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    Lithographic apparatus, substrate table, and method for enhancing substrate release properties
    4.
    发明授权
    Lithographic apparatus, substrate table, and method for enhancing substrate release properties 有权
    平版印刷装置，基板台，以及增强基板剥离性能的方法

    公开(公告)号：US08792085B2

    公开(公告)日：2014-07-29

    申请号：US12856106

    申请日：2010-08-13

    申请人： Michiel Puyt ,  Arno Jan Bleeker ,  Rene Theodorus Petrus Compen ,  Rudolf Hartmut Fischer

    发明人： Michiel Puyt ,  Arno Jan Bleeker ,  Rene Theodorus Petrus Compen ,  Rudolf Hartmut Fischer

    IPC分类号： G03B27/58 ,  G03F7/20 ,  H01L21/687

    CPC分类号： G03F7/707 ,  G03F7/70708 ,  H01L21/6875 ,  H01L21/68757

    摘要： A lithographic apparatus includes an illumination system constructed and arranged to condition a radiation beam, and a support constructed and arranged to support a patterning device. The patterning device is capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam. The apparatus also includes a substrate table constructed and arranged to hold a substrate, and a projection system constructed and arranged to project the patterned radiation beam onto a target portion of the substrate. The substrate table includes a chuck having a plurality of protrusions constructed and arranged to support corresponding parts of a bottom surface of a wafer. The top surface of at least one of the protrusions includes a plurality of elements that define a reduced contact area between the substrate and the top surface of the protrusion.

    摘要翻译： 光刻设备包括构造和布置成调节辐射束的照明系统，以及构造和布置成支撑图案形成装置的支撑件。 图案形成装置能够在其横截面中赋予辐射束图案以形成图案化的辐射束。 所述装置还包括被构造和布置成保持基板的基板台，以及构造和布置成将图案化的辐射束投影到基板的目标部分上的投影系统。 衬底台包括具有多个突出部的卡盘，所述多个突起被构造和布置成支撑晶片底面的对应部分。 至少一个突起的顶表面包括多个元件，其限定了基板和突起的顶表面之间的减小的接触面积。

    RECYCLING AN ORGANIC-MATRIX COMPOSITE MATERIAL
    6.
    发明申请
    RECYCLING AN ORGANIC-MATRIX COMPOSITE MATERIAL 有权
    回收有机基质复合材料

    公开(公告)号：US20110257279A1

    公开(公告)日：2011-10-20

    申请号：US13122489

    申请日：2009-10-13

    申请人： Maria Elizabeth Louise Wouters ,  Rudolf Hartmut Fischer

    发明人： Maria Elizabeth Louise Wouters ,  Rudolf Hartmut Fischer

    IPC分类号： C08J11/12

    CPC分类号： C08J11/12 ,  B29B17/0206 ,  Y02W30/622 ,  Y02W30/703

    摘要： The invention is directed to a method for recycling an organic-matrix composite material. The organic-matrix composite material comprises a first component comprising at least one organic matrix polymer and at least one solid second component being compatible with said first component and being structurally different from said first component, wherein said at least one organic polymer has thermosetting properties at room temperature and wherein said polymer comprises thermally reversible cross-links The method of the invention comprises -heating the organic-matrix composite material to a temperature at which at least part of the thermally reversible cross-links cleave and at which temperature the first component as a viscosity of at most 500 Pa·s, as measured by oscillatory measurements on an Anton Paar MCR 301 rheometer using parallel plate geometry; and -separating the at least part of said first component from said second component.

    摘要翻译： 本发明涉及一种用于再循环有机基质复合材料的方法。 有机基质复合材料包括第一组分，其包含至少一种有机基质聚合物和至少一种固体第二组分，其与所述第一组分相容并且在结构上不同于所述第一组分，其中所述至少一种有机聚合物具有在 室温，其中所述聚合物包括热可逆交联。本发明的方法包括 - 将有机基质复合材料加热至至少部分热可逆交联体断裂的温度，在该温度下第一组分为 通过使用平行板几何形状的Anton Paar MCR 301流变仪上的振荡测量来测量的粘度至多为500Pa·s; 以及将所述第一组分的至少一部分与所述第二组分分离。

    METHOD FOR PREPARING AN INORGANIC CRYSTALLINE CERAMIC MATERIAL HAVING AN ORGANIZED STRUCTURE
    7.
    发明申请
    METHOD FOR PREPARING AN INORGANIC CRYSTALLINE CERAMIC MATERIAL HAVING AN ORGANIZED STRUCTURE 审中-公开
    制备无机结构陶瓷材料的方法

