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公开(公告)号：US08083515B2
公开(公告)日：2011-12-27
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold comprises: that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 精细图案模具包括：包括辊，具有内周表面的缓冲管与辊的外周表面接触;以及压模管，其内周表面与所述辊的外周表面接触 在其外周面形成有缓冲管和细凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US07654815B2
公开(公告)日：2010-02-02
申请号：US12191326
申请日：2008-08-14
申请人： Mitsuru Hasegawa , Masahiko Ogino
发明人： Mitsuru Hasegawa , Masahiko Ogino
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： There is provided a fine pattern transfer, belt-shaped mold, with which a fine structure having a high aspect ratio can be formed rapidly and stably using nanoimprinting, and a fine pattern transfer system (a nanoimprint system) that employs this mold. According to the present invention, a nanoimprint mold includes: a belt-shaped support member; a plurality of stampers, for each of which a fine convex-and-concave pattern, to be transferred, is formed on one surface; and an adhesive member, to which the belt-shaped support member and the stampers are to be securely adhered, wherein the adhesive member includes a porous member and adhesive layers, which are deposited on either face of the porous member, for impregnating one part of the porous member, and wherein, for the porous member, a porous area that is not impregnated with the adhesive layers, is provided and positioned so as to sandwich the porous member between portions impregnated with the adhesive layers.
摘要翻译： 提供了一种精细图案转印，带状模具，利用其可以使用纳米压印快速且稳定地形成具有高纵横比的精细结构，并且使用该模具的精细图案转印系统（纳米压印系统）。 根据本发明，纳米压印模具包括：带状支撑构件; 在一个表面上形成多个刻印机，每个都要在其上形成要转印的细凹凸图案; 以及粘合构件，其中带状支撑构件和压模应牢固地粘附到该粘合构件上，其中粘合构件包括多孔构件和粘合剂层，其沉积在多孔构件的任一面上，用于浸渍一部分 多孔构件，并且其中，对于多孔构件，设置并定位未浸渍有粘合剂层的多孔区域，以将多孔构件夹在浸渍有粘合剂层的部分之间。
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3.发明授权Method of transcribing fine pattern and fine structure pattern transcription apparatus 失效转录精细图案和精细结构图案转录装置的方法公开(公告)号：US08047835B2
公开(公告)日：2011-11-01
申请号：US11736016
申请日：2007-04-17
申请人： Mitsuru Hasegawa , Masahiko Ogino , Takashi Ando , Hideaki Kataho
发明人： Mitsuru Hasegawa , Masahiko Ogino , Takashi Ando , Hideaki Kataho
CPC分类号： B29C43/021 , B29C33/08 , B29C35/0888 , B29C43/003 , B29C43/10 , B29C59/022 , B29C2035/0827 , B29C2043/025 , B29C2043/3238 , B29C2059/023
摘要： A method of transcribing a shape of a surface of a stamper on a transcription surface of a transcription object by pressing the stamper on the transcription object, which comprises steps of: having one of the stamper and the transcription object positioned opposite a plate surface and the other of the stamper and the transcription object placed on one surface of a pressure plate; and having the one of the stamper and the transcription object pressed onto the plate surface by applying a fluid on the other surface of the pressure plate, wherein an area of the one surface of the pressure plate is larger than a contact area in which the other of the stamper and the transcription object is in contact with the pressure plate.
摘要翻译： 一种通过将转印体上的压模按压在转录物上的转印体转录面上的压模表面的形状的方法，该方法包括以下步骤：将压模和转录体中的一个定位在与板表面相对的位置， 放置在压板的一个表面上的压模和转录对象中的另一个; 并且通过在所述压力板的另一个表面上施加流体而将所述压模和转印体中的一个压在所述板表面上，其中所述压板的所述一个表面的面积大于所述压板的所述另一表面的面积 的压模和转录物体与压力板接触。
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公开(公告)号：US20090166914A1
公开(公告)日：2009-07-02
申请号：US12343550
申请日：2008-12-24
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/16 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。
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公开(公告)号：US20090087506A1
公开(公告)日：2009-04-02
申请号：US12191326
申请日：2008-08-14
申请人： Mitsuru Hasegawa , Masahiko Ogino
发明人： Mitsuru Hasegawa , Masahiko Ogino
IPC分类号： B29C33/36
CPC分类号： B29C59/04 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： There is provided a fine pattern transfer, belt-shaped mold, with which a fine structure having a high aspect ratio can be formed rapidly and stably using nanoimprinting, and a fine pattern transfer system (a nanoimprint system) that employs this mold. According to the present invention, a nanoimprint mold includes: a belt-shaped support member; a plurality of stampers, for each of which a fine convex-and-concave pattern, to be transferred, is formed on one surface; and an adhesive member, to which the belt-shaped support member and the stampers are to be securely adhered, wherein the adhesive member includes a porous member and adhesive layers, which are deposited on either face of the porous member, for impregnating one part of the porous member, and wherein, for the porous member, a porous area that is not impregnated with the adhesive layers, is provided and positioned so as to sandwich the porous member between portions impregnated with the adhesive layers.
