公开(公告)号：US20070290282A1

公开(公告)日：2007-12-20

申请号：US11553421

申请日：2006-10-26

申请人： Nickolai Belov ,  Peter David Ascanio ,  Donald Edward Adams

发明人： Nickolai Belov ,  Peter David Ascanio ,  Donald Edward Adams

IPC分类号： H01L43/00

CPC分类号： H01F7/066 ,  H01F7/122 ,  H01F2007/068 ,  H02K41/0354 ,  H02K2201/18

摘要： An embodiment of a micro-mover in accordance with the present invention can include a movable plate hermetically sealed between a top cap wafer and a bottom cap wafer. A magnet disposed on one or both of the cap wafers. The movable plate can include current paths disposed within a magnetic field generated by the magnet, and coaxially with a surface of the movable plate. When current is applied to the current paths, the movable plate is urged some distance within a gap between the movable plate and a stationary portion disposed co-planar with the movable plate.

摘要翻译： 根据本发明的微型移动器的实施例可以包括气密地密封在顶盖晶片和底盖晶片之间的可移动板。 设置在一个或两个盖晶片上的磁体。 可移动板可以包括设置在由磁体产生的磁场内并与可动板的表面同轴的电流路径。 当电流施加到电流路径时，可移动板在可动板和与可动板共面设置的固定部分之间的间隙内被推动一定距离。

公开(公告)号：US20080001075A1

公开(公告)日：2008-01-03

申请号：US11553435

申请日：2006-10-26

申请人： Peter David Ascanio ,  Nickolai Belov

发明人： Peter David Ascanio ,  Nickolai Belov

IPC分类号： H01J40/14

CPC分类号： G11B9/1454

摘要： An embodiment of a probe storage device in accordance with the present invention can include a media frame, a media stage including a media, a suspension arrangement moveably connecting the media stage with the media frame, the suspension arrangement including a suspension, and a tip stage having a tip extending therefrom, the tip stage being arranged so that the media is accessible to the tip. The suspension can comprise a foot fixedly connected with the media frame, a knee, a first flexure connected between the foot and the knee so that the knee is moveable relative to the foot, and a second flexure connected between the media stage and the knee so that the media stage is moveable relative to the knee.

摘要翻译： 根据本发明的探针存储装置的实施例可以包括介质框架，包括介质的介质台，可移动地将介质台与介质框架连接的悬挂装置，悬架装置包括悬架，以及尖端台 具有从其延伸的尖端，所述尖端台被布置成使得所述介质能够接近所述尖端。 悬架可以包括与媒体框架固定连接的脚，膝盖，连接在脚和膝盖之间的第一弯曲部，使得膝部相对于脚可移动，以及连接在媒体台和膝盖之间的第二挠曲 媒体舞台可以相对于膝盖移动。

公开(公告)号：US20090129247A1

公开(公告)日：2009-05-21

申请号：US12269817

申请日：2008-11-12

申请人： Quan A. Tran ,  Qing Ma ,  Donald Edward Adams ,  Nickolai Belov ,  Yevgeny Vasilievich Anoikin

发明人： Quan A. Tran ,  Qing Ma ,  Donald Edward Adams ,  Nickolai Belov ,  Yevgeny Vasilievich Anoikin

IPC分类号： G11B9/00

CPC分类号： G11B9/02 ,  B82Y10/00 ,  G01Q80/00 ,  G11B9/1409 ,  G11B9/1436

摘要： An information storage device comprises a ferroelectric media, write circuitry to provide a first signal and a second signal to the ferroelectric media, a tip platform and a cantilever operably associated with the tip platform. A tip extends from the cantilever toward the ferroelectric media and includes a first conductive material communicating the first signal from the write circuitry to the ferroelectric media and a second conductive material communicating the second signal from the write circuitry to the ferroelectric media. A insulating material arranged between the first conductive material and the second conductive material to electrically isolate the first conductive material from the second conductive material.