    公开(公告)号：US20100304154A1

    公开(公告)日：2010-12-02

    申请号：US12738784

    申请日：2008-10-22

    申请人： Lawrence Fabian Batenburg ,  Klaas Timmer ,  Irene Antoinette Petra Hovens ,  Rudolf Hartmut Fischer

    发明人： Lawrence Fabian Batenburg ,  Klaas Timmer ,  Irene Antoinette Petra Hovens ,  Rudolf Hartmut Fischer

    IPC分类号： C07F7/02 ,  C07F7/10 ,  B32B9/04

    CPC分类号： C01B33/44 ,  B82Y30/00 ,  C01P2002/72 ,  C01P2002/88 ,  C01P2004/20 ,  C01P2004/54 ,  C01P2004/62 ,  C01P2004/64 ,  C09C1/42 ,  C09C3/12

    摘要： The present invention provides a method for preparing an inorganic crystalline ceramic material having an organized structure, comprising the steps of: (a) providing nanoparticles of one or more inorganic crystalline ceramic materials; (b) reacting metal hydroxide groups that are present on the nanoparticles with molecules of a chemical compound which molecules each comprisea first and a second reactive moiety, whereby a covalent bond is formed between the first reactive moieties of the molecules and the respective metal hydroxide groups; and (c) subjecting the nanoparticles obtained in step (b) to a treatment which enables the formation of a bond between at least two nanoparticles, whereby the bond is formed directly or indirectly between the second reactive moieties of the covalenty bonded molecules of the chemical compound as obtained in step (b), thereby forming an organized structure.

    摘要翻译： 本发明提供一种制备具有组织结构的无机结晶陶瓷材料的方法，包括以下步骤：（a）提供一种或多种无机结晶陶瓷材料的纳米颗粒; （b）使存在于纳米颗粒上的金属氢氧化物基团与分子各自包含第一和第二反应性部分的化学化合物分子反应，从而在分子的第一反应性部分和相应的金属氢氧化物基团之间形成共价键 ; 和（c）使在步骤（b）中获得的纳米颗粒经受能够在至少两个纳米颗粒之间形成键的处理，由此直接或间接地在化学品的共价键合分子的第二反应性部分之间形成键 化合物，从而形成有组织的结构。

    Recycling an organic-matrix composite material
    9.
    发明授权
    Recycling an organic-matrix composite material 有权
    回收有机基质复合材料

    公开(公告)号：US08916618B2

    公开(公告)日：2014-12-23

    申请号：US13122489

    申请日：2009-10-13

    申请人： Maria Elizabeth Louise Wouters ,  Rudolf Hartmut Fischer

    发明人： Maria Elizabeth Louise Wouters ,  Rudolf Hartmut Fischer

    IPC分类号： C08J11/04 ,  C08J11/12 ,  B29B17/02

    CPC分类号： C08J11/12 ,  B29B17/0206 ,  Y02W30/622 ,  Y02W30/703

    摘要： The invention is directed to a method for recycling an organic-matrix composite material. The organic-matrix composite material comprises a first component comprising at least one organic matrix polymer and at least one solid second component being compatible with said first component and being structurally different from said first component, wherein said at least one organic polymer has thermosetting properties at room temperature and wherein said polymer comprises thermally reversible cross-links The method of the invention comprises —heating the organic-matrix composite material to a temperature at which at least part of the thermally reversible cross-links cleave and at which temperature the first component as a viscosity of at most 500 Pa·s, as measured by oscillatory measurements on an Anton Paar MCR 301 rheometer using parallel plate geometry; and —separating the at least part of said first component from said second component.

    摘要翻译： 本发明涉及一种用于再循环有机基质复合材料的方法。 有机基质复合材料包括第一组分，其包含至少一种有机基质聚合物和至少一种固体第二组分，其与所述第一组分相容并且在结构上不同于所述第一组分，其中所述至少一种有机聚合物具有在 室温，其中所述聚合物包括热可逆交联。本发明的方法包括 - 将有机基质复合材料加热至至少部分热可逆交联裂解的温度，在该温度下第一组分为 通过使用平行板几何形状的Anton Paar MCR 301流变仪上的振荡测量来测量的粘度至多为500Pa·s; 以及将所述第一组分的至少一部分与所述第二组分分离。