摘要翻译： 提供了一种精细图案转印，带状模具，利用其可以使用纳米压印快速且稳定地形成具有高纵横比的精细结构，并且使用该模具的精细图案转印系统（纳米压印系统）。 根据本发明，纳米压印模具包括：带状支撑构件; 在一个表面上形成多个刻印机，每个都要在其上形成要转印的细凹凸图案; 以及粘合构件，其中带状支撑构件和压模应牢固地粘附到该粘合构件上，其中粘合构件包括多孔构件和粘合剂层，其沉积在多孔构件的任一面上，用于浸渍一部分 多孔构件，并且其中，对于多孔构件，设置并定位未浸渍有粘合剂层的多孔区域，以将多孔构件夹在浸渍有粘合剂层的部分之间。
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公开(公告)号：US20080299247A1
公开(公告)日：2008-12-04
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： There is provided a fine pattern mold capable of transferring a fine concave/convex pattern accurately without causing deformation of the fine concave/convex pattern itself.The fine patter mold comprises: a roll; a buffer tube whose inner peripheral surface is in contact with an outer peripheral surface of the roll; and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 提供了能够精确地转印精细凹凸图案的精细图案模具，而不会导致精细凹凸图案本身的变形。 精细模具包括：卷; 缓冲管，其内周面与所述辊的外周面接触; 以及其内周面与缓冲管的外周面接触的压模管，在其外周面上形成微细的凹凸图案，其中缓冲管具有较大的线膨胀系数和 比压模管的弹性模量小。
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公开(公告)号：US20120301569A1
公开(公告)日：2012-11-29
申请号：US13574064
申请日：2010-12-28
IPC分类号： B29C59/04
CPC分类号： B29C33/58 , B29C37/0067 , B29C59/04
摘要： Provided is a pattern transferring apparatus (1A) which presses a belt-shaped mold (2) with a fine convex concave pattern and a transfer target material (3) against each other, releases the mold (2) from the transfer target material (3), thereby to transfer the convex concave pattern onto a surface of the transfer target material (3). The apparatus includes a pressing mechanism (4A) that presses the mold (2) and the transfer target material (3) against each other, and a supply mechanism for a mold releasing agent (7), which supplies a mold releasing agent to the mold (2). Accordingly, the pattern transferring apparatus (1A) may need no renewable process of the continuously used mold (2), allowing the excellent mold releasing performance of the mold (2) to be maintained.
摘要翻译： 提供了一种图案转印装置（1A），其将细小凸凹图案的带状模具（2）和转印目标材料（3）彼此挤压，从转印目标材料（3）释放模具 ），从而将凸凹图案转印到转印目标材料（3）的表面上。 该装置包括将模具（2）和转印目标材料（3）彼此挤压的按压机构（4A）和用于脱模剂（7）的供给机构，其将脱模剂供应到模具 （2）。 因此，图案转印装置（1A）不需要连续使用的模具（2）的可再生处理，能够保持模具（2）的脱模性优异。
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公开(公告)号：US20120067507A1
公开(公告)日：2012-03-22
申请号：US13307042
申请日：2011-11-30
申请人： Masahiko OGINO , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko OGINO , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 包括辊，具有内周面的缓冲管的精细图案模具与辊的外周面接触，并且压模管的内周面与缓冲管的外周面接触 并且在其外周面上形成微细的凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US08387255B2
公开(公告)日：2013-03-05
申请号：US13307042
申请日：2011-11-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 包括辊，具有内周面的缓冲管的精细图案模具与辊的外周面接触，并且压模管的内周面与缓冲管的外周面接触 并且在其外周面上形成微细的凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US08147234B2
公开(公告)日：2012-04-03
申请号：US12343550
申请日：2008-12-24
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/16 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。
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