摘要翻译： 信息存储装置包括铁电介质，用于向铁电介质提供第一信号和第二信号的写入电路，与尖端平台可操作地相关联的尖端平台和悬臂。 尖端从悬臂向铁电介质延伸并且包括将来自写入电路的第一信号传递到铁电介质的第一导电材料和将来自写入电路的第二信号传递到铁电介质的第二导电材料。 布置在第一导电材料和第二导电材料之间以将第一导电材料与第二导电材料电隔离的绝缘材料。

公开(公告)号：US20120194207A1

公开(公告)日：2012-08-02

申请号：US13290764

申请日：2011-11-07

申请人： Vladimir Vaganov ,  Nickolai Belov

发明人： Vladimir Vaganov ,  Nickolai Belov

IPC分类号： G01R31/00

CPC分类号： G06F3/0338 ,  B81C99/0045 ,  G01L5/162 ,  G01L5/223

摘要： Some embodiments provide methods, process, systems and apparatus for use in testing multi-axis Micro Electro Mechanical Systems (MEMS) devices. In some embodiments, methods of testing are provided, comprising: selecting, according to a test specification and a test program, at least a first MEMS device on a substrate comprising a plurality of MEMS formed relative to the substrate and applying one or more electrical probes to the first MEMS device; providing power to the first MEMS device through the one or more electrical probes; measuring output signals of the first MEMS device; applying a force to the first MEMS device using a force actuator; measuring a set of output signals of the first MEMS device based on the applied force; and processing test data and generating output test results according to the test specification and test program.

摘要翻译： 一些实施例提供用于测试多轴微机电系统（MEMS）装置的方法，过程，系统和装置。 在一些实施例中，提供了测试方法，包括：根据测试规范和测试程序，选择至少第一MEMS器件，其包括相对于衬底形成的多个MEMS，并且施加一个或多个电探针 到第一个MEMS器件; 通过所述一个或多个电探针向所述第一MEMS器件供电; 测量所述第一MEMS器件的输出信号; 使用力致动器向第一MEMS装置施加力; 基于所施加的力测量所述第一MEMS装置的一组输出信号; 并根据测试规范和测试程序处理测试数据并生成输出测试结果。

公开(公告)号：US07791151B2

公开(公告)日：2010-09-07

申请号：US11803788

申请日：2007-05-15

申请人： Vladimir Vaganov ,  Nickolai Belov

发明人： Vladimir Vaganov ,  Nickolai Belov

IPC分类号： G01R27/26

CPC分类号： G01L5/162 ,  G01L1/18 ,  G01L1/2231

摘要： Method of fabricating 3-dimensional force input control device are disclosed. These roughly follow a process of providing a first substrate having side one and side two, fabricating stress-sensitive IC components and signal processing IC on the side one of the first substrate, fabricating closed trenches on the side two of the first substrate within each die area, said closed trenches create elastic element, frame area and at least one rigid island separated from the frame areas, providing a second substrate having side one and side two, patterning side two of the second substrate to define areas for deep etching, creating a layer of bonding material in the local areas on at least one of the surfaces of the side one of the second substrate and the side two of the first substrate, aligning and bonding the side two of the first substrate with the side one of the second substrate, etching the second substrate from the side two through to the first substrate, dicing two bonded substrates onto multiple separate dice, resulting in processed, aligned, bonded and diced batch fabricated low cost 3D force input control devices.

摘要翻译： 公开了制造三维力输入控制装置的方法。 这些大致遵循提供具有侧面1和侧面2的第一基板的过程，在第一基板的侧面上制造应力敏感IC部件和信号处理IC，在每个管芯内在第一基板的侧面二上制造闭合沟槽 所述封闭沟槽产生弹性元件，框架区域和与框架区域分离的至少一个刚性岛，提供具有侧面和侧面两个的第二基底，图案化第二基底的侧面以限定用于深刻蚀的区域， 在第二基板的一侧的第一表面和第一基板的侧面的至少一个表面上的局部区域中的接合材料层，将第一基板的侧面与第二基板的侧面对准和接合 ，从第二侧到第一衬底的第二衬底蚀刻，将两个键合的衬底切割成多个分开的裸片，得到加工的，对准的，结合的和切割的 批量制造低成本3D力输入控制装置。

公开(公告)号：US07367119B2

公开(公告)日：2008-05-06

申请号：US11177731

申请日：2005-07-08

申请人： Nickolai Belov

发明人： Nickolai Belov

IPC分类号： H05K3/02 ,  H05K3/10

CPC分类号： G11B9/149 ,  B82Y10/00 ,  G01Q80/00 ,  G11B9/065 ,  G11B9/08 ,  G11B9/1409 ,  Y10T29/49121 ,  Y10T29/49155 ,  Y10T29/49156 ,  Y10T29/49204

