Method and apparatus for on-chip stress detection

    公开(公告)号:US11189536B2

    公开(公告)日:2021-11-30

    申请号:US16294469

    申请日:2019-03-06

    Abstract: A microelectronic chip device includes a semiconductor substrate and multiple on-chip strain sensors (OCSSs) constructed on the substrate at various locations of the substrate. The OCSSs may each include multiple piezoresistive devices configured to sense a strain at a location of the various locations and produce a strain signal representing the strain at that location. A strain measurement circuit may also be constructed on the semiconductor substrate and configured to measure strain parameters from the strain signals produced by the OCSSs. The strain parameters represent the strains at the various location. Values of the strain parameters can be used for analysis of mechanical stress on the chip device.

    METHOD AND APPARATUS FOR ON-CHIP STRESS DETECTION

    公开(公告)号:US20220084896A1

    公开(公告)日:2022-03-17

    申请号:US17534973

    申请日:2021-11-24

    Abstract: A microelectronic chip device includes a semiconductor substrate and multiple on-chip strain sensors (OCSSs) constructed on the substrate at various locations of the substrate. The OCSSs may each include multiple piezoresistive devices configured to sense a strain at a location of the various locations and produce a strain signal representing the strain at that location. A strain measurement circuit may also be constructed on the semiconductor substrate and configured to measure strain parameters from the strain signals produced by the OCSSs. The strain parameters represent the strains at the various location. Values of the strain parameters can be used for analysis of mechanical stress on the chip device.

    METHOD AND APPARATUS FOR ON-CHIP STRESS DETECTION

    公开(公告)号:US20200211914A1

    公开(公告)日:2020-07-02

    申请号:US16294469

    申请日:2019-03-06

    Abstract: A microelectronic chip device includes a semiconductor substrate and multiple on-chip strain sensors (OCSS s) constructed on the substrate at various locations of the substrate. The OCSSs may each include multiple piezoresistive devices configured to sense a strain at a location of the various locations and produce a strain signal representing the strain at that location. A strain measurement circuit may also be constructed on the semiconductor substrate and configured to measure strain parameters from the strain signals produced by the OCSSs. The strain parameters represent the strains at the various location. Values of the strain parameters can be used for analysis of mechanical stress on the chip device.

    COMPACT DIGITAL THERMOMETER IN A MEMORY DEVICE

    公开(公告)号:US20240233839A9

    公开(公告)日:2024-07-11

    申请号:US18489770

    申请日:2023-10-18

    CPC classification number: G11C16/32 G01K13/00

    Abstract: A digital thermometer includes a first oscillator to generate a first clock signal, wherein a period of the first clock signal remains constant in view of changes in a temperature of the apparatus and a first counter coupled to the first oscillator, the first counter to count a fixed number of cycles of the first clock signal associated with a measurement period. The digital thermometer further includes a second oscillator to generate a second clock signal, wherein a period of the second clock signal varies with changes in the temperature and a second counter coupled to the second oscillator, the second counter to generate an output representing a count of a number of cycles of the second clock signal that occur during the measurement period. In addition, the digital thermometer includes calibration circuitry coupled to the second counter, the calibration circuitry to calibrate the output of the second counter to generate a value representing the temperature of the apparatus.

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