickness of the pioelectric layer is in the region of 0.5 to 20 μm and the resonance frequency of the oscillation ranges from 500 MHz to 2 GHz. The device is a mass sensor with a piezo-acoustic high-frequency thin film resonator.
摘要翻译： 用于检测流体的至少一种物质的装置包括：至少一个压电声谐振器，具有至少一个压电层，布置在压电层上的电极，布置在压电层上的至少一个其它电极和 用于吸附流体物质的表面部分。 压电层，电极和表面部分以这样的方式设置，使得电极的电控制导致谐振器的振荡以共振频率取决于吸收在表面部分上的物质的量 。 皮电层的厚度在0.5〜20μm的范围内，振荡的共振频率为500MHz〜2GHz。 该装置是具有压电声高频薄膜谐振器的质量传感器。
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8.发明授权公开(公告)号：US08823245B2
公开(公告)日：2014-09-02
申请号：US13509521
申请日：2010-11-22
申请人： Franz Rinner , Markus Weiglhofer , Marion Ottlinger , Reinhard Gabl , Martin Galler , Christoph Auer , Georg Kuegerl
发明人： Franz Rinner , Markus Weiglhofer , Marion Ottlinger , Reinhard Gabl , Martin Galler , Christoph Auer , Georg Kuegerl
IPC分类号： H01L41/083 , B23K35/00 , H01L41/293 , H01L41/047 , B23K35/26
CPC分类号： B23K35/262 , B23K1/0016 , B23K35/001 , B23K2101/36 , B32B15/01 , B32B15/018 , C22C13/00 , H01L41/0472 , H01L41/293
摘要： A solder material can be used for fastening an outer electrode on a piezoelectric component. The solder material contains tin as the main constituent and at least one addition from the group of cobalt, tungsten, osmium, titanium, vanadium, iron and rare earth metals. A piezoelectric component includes such a solder material. The solder material is applied by means of a base metallization.
摘要翻译： 可以使用焊料材料来紧固压电元件上的外部电极。 焊料材料含有锡作为主要成分，并且包括钴，钨，锇，钛，钒，铁和稀土金属的组中的至少一种。 压电元件包括这种焊料。 焊料材料通过基底金属化施加。
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公开(公告)号：US20130212848A1
公开(公告)日：2013-08-22
申请号：US13813341
申请日：2011-09-02
申请人： Reinhard Gabl
发明人： Reinhard Gabl
CPC分类号： H01L41/25 , G01H1/04 , G01R29/22 , H01L41/053 , Y10T29/42
摘要： In the method for monitoring flexural vibrations of a piezoactuator, a small-signal spectrum of a piezoactuator, which is provided and mounted for the purpose of exciting longitudinal vibrations, is measured and an excitation of a transverse vibration in the piezoactuator is detected from resonances occurring in the small-signal spectrum.
摘要翻译： 在用于监测压电致动器的弯曲振动的方法中，测量为了激励纵向振动而设置和安装的压电致动器的小信号频谱，并且从产生的共振检测压电致动器中的横向振动的激发 在小信号频谱中。
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公开(公告)号：US20120019107A1
公开(公告)日：2012-01-26
申请号：US13023819
申请日：2011-02-09
IPC分类号： H01L41/083 , H01L41/16 , H01L41/22 , H01L41/047
CPC分类号： H01L41/083 , H01L41/0472 , H01L41/0838 , H01L41/293 , H01L41/31 , Y10T29/42
摘要： A multilayer piezo actuator is specified, in which piezoelectric layers and electrode layers are arranged to form a stack. Electrical contact is made with the electrode layers via two external electrodes which consist of wires which are woven with one another. The external electrodes are in this case connected over their entire area to the side surfaces of the stack. A method is also specified for fitting an external electrode.
摘要翻译： 规定了多层压电致动器，其中压电层和电极层被布置成形成叠层。 通过由彼此编织的线组成的两个外部电极与电极层进行电接触。 在这种情况下，外部电极在其整个区域上连接到堆叠的侧表面。 还规定了用于安装外部电极的方法。
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