摘要： Systems and methods in accordance with the present invention can include a tip contactable with a media. In an embodiment, the tip comprises a substantially hollow structure formed of a metal. The tip can be formed by depositing a first metal layer over silicon thereby defining a cantilever structure, depositing a second metal layer at least partially over the first metal layer, and at least partially over a cone structure of the silicon to define the tip structure. The silicon can then be removed from beneath the cantilever and from within the deposited second metal layer by etching, thereby leaving a low-mass metal tip associated with a metal cantilever. An alternative embodiment, the silicon can be removed from beneath the cantilever by etching, but endpointed such that at least a portion of the cone structure remains beneath the second metal layer. The silicon/metal tip can have good wear characteristics and a slightly higher mass.

摘要翻译： 根据本发明的系统和方法可以包括可与介质接触的尖端。 在一个实施例中，尖端包括由金属形成的大致中空结构。 尖端可以通过在硅上沉积第一金属层而形成，从而限定悬臂结构，在第一金属层上至少部分地沉积第二金属层，并且至少部分地超过硅的锥形结构以限定尖端结构。 然后可以通过蚀刻从悬臂下方和沉积的第二金属层内从硅中除去硅，从而留下与金属悬臂相关联的低质量金属尖端。 替代实施例中，硅可以通过蚀刻从悬臂下方移除，但是终点使得锥形结构的至少一部分保留在第二金属层的下方。 硅/金属尖端可以具有良好的磨损特性和略高的质量。

公开(公告)号：US20070008864A1

公开(公告)日：2007-01-11

申请号：US11177639

申请日：2005-07-08

申请人： Zhaohui Fan ,  Nickolai Belov

发明人： Zhaohui Fan ,  Nickolai Belov

IPC分类号： G11B9/00

CPC分类号： G11B9/04 ,  G01Q80/00 ,  G11B5/743 ,  G11B9/149 ,  G11B11/002 ,  G11B11/08 ,  G11B2005/0021

摘要： Systems in accordance with the present invention can include a tip contactable with a media, the media including a substrate and a plurality of cells disposed over the substrate, one or more of the cells being electrically isolated from the other of the cells by a material having insulating properties. One or more of the plurality of cells can include a phase change material. The media is either grounded or electrically connected with a voltage source such that when the tip is placed in contact with the media and a voltage is applied to the tip, a current is drawn through the cell over which the tip is arranged. The current is drawn through the isolated cell at least a portion of the phase change material within the cell beneath the tip is heated to a sufficient temperature such that the material become amorphous in structure. The current is then removed from the phase change material, which is quickly cooled to form an amorphous domain having a resistance representing a “1” (or a “0”). In another embodiment the one or more of the plurality of cells can include a polarity dependent material. In an embodiment, the one or more cells can have a sidewall structure that tapers along the depth of the cell so that the cell has a wider cross-section near where a tip contacts the media and a narrower cross-section near where the cell contacts one of the substrate and an underlayer.

摘要翻译： 根据本发明的系统可以包括可与介质接触的尖端，所述介质包括衬底和设置在衬底上的多个单元，一个或多个单元通过具有 绝缘性能。 多个单元中的一个或多个可以包括相变材料。 介质与电压源接地或电连接，使得当尖端被放置成与介质接触并且电压被施加到尖端时，电流被吸引通过其上布置尖端的电池。 电流通过分离的电池被吸入，尖端内的电池内的相变材料的至少一部分被加热到足够的温度，使得材料在结构上变成非晶态。 然后将电流从相变材料中除去，其被快速冷却以形成具有表示“1”（或“0”）的电阻的非晶畴。 在另一个实施例中，多个单元中的一个或多个可以包括极性依赖材料。 在一个实施例中，一个或多个单元可以具有沿着单元的深度逐渐变细的侧壁结构，使得单元具有在尖端接触介质附近的更宽的横截面和在单元接触的附近的较窄的横截面 衬底和底层之一。

