摘要:
In the micro vacuum device according to the present invention, an electron emitter is formed into a thin film form on a thin film heater rising in midair by means of air bridge, or a thin film heater is formed as an electron emitter, and the electron emitter is provided adjacent to a gate with a space therebetween so that field emission of electrons is easily effected, or the electron emitter is heated so that thermoelectrons are easily emitted.
摘要:
A display unit comprising a board (10), a three-primary color-independent optical waveguide (100) arranged and formed on one side thereof, and a transparent electrode (30) and an electrode (40) serving as counter electrodes arranged and formed to sandwich an electric field reaction material (20) formed on one of two optical waveguides constituting the optical waveguide (100) and being transparent to waveguide light, wherein part of the waveguide light is allowed to pass at least the field reaction material (20), and a voltage applied between these counter electrodes changes the shape of the reaction material (20) to scatter the waveguide light and form pixels in to a displayed image, whereby the device is free from a mechanical drive unit, high in reliability, quality, brightness and response speed, low in power consumption and cost, and capable of full color displaying.
摘要:
A humidity sensor of a heat conduction type which enables a humidity measurement to be produced by a single temperature sensing resistor so as to reduce a change in characteristic depending on a temperature change of the measurement atmosphere and to reduce the cost, comprises a temperature sensing resistor 1 and three fixed resistors R.sub.1, R.sub.2 and R.sub.3 which form a Wheatstone bridge circuit. The humidity is measured by utilizing the fact that the heat dissipation of the temperature sensing resistor 1 changes depending on the humidity. The temperature sensing resistor 1 is heated by a heat generator 2 for self-radiation of Joule heat so that the temperature of the temperature sensing resistor 1 is controlled to be at a constant temperature of 150.degree. C. or more. The output voltage value of the Wheatstone bridge circuit is corrected with reference to the variation of the output voltage value depending on the ambient temperature of the temperature sensing resistor 1.
摘要:
A piezo-electricity generation device without an external power supply unit includes a rectifying means which rectifies an AC voltage generated by the vibration of at least one piezo-electric plate. An accumulating means accumulates an electric charge outputted through the rectifying means. A voltage setting means provides a prespecified voltage. A transmission means transmits substantially all of the electric charge accumulated in the accumulating means to a signal output means when the output voltage of the accumulating means exceeds the prespecified voltage set by the voltage setting means. A timing setting means may also or alternatively be provided for setting a prespecified timing such that the transmission means transmits substantially all of the electric charge stored in the accumulating means at the prespecified timing set by said timing setting means.
摘要:
A specified gas concentration sensor includes a thin film thermally separated from a substrate, which is provided by a heater, a temperature sensor and an absorbing substance of a specified gas, and temperature change accompanied by heat generation while absorbing the specified gas in an ambient gas being capable of measuring by the temperature sensor. The absorbed specified gas is released from the absorbing substance by heating with the heater, and after stopping heating with the heater, the specified gas concentration in the ambient gas is obtained by utilizing an output of the temperature sensor at a time passing a predetermined time which is a thermal time constant of the thin film or longer at which the specified gas is absent from the heater. An optional heat conductive type sensor having no absorbing substance of the specified gas can broaden the measurable range of the specified gas concentration.
摘要:
An infrared radiation sensor of high accuracy is provided which is suitable for a thermometer to be used for effecting noncontacting determination of a temperature of a subject under test, particularly a temperature of a tympanic membrane, by utilizing the temperature characteristics of the saturated current flowing in the reverse direction through a Schottky junction diode. The infrared radiation sensor comprises an n type single crystal area 2 formed in the shape of a thin film by doping a sensor substrate 8 made of p type semiconductor with an n type impurity through the surface of the sensor substrate, a temperature sensor element 1 formed in the n type single crystal area 2, a hollow part 6 formed by removing by electrochemically etching the p type semiconductor from the substantially lower and peripheral parts of the n type single crystal area 2, and a thermally and electrically insulating thin film bridge structure having the n type single crystal area 2 in the shape of a thin film provided with the temperature sensor element 1 carried thereon.
摘要:
A flow sensor is disclosed, which has a thin film heater which is formed atop a cavity formed in the substrate, and the thin film heater is formed on its upstream and downstream sides with slits for separating it and temperature sensors from the substrate. The slits have such a small width that a laminar flow of gas can be maintained. In the case where the film heater has a positive resistance temperature coefficient, the thin film heater is disposed such that current flows in a direction of the gas stream, in case when the film heater has a negative temperature coefficient, the thin film heater is disposed such that current flows in a direction perpendicular to the gas stream.
摘要:
A photoelectric transducer advantageously usable as an electrical energy source for driving units of work modules and sensors of a micromachine is provided. This photoelectric transducer is characterized by having a photoelectric transducing element, a self-exciting oscillating circuit, and voltage transformer and optionally further a storage mechanism formed on one substrate. It is further characterized by producing electrical power by the exposure of the photoelectric transducing element to a continuous light.
摘要:
A wave activated electric power generating system is durable even if exposed to a rainstorm, extremely simple in structure and highly efficient. A motion transfer medium rendering the rotary part of an electric generator less liable to produce slipping and a rotation transform member adapted to rotate while fitting with the motion transfer medium in movement are also provided. The system includes a buoy floating on the sea or lake so as to move up and down with the waves, and an underwater motion restrainer suspended underwater by water resistance, or submerged by its own weight on the sea or lake floor. Vertical movement of the buoy relative to the underwater motion restrainer is converted and transferred by the motion transfer medium in the form of an elongate rope vertically moving under the weight of an element to operate the rotary electric generator securely connected to the buoy.
摘要:
A heat conduction-type sensor corrects (calibrate) effects of a temperature of a measurement target fluid and a type of the fluid on a measurement value in measurement of a flow velocity, a mass flow, or an atmospheric pressure. Also provided is a thermal flow sensor and a thermal barometric sensor with this correcting function, high sensitivity, simple configuration, and low cost. At least two thin films that are thermally separated from a substrate through the same cavity are provided, one thin film comprises a heater and a temperature sensor, and the other thin film comprises at least one temperature sensor, the temperature sensors being thin-film thermocouples. The thin film is arranged in proximity so that it is heated only through the measurement target fluid by heating of the heater. A calibration circuit calculates and compares quantities concerning heat transfer coefficients of a standard fluid and the unknown measurement target fluid.