公开(公告)号：US20060272413A1

公开(公告)日：2006-12-07

申请号：US11160004

申请日：2005-06-04

申请人： Vladimir Vaganov ,  Nickolai Belov

发明人： Vladimir Vaganov ,  Nickolai Belov

IPC分类号： G01P15/00 ,  G01P15/125

CPC分类号： G01P15/18 ,  G01P15/123 ,  G01P2015/084

摘要： 3D accelerometer for measuring three components of inertial force (or acceleration) vector with respect to an orthogonal coordinate system, which has high sensitivity due to a big proof mass located within a cavity beneath the surface of the sensor die. The size of the cavity and the size of the proof mass exceed the corresponding overall dimensions of the elastic element. The sensor structure occupies a very small area at the surface of the die increasing the area for ICs need to be integrated on the same chip.

摘要翻译： 用于测量相对于正交坐标系的惯性力（或加速度）矢量的三个分量的3D加速度计，其由于位于传感器模具表面下方的空腔内的大的检测质量而具有高灵敏度。 空腔的尺寸和检测质量的大小超过弹性元件的相应的整体尺寸。 传感器结构在芯片表面占据非常小的面积，增加了需要集成在同一芯片上的IC的面积。

公开(公告)号：US20130058202A1

公开(公告)日：2013-03-07

申请号：US12242843

申请日：2008-09-30

申请人： Tsung-Kuan Allen Chou ,  Nickolai Belov ,  John Heck

发明人： Tsung-Kuan Allen Chou ,  Nickolai Belov ,  John Heck

IPC分类号： G11B9/00 ,  C25D5/02 ,  C25D5/10 ,  C25D7/00 ,  B32B15/04 ,  C25D5/12

CPC分类号： G11B9/1454 ,  C25D5/022 ,  C25D5/505 ,  C25D17/001 ,  H01L2224/16145 ,  H01L2924/16235

摘要： A seek-scan probe (SSP) memory involves multiple-wafer bonding needing precision small gaps in between. Solder reflow bonding is typically used to join the wafers due to its reliability and ability to hermetically seal. However, solder reflow bonding may not provide a consistently controllable gap due to flowing solder during the bonding process. Thus, a bond stop technique and process is used to provide accurate cantilever to media gap control.

摘要翻译： 寻找扫描探针（SSP）存储器涉及多晶片接合，需要精密的小间隙。 由于其可靠性和气密密封能力，通常使用焊接回流焊接来连接晶片。 然而，焊料回流焊接可能不会由于在焊接过程中流动的焊料而提供始终如一的可控的间隙。 因此，使用粘结停止技术和工艺来为介质间隙控制提供准确的悬臂。

公开(公告)号：US20110248846A1

公开(公告)日：2011-10-13

申请号：US12758886

申请日：2010-04-13

申请人： Nickolai Belov ,  Ghassan Tchelepi

发明人： Nickolai Belov ,  Ghassan Tchelepi

IPC分类号： G08B1/08

CPC分类号： H04Q9/00 ,  G01N33/0075 ,  H04Q2209/86 ,  H04Q2209/886

摘要： A wireless sensing module with extended service life containing at least one sensor of a physical parameter, a data acquisition hardware acquiring output electrical signals from at least one sensor and converting it into digital measurement data, a microcontroller, a non-volatile memory, at least one transceiver for wireless communication with external wireless devices, at least one battery, including at least one re-chargeable battery, at least one energy harvesting device, a power management circuit, and at least one antenna. All components of the wireless sensing module are mounted on a printed circuit board and placed into an enclosure providing mechanical, chemical, electrical and environmental protection. The wireless sensing modules can be used in different applications, including long-term condition monitoring of structures.

摘要翻译： 一种具有延长的使用寿命的无线传感模块，其包含至少一个物理参数的传感器，数据采集硬件获取至少一个传感器输出电信号并将其转换为数字测量数据，微控制器，非易失性存储器，至少 用于与外部无线设备的无线通信的一个收发器，至少一个电池，包括至少一个可重新充电的电池，至少一个能量收集装置，电力管理电路和至少一个天线。 无线感测模块的所有组件都安装在印刷电路板上，并放置在提供机械，化学，电气和环境保护的外壳中。 无线传感模块可用于不同的应用，包括结构的长期状